A novel thermal switch design by using CMOS MEMS fabrication process.

Lei-Chun Chou You-Liang Lai Ying-Zong Juang Chun-Yin Tsai Chun-Ying Lin Sheng-Chieh Huang Jin-Chern Chiou A novel thermal switch design by using CMOS MEMS fabrication process. 213-216 2011 NEMS https://doi.org/10.1109/NEMS.2011.6017332 conf/nems/2011 db/conf/nems/nems2011.html#ChouLJTLHC11