"Decoupling Control Based on Dynamic Model of 4-DOF Wafer Handling Robot."

Lei Yang, Nianfeng F. Wang (2015)

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DOI: 10.1007/978-3-319-22873-0_50

access: closed

type: Conference or Workshop Paper

metadata version: 2021-01-11

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Lei Yang, Nianfeng F. Wang:
Decoupling Control Based on Dynamic Model of 4-DOF Wafer Handling Robot. ICIRA (3) 2015: 563-570

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