ZERODUR SLIDES 2022-02-03 ZERODUR® Glass-Ceramic
ZERODUR SLIDES 2022-02-03 ZERODUR® Glass-Ceramic
Lithium-Aluminum-Silicate
100 nm
4 m blank light weighting 8 m blank tube shape CTE < 5 ppb/K optical bench largest convex
Raw Material Melting Casting Hot Transport Annealing Raw Glass Ceramization CTE Metrology
Machining
CNC Machining Metrology Technical Final Product Handling Packaging Shipping Application
Acceptance
Sample Pt-100
Measuring
head
Laser
interferometer
1. Thermal expansion at two different temperatures 2. Calculation of Coefficient of Thermal Expansion (CTE)
Weekly measurements
Time [days]
© SCHOTT AG, 03/02/2022 R. Jedamzik, R. Müller, P. Hartmann, “Homogeneity of the linear thermal expansion coefficient
of ZERODUR® measured with improved accuracy”, Proc. SPIE Vol. 6273 (2006)
Definition of CTE grades
100
ZERODUR® CTE Grades CTE(0°C, 50°C)
Expansion Class 2 ± 100 ppb/K
6
CTE(0,50) = +0.021 ppm/K
5 CTE(0,50) = +0.010 ppm/K
CTE(0,50) = -0.003 ppm/K
CTE [ppm/K]
CTE(0,50) = -0.019 ppm/K
4
[ppm]
dl/ldl/l[ppm]
-1
-50 -40 -30 -20 -10 0 10 20 30 40 50
TT [°C]
[°C] T [°C]
Temperature profile
Temperature [°C]
Time [h]
Image: ESO
Temperature profile
Temperature [°C]
SPECIAL
Time [h]
Image: ESO
CTE [ppm/K]
CTE(T)
CTE(0°C, 50°C
T [°C] T [°C]
Modell
2. Application temperature profile
T
12
11
10
T [°C]
0,05
dl/l
0,04 slope: +0.0025 ppm/K
0,03
0,02
0,01
dl/l [ppm]
0,00
Modell
-0,01
T -0,03
12
-0,04
11
-0,05
10 6 7 8 9 10 11 12
T [°C]
9 T [°C]
8
Temperature profile
Temperature [°C]
SPECIAL
Time [h]
Image: ESO
Temperature profile
Temperature [°C]
TAILORED
SPECIAL
Time [h]
Image: ESO
0,3
80
0,2
70
ZERODUR Sample 1 0,1
60 ZERODUR Sample 2
ZERODUR TAILORED CRYO 0,0
50
-0,1
dl/l [ppm]
40
CTE [ppm/K]
-0,2
30 -0,3
20 -0,4
ZERODUR sample 1
10 -0,5 ZERODUR sample 2
ZERODUR TAILORED CRYO
0 -0,6
-10 -0,7
-20 -0,8
0 50 100 150 200 250 300 0 50 100 150 200 250 300
T [K] T [K]
© SCHOTT AG, 03/02/2022 * ZERODUR® sample 1, sample 2 and TAILORED CRYO measured by the PTB
(Physikalisch Technische Bundesanstalt, national standardization laboratory 2013/2014)
Expansion classes
Typically between 4 to 24
samples are taken for orders
evenly distributed around a blank
or near a center hole.
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021
ZERODUR® TAILORED
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021
The CTE homogeneity on blanks 1.5 m in diameter was determined by
cutting about 90 samples per blank.
y [mm]
0,75 -2,3
-0,75 -1,5
0 0,0
-0,75 -0,38
0,75
1,5 -0,75
-200
-0,75 -1,1
2,3 1,5 -0,75
-1,5
-0,75
-400 0,750,0 -1,9
0,0 -2,3
-2,6
-600
-1,5 -0,75 -3,0
CTE Homogeneity: 6.4 ppb/K CTE Homogeneity: 3.8 ppb/K CTE Homogeneity: 5.3 ppb/K
R. Jedamzik, C. Kunisch, J. Nieder, T. Westerhoff, “Glass ceramic ZERODUR enabling nanometer precision“,
Proc. SPIE Vol. 9052 (2014)
ZERODUR®
ZERODUR®
ZERODUR®
goal
Dimensions: 10 mm – 4500 mm
Mirror substrates
Optical benches
Laser cavities
Substrates up to 4.5m
Various light-weighting designs
Up to ~90% mass reduction
Manufacturing Center since 2019 Large 3D CMM ZEISS MMZ-G since 2020
0
800 1600 2400
-4
-8
E0,MPE = 2,0 +L/2000
(actual accuarcy incl. uncertainty)
-12
Length in mm
80
4250 mm LASER TRACKER Measurement
70 Length measurement error:
15 µm + 6 * L/1000 (L in mm)
60
50
40
2560 mm 2700 mm 4250 mm 3D CMM Measurement expectation
30 Length measurement error:
2200 mm
3050 mm 4 µm + L/350 (L in mm)
20 935 mm
1500 mm
10
670 mm
376 mm
0
500 1.000 1.500 2.000 2.500 3.000 3.500 4.000 4.500
Diameter [mm]
Diameter: 1200 mm
Edge Thickness: 125 mm
Rib thickness: 2 mm
Light weighting factor: 88 %
Face sheet thickness: 8 mm
Weight: 45 kg
First Eigenfrequency: > 200 Hz
Front figure tolerance: < 15 µm
Diamond grains
Wheel
movement
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021 44
Q: When does glass break?
A: When tensile stress can grow micro cracks strongly in short time.
Tensile Stress
Roughness
Range: Rz ~20 µm
50 µm
Bending strength of a component depends on the local maximum depth of the micro cracks.
For homogeneously ground surfaces there is a global maximum crack depth.
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021 45
The sub-surface damage depth dependence on the grain size and
tool/grinding geometry: Maximum SSD ~ Tool grain size
4
D151 wheel
Frequency [%]
Maximum SSD
wheel grinding
0
0 20 40 60 80 100 120 140 160 180 200
SSD [µm]
Thomas Westerhoff, Thomas Werner, “Advances in ZERODUR manufacturing for space and ground based telescopes”
Proc. SPIE Vol. 10706- 25 (2018)
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021
Statistical Approach: Breakage test on 100 x 100 x 6 mm samples
σ = σr t
Ø 18
Ø 90 Support
Ring on Ring Setup
Support ring Ring
acc. EN 1288-5 R 45
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021 48
With ground surfaces a bending strength of larger 40 MPa can be
achieved for short term loads
SiC320
SiC600
D151
D64
D46
D35
D25
Threshold breakage stress values for coarse D151 high SSD
ground surfaces extend from
Increasing strength
47 MPa to 69 MPa D64
for maximum grain sizes
between 20 µm and 150 µm D46
SiC320
D35
D25
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021 49
Acid etching increases the strength to values above 100 MPa
Length: 460 mm
Width: 420 mm
Thickness: 60 mm
Smartphone Data Center
Reticle Stage
Length: 450 mm
Width: 450 mm
Thickness: 80 mm
Wafer Stage IC Lithography Wafer Stepper Gaming 5G Network
Television Smartphone
Diameter: 1500 mm
Thickness: 348 mm
Weight: 1200 kg
Mirror
Length Scale
Commercial Defense
Space Drones
Mirror Prism
Emerging markets
Body
Secondary
Tertiary Mirror
Mirror
Diameter: 700 mm
Thickness: 78 mm
Light weighted mirror Earth Observation Satellite Environmental Monitoring Optical Data Link
Diameter: 1450 mm
Thickness: 50 mm