{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,4]],"date-time":"2026-05-04T20:36:42Z","timestamp":1777927002856,"version":"3.51.4"},"reference-count":18,"publisher":"SAGE Publications","issue":"9","license":[{"start":{"date-parts":[[2014,8,28]],"date-time":"2014-08-28T00:00:00Z","timestamp":1409184000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/2.zoppoz.workers.dev:443\/https\/journals.sagepub.com\/page\/policies\/text-and-data-mining-license"}],"content-domain":{"domain":["journals.sagepub.com"],"crossmark-restriction":true},"short-container-title":["Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering"],"published-print":{"date-parts":[[2014,10]]},"abstract":"<jats:p>Iterative learning control is known as an effective technique for improving the performance of systems that require repetitive work. In general, a linear time-invariant low-pass Q-filter is employed to provide robustness to modeling errors and model uncertainties, as well as to suppress the noise transmission in the learning process. A lower bandwidth of Q-filter results in less noise amplification but at the cost of decreasing the learning performance. The filter\u2019s bandwidth thus forms a fixed trade-off between attenuation of repetitive errors and amplification of noise. Although linear time-varying Q-filter in finite impulse response type has been proposed, the performance is still unsatisfactory for the filter of this type has a low attenuation rate in high frequency and is unable to obtain a low bandwidth as well. Therefore, in this article, a linear time-varying Q-filter in infinite impulse response type is put forward, providing a better means to deal with the trade-off. To demonstrate that, experiments have been conducted on the developed dual-stage actuated wafer stage, which consists of a short-stroke stage for accurate positioning and a long-stroke stage for coarse positioning. The results illustrate that the proposed method results in a significant improvement in tracking performance, which includes lower converged error and decreased settling time.<\/jats:p>","DOI":"10.1177\/0959651814547443","type":"journal-article","created":{"date-parts":[[2014,8,29]],"date-time":"2014-08-29T01:05:50Z","timestamp":1409274350000},"page":"658-667","update-policy":"https:\/\/2.zoppoz.workers.dev:443\/https\/doi.org\/10.1177\/sage-journals-update-policy","source":"Crossref","is-referenced-by-count":22,"title":["A time-varying Q-filter design for iterative learning control with application to an ultra-precision dual-stage actuated wafer stage"],"prefix":"10.1177","volume":"228","author":[{"given":"Dongdong","family":"Yu","sequence":"first","affiliation":[{"name":"State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yu","family":"Zhu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kaiming","family":"Yang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chuxiong","family":"Hu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Min","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 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