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"A Virtual Wafer-based Scheduling Method for Dual-arm Cluster Tools with ..."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Yan Qiao et al. (2021)

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DOI: 10.1109/ICNSC52481.2021.9702173

access: closed

type: Conference or Workshop Paper

metadata version: 2026-01-20

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Yan Qiao, Jie Li, Yanjun Lu, SiWei Zhang, NaiQi Wu, Bin Liu:
A Virtual Wafer-based Scheduling Method for Dual-arm Cluster Tools with Chamber Cleaning Requirements. ICNSC 2021: 1-6

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last updated on 2026-01-20 22:25 CET by the dblp team

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