I. Gary Rosen

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

◀ ▶ joint publications with Tyler Parent

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Publications

2002
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Anupam Madhukar, Tyler Parent, I. Gary Rosen, Chunming Wang:
An Elementary Model for Control of a Semiconductor Etching Process. SIAM Rev. 44(4): 678-695 (2002)
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I. G. Rosen, Tyler Parent, Baris Fidan, Chunming Wang, Anupam Madhukar:
Design, development, and testing of real-time feedback controllers for semiconductor etching processes using in situ spectroscopic ellipsometry sensing. IEEE Trans. Control. Syst. Technol. 10(1): 64-75 (2002)
2001
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I. Gary Rosen, Tyler Parent, Carolyn Cooper, Ping Chen, Anupam Madhukar:
A neural-network-based approach to determining a robust process recipe for the plasma-enhanced deposition of silicon nitride thin films. IEEE Trans. Control. Syst. Technol. 9(2): 271-284 (2001)
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Baris Fidan, I. G. Rosen, Tyler Parent, Anupam Madhukar:
Multi-variable adaptive control of CF₄/O₂ plasma etching of silicon nitride thin films. ACC 2001: 1280-1285
2000
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Baris Fidan, Tyler Parent, I. G. Rosen, Anupam Madhukar:
Spectroscopic ellipsometry (SE) based real-time control of CF₄/O₂ plasma etching of silicon nitride. ACC 2000: 4006-4010

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