Helium focused ion beam damage in silicon: Physics-informed neural network modeling of helium bubble nucleation and early growth.

Qianhuang Chen

Shupeng Gao Qi Li Miguel A. Gosálvez Xi Lin Yan Xing Zaifa Zhou Qianhuang Chen Helium focused ion beam damage in silicon: Physics-informed neural network modeling of helium bubble nucleation and early growth. 102696 2025 92 J. Comput. Sci. https://doi.org/10.1016/j.jocs.2025.102696 db/journals/jocs/jocs92.html#GaoLGLXZC25 streams/journals/jocs

Chenglong Liu Qi Li Qianhuang Chen Yan Xing Damage profile model of nanostructure fabricated by Focused Helium Ion Beam. 845-848 2021 NEMS https://doi.org/10.1109/NEMS51815.2021.9451533 conf/nems/2021 db/conf/nems/nems2021.html#LiuLCX21

Qianhuang Chen Tianyang Shao Yan Xing An Experiment-Based Profile Function for the Calculation of Damage Distribution in Bulk Silicon Induced by a Helium Focused Ion Beam Process. 2306 2020 20 Sensors 8 https://doi.org/10.3390/s20082306 https://www.wikidata.org/entity/Q92123437 db/journals/sensors/sensors20.html#ChenSX20

Shupeng Gao Miguel A. Gosálvez Qi Li Xi Lin Chenglong Liu Tianyang Shao Yan Xing Zaifa Zhou