Center for Nano Science and Technology, National Taiwan University
SPEC
TYPE TITLE REV. PAGE
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SP 2000
205021700 1.0 1 OF 4
Work Instruction Introduction to SP 2000 Interferometer
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1.0
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205021700
Center for Nano Science and Technology, National Taiwan University
SPEC
TYPE TITLE REV. PAGE
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SP 2000
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Work Instruction Introduction to SP 2000 Interferometer
SP 2000
2.0
SP 2000
3.0
4.0
SIOS SP 2000
5.0
Interferometer
6.0
SIOS
SP 2000
2003/08
7.0
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205021700
Center for Nano Science and Technology, National Taiwan University
SPEC
TYPE TITLE REV. PAGE
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SP 2000
205021700 1.0 3 OF 4
Work Instruction Introduction to SP 2000 Interferometer
He-Ne
8.0
2000mm
1.24nm
632.8nm
2 × 10 −8
10-20 min
15-30
600mm/s
RS 232 C
USB 1.0
Alignment 115*90mm
Fixture
USB
software INFAS NTC
The information contained in this document is the exclusive property of the Center for Nano Science and Technology in
National Taiwan University. Neither this document nor any part may be reproduced or transmitted in any form or by any
means without prior permission in writing.
205021700
Center for Nano Science and Technology, National Taiwan University
SPEC
TYPE TITLE REV. PAGE
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SP 2000
205021700 1.0 4 OF 4
Work Instruction Introduction to SP 2000 Interferometer
9.0
E-mail
(02)23671691 0926161602 R92522605@[Link]
(02)23671691 0933708964 R91522601@[Link]
10.0
User’s guide—Model SP 120/500/2000 Miniature
Plane-Mirror Interferometers
Software Documentation—INFAS NTC
The information contained in this document is the exclusive property of the Center for Nano Science and Technology in
National Taiwan University. Neither this document nor any part may be reproduced or transmitted in any form or by any
means without prior permission in writing.
205021700
