"Effect of Pre-Existing Defects on Reliability Assessment of High-K Gate ..."

Gennadi Bersuker et al. (2004)

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DOI: 10.1016/J.MICROREL.2004.07.048

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type: Journal Article

metadata version: 2021-10-14

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Gennadi Bersuker, Jang H. Sim, Chadwin D. Young, Rino Choi, Peter Zeitzoff, George A. Brown, Byoung Hun Lee, Robert W. Murto:
Effect of Pre-Existing Defects on Reliability Assessment of High-K Gate Dielectrics. Microelectron. Reliab. 44(9-11): 1509-1512 (2004)

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