Mass Flow Meters

TopTrak 822S/824S
for Corrosive and
Toxic Gases
FEATURES

n D
 irect monitoring of mass flow rate eliminates need
for ancillary pressure and temperature sensing
n S tainless-steel flow body accommodates most
corrosive and toxic gas applications
n D
 igital display of mass flow rate on flow body or in
remote version for panel mounting
n E lectronic output of mass flow rate for control or
data-logging
n L arge, straight sensor tube reduces contamination
and maintenance down-time
n P latinum sensor eliminates zero drift and ensures DESCRIPTION
long-term repeatability
n P rimary standard calibration ensures starting point
S
ierra Instruments' TopTrak™ 820S is designed
accuracy and NIST traceability for precise measurement of any process gas in
n CE Approved ranges from 0 to 10 sccm to 0 to 500 slpm. Because
all wetted materials are 316 stainless steel, the
device accommodates most clean gases, including
corrosives.
®

The 820S measures and displays the mass flow

rate directly in any user defined gas mass units.
The instrument display is tiltable over 180° for easy
viewing and can be removed for remote panel
mounting. A 0 to 5 VDC or 4 to 20 mA linearly output
signal proportional to gas mass flow rate is provided
for recording, data-logging or control.

TopTrak's outstanding accuracy is a function of a

high-stability platinum flow sensor. This sensor has
been continuously tested for over two years. The
maximum deviation (drift) during that time was less
than 0.5%. The sensor's large internal diameter
also prevents the clogging and contamination often
associated with capillary type thermal mass flow
meters.

TopTrak's broad range of sizes, electronics, process

connections and input/output options provide
flexibility, versatility and ultimately, the ideal
instrument package for your specific application.

w w w. s i e r r a i n s t r u m e n t s . c o m
The information contained herein is subject to
change without notice.
2 LOW FLOW BODY MEDIUM FLOW BODY HIGH FLOW BODY

FLOW RANGE FLOW RANGE, slm FLOW RANGE, slm

0 to 10 sccm 0 to 15 slm 0 to 15 0 to 100 0 to 100 0 to 500
Process .25 or .375 .25 or .375 Process .375 or .5 .50
Process Tubing (6.4 or 9.5) (6.4 or 9.5) Tubing (9.5 or 12.7) (12.7)
.25 (6.4) .25 (6.4)
Tubing

Fitting Type, .562-18 Thread(1) Fitting Type, .562-18 Thread(1) Fitting Type, .75-16 Thread(1)
Compression VCO VCR Compression VCO VCR Compression VCO VCR
.125 or .25 (male) (male) .25 or .375 (male) (male) .375 or .50 (male) (male)
.25 .25 .25 or .25 or .375 .375
.375 .375
4.84 or 5.0
4.60 4.90 5.81 or 6.13 or 11.89 or 12.17 11.75 12.19
Dim. L (122.9 or Dim. L
(116.8) (124.5) 6.27 or 6.39 6.25 6.43 (302 or 309.1) (298.5) (309.6)
127.0)
Dim. L (159.3 or (147.6 (155.7
Note: (1) Metric fittings are available, consult factory. 162.3) or or
158.8) 163.3)

Model 820S—Side View Model 820S—Side View Model 820S—Side View

1.25 1.25
(31.8) (31.8)
4.23
4.23 (107.4)
(107.4) 5.67
5.21 (144.0) 1.45
9.15
(132.3) 6.66 (36.8)
4.47
4.01 (113.5) (232.4)
(101.9) without display (169.2)
without display

L
L
L

Model 820S—Bottom View Model 820S—Bottom View Model 820S—Bottom View

(A) M6, 2PL

thread depth 0.15 (B) M6, 2PL
(B) 8-32, 2PL
(A) M4x0.7 1.00 (A) 10-34, 2PL
(B) 8-32
(25.40)
A B
B A 2.00
B A (50.80)
B A
A B A B
.13
3.0 2.00 .22
2.750 .12 .750 1.9 2.00 (76.2) (50.80)
(3.3) (69.85) (3.0) (19.1) .23 (5.6)
3.00
(48.3) (50.80) (5.8) 9.75
(76.20)
4.25 (247.7)
(108.0)

Model 820S—Outlet View Model 820S—Outlet View Model 820S—Outlet View

1.13 1.13
(28.7) (28.7)
1.13
(28.7)

.73
.49 (18.5)
(12.4)
.98 1.45 2.44
(24.9) (36.8) (62.0)
.49 .73
(12.4) (18.5) 1.22
1.58 (31.0) 1.22
(40.1) 2.44 (31.0)
2.05 1.45 (62.0)
(52.1) (36.8)

All dimensions are inches. Millimeters are in parentheses. Certified drawings are available on request.
 PERFORMANCE SPECIFICATIONS Mass Flow Rates 3

Accuracy 0 to 10 sccm to 0 to 500 slpm; flow ranges specified are for

an equivalent flow of nitrogen at 760 mm Hg and 21°C (70°F);
±1.5% of full scale under calibration conditions including
other ranges in otherunits are available (e.g., scfh or nm3/h)
linearity over 15° to 25°C and 5 to 60 psia (0.3 to 4 bara)
If the meter is mounted with a vertical (up or down) flow Gas Pressure
path the folowing accuracy de-rating applies: 500 psig (34 barg) maximum
30 psig (2 barg) optimum

Gas & Ambient Temperature

Operating Pressure
32 to 122°F (0 to 50°C)
Inlet Pressure
50 psig 100 psig 150 psig
Deviation2 Leak Integrity
5 X 10-9 atm cc/sec of helium maximum
± 1.5% of ± 1.5% of ± 1.5% of
± 1 psig
full scale full scale full scale Power Requirements
12 to 15 VDC, 15 VDC nominal, 100 mA maximum
± 5.3% of full 24 VDC optional, specify when ordering
± 3.8% of ± 4.5% of
± 5 psig scale
full scale full scale
Output Signal
± 6% of ± 7.5% of ± 9% of full Linear 0–5 VDC, 1000 ohms minimum load resistance
± 10 psig Linear 4–20 mA, 500 ohms maximum loop resistance
full scale full scale scale

Notes: (1) Do not exceed 150 psig. (2) Difference between inlet Display (optional)
pressure and calibrated pressure. Do not exceed ± 10 psig. 3.5 digit LCD (0.6 in H)
PHYSICAL SPECIFICATIONS
Repeatability
± 0.5% of full scale Wetted Materials
Temperature Coefficient 316 stainless steel, Viton® “O”-rings standard
0.08% of full scale per °F (0.15% of full scale per °C), or better Neoprene® and 4079 Kalrez® “0”-rings optional

Pressure Coefficient Options

0.01% of full scale per psi (0.15% of full scale per bar) or better See “Price List” for available CE options

Response Time
800 ms time constant; six seconds (typical) to within ± 2% of ® Viton, Neoprene, Kalrez, and Teflon are registered trademarks of DuPont.
final value over 25 to 100% of full scale

OPERATING SPECIFICATIONS
Gases
Most gases; check compatibility with wetted materials;
specify when ordering

PRESSURE DROP ACROSS THE 820S

Flow Meter Flow rate psi Mbar
Meter Fittings (inch) 1/4 3/8 1/2 1/4 3/8 1/2
820S 100 sccm .005 n/a n/a .309 n/a n/a
820S 500 sccm ,006 n/a n/a .440 n/a n/a
820S 1 slpm .006 n/a n/a .475 n/a n/a
820S 15 slpm .11 .06 n/a 7.59 4.0 n/a
820S 20 slpm .08 .03 n/a 5.50 2.0 n/a
820S 50 slpm n/a .3 .10 n/a 20.4 6.8
820S 100 slpm 2,0 .85 .30 136 58 20.4
820S 200 slpm n/a 2.50 2.00 n/a 170 136
820S 500 slpm n/a n/a 8.5 n/a n/a 578
4 ORDERING THE 822S/824S
Features Option

- - - - - - - - -
Parent 1 2 3 4 5 1 2 3 4
Instructions: To order a 822S/824S please fill in each number block by selecting the codes from the corresponding features below and following pages.

Parent Number
822S Top-Trak® Mass Flow Meter with Display. Flow body and sensor constructed of 316 stainless steel, Viton® "O"-rings. 3.5 digit LCD display. Linear,
0-5 VDC output signal; input power 12-15 VDC. 9 Pin "D" mating connector and 1/4-inch fitting. Calibrated for flow ranges from 0-10 sccm to
0-500 slpm equivalent nitrogen flow; 1.5% full scale accuracy; maximum temperature 122°F (50°C); maximum pressure 500 psig (34.5 barg) for
horizontal orientation; maximum pressure 150 psig (10.3 barg) for vertical orientation. CE Approved.
824S Top-Trak® Mass Flow Meter. Same as above with no display.

Feature 1: Flow Body* Feature 2: Fittings

L 822S-L with display (0-10 sccm up to 0-15 slpm) 1 1/8-inch compression. For low flow bodies (maximum 5 slpm)
L 824S-L without local display (0-10 sccm up to 0-15 slpm) 2 1/4-inch compression. For low and medium flow bodies
M 822S-M with display (0-15 slpm up to 0-100 slpm) (maximum 50 slpm)
(also see M100M) 3 3/8-inch compression. For low, medium and high flow bodies
M 824S-M without local display (0-15 slpm up to 0-100 slpm) (maximum 300 slpm)

H 822S-H with display (0-100 slpm up to 0-500 slpm)

4 1/2-inch compression. For medium and high flow bodies
(also see M100H) 5 1/4-inch VCO. For low and medium flow bodies (maximum 50 slpm)
H 824S-H without local display (0-100 slpm up to 0-500 slpm) 6 1/2-inch VCO. For low and medium flow bodies

Note: All Slpm Flow Ranges Also Available In Nlpm 7 1/2-inch VCO. For high flow bodies. (maximum 300 slpm)

Feature 3: Elastomers 8 1/4-inch VCR. For low and medium flow bodies (maximum 50 slpm)
OV1 Viton . For low, medium and high flow bodies
®
9 1/2-inch VCR. For low, medium and high flow bodies
10 6 mm compression. For low and medium flow bodies (maximum 50 slpm)
Feature 4: Input Power Feature 5: Output Signal 11 10 mm compression. For medium and high flow bodies
PV1 12-15 VDC V1 0-5 VDC, linear 12 12 mm compression. For medium and high flow bodies
V4 4-20 mA, linear 13 1/4-inch FNPT adapter bushing. For low and medium flow bodies
14 3/8-FNPT. For low and med flow bodies only.
Option 1: Special Cals
HP* High pressure calibration.
Option 3: O2 Cleaning
100-500 psig maximum (6.9-34.5 barg)
02C O2 Cleaning. Includes certification. Product cleaned for O2 service.
MP Medium pressure calibration.
Inspected with ultra-violet light, double-bagged prior to shipment.
40-100 psig (2.8-6.9 barg)
LF Low Flow calibration. Required for 0-20 sccm full scale
flow range or less Option 4: Display
* Maximum pressure 150 psig (10.3 barg) for vertical flow orientation. RD ( ) Remote Display. Maximum 100 feet available on Models 822S. Specify
cable length in parentheses, $1 per foot. Instruments ordered with
Option 2: Certificates remote display are not CE compliant
MC Material certificates--US Mill certs on all wetted
Note: Accessories must be entered as separate line items on your order.
flow body parts
CC Certificate of conformance

Sierra Instruments
North America EMEA Asia
20 Ryan Ranch Rd, Suite 109 Bijlmansweid 2 Second Floor Building 5 • Senpu Industrial Park • 25 Hangdu
Monterey, California 93940 1934RE Egmond aan den Hoef • The Netherlands Road Hangtou Town • Pu Dong New District • Shanghai, P.R.
+1.831.373.0200 • [Link] +31 72 5071400 China 201316 • +8621 5879 8521/22 822/824 J 12/24