Multi-Row Guiding Template Design for Lamellar Directed Self-Assembly with Self-Aligned Via Process.

Yi-Ting Lin Kang-Ting Fan Iris Hui-Ru Jiang Multi-Row Guiding Template Design for Lamellar Directed Self-Assembly with Self-Aligned Via Process. 29:1-29:17 2025 March 30 ACM Trans. Design Autom. Electr. Syst. 2 https://doi.org/10.1145/3711851 db/journals/todaes/todaes30.html#LinFJ25 streams/journals/todaes