{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,12]],"date-time":"2026-03-12T19:20:49Z","timestamp":1773343249944,"version":"3.50.1"},"reference-count":29,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2015,4,16]],"date-time":"2015-04-16T00:00:00Z","timestamp":1429142400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/2.zoppoz.workers.dev:443\/https\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61204063"],"award-info":[{"award-number":["61204063"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Kongque Technology Innovation Foundation of Shenzhen","award":["KQCX20120807153227588"],"award-info":[{"award-number":["KQCX20120807153227588"]}]},{"name":"Fundamental Research Foundation of Shenzhen","award":["JCYJ20140418095735624"],"award-info":[{"award-number":["JCYJ20140418095735624"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this paper, we report an on-chip gas sensor based on novel zinc oxide (ZnO) nanocombs for carbon monoxide (CO) sensing. With ZnO gas sensing nanocombs fully integrated on a single silicon chip, the concept of low cost complementary-metal-oxide-semiconductor (CMOS) microsensor capable of on-chip gas sensing and processing is enabled. Compared with all previous implementations, the proposed ZnO nanocombs feature much larger effective sensing area and exhibit ultra-high sensitivity even at the room temperature. Specifically, at room temperature, we demonstrate peak sensitivities as high as 7.22 and 8.93 for CO concentrations of 250 ppm and 500 ppm, respectively. As a result, by operating the proposed ZnO-nanocomb-based gas sensor at the room temperature, the widely adopted power consuming heating components are completely removed. This leads to not only great power saving, but also full compatibility between the gas sensor and the  on-chip circuitry in term of acceptable operating temperature. In addition, the reported fast response\/recovery time of ~200 s\/~50 s (250 ppm CO) makes it well suited to  real-life applications.<\/jats:p>","DOI":"10.3390\/s150408919","type":"journal-article","created":{"date-parts":[[2015,4,16]],"date-time":"2015-04-16T10:37:57Z","timestamp":1429180677000},"page":"8919-8930","update-policy":"https:\/\/2.zoppoz.workers.dev:443\/https\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":27,"title":["Ultra-High Sensitivity Zinc Oxide Nanocombs for On-Chip Room Temperature Carbon Monoxide Sensing"],"prefix":"10.3390","volume":"15","author":[{"given":"Xiaofang","family":"Pan","sequence":"first","affiliation":[{"name":"College of Information Engineering, Shenzhen University, Shenzhen 518060, China"},{"name":"Department of ECE, the Hong Kong University of Science and Technology, Clear Water Bay,  Hong Kong, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/2.zoppoz.workers.dev:443\/https\/orcid.org\/0000-0002-9965-3516","authenticated-orcid":false,"given":"Xiaojin","family":"Zhao","sequence":"additional","affiliation":[{"name":"College of Electronic Science and Technology, Shenzhen University, Shenzhen 518060, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2015,4,16]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"111","DOI":"10.1080\/10408430490888977","article-title":"Oxide materials for development of integrated gas sensors\u2014A comprehensive review","volume":"29","author":"Eranna","year":"2004","journal-title":"Crit. Rev. Solid State Mater. Sci."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1833","DOI":"10.1109\/JSEN.2010.2046409","article-title":"CMOS interfacing for integrated gas sensors: A review","volume":"10","author":"Gardner","year":"2010","journal-title":"IEEE Sens. J."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"666","DOI":"10.1016\/j.msec.2007.10.056","article-title":"Application of a portable electronic nose system to assess the freshness of Moroccan sardines","volume":"28","author":"Barbria","year":"2008","journal-title":"Mater. Sci. Eng."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"1237","DOI":"10.1109\/TED.2008.919283","article-title":"Thin-film bulk-acoustic-resonator gas sensor functionalized with a nanocomposite Langmuir\u2013Blodgett layer of carbon nanotubes","volume":"55","author":"Penza","year":"2008","journal-title":"IEEE Trans. Electron. Devices"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"2229","DOI":"10.1063\/1.1763252","article-title":"Cantilever transducers as a platform for chemical and biological sensors","volume":"75","author":"Lavrik","year":"2004","journal-title":"Rev. Sci. Instrum."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"1123","DOI":"10.1039\/b508596a","article-title":"First-generation hybrid MEMS gas chromatograph","volume":"5","author":"Lu","year":"2005","journal-title":"Lab Chip"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"405","DOI":"10.3390\/s6040405","article-title":"High-temperature MEMS heater platforms: Long-term performance of metal and semiconductor heater materials","volume":"6","author":"Spannhake","year":"2006","journal-title":"Sensors"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"3654","DOI":"10.1063\/1.1738932","article-title":"Fabrication and ethanol sensing characteristics of ZnO nanowire gas sensors","volume":"84","author":"Wan","year":"2004","journal-title":"Appl. Phys. Lett."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"1720","DOI":"10.1109\/JSEN.2007.908919","article-title":"An integrated surface micromachined convex microhotplate structure for tin oxide gas sensor array","volume":"7","author":"Guo","year":"2007","journal-title":"IEEE Sens. J."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"69","DOI":"10.1016\/j.sse.2006.10.015","article-title":"A monolithically integrated 4 \u00d7 4 Tin Oxide gas sensor array with on-chip multiplexing and differential readout circuits","volume":"51","author":"Guo","year":"2007","journal-title":"Solid-State Electron."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"168","DOI":"10.1016\/j.snb.2009.02.008","article-title":"On-chip fabrication of ZnO-nanowire gas sensor with high gas sensitivity","volume":"138","author":"Ahn","year":"2009","journal-title":"Sens. Actuators B Chem."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1502","DOI":"10.1021\/ac60191a001","article-title":"A new detector for gaseous components using semiconductive thin films","volume":"34","author":"Seiyama","year":"1962","journal-title":"Anal. Chem."},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Ponzoni, A., Comini, E., Sberveglieri, G., Zhou, J., Deng, S.Z., Xu, N.S., Ding, Y., and Wang, Z.L. (2006). Ultrasensitive and highly selective gas sensors using three-dimensional tungsten oxide nanowire networks. Appl. Phys. Lett., 88.","DOI":"10.1063\/1.2203932"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"28","DOI":"10.1016\/j.aca.2005.10.069","article-title":"Metal oxide nano-crystals for gas sensing","volume":"568","author":"Comini","year":"2006","journal-title":"Anal. Chim. Acta"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"94","DOI":"10.1016\/j.snb.2011.07.018","article-title":"Preparation of ZnO nanorods by microemulsion synthesis and their application as a CO gas sensor","volume":"160","author":"Lim","year":"2011","journal-title":"Sens. Actuators B Chem."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"4625","DOI":"10.1002\/adma.201301828","article-title":"Low-cost fully transparent ultraviolet photodetectors based on electrospun ZnO-SnO2 heterojunction nanofi bers","volume":"25","author":"Tian","year":"2013","journal-title":"Adv. Mater."},{"key":"ref_17","doi-asserted-by":"crossref","unstructured":"Zheng, X.J., Cao, X.C., Sun, J., Yuan, B., Li, Q.H., Zhu, Z., and Zhang, Y. (2011). A vacuum pressure sensor based on ZnO nanobelt film. Nanotechnology, 22.","DOI":"10.1088\/0957-4484\/22\/43\/435501"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"772","DOI":"10.1016\/j.spmi.2010.03.006","article-title":"A ZnO nanowire-based humidity sensor","volume":"47","author":"Changa","year":"2010","journal-title":"Superlattices Microstruct."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"335","DOI":"10.1016\/0039-6028(79)90411-4","article-title":"Interactions of tin oxide surface with O2, H2O and H2","volume":"86","author":"Yamazoe","year":"1979","journal-title":"Surf. Sci."},{"key":"ref_20","unstructured":"Ikohura, K., and Watson, J. (1994). The Stannic Oxide Gas Sensor: Principles and Applications, CRC Press."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"393","DOI":"10.1109\/TNANO.2006.877428","article-title":"Chemical sensing with ZnO nanowire field-effect transistor","volume":"5","author":"Fan","year":"2006","journal-title":"IEEE Trans. Nanotechnol."},{"key":"ref_22","doi-asserted-by":"crossref","unstructured":"Morrison, S. (1977). The Chemical Physics of Surfaces, Plenum Press. [1st ed.].","DOI":"10.1007\/978-1-4615-8007-2"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"5133","DOI":"10.1021\/cm049182c","article-title":"ZnO nanowires synthesized by vapor trapping CVD method","volume":"16","author":"Chang","year":"2004","journal-title":"Chem. Mater."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"247","DOI":"10.1016\/j.snb.2005.09.008","article-title":"Nano-crystalline Cu-doped ZnO thin film gas sensor for CO","volume":"115","author":"Gonga","year":"2006","journal-title":"Sens. Actuators B Chem."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"28","DOI":"10.1016\/j.snb.2010.06.039","article-title":"Preparation of mesoporous In2O3 nanofibers by electrospinning and their application as a CO gas sensor","volume":"149","author":"Lim","year":"2010","journal-title":"Sens. Actuators B Chem."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/j.snb.2010.06.048","article-title":"1D ZnO nano-assemblies by Plasma-CVD as chemical sensors for flammable and toxic gases","volume":"149","author":"Barrecaa","year":"2010","journal-title":"Sens. Actuators B Chem."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"229","DOI":"10.1016\/j.snb.2011.12.072","article-title":"Synthesis process induced improvement on the gas sensing characteristics of nano-crystalline magnesium zinc ferrite particles","volume":"162","author":"Mukherjee","year":"2012","journal-title":"Sens. Actuators B Chem."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"110","DOI":"10.1016\/j.snb.2012.02.025","article-title":"Comparison of the gas sensing performance of SnO2 thin film and SnO2 nanowire sensors","volume":"165","author":"Bruneta","year":"2012","journal-title":"Sens. Actuators B Chem."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"734","DOI":"10.1016\/j.snb.2011.11.024","article-title":"Low-temperature electrodeposited Co-doped ZnO nanorods with enhanced ethanol and CO sensing properties","volume":"161","author":"Li","year":"2012","journal-title":"Sens. Actuators B Chem."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/2.zoppoz.workers.dev:443\/https\/www.mdpi.com\/1424-8220\/15\/4\/8919\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T20:44:50Z","timestamp":1760215490000},"score":1,"resource":{"primary":{"URL":"https:\/\/2.zoppoz.workers.dev:443\/https\/www.mdpi.com\/1424-8220\/15\/4\/8919"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,4,16]]},"references-count":29,"journal-issue":{"issue":"4","published-online":{"date-parts":[[2015,4]]}},"alternative-id":["s150408919"],"URL":"https:\/\/2.zoppoz.workers.dev:443\/https\/doi.org\/10.3390\/s150408919","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2015,4,16]]}}}