"Reliability characteristics of MIM capacitor studied with ΔC-F ..."

Soo Cheol Kang et al. (2018)

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DOI: 10.1109/IRPS.2018.8353687

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type: Conference or Workshop Paper

metadata version: 2024-01-24

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Soo Cheol Kang, Sang Kyung Lee, S. Heo, S. M. Kim, Sung Kwan Lim, Byoung Hun Lee:
Reliability characteristics of MIM capacitor studied with ΔC-F characteristics. IRPS 2018: 5-1

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