"Practical iterated fill synthesis for CMP uniformity."

Yu Chen et al. (2000)

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DOI: 10.1145/337292.337610

access: closed

type: Conference or Workshop Paper

metadata version: 2019-09-25

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Yu Chen, Andrew B. Kahng, Gabriel Robins, Alexander Zelikovsky:
Practical iterated fill synthesis for CMP uniformity. DAC 2000: 671-674

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