Arthur Tay

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

◀ ▶ joint publications with Li Da

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Publications

2002
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Li Da, Varadarajan Ganesh Kumar, Arthur Tay, Abdullah Al Mamun, Weng Khuen Ho, Alex See, Lap Chan:
Run-to-run process control for chemical mechanical polishing in semiconductor manufacturing. ISIC 2002: 740-745

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