Yin et al.

Light: Advanced Manufacturing (2022)3:36 Official journal of the JHL 2689-9620

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Article Open Access

Alleviating the crosstalk effect via a fine-

moulded light-blocking matrix for colour-
converted micro-LED display with a 122%
NTSC gamut
Yongming Yin1, Zhiping Hu1,2, Muhammad Umair Ali1,3, Miao Duan4, Yongwei Wu4, Ming Liu1,
Wenxiang Peng4, Jun Hou4, Dongze Li4, Xin Zhang4 and Hong Meng1,*

Abstract
One of the major challenges when fabricating high gamut colour-converted micro-light-emitting diodes (LEDs)
displays is severe crosstalk effect among adjacent pixels because of the wide view-angle feature of micro-LED
chips. In this study, potential factors that contribute to the crosstalk effect were systematically simulated. We
observed that precisely filling the space between each micro-LED chip with a light blocking matrix (LBM) can be a
promising solution to alleviate this risk. After careful investigations, a press-assisted moulding technique was
demonstrated to be an effective approach of fabricating the LBM. Nevertheless, experimental observations further
revealed that residual black LBM on the surface of micro-LEDs severely reduces the brightness, thereby
compromising the display performance. This problem was successfully addressed by employing a plasma etching
technique to efficiently extract the trapped light. Eventually, a top-emitting blue micro-LED-based backlight fine-
moulded with a black LBM was developed and combined with red and green quantum dot colour-conversion
layers for full-colour display. The colour gamut of our manufactured display prototype can cover as high as 122%
that of the National Television Standards Committee.
Keywords: Micro-LED, Crosstalk effect, Quantum dots, Color conversion, Plasma etching, Fine-moulding

Introduction 2021,  Ji  et  al.  comprehensively  summarised  the  progress

Micrometre-scale  light-emitting  diode  (micro-LED)1–8 and  future  challenges  of  micro-LED  displays  and
displays  have  attracted  significant  interest  owing  to  their considered them as next-generation displays8. Nevertheless,
exciting features, such as high brightness and contrast ratio, some technical bottlenecks remain that should be resolved
low  power  consumption,  and  prolonged  lifetime9–11.  In for  the  further  advancement  of  this  technology  for  mass
production.  In  addition  to  the  mass-transfer  challenge,
Correspondence: Hong Meng (menghong@[Link])
1
School of Advanced Materials, Shenzhen Graduate School, Peking significant  differences  in  electroluminescence  (EL)
University, Shenzhen 518055, China efficiencies  and  the  threshold  voltages  of  red,  green,  and
2
Hangzhou Institute for Advanced Study, University of Chinese Academy
blue  (RGB)  LEDs12  inevitably  complicate  the  driving
of Sciences, Hangzhou 310024, China
Full list of author information is available at the end of the article.
circuit  design  of  display  panels.  Furthermore,  blue  LEDs
These authors contributed equally: Yongming Yin, Zhiping Hu exhibit  relatively  better  stability  characteristics  than  their
 

© The Author(s) 2022

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Yin et al. Light: Advanced Manufacturing (2022)3:36 Page 2 of 8

red and green counterparts, which can result in a high risk colour  gamut.  To  determine  potential  solutions  for

of colour shift after long-term usage. Therefore, alternative alleviating  the  crosstalk  risk  in  top-emitting  colour-
strategies should be explored to harness the full potential of converted  micro-LEDs  (Fig. 1),  we  conducted  a  series  of
micro-LED  technology  for  high-performance  full-colour simulations.  First,  we  performed  a  simulation  of
displays.  Therefore,  blue  micro-LEDs  integrated  with  red conventional top-emitting structures without an LBM (Fig.
and  green  colour  conversion  materials  (CCMs)  have S1 in the Supplementary Information). In this model (Fig.
recently  emerged  as  an  effective  method  of  developing S2a,  Supplementary  Information),  three  components,
efficient  full-colour  displays4.  RGB  emissions  can  be including  the  micro-LED  pitch,  black  bank  critical
attained  by  combining  phosphors  or  quantum  dots  (QDs) dimensions (CDs), and gaps (the vertical distance between
with ultraviolet (UV) or blue LEDs13–19. In 2022, Triana et the sapphire surface and CCLs), were considered the main
al.  comprehensively  summarised  the  progress  of factors  contributing  to  the  photoconversion  performance.
luminescent  nanomaterials,  including  QDs,  as  efficient Based  on  this  model,  the  crosstalk  (XT%=Lsubpixel/
energy  converters  for  advanced  displays20.  In  addition  to Lmicro-LED,  where  Lsubpixel  is  the  luminance  of  adjacent
the fine patterning of QD films as colour conversion layers pixels and Lmicro-LED is the luminance of the lit blue micro-
(CCLs)21–24  for  efficient  and  complete  photoconversion, LED)  was  estimated  by  comparing  the  brightness
another  major  bottleneck  is  the  crosstalk  effect  among difference  of  blue  emissions  between  the  lit  micro-LED
adjacent  pixels  because  of  the  wide  view-angle  feature  of and  adjacent  sub-pixels.  Severe  crosstalk  (XT%=19.9%)
LED  chips15.  In  2020,  we  successfully  demonstrated  a  4- was  observed  in  the  4-inch  chip  pixel  design  (Fig.  S3,
inch full-colour prototype incorporating a bottom-emitting Supplementary Information), because the pitch was similar
blue  micro-LED  backlight  and  QD  CCLs25.  The  colour to  that  of  the  micro-LED  chips.  XT%  was  still  as  high  as
gamut  of  this  display  reached  up  to  129%  of  the  National 16.01%, even after the gap was reduced to 0 μm. A lower
Television  Standards  Committee  (NTSC).  However,  the crosstalk  effect  was  observed  when  the  micro-LED  pitch
tolerance  of  the  fabrication  process  was  rather  small, was increased, and the XT% was 1.3% at a 450 μm pitch.
because  it  was  fabricated  on  a  colourless  polyimide Under  this  condition,  both  the  gap  and  black  bank  CD
substrate  with  a  thickness  of  10  μm.  Maintaining  the factors  had  a  limited  influence  on  the  crosstalk.  The
vertical  distance  between  the  blue  light  emission  and  the detailed  simulation  results  for  this  model  are  provided  in
CCLs at ≤10 μm is considerably difficult because certain Table S1 (Supplementary Information). Nevertheless, such
deviations  may  occur  during  thin-film  transistor  (TFT) a  high  micro-LED  pitch  conflicts  with  the  demand  for
manufacturing,  micro-LED  bonding,  or  module  assembly high-resolution  displays.  Therefore,  alternative  techniques
steps.  Thus,  there  remains  a  high  probability  of  the are  crucial  for  mitigating  the  risk  of  the  crosstalk  effect
crosstalk effect under undemanding fabrication conditions. without compromising display performance.
In  this  study,  we  focused  on  conventional  top-emitting Considering that crosstalk occurs among adjacent micro-
structure  and  systematically  simulated  the  factors  that LED  chips,  a  potential  solution  could  be  to  separate  them
contribute  to  the  crosstalk  effect  and  observed  that  filling by  incorporating  LBMs.  To  confirm  our  hypothesis,  we
the  space  between  each  micro-LED  chip  with  a  light- designed  another  simulation  model  (Fig.  S2b,
blocking  matrix  (LBM)  can  be  a  promising  solution  to
alleviate this risk. Based on the simulation results, a black  

LBM  matrix  was  finely  moulded  on  the  top-emitting  blue

micro-LED  backlight  through  a  moulding  and  plasma
etching technique. With the black LBM, the view-angle of CCL plate
the  backlight  was  reduced  by  40°  and  the  crosstalk  effect
Red CF Green CF Blue CF
was  efficiently  suppressed.  Eventually,  a  full-colour
display was manufactured by integrating an LBM-moulded Red QD Green QD Scatter
Bank Bank
blue  micro-LED  backlight  with  red  and  green  QD  CCLs.
Blue Blue Blue
The  colour  gamut  of  our  display  prototype  can  reach  as micro-LED micro-LED micro-LED
high as 122% of the NTSC.
 
Anode Cathode Anode Cathode Anode Cathode

Results and discussion TFT backplane

Because  of  the  emanative  emission  of  the  inorganic
Fig. 1 Schematic  architecture  of  the  top-emitting  colour-converted
micro-LED  and  QD  layers,  the  crosstalk  of  the  QD-LED
full-colour micro-LED display prototype. 
display  system  significantly  affects  the  colour  purity  and
Yin et al. Light: Advanced Manufacturing (2022)3:36 Page 3 of 8

Supplementary  Information).  In  this  model,  in  addition  to paper25,  a  4-inch  pristine  blue  micro-LED  backlight  was
the gap, two other factors, the transmittance and thickness first  fabricated.  Nevertheless,  it  is  not  a  simple  task  to
of the LBM, were considered. As indicated in Table 1, the effectively introduce an LBM into micrometre-scale spaces
crosstalk  decreased  significantly  when  an  LBM  with between  adjacent  micro-LEDs.  Meanwhile,  the  side
absolute  light-blocking  ability  and  thickness  equal  to  that emissions  among  adjacent  blue  micro-LEDs  should  be
of the micro-LEDs was employed. The colour gamut of the completely blocked, whereas the forward emissions should
resulting  prototype  reached  ~120%  NTSC,  even  when  the be  maintained.  Therefore,  we  proposed  three  schemes:
gap  was  maintained  at  approximately  20  μm.  Considering press-assisted  moulding,  inkjet  printing  (IJP),  and  metal
the  limited  light-blocking  ability  of  conventional  capping stencil printing (MSP) (Fig. 2). Based on the corresponding
materials, we simulated the crosstalk effect under different LBM materials for these three approaches (semi-solid gel,
LBM  transmittances.  Under  an  equal  LBM  height  to  the liquid  ink,  and  paste  state),  we  conducted  three
micro-LED and with a 0 μm gap, the crosstalk was as low experiments to introduce the LBM into micro-LED panels.
as  0.2%,  and  the  colour  gamut  was  higher  than  126% As indicated in Fig. 2a, the LBM was completely moulded
NTSC  when  the  transmittance  of  the  LBM  was  less  than inside  the  micro-LED  spaces  using  the  first  approach.
1%  (Table  S2,  Supplementary  Information).  When  the However,  a   “U”  shape  film  morphology  (Fig. 2b)  and
LBM height was increased by 10 μm compared with that of rough patterns (Fig. 2c) were achieved through the IJP and
the  micro-LED  chips,  no  influence  on  the  crosstalk  was MSP methods. In the following, we focus on the moulding
observed, whereas the emission brightness was reduced by method  to  fabricate  the  LBM  on  micro-LEDs.  The   “U”
9%.  These  simulation  results  indicated  that  the  crosstalk shape  morphology  can  be  attributed  to  the  fluid  dynamics
can  be  efficiently  curbed  by  introducing  an  LBM  matrix of IJP inks, which made it difficult to realise square edges.
with a transmittance of <1% to the micro-LED backlights. For  the  rough  patterns  fabricated  using  the  MSP  method,
Based on the TFT backplane manufacturing, micro-LED the difficulties primarily fall on the design of suitable metal
transfer  and  bonding  procedure  described  in  our  previous stencil  patterns  and  the  development  of  suitable  black

Table 1    Crosstalk simulation of photoconversion performance for the top-emitting model with the black LBM under different gaps
between the blue backlight and CCL plate.
Gap Red Green Blue XT% Gamut (NTSC)

0 μm 0 128.0%

10 μm 0.22% 125.4%

15 μm 0.57% 122.0%

20 μm 1.3% 118.7%

25 μm 2.0% 116.5%

30 μm 3.6% 114.0%
Yin et al. Light: Advanced Manufacturing (2022)3:36 Page 4 of 8

a b c

Press
Nozzle
Printing direction
Moulding plate
LBM Ink LBM paste
LBM
LED LED LED

TFT backplane TFT backplane TFT backplane

LED LED LED

TFT backplane TFT backplane TFT backplane

Micro-LED

Micro-LED Micro-LED Micro-LED

Micro-LED

Micro-LED

Micro-LED
100 μm 100 μm 100 μm

Fig. 2 Proposed  schemes  to  fabricate  LBM  for  the  blue  micro-LEDs  backlight.  Schematic  process  and  corresponding  LBM  morphologies  of  a
press-assisted molding, b IJP, and c metal stencil printing techniques. 

pastes.  Designing  a  metal  mask  with  completely  blank the  pristine  state  and  remained  at  only  ~2%  of  the  initial
rings  surrounding  micro-LED  chips  is  impossible.  Thus, value (Fig. 3e). This can be primarily attributed to the thick
we  designed  a  mask  with  approximate  rings,  where  the (>30  μm)  LBM  layer  on  the  sapphire  surface  (Fig.  S5c).
metal  blocks  corresponding  to  the  micro-LED  positions Such  severe  brightness  loss  is  not  appropriate  for  further
were  connected  using  narrow  metal  stripes  (Fig.  S4, applications.
Supplementary Information). Based on this design and the Therefore,  we  sought  to  explore  a  method  of  removing
fluid  characteristics  of  the  pastes,  it  was  anticipated  to the remaining LBM to efficiently extract the trapped light.
encircle  the  micro-LED  chips  with  black  paste  while The  plasma  etching  technique  (Fig.  S7,  Supplementary
failing. The following section focuses on the first approach. Information)  was  used  to  lap  the  LBM  layers.
Before  fabricating  the  LBM  matrix  on  a  4-inch  pristine Tetrafluoromethane  (CF4)  and  oxygen  (O2)  were  adopted
blue  micro-LED  backlight,  the  transmittance  of  the as gas sources, considering that the main constituents of the
corresponding  black  LBM  (thermosetting  silica  gel)  was LBM  were  silica  gel  and  other  organic  additives.  As
measured.  As  shown  in  Fig.  S5a  (Supplementary indicated in Fig. 4a, both of these gases were implemented
Information),  when  the  film  thickness  was  higher  than  40 as  F*  and  O*  sources,  respectively,  to  remove  the  Si  and
μm,  the  corresponding  transmittance  in  the  blue  emission C/H  elements  and  thus  lap  the  LBM  layer.  A  suitable
range  was  lower  than  0.1%,  which  can  also  be  verified  in process  recipe  was  used  (microwave  power:  4000  W,
Fig.  S5b  (Supplementary  Information).  According  to  the chamber  pressure:  1.27  mTorr,  CF4  flow:  500  cc/min,  O2
aforementioned  findings,  the  light-blocking  ability  fully flow:  2000  cc/min,  and  time:  15  min),  a  >20-μm-thick
satisfied the requirement for the LBM, considering that the LBM test sample was lapped using this approach (Fig. 4b).
space  of  adjacent  micro-LEDs  was  wider  than  50  μm. Furthermore,  the  root-mean-square  surface  roughness  of
Based  on  the  aforementioned  black  silica  gel,  an  LBM the  lapped  LBM  was  as  low  as  0.23  μm  (Fig. 4c),  which
matrix  was  moulded  on  top  of  the  pristine  backlight  (Fig. further  suggested  that  plasma  etching  is  suitable  for
S6a).  As  shown  in  Fig.  S6b,  the  fabricated  backlight reducing  black  silica  gel.  Finally,  sapphire  surfaces  were
displayed a high luminance uniformity along the full panel, observed (Fig. 4d) after the top LBM films were removed.
indicating  that  the  moulded  LBM  layer  was  very  smooth. As  a  result,  approximately  83%  of  the  on-axis  light  was
The  crosstalk  phenomenon  (Fig. 3a,  c)  was  successfully successfully  extracted  without  changing  the  view-angle
curtailed (Fig. 3b) with the aid of the LBM, and the panel characteristics (Fig. 3d, e).
view  angle  at  half  brightness  maximum  was  also With  a  prefabricated  top-emitting  blue  micro-LED
successfully reduced by almost 40° (Fig. 3d). However, the backlight,  a  CCL  plate  was  developed,  and  both  of  these
panel on-axis brightness decreased severely compared with components  (i.e.,  micro-LED  chip  and  CCL  plate)  were
Yin et al. Light: Advanced Manufacturing (2022)3:36 Page 5 of 8

a b c
 

w/o LBM w LBM w/o LBM

d w/o LBM w LBM w LBM etched e 350

1.2

Backlight brightness (cd/m2)

Normalized intensity (a.u.)

300 ~85%
1.0
250
0.8
200
0.6
150
0.4
100
0.2
0 50
~2%
−100 −80 −60 −40 −20 0 20 40 60 80 100
0
View-angle (°) Pristine LBM molded LBM etched
Fig. 3 Optical performance of the top-emitting active matrix blue micro-LEDs backlight. Pixel photograph of the panels a without and b with the
LBM when only one micro-LED was lit. c Pixel photograph of the panel with the CCL plate directly stacked on top of blue micro-LED without an
LBM when only one micro-LED was lit. d Brightness and e view-angle characteristics of backlights. 

a H F*
F b Top view
O H
O* Si
F F Original area Etched area
F

H H H H H H
H H H H H H H H H H H H
C C C C C C Cross-section view

Si Si Si Si Si Si Original area Etched area

O O O O O
C C C C C C
130.3 μm 107.1 μm
H H H H H H H H H H H H
H H H H H H

c 884 nm d

−783.3
nm 400 μm
0 Height sensor (μm) 100

Fig. 4 Plasma etching and the resulting film morphology of the black LBM films. a Schematic illustration of the plasma etching process. b Top-
view  and  cross-sectional  microscopic  and  c  atomic  force  microscopy  images  of  the  black  LBM  films  under  plasma  etching  treatment.
d Microscopic images of the blue micro-LED backlight molded with the LBM after plasma etching treatment. 
Yin et al. Light: Advanced Manufacturing (2022)3:36 Page 6 of 8

assembled  together  to  develop  a  full-colour  display  (Fig. Conclusions

S8,  Supplementary  Information).  Similar  to  our  previous An efficient full-colour display prototype adopting a top-
studies21,23,25,  red  and  green  CdSe  QDs  were  selected  as emitting  blue  micro-LED  backlight  integrated  with  CdSe
CCLs,  and  a  UV-induced  polymerisation  method  was QDs  as  the  CCL  was  successfully  manufactured.  By
employed  to  obtain  micrometre-thick  QD  films  for employing  a  top-emitting  backlight  design  with  the  space
effective  photoconversion.  As  shown  in  Fig.  S9 between  each  micro-LED  chip  filled  with  an  LBM,  the
(Supplementary  Information),  bright  and  vivid  red  and crosstalk  effect  between  different  pixels  was  efficiently
green  emissions  were  achieved,  indicating  that  the  CCL alleviated.  Compared  with  conventional  micro-LED
patterns  were  precisely  fabricated  using  the  IJP  approach. displays  containing  RGB  LEDs,  our  developed  display
Finally,  the  blue  top-emitting  backlight  and  CCL  plates prototype  offers  significantly  improved  colour  gamut
were  carefully  assembled  to  obtain  the  target  full-colour
values,  as  high  as  122%  NTSC  or  91%  BT.2020.  This
display prototype (Fig. 1).
research  provides  an  effective  method  for  suppressing  the
Peking University logos illuminated in different colours
crosstalk effect in top-emitting micro-LED-based displays.
using  this  developed  display  prototype  are  shown  in  Fig.
We  anticipate  that  our  proposed  method  will  spur  the
5d–f, revealing high colour purities (Fig. 5b). Furthermore,
further development of high-performance colour-converted
a colourful photo of a bus (Fig. 5a) was also created using
full-colour micro-LED displays.
our  CCL-integrated  micro-LED  display  (more  display
 

images  are  provided  in  the  Supplementary  Video).  These

results indicate that the integration of CdSe QD CCLs with Materials and methods
 

top-emitting  LEDs  is  an  effective  approach  for

manufacturing  efficient  full-colour  micro-LED  displays. Fabrication of TFT and CF backplanes
The colour gamut of this prototype was also estimated, as The  TFT  and  CF  plates  were  developed  individually  in
shown  in  Fig. 5c  (for  detailed  Commission  Internationale two parallel steps. The TFT backplanes were obtained via a
de  L’Eclairage  (CIE)  coordinates,  please  see  Table  S3), chain  of  cyclic  procedures  including  sputtering,  chemical
and  could  reach  as  high  as  91%  of  Broadcasting  Service vapour  deposition,  exposure,  development,  etching,  and
Television  2020  (BT.2020)  or  122%  NTSC.  This  colour testing  phases.  The  patterned  CF  and  bank  patterns  were
gamut  performance  was  considerably  higher  than  that  of manufactured  using  conventional  photolithography
displays  based  on  RGB  micro-LED  chips  with  80.5% comprising  coating,  baking,  exposing,  and  developing
BT.2020 or 108% NTSC.
 
steps.
 

0.9
 

a b R_Pixel G_Pixel B_Pixel c 0.8

520
BT.2020
NTSC
540
Micro-LED+CCL
1.0 0.7
560
Intensity (a.u.)

0.6
0.8
500
0.5 580
FWHM FWHM FWHM
0.6 19 nm 22 nm 27 nm
TC (°K)
4000
3000 2500
y

0.4 6000
600
0.4 10000
2000 1500
620
0.3
0.2 490
∞ 700
0.2
0
400 450 500 550 600 650 700 750 0.1
480

470
Wavelength (nm) 0
0
460 380
0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8
x

d e f

Fig. 5 Display  performance  of  the  manufactured  display  prototype.  a  Vivid  bus  image;  d  red,  e  green,  and  f  blue  Peking  University  logos
illuminated by this CCLs-integrated micro-LED display (The insets in d, e and f are the corresponding microscopic images of red, green, and blue
pixels).  c  EL  and  PL  spectra  of  blue  micro-LED  and  CCMs,  respectively.  d  Color  gamut  of  BT.  2020,  NTSC  standard,  and  our  demonstrated
module. 
Yin et al. Light: Advanced Manufacturing (2022)3:36 Page 7 of 8

Development of blue micro-LED backlights 2019B010924003), Shenzhen Hong Kong Innovation Circle Joint R&D
Project (SGDX20190918105201704), Shenzhen Fundamental Research
Micro-LED  chips  (100-μm-high  with  85-μm-thick Program (No. GXWD20201231165807007-20200810113811001), and
sapphire) were acquired from San’an Optoelectronics Co., Shenzhen Science and Technology Research Grant
Ltd.  Active-matrix  blue  micro-LED  backlights  based  on (JCYJ20170818085627903).

predeveloped  TFT  backplanes  were  fabricated  in  three

Author details
main  steps.  In  the  first  phase,  tin  (Sn)  solder  paste  was 1
School of Advanced Materials, Shenzhen Graduate School, Peking
deposited  onto  the  pads  (anodes  and  cathodes)  using  a University, Shenzhen 518055, China. 2Hangzhou Institute for Advanced
printer  combined  with  a  metal  stencil.  Next,  the  micro- Study, University of Chinese Academy of Sciences, Hangzhou 310024,
China. 3Tsinghua-Berkeley Shenzhen Institute (TBSI), Tsinghua Shenzhen
LED  chips  were  moved  onto  the  printed  Sn  patterns  with
International Graduate School, Tsinghua University, Shenzhen 518055,
proper electrode directions using a die bonder. In the final China. 4TCL China Star Optoelectronics Technology Co., Ltd. (CSOT),
step, the panel was moved to an oven chamber to perform Shenzhen 518132, China
the  reflow  process.  The  LBM  was  created  from
thermosetting  silica  gel  purchased  from  Tecore-Synchem Conflict of interest
The authors declare that they have no conflicts of interest.
Co., Ltd., Tianjin, China.
 

Supplementary information is available for this paper at [Link]

IJP of QD films 10.37188/lam.2022.036.
Both  types  of  scatter  ink  and  CdSe  QDs  were  obtained
from  Suzhou  Mesolight  Nanotech  Co.,  Ltd.  The  QD  inks Received: 24 November 2021 Revised: 17 May 2022 Accepted: 17 May 2022
used  were  acrylic  resin  (tetradecyl  acrylate,  ~75  wt%),  a Accepted article preview online: 19 May 2022
Published online: 06 June 2022
photoinitiator  (phenyl  bis(2,4,6-trimethylbenzoyl)-
phosphine  oxide,  10  wt%),  and  QDs  (~15  wt%).  The  QD
component  was  exchanged  with  TiO2  spheres  (diameter:
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