Monolithic Complementary Field Effect Transistors (CFET) Demonstrated using Middle Dielectric Isolation and Stacked Contacts.

J. P. Soulie Steven Demuynck Victor Vega-Gonzalez C. Toledo de Carvalho Cavalcante L. Petersen Barbosa Lima K. Stiers C. Sheng A. Vandooren M. Hosseini X. Zhou Hans Mertens Thomas Chiarella Jürgen Bömmels Roger Loo E. Rosseel Clement Porret Y. Shimura A. Akula G. Mannaert S. Choudhury V. Brissonneau E. Dupuy T. Sarkar Nathali Franchina-Vergel A. Peter Nicolas Jourdan 0002 J. P. Soulie Kevin Vandersmissen F. Sebaai P. Puttarame Gowda K. Lai A. Mingardi S. Sumar Sarkar K. D'Have B. T. Chan A. Sepulveda Marquez R. Langer I. Gyo Koo E. Altamirano Sanchez Katia Devriendt P. Rincon Delgadillo F. Lazzarino Jérôme Mitard J. Geypen E. Grieten D. Batuk Y.-F. Chen F. Verbeek F. Holsteyns S. Subramanian N. Horiguchi S. Biesemans Monolithic Complementary Field Effect Transistors (CFET) Demonstrated using Middle Dielectric Isolation and Stacked Contacts. 1-2 2024 VLSI Technology and Circuits https://doi.org/10.1109/VLSITechnologyandCir46783.2024.10631349 conf/vlsit/2024 db/conf/vlsit/vlsit2024.html#DemuynckVCLSSVH24 Hans Mertens M. Hosseini Thomas Chiarella D. Zhou S. Wang G. Mannaert E. Dupuy D. Radisic Z. Tao Yusuke Oniki Andriy Hikavyy R. Rosseel A. Mingardi S. Choudhury P. Puttarame Gowda F. Sebaai A. Peter Kevin Vandersmissen J. P. Soulie An De Keersgieter L. Petersen Barbosa Lima C. Cavalcante D. Batuk G. T. Martinez J. Geypen F. Seidel K. Paulussen P. Favia Jürgen Bömmels Roger Loo P. Wong A. Sepulveda Marquez B. T. Chan Jérôme Mitard S. Subramanian S. Demuynck E. Dentoni Litta N. Horiguchi S. Samavedam S. Biesemans Nanosheet-based Complementary Field-Effect Transistors (CFETs) at 48nm Gate Pitch, and Middle Dielectric Isolation to enable CFET Inner Spacer Formation and Multi-Vt Patterning. 1-2 2023 VLSI Technology and Circuits https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185218 conf/vlsit/2023 db/conf/vlsit/vlsit2023.html#MertensHCZWMDRT23 Victor Vega-Gonzalez D. Radisic Bt Chan S. Choudhury S. Wang A. Mingardi Q. Toan Le H. Decoster Yusuke Oniki P. Puttarame Kevin Vandersmissen J. P. Soulie A. Peter A. Sepulveda D. Batuk G. T. Martinez Olivier Richard Jürgen Bömmels S. Biesemans E. Dentoni Litta Naoto Horiguchi Seongho Park Zsolt Tokei Integration of a Stacked Contact MOL for Monolithic CFET. 1-2 2023 VLSI Technology and Circuits https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185260 conf/vlsit/2023 db/conf/vlsit/vlsit2023.html#Vega-GonzalezRC23 Anabela Veloso Anne Jourdain D. Radisic Rongmei Chen G. Arutchelvan B. O'Sullivan Hiroaki Arimura Michele Stucchi An De Keersgieter M. Hosseini T. Hopf K. D'Have S. Wang E. Dupuy G. Mannaert Kevin Vandersmissen S. Iacovo P. Marien S. Choudhury Filip Schleicher F. Sebaai Yusuke Oniki X. Zhou A. Gupta Tom Schram B. Briggs C. Lorant E. Rosseel Andriy Hikavyy Roger Loo J. Geypen D. Batuk G. T. Martinez J. P. Soulie Katia Devriendt B. T. Chan S. Demuynck Gaspard Hiblot Geert Van der Plas Julien Ryckaert Gerald Beyer E. Dentoni Litta Eric Beyne Naoto Horiguchi Scaled FinFETs Connected by Using Both Wafer Sides for Routing via Buried Power Rails. 284-285 2022 VLSI Technology and Circuits https://doi.org/10.1109/VLSITechnologyandCir46769.2022.9830177 conf/vlsit/2022 db/conf/vlsit/vlsit2022.html#VelosoJRCAOASKH22 A. Akula Hiroaki Arimura G. Arutchelvan D. Batuk Gerald Beyer Eric Beyne S. Biesemans Jürgen Bömmels B. Briggs V. Brissonneau C. CavalcanteC. Toledo de Carvalho Cavalcante B. T. Chan Bt Chan Rongmei Chen Y.-F. Chen Thomas Chiarella S. Choudhury H. Decoster P. Rincon Delgadillo Steven DemuynckS. Demuynck Katia Devriendt K. D'Have E. Dupuy P. Favia Nathali Franchina-Vergel J. Geypen P. Puttarame GowdaP. Puttarame E. Grieten A. Gupta Gaspard Hiblot Andriy Hikavyy F. Holsteyns T. Hopf Naoto HoriguchiN. Horiguchi M. Hosseini S. Iacovo Anne Jourdain Nicolas Jourdan 0002 An De Keersgieter I. Gyo Koo K. Lai R. Langer F. Lazzarino Q. Toan Le L. Petersen Barbosa Lima Eugenio Dentoni LittaE. Dentoni Litta Roger Loo C. Lorant G. Mannaert P. Marien A. Sepulveda Marquez G. T. Martinez Hans Mertens A. Mingardi Jérôme Mitard Yusuke Oniki B. O'Sullivan Seongho Park K. Paulussen A. Peter Geert Van der Plas Clement Porret D. Radisic Olivier Richard E. Rosseel R. Rosseel Julien Ryckaert S. Samavedam E. Altamirano Sanchez S. Sumar Sarkar T. Sarkar Filip Schleicher Tom Schram F. Sebaai F. Seidel A. Sepulveda C. Sheng Y. Shimura K. Stiers Michele Stucchi S. Subramanian Z. Tao Zsolt Tokei Kevin Vandersmissen A. Vandooren Victor Vega-Gonzalez Anabela Veloso F. Verbeek S. Wang P. Wong D. Zhou X. Zhou