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ZERODUR SLIDES 2022-02-03 ZERODUR® Glass-Ceramic

ZERODUR is a lithium aluminum silicate glass ceramic characterized by its extremely low and stable coefficient of thermal expansion (CTE). It has a polycrystalline structure consisting of small crystallites within a residual glassy matrix. The CTE is measured using a high-precision dilatometer and can be classified into grades with tolerance ranges as tight as ±7 ppb/K. For applications with specific temperature profiles, the CTE over the profile temperature range is modeled rather than just the standard CTE(0°C, 50°C) measurement.

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0% found this document useful (0 votes)
77 views57 pages

ZERODUR SLIDES 2022-02-03 ZERODUR® Glass-Ceramic

ZERODUR is a lithium aluminum silicate glass ceramic characterized by its extremely low and stable coefficient of thermal expansion (CTE). It has a polycrystalline structure consisting of small crystallites within a residual glassy matrix. The CTE is measured using a high-precision dilatometer and can be classified into grades with tolerance ranges as tight as ±7 ppb/K. For applications with specific temperature profiles, the CTE over the profile temperature range is modeled rather than just the standard CTE(0°C, 50°C) measurement.

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© © All Rights Reserved
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You are on page 1/ 57

ZERODUR® glass-ceramic

Dr. Ralf Jedamzik, Dr. Janina Krieg


© SCHOTT AG, 03/02/2022
Structure of glass-ceramics

Crystal Glass-Ceramics Glass

© SCHOTT AG, 03/02/2022


Structure of glass-ceramics

 Macroscopically almost zero thermal expansion

 Quantified by Coefficient of Thermal Expansion (CTE)

© SCHOTT AG, 03/02/2022


ZERODUR® glass-ceramics

 Lithium-Aluminum-Silicate

 Polycrystalline phase ~80 vol.-%

 Mean length of crystallites 70-80 nm

100 nm

© SCHOTT AG, 03/02/2022


52 years of highest precision in six different industries

Astronomy Aviation IC Lithography

1968 1978 1996


Projects Industrialized
1972 1984 1998

https://microsites.schott.com/the-power-of-zerodur Metrology Space FPD Lithography

© SCHOTT AG, 03/02/2022


ZERODUR® development challenged by ambitious projects

Calar Alto METEOSAT VLT Chandra Aries LISA Pathfinder ELT

1968 1984 1996 1999 2009 2015 2017

4 m blank light weighting 8 m blank tube shape CTE < 5 ppb/K optical bench largest convex

© SCHOTT AG, 03/02/2022


ZERODUR® material production

Raw Material Melting Casting Hot Transport Annealing Raw Glass Ceramization CTE Metrology
Machining

© SCHOTT AG, 03/02/2022


ZERODUR® mirror substrate production

CNC Machining Metrology Technical Final Product Handling Packaging Shipping Application
Acceptance

© SCHOTT AG, 03/02/2022


Thermal expansion measurements

Design of SCHOTT’s dilatometer


Titanium-Silicate-
System
Furnace

Sample Pt-100

Measuring
head

Laser
interferometer

© SCHOTT AG, 03/02/2022


Sequence of thermal expansion measurements

1. Thermal expansion at two different temperatures 2. Calculation of Coefficient of Thermal Expansion (CTE)

dl/l value recorded

Thermal expansion (dl/l) [ppm]


50
T [°C]

CTE(0°C, 50°C) = 0.015 ppm/K


0
time
20 min 20 min 20 min
T [°C]

© SCHOTT AG, 03/02/2022


The CTE of ZERODUR® is measured with a push rod dilatometer:
High accuracy, small downtime

 optimized for CTE (0°C,50°C): measurement at 0°C and


50°C (holding time 20 minutes and cooling rate of 36K/h)
 sample size 100 x 6 x 6 mm
 Standard: inductive coil measurement head
 Improved: Interferometric measurement head
 Advanced: Linear Heidenhain encoder, monolithic setup

Accuracy Reproducibility (95%)


CTE(0°C, 50°C)
[ppb/K] [ppb/K]
Standard Design of improved dilatometer
± 10 ±5
Dilatometer
Improved
± 6.2 ± 1.2
Dilatometer
Advanced
±3 ±1
Dilatometer

© SCHOTT AG, 03/02/2022


Reproducibility of CTE(0°C,50°C) measurements

Results reference sample measurements


CTE deviation from mean [ppb/K]

 Weekly measurements

 Reproducibility of < 1 ppb/K in 280 days

 95% confidence interval

Time [days]

© SCHOTT AG, 03/02/2022 R. Jedamzik, R. Müller, P. Hartmann, “Homogeneity of the linear thermal expansion coefficient
of ZERODUR® measured with improved accuracy”, Proc. SPIE Vol. 6273 (2006)
Definition of CTE grades

100
ZERODUR® CTE Grades CTE(0°C, 50°C)
Expansion Class 2 ± 100 ppb/K

CTE Tolerance [ppb/K]


50 100
Expansion Class 1 ± 50 ppb/K
50
Expansion Class 0 ± 20 ppb/K 20 10 7
0
-20 -10 -7
Expansion Class 0 SPECIAL ± 10 ppb/K -50
Expansion Class 0 EXTREME ± 7 ppb/K -50 -100
Expansion Class ???
-100
EC 2 EC 1 EC 0 SPECIAL EXTREME

© SCHOTT AG, 03/02/2022


ZERODUR® is characterized by the Coefficient of Thermal Expansion

Thermal expansion for various samples Coefficient of thermal expansion CTE

6
CTE(0,50) = +0.021 ppm/K
5 CTE(0,50) = +0.010 ppm/K
CTE(0,50) = -0.003 ppm/K

CTE [ppm/K]
CTE(0,50) = -0.019 ppm/K
4
[ppm]
dl/ldl/l[ppm]

-1
-50 -40 -30 -20 -10 0 10 20 30 40 50
TT [°C]
[°C] T [°C]

© SCHOTT AG, 03/02/2022


What if a specific application temperature range is needed?

Temperature profile

Extremely Large Telescope on Cerro Armazones, Chile

Temperature [°C]
Time [h]
Image: ESO

© SCHOTT AG, 03/02/2022


What if a specific application temperature range is needed?

Temperature profile

Extremely Large Telescope on Cerro Armazones, Chile


Length change (∆l/l) [ppm]

Temperature [°C]
SPECIAL

Time [h]
Image: ESO

© SCHOTT AG, 03/02/2022


Modelling of the thermal expansion

CTE at a specific temperature CTE is measured as a function of temperature

CTE(0°C, 50°C) ≠ CTE (T)


Thermal expansion (dl/l) [ppm]

CTE [ppm/K]
CTE(T)

CTE(0°C, 50°C

T [°C] T [°C]

© SCHOTT AG, 03/02/2022


Modelling of the thermal expansion

1. Batch material parameters 3. Modelling thermal expansion dl/l(t)

Modell
2. Application temperature profile
T

12

11

10
T [°C]

0 2000 4000 6000 8000


t [min]

© SCHOTT AG, 03/02/2022


Modelling of the thermal expansion

1. Batch material parameters 3. Modelling thermal expansion dl/l(t)

0,05
dl/l
0,04 slope: +0.0025 ppm/K
0,03

0,02

0,01

dl/l [ppm]
0,00
Modell
-0,01

2. Application temperature profile -0,02

T -0,03
12
-0,04
11
-0,05
10 6 7 8 9 10 11 12
T [°C]

9 T [°C]
8

0 2000 4000 6000 8000


t [min]

© SCHOTT AG, 03/02/2022


ZERODUR® TAILORED

Temperature profile

Extremely Large Telescope on Cerro Armazones, Chile


Length change (∆l/l) [ppm]

Temperature [°C]
SPECIAL

Time [h]
Image: ESO

© SCHOTT AG, 03/02/2022


ZERODUR® TAILORED

Temperature profile

Extremely Large Telescope on Cerro Armazones, Chile


Length change (∆l/l) [ppm]

Temperature [°C]
TAILORED
SPECIAL

Time [h]
Image: ESO

© SCHOTT AG, 03/02/2022


Expansion classes

ZERODUR® CTE Grades CTE(0°C, 50°C)


Expansion Class 2 ± 100 ppb/K
Expansion Class 1 ± 50 ppb/K CTE (T, dT/dt)

Expansion Class 0 ± 20 ppb/K


Expansion Class 0 SPECIAL ± 10 ppb/K
Expansion Class 0 EXTREME ± 7 ppb/K
Optimized* for
Expansion Class TAILORED
application T-profile CTE(0°C, 50°C)
*ZERODUR® TAILORED accuracy of +/- 5 ppb/K achievable

Is there even more?

© SCHOTT AG, 03/02/2022


ZERODUR® TAILORED CRYO: optimized for low T

Thermal expansion with temperature Coefficient of thermal expansion CTE

0,3
80
0,2
70
ZERODUR Sample 1 0,1
60 ZERODUR Sample 2
ZERODUR TAILORED CRYO 0,0
50
-0,1
dl/l [ppm]

40

CTE [ppm/K]
-0,2
30 -0,3
20 -0,4
ZERODUR sample 1
10 -0,5 ZERODUR sample 2
ZERODUR TAILORED CRYO
0 -0,6
-10 -0,7
-20 -0,8
0 50 100 150 200 250 300 0 50 100 150 200 250 300
T [K] T [K]

© SCHOTT AG, 03/02/2022 * ZERODUR® sample 1, sample 2 and TAILORED CRYO measured by the PTB
(Physikalisch Technische Bundesanstalt, national standardization laboratory 2013/2014)
Expansion classes

ZERODUR® CTE Grades CTE(0°C, 50°C)


Expansion Class 2 ± 100 ppb/K
Expansion Class 1 ± 50 ppb/K
Expansion Class 0 ± 20 ppb/K
Expansion Class 0 SPECIAL ± 10 ppb/K
Expansion Class 0 EXTREME ± 7 ppb/K
Optimized for
Expansion Class TAILORED
application T-profile
Optimized for low T
Expansion Class TAILORED CRYO
applications

© SCHOTT AG, 03/02/2022


The CTE of ZERODUR® is measured with a push rod dilatometer:
High accuracy, small downtime

 optimized for CTE (0°C,50°C): measurement at 0°C and


50°C (holding time 20 minutes and cooling rate of 36K/h)
 sample size 100 x 6 x 6 mm
 Standard: inductive coil measurement head
 Improved: Interferometric measurement head
 Advanced: Linear Heidenhain encoder, monolithic setup

Accuracy Reproducibility (95%)


CTE(0°C, 50°C)
[ppb/K] [ppb/K]
Standard Design of improved dilatometer
± 10 ±5
Dilatometer
Improved
± 6.2 ± 1.2
Dilatometer
Advanced
±3 ±1
Dilatometer

© SCHOTT AG, 03/02/2022


ZERODUR® TAILORED

The CTE homogeneity is estimated from CTE measurement


of samples cut at the outer circumferential area of the blank

All CTE homogeneity evaluations


are based on CTE (0°C, 50°C)
measurements.

The CTE homogeneity is the


peak to valley (pv) CTE variation
of the samples measured.

Typically between 4 to 24
samples are taken for orders
evenly distributed around a blank
or near a center hole.

© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021
ZERODUR® TAILORED

25 years of excellent ZERODUR® CTE homogeneity:


Refinement of production process and improvement of CTE metrology

Dimensions of Mirror Number of samples CTE homogeneity CTE homogeneity


Project Dilatometer Completed
Blank [mm] per blank [ppb/K] specification [ppb/K]
4 blanks
VLT 122 50 < 28 Standard 1996
dia. 8200 x 177
43 segments
Keck I 1990
dia. 1900 x 76,5
18 20 21 (22% < 10) Standard
42 segments
Keck II 1993
dia. 1900 x 75,8
96 hexagons
HET 4 samples per casting 10 < 13 (85% < 10) Standard 1995
width 1019 x 56
GTC 42 hexagons
12 20 < 20 (60% < 10) Standard 2002
width 1622 x 83,5
VISTA dia. 4100 x 171 18 20 18 Standard 2003
SST dia. 3610 x 370 12 30 25 Standard 2005
ARIES dia. 3700 x 163 36 40 9 Improved 2009
Finnland dia. 3400 x 180 12 30 5 Improved 2010
DKIST dia. 4250 x 350 16 40 3 Improved 2014
IOE dia. 4060 x 103 16 20 7 Improved 2016
DAG dia. 4000 x 100 12 20 4 Advanced 2016
ELT M2 dia. 4250 x 100 16 20 5 Advanced 2019
ELT M3 dia. 4000 x 100 16 20 4 Advanced 2019
798 segments
ELT M1 6 10 <7 Advanced 2024
dia. 1520 x 50
10 ppb/K = 0.010*10-6 K-1 Ralf Jedamzik, Thomas Westerhoff, “Homogeneity of the coefficient of linear thermal expansion of ZERODUR: a review of a
decade of evaluations“, Proc. SPIE Vol. 10401 (2017)

© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021
The CTE homogeneity on blanks 1.5 m in diameter was determined by
cutting about 90 samples per blank.

Ralf Jedamzik, Peter Hartmann, Thomas Westerhoff,


„CTE homogeneity of ZERODUR® in the ELT century”,
Proc. SPIE. 11451 (2020)

© SCHOTT AG, 03/02/2022


ZERODUR® CTE Homogeneity on 1.5 m blanks has repeatedly been
determined in the single digit ppb / K level.

Blank 1 2006 Blank 2 2008 Blank 3 2019


blank 3, measurement from 2019
DCTE [ppb/K]
1,5
3,0
0,75
600 2,6
2,3
400 1,9
1,5 1,5
1,5 0,75
0,0
1,1
200
0,75
0,38

y [mm]
0,75 -2,3
-0,75 -1,5
0 0,0
-0,75 -0,38
0,75
1,5 -0,75
-200
-0,75 -1,1
2,3 1,5 -0,75
-1,5
-0,75
-400 0,750,0 -1,9
0,0 -2,3
-2,6
-600
-1,5 -0,75 -3,0

-600 -400 -200 0 200 400 600


x [mm]

CTE Homogeneity: 6.4 ppb/K CTE Homogeneity: 3.8 ppb/K CTE Homogeneity: 5.3 ppb/K

Ralf Jedamzik, Peter Hartmann, Thomas Westerhoff,


10 ppb/K = 0.010*10-6 K-1 „CTE homogeneity of ZERODUR® in the ELT century”, Proc. SPIE. 11451 (2020)

© SCHOTT AG, 03/02/2022


Very high CTE homogeneity for large rectangular castings: 5 ppb/K pv

Two dimensional contour plot of CTE data


measured with the Improved Dilatometer

64 samples, 1.2 m x 1.2 m casting

R. Jedamzik, C. Kunisch, J. Nieder, T. Westerhoff, “Glass ceramic ZERODUR enabling nanometer precision“,
Proc. SPIE Vol. 9052 (2014)

© SCHOTT AG, 03/02/2022


Small scale CTE Homogeneity of a ZERODUR® cube: 1.3 ppb/K pv !

100mm x 100mm x 100 mm 100 samples cut in a 10 x 10 matrix


Ralf Jedamzik, Thomas Westerhoff, “Homogeneity of the coefficient of linear thermal expansion of ZERODUR: a review of a decade of evaluations“,
Proc. SPIE Vol. 10401 (2017)

© SCHOTT AG, 03/02/2022


ESO’s ELT mirrors M1 to M4 ZERODUR®

are made from ZERODUR® –


CTE Homogeneity
in serial production

ZERODUR®

ZERODUR®
ZERODUR®

© SCHOTT AG, 03/02/2022


© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021
A homogeneity statistic on 90 ELT M1 blanks
shows single ppb/K CTE homogeneity

goal

Ralf Jedamzik, Peter Hartmann, Thomas Westerhoff,


„CTE homogeneity of ZERODUR® in the ELT century”, Proc. SPIE. 11451 (2020)

© SCHOTT AG, 03/02/2022


Single digit pv CTE homogeneity for 4m class blanks

© SCHOTT AG, 03/02/2022 34


Single digit pv CTE homogeneity for 4m class blanks

CTE CTE CTE


operational homogeneity axial gradient
[ppb/K] [ppb/K] [ppb/K]
ELT M2 -8 5 0.9
ELT M3 + 27 4 - 0.1

ESO ELT M2 and M3 with single ppb/K CTE homogeneity

© SCHOTT AG, 03/02/2022 35


ZERODUR® is machinable into various shapes and structures

 Dimensions: 10 mm – 4500 mm
 Mirror substrates
 Optical benches
 Laser cavities

© SCHOTT AG, 03/02/2022


ZERODUR® large curved surface processing

 Radii & aspheres


 Free-form surfaces
 Up to 4.5 m

© SCHOTT AG, 03/02/2022


ZERODUR® complex light-weighting

 Substrates up to 4.5m
 Various light-weighting designs
 Up to ~90% mass reduction

© SCHOTT AG, 03/02/2022


Significant investments in capacity & capabilities

Manufacturing Center since 2019 Large 3D CMM ZEISS MMZ-G since 2020

 Area ~ 5.000 m²  Room T stabilized to: max. 0.3 K/day


 T stabilization ± 1K  Maximum measurement range: 5 m x 6 m x 2 m
 Controlled environment: vibration, temperature  Archived accuracy: < 2.0 µm + L/2000 mm
 Up to 14 CNC machines (< 4.5 m diameter)

© SCHOTT AG, 03/02/2022


Metrology for large workpieces

Accredited by national standards Large 3D CMM ZEISS MMZ-G since 2020

12 E0,MPE = 4,0 +L/350


(given specification)
8
Deviation P-V in µm

0
800 1600 2400
-4

-8
E0,MPE = 2,0 +L/2000
(actual accuarcy incl. uncertainty)
-12
Length in mm

 Room T stabilized to: max. 0.3 K/day


 Maximum measurement range: 5 m x 6 m x 2 m
 Archived accuracy: < 2.0 µm + L/2000 mm

© SCHOTT AG, 03/02/2022


Tight front figure tolerances

Front Figure PV [µm]

80
4250 mm LASER TRACKER Measurement
70 Length measurement error:
15 µm + 6 * L/1000 (L in mm)
60

50

40
2560 mm 2700 mm 4250 mm 3D CMM Measurement expectation
30 Length measurement error:
2200 mm
3050 mm 4 µm + L/350 (L in mm)
20 935 mm
1500 mm
10
670 mm
376 mm
0
500 1.000 1.500 2.000 2.500 3.000 3.500 4.000 4.500
Diameter [mm]

© SCHOTT AG, 03/02/2022


Dimensions for light-weight structures
240 mm
200 mm
Pocket depth
125 mm
60 mm

300 m 700 mm 1200 mm 2500 mm


Diameter

© SCHOTT AG, 03/02/2022


Space-ready mirror substrates

Diameter: 1200 mm
Edge Thickness: 125 mm
Rib thickness: 2 mm
Light weighting factor: 88 %
Face sheet thickness: 8 mm
Weight: 45 kg
First Eigenfrequency: > 200 Hz
Front figure tolerance: < 15 µm

Passed thermal test confirming


NASA Technical Readiness Level (TRL) 6

© SCHOTT AG, 03/02/2022


Grinding generates micro cracks, called Sub-Surface Damage (SSD)

Diamond grains
Wheel
movement

FEPA (Federation of European Producers of Abrasives)

Diamond Standard Mesh width µm


coarse
D151 150 – 125
Lateral crack (Material removal)
D64 63 – 53
Vertical crack (SSD)
D46 45 – 38
D35 40 – 32
D25 30 – 20 fine

© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021 44
Q: When does glass break?
A: When tensile stress can grow micro cracks strongly in short time.

Tensile Stress
Roughness
Range: Rz ~20 µm

50 µm

Micro cracks in ZERODUR® from


grinding with bonded diamond grains
D151 with maximum size of 150 µm

 Bending strength of a component depends on the local maximum depth of the micro cracks.
 For homogeneously ground surfaces there is a global maximum crack depth.

© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021 45
The sub-surface damage depth dependence on the grain size and
tool/grinding geometry: Maximum SSD ~ Tool grain size

4
D151 wheel
Frequency [%]

Maximum SSD
wheel grinding
0
0 20 40 60 80 100 120 140 160 180 200
SSD [µm]

SSD depth strongly depends on the grinding parameters.


The results presented based on SCHOTT’s processes !

© SCHOTT AG, 03/02/2022


Precision grinding of mirror front figures down to < 15 µm minimizing
sub-surface damage is significantly reducing polishing time.

Aspherical mirror surface figure deviation of < 15 µm


achieved by CNC grinding on a 600 mm diameter
ZERODUR® blank and D25 grain (< 10-15 µm SSD).

Thomas Westerhoff, Thomas Werner, “Advances in ZERODUR manufacturing for space and ground based telescopes”
Proc. SPIE Vol. 10706- 25 (2018)

© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021
Statistical Approach: Breakage test on 100 x 100 x 6 mm samples

Stress increases with constant rate Area tested: 2.54 cm2


until breakage occurs Stress increase: 2 MPa/s

σ = σr t

Specimen Load ring


Load Ring

Ø 18
Ø 90 Support
Ring on Ring Setup
Support ring Ring
acc. EN 1288-5 R 45

 Sample sets between 50 to 150 samples


 Homogeneous and isotropic tensile stress field within the load ring area

© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021 48
With ground surfaces a bending strength of larger 40 MPa can be
achieved for short term loads

SiC320

SiC600
D151

D64
D46

D35

D25
Threshold breakage stress values for coarse D151 high SSD
ground surfaces extend from

Increasing strength
47 MPa to 69 MPa D64
for maximum grain sizes
between 20 µm and 150 µm D46
SiC320
D35
D25

fine SiC600 low SSD

How to further increase the strength?

But this is short time strength


for < 1 minute

20 30 40 50 60 70 80 90 Peter Hartmann, “Minimum lifetime of ZERODUR® structures based on the breakage


stress threshold model: a review
(OPEN ACCESS)”, Optical Engineering Vol. 58, Issue 2 (2019)

© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021 49
Acid etching increases the strength to values above 100 MPa

E181 = 181µm acid etching

Peter Hartmann, “Minimum lifetime of ZERODUR® structures based on the breakage


stress threshold model: a review
(OPEN ACCESS)”, Optical Engineering Vol. 58, Issue 2 (2019)

© SCHOTT AG, 03/02/2022


ZERODUR® components lifetime prediction based on 3-parameter
Weibull Statistic and stress corrosion coefficient

Peter Hartmann, "Minimum lifetime of


ZERODUR® structures based on the
breakage stress threshold model: a
review," Opt. Eng. 58(2) 020902 (9
February 2019)

© SCHOTT AG, 03/02/2022


ZERODUR® based components enable wafer-stepper for the production
of high performance computer chips for the digital age.

Length: 460 mm
Width: 420 mm
Thickness: 60 mm
Smartphone Data Center
Reticle Stage

Length: 450 mm
Width: 450 mm
Thickness: 80 mm
Wafer Stage IC Lithography Wafer Stepper Gaming 5G Network

Wafer diameter: 300 mm


Length: 850 mm
Scans / hour:
Width: 830 mm 26400
Thickness: 65 mm
Position accuracy: < 1.6 nm*
Alignment system Line distance: 10 – 20 nm Autonomous Driving Artificial Intelligence
* Nanometer = 10-9 m, equivalent to 1/50.000 diameter of a human hair

© SCHOTT AG, Dr. Janina Krieg, April 9th 2019


52
Today, 95% of Flat Panel Displays are produced with ZERODUR®
involved as crucial part of FPD Lithography process.

Television Smartphone
Diameter: 1500 mm
Thickness: 348 mm
Weight: 1200 kg

Mirror

Public Display Virtual Reality


Flat Panel Display Mask aligner
Length: 1100 mm
Width: 950 mm Glass sheet size: 2700 x 2300 mm2
Thickness: 480 mm
Scans / hour: 60 – 70
Weight: 700 kg
Position accuracy: ~ 500 nm*
Prism Line distance: 1500 nm
Automotive Smart Watch
* Nanometer = 10-9 m, equivalent to 1/50.000 diameter of a human hair

© SCHOTT AG, Dr. Janina Krieg, April 9th 2019


53
ZERODUR® allows for nanometer precision in mechanical engineering
and optics production metrology.

Length: 1800 – 3200 mm


Width: 75 – 150 mm
Thickness: 4 – 75 mm Mechanical Engineering 3D Metrology
Long bars

Length Scale

Flat Panel Display Prod. Computer Chip Prod.

Diameter: 150 – 800 mm


Thickness: 30 – 80 mm

Round blanks Interferometer Optical Metrology Material Metrology

© SCHOTT AG, Dr. Janina Krieg, April 9th 2019


54
ZERODUR® is designed into high-end and tactical Ring Laser Gyroscopes (RLG)
in Inertial Navigation Systems for various applications.

Ring Laser Gyroscope Inertial Navigation System

Commercial Defense

Space Drones

Mirror Prism
Emerging markets

Body

Autonomous Driving Robotic Ships


90-25 mm

© SCHOTT AG, Dr. Janina Krieg, April 9th 2019


ZERODUR® material properties enable highest optical performance for
space borne telescopes and earth observation.
Primary
Mirror

Secondary
Tertiary Mirror
Mirror

Diameter: 1200 mm Band pass filter and CCD Weather Astronomy


Thickness: 125 mm camera

Optical System for Satellite


Light weighted mirror

Surveillance Disaster Monitoring

Diameter: 700 mm
Thickness: 78 mm

Light weighted mirror Earth Observation Satellite Environmental Monitoring Optical Data Link

© SCHOTT AG, Dr. Janina Krieg, April 9th 2019


56
ZERODUR® is considered as the material of choice for monolithic and
segmented solar and astronomical telescope mirrors.

Diameter: 4260 mm DKIST 4.25 m, Hawaii KECK 2 x 10 m, Hawaii


Thickness: 80 mm
Daniel K. Inue Telescope
(DKIST) mirror substrate Monolithic Telescopes

ARIES 3.6 m, India GTC, 10.4 m, Canary Esp

Diameter: 1450 mm
Thickness: 50 mm

Segmented Telescopes VLT* 8.2 m, Chile ELT*, 39 m, Chile


*VLT: Very Large Telescope, ELT: Extremely Large Telescope; Monolithic Telescopes Segmented Telescopes

© SCHOTT AG, Dr. Janina Krieg, April 9th 2019


57

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