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Example

Reducing the weight of a MEMS component by a factor of 10 will: 1) Not reduce the acceleration. 2) Reduce the time to complete motion by a factor of 3.16. 3) Reduce the power density by a factor of 3.16 and overall power consumption by a factor of 0.3.

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Piyush Gupta
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72 views2 pages

Example

Reducing the weight of a MEMS component by a factor of 10 will: 1) Not reduce the acceleration. 2) Reduce the time to complete motion by a factor of 3.16. 3) Reduce the power density by a factor of 3.16 and overall power consumption by a factor of 0.3.

Uploaded by

Piyush Gupta
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd

Example

Estimate the associate changes in the acceleration (a) and the time (t)
and the power supply (P) to actuate a MEMS component if its weight is
reduced by a factor of 10.

Solution:

Since W µ V (= (ℓ)3 , so it involves Order 3 scaling, from the table for


scaling of dynamic forces, we get:

● There will be no reduction in the acceleration (ℓ0).

● There will be (ℓ0.5 ) = (10)0.5 = 3.16 reduction in the time to


complete the motion.

● There will be (ℓ0.5) = 3.16 times reduction in power density (P/Vo).

The reduction of power consumption is 3.16 Vo. Since the volume of the
component is reduced by a factor of 10, the power consumption after
scaling down reduces by: P = 3.16/10 = 0.3 times.

So, we may conclude that electrostatic forces:

Fd, FW, and FL µ l2

Scaling: A 10 times reduction in electrode linear dimensions

→ 102 = 100 times reduction in the magnitude of the electrostatic


forces.

in which r, L and A are respective electric resistivity of the material,


the length and across-sectional area of the conductor

where e is the permeativity of dielectric , and E is the electric field


strength µ (l)-1 .

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