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Nannan Li Yangxi Zhang Ningli Zhu Yunhui Zhu Chengchen Gao Jing Chen Low temperature multi-layer wafer level package for chip scale atomic clock (CSAC). 481-484 2015 NEMS https://doi.org/10.1109/NEMS.2015.7147472 conf/nems/2015 db/conf/nems/nems2015.html#LiZZZGC15