1742-6596/3083/1/012008
Abstract
To achieve high-speed and high-precision measurements, this study introduces a height measurement system based on LCCD and optical triangulation that utilizes a gray-scale centroid algorithm for sub-pixel positioning. Ultimately, the system achieves a resolution of 10 nm, a repeatability of 15 nm, and a stability of 7.8 nm, by setting up an experimental system in the laboratory.
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