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"GPU-Accelerated Inverse Lithography Towards High Quality Curvy Mask ..."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Haoyu Yang, Haoxing Ren (2025)

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DOI: 10.1145/3698364.3705343

access: closed

type: Conference or Workshop Paper

metadata version: 2025-05-09

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Haoyu Yang, Haoxing Ren:
GPU-Accelerated Inverse Lithography Towards High Quality Curvy Mask Generation. ISPD 2025: 42-50

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