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Thermal annealing effect on ZnO surface acoustic wave-based ultraviolet light sensors on glass substrates
Appl. Phys. Lett. (May 2014)
Chi Zhang,1,2,3 Huiling Ong,1 Hamdi Torun,1 Jikai Zhang,1 Luke Haworth,1 Nicholas L. Theodorou,1
1 4 4 1
Prashant Agrawal, Weipeng Xuan, Jinkai Chen, Dengmu Cheng, Jikui Luo,2,3,a)
and Yong-Qing Fu1,a)
AFFILIATIONS
1
Faculty of Engineering and Environment, Northumbria University, Newcastle upon Tyne NE1 8ST, UK
2
College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
3
International Joint Innovation Center, Zhejiang University, Haining 314400, China
4
College of Electronics & Information, Hangzhou Dianzi University, Hangzhou, China
a)
Authors to whom correspondence should be addressed: [email protected] and [email protected]
Appl. Phys. Rev. 12, 021402 (2025); doi: 10.1063/5.0241048 12, 021402-1
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lot of attention due to its advantages such as simple structure, low de-fogging, and sensing of ice and fog formation without mutual inter-
manufacturing cost, high sensitivity, wireless, and non-contact detec- ferences, avoiding the requirement of additional precision sensors for
tion. The mechanism of microwave sensing is to monitor the fre- fog and ice monitoring, simplifying the design of ice protection
quency responses of the microwave resonator. For example, Wiltshire system.
et al.16 reported an ice sensing system based on a split-ring resonator
II. DESIGN AND PRINCIPLE OF THE INTEGRATED
(SRR), which is a type of planar microwave resonator. Shah et al.17
PLATFORM
recently developed a smart ice detection and removal system utilizing
multi-frequency microwave SRR sensors for location-specific ice sens- A. Design of the integrated platform
ing. The SRR structures were one of the first examples of electromag- Figures 1(a) and 1(b) show the conceptual diagrams and experi-
netic metamaterials which are commonly circular or rectangular rings mental setup of the proposed integrated platform, which consists of a
with one or multiple splits. The geometry of these structures deter- loop antenna connected to a vector network analyzer (VNA) and a
mines their resonant frequencies, and they exhibit high-quality factors SAW device made on a ZnO/glass substrate for sensing. Details of the
exceeding several hundred in microwave frequencies.18 When they deposition process of the ZnO films and fabrication process of the
were used for ice sensing applications, the scattering parameters of the SAW device are provided in the supplementary material. The antenna
devices were measured for detecting the accumulation or melting of was used to generate the electromagnetic field which excites the IDT
ice.16 Similarly, Niksan et al. reported real-time wireless monitoring of configuration-based EMS, and was fabricated using the copper wire
ice by employing an SRR array with a sensing distance up to 33 cm.14 with a diameter of 0.1 mm wound into a circular loop with a diameter
Many active and passive methods have been proposed to prevent of 2.25 cm. To protect the antenna from external environmental inter-
or remove the hazards caused by the accumulation of fog and ice. ference, it was placed within a rectangular box with the top cover
Methods for removal of fogging mainly include resistance heating and thickness of 0.5 mm, made using a 3D printer. The SAW device was
accelerating air circulation or increasing evaporation rate of condensed placed on top of the box at the center position as shown in Fig. 1.
water on the surface of the structures,19,20 whereas most de-icing meth- A signal generator (Aim TTi, TG5011A) was used to produce RF
ods include mechanical deformation/vibration, electrothermal, and signals, which were amplified using a power amplifier (Amplifier
photothermal ones.21,22 However, these methods have shortages of Research, Model 75A250) to drive the SAW device. In the anti-fogging
either large power consumption and low efficiency, or complex proc- and de-fogging experiments, the fogging on the IDT electrode was cre-
essing procedures, defects, pollution, degradation and/or damage to
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They were then placed on the IDT electrode of the SAW device.
Additionally, another type of de-icing experiment was conducted by
placing the SAW device on a refrigeration plate in a cold chamber. A
K-type thermocouple (RS PRO, Type K Exposed Junction) was placed
on the surface of the SAW device to monitor the surface temperature.
Appl. Phys. Rev. 12, 021402 (2025); doi: 10.1063/5.0241048 12, 021402-3
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where Leff and Ceff are the effective inductance and capacitance of the to the gap area or the permittivity of the object changes, a larger fre-
structure, respectively, and mainly determined by the shape and size of quency shift of fEMS2 will occur. On the other hand, the frequency sig-
the IDT electrode. Additionally, the permittivity of the material sur- nal of fEMS3 is more sensitive to attachment (fog or ice) in the IDT
rounding the IDT electrode significantly affects the value of Ceff. region. Since the IDT region has a higher vibration amplitude (tens to
Therefore, the frequency fEMS will be changed as fog or ice is formed hundreds of pm) as compared to areas outside of the IDTs when the
on the surface of the IDT layer. Circulating currents can also be SAW device is supplied with an RF power, it is considered more effec-
induced by electric field component applied parallel or perpendicular tive for removing fog or ice in this area.21 Therefore, fEMS3 was used as
to the IDT fingers, often called the electrically coupled resonance. a sensing parameter to monitor the fog and ice accumulation in this
Fundamental and higher order resonances can be obtained by moni- study, and the metamaterial was designed to have working frequencies
toring scattering parameters (in particular, the S11 reflection spec- ranging from 2 to 8 GHz.
trum) of the loop antenna using the VNA. From the S11 spectrum,
III. EXPERIMENTAL RESULTS AND DISCUSSION
individual dips corresponding to different resonant frequencies and
environmental changes can be monitored by detecting the shift in the A. Fog monitoring and prevention
resonant frequencies. Fog monitoring capability and de-fogging/anti-fogging perfor-
Figure 2(d) presents the simulation and experimental results of mance of the integrated platform were first investigated, which was
the S11 spectra of the metamaterial devices. The simulation was per- conducted at room temperature (20 C). To investigate the fog moni-
formed using the commercial electromagnetic simulation software, toring capability, the nebulizer was turned on, and the generated water
CST Studio Suite. As shown in Fig. 2(d), there are two distinct reflec- aerosols were deposited onto the surface of the SAW device to create a
tion dips corresponding to the resonant frequencies, at layer of condensate. Figure 3(a) shows images of the SAW device’s sur-
fEMS2 ¼ 2.86 GHz and fEMS3 ¼ 3.31 GHz, respectively. The charge dis- faces taken at different stages, where the air flow rate of the nebulizer
tributions on the device surface at these two resonant frequencies are was set to be 8 l/min. Here, the power and air velocity of the nebulizer
illustrated in Figs. 2(e) and 2(f). At 2.86 GHz, the induced current were set to be their maximum values. The volume of water droplets
forms a loop around the hollow area of the IDT layer (i.e., the area condensed on the surface of the SAW device gradually increased dur-
between the pad and IDT). In contrast, at 3.31 GHz, the induced cur- ing the fog generation process. The measured S11 values of the loop
rent path is symmetric along the symmetrical axis of the IDT electrode. antenna at different durations are shown in Fig. 3(b), which reveals
Similar to the findings reported in our previous work,32 the frequency
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larger than that of air (eair ¼ 1);38 therefore, the effective capacitance of study, the nebulizer was turned on for 35 s and then was turned off,
the IDT structure increases with the increase in condensate, resulting allowing a certain amount of condensation water (estimated to be
in a decrease in fEMS3. Figure 3(c) shows the relationship between the 10–25 ll) to be deposited on the surface of the SAW device. After 15 s,
frequency shift of fEMS3 (i.e., DfEMS3) and time at different flow the signal generator and power amplifier were turned on for de-
rates of humid air. As the flow rate of humid air was increased, fogging, with the output power of the power amplifier set to be 1.9 W.
which was controlled by the nebuliser, the rate of the frequency Figure 4(a) shows the photos of the SAW device taken at different
shift was increased. This is because a higher flow rate leads to a stages of the de-fogging process. When the SAW device was powered
faster accumulation rate of condensate. The increasing rates of on, the condensate in the left IDT region (i.e., on the device’s side close
fEMS3, with the humid air flow rates of 8 and 4 l/min, were calcu- to the pad) was evaporated first, which is probably because of the
lated to be 0.8 and 0.2 MHz/s, respectively. higher current flowing through the left IDT.
Anti-fogging performance of the integrated platform was then Figure 4(b) shows the S11 spectra of the loop antenna measured
investigated by activating the nebulizer to create fog, and simulta- at different stages of the de-fogging process, revealing that the reflec-
neously the signal generator and power amplifier were switched on to tion dips are shifted to the higher frequency region as the condensate
generate SAWs. Here, the air velocity of the nebulizer was set to be on the device surface was removed. Figure 4(c) shows the DfEMS3 val-
8 l/min. Figure 3(d) shows the dependence of DfEMS3 with time as the ues as a function of time as the RF signal power was increased from
RF signal power was increased from 0 to 1.9 W. The decreasing rate of 0.36 to 1.9 W. It is clearly seen that after the nebulizer was turned on
fEMS3 was reduced when the RF signal power was applied, and the for 35 s, the value of fEMS3 was decreased by about 35 MHz. After the
larger the RF signal power applied, the more significant the rate of SAW power was switched on, the frequency quickly returned to its ini-
decrease. As mentioned earlier, the combined effects of acousto- tial value. The time required for the de-fogging process was shown to
thermal, acoustic streaming, and mechanical vibration effects pre- decrease as the amplitude of the RF signal was increased. When the
vented the accumulation of fog generation, accelerating the removal or RF signal power was 1.9 W, the required de-fogging time was
evaporation of fog and moisture condensation on the surface of the 61 s. However, when the SAW power was decreased to 0.36 W, it
SAW device. took 152 s to complete the de-fogging process. It was also found
that during the de-fogging process, the frequency shift of fEMS3 was
initially increased rapidly but then increased slowly, which was
B. De-fogging more pronounced when the RF signal power was relatively high.
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spraying, the maximum change was increased to 1.42 MHz. When the of the RF signal and temperature on the sensing performance of
change was increased to a certain value, the frequency of fEMS3 could the integrated platform were minimal.
not be used to reliably detect the condensation water content on the
surface of the SAW device.
To study the effects of the RF signal and temperature on the D. Ice monitoring and de-icing functions
fog sensing performance of the integrated platform, the signal gen- Two sets of experiments were conducted to evaluate the capabil-
erator and power amplifier were turned on for 50 s while keeping ity of the integrated platform for ice monitoring and de-icing. In the
the nebulizer turned off. Figures 5(c) and 5(d) show the depen- first set of experiments, frozen ice droplets with different sizes were
dence of DfEMS3 and the surface temperature of the SAW device as first prepared in the cold chamber and then transferred onto the sur-
a function of time when the RF signal powers were set at 1.5 and face of the SAW device. Here, the experimental setup used was the
3 W, respectively. The results indicated that the temperature of the same as that shown in Fig. 1(b), and the room temperature was 20 C.
SAW device was quickly increased (from 20 to 45 C for 3 W RF A micropipette was used to place droplets with volumes of 1.3, 2.0, 3.3,
signal power and from 20 to 31 C for 1.5 W RF signal power) after and 5.0 ll on a cooling plate, the temperature of which was set to be
the RF signal was applied. The higher the power of the RF signal, 16 C. After the droplet was frozen, we then moved the ice crystals
the faster the temperature increased. However, except for slight onto the surface of the SAW device.
fluctuations of DfEMS3 when the power amplifier was turned on or The relative permittivity of ice is 3.2,15 whereas that of water is
off, there was no significant dependence of DfEMS3 on temperature. 42
80. When ice melts into water, the effective capacitance of the IDT
The fluctuations were mainly caused by the ambient mechanical structure and substrate increases drastically due to the rise in permit-
vibrations when the switch was turned on or by pulsed currents tivity, resulting in a decrease in resonant frequency of DfEMS3. Figure
due to the switching state being switched off. Therefore, the effects 6(a) illustrates the relationship between DfEMS3 and time as the ice
FIG. 6. Ice monitoring and de-icing: (a) the relationship between DfEMS3 and time when ice droplet of different volumes melts naturally, (b) the frequency shift of fEMS3 as a func-
tion of time with different RF signal power, (c) the DfEMS3–t curves when the droplet melted naturally and when the power amplifier was turned on during the droplet melting pro-
cess. (d) and (e) The photos of the ice droplet at different times during the natural melting process of droplet and the de-icing progress, respectively.
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crystals of different volumes melted naturally. The results indicated rate of the resonant frequency during the natural melting of ice droplet
that the resonant frequency shift gradually decreased during the ice was calculated to be 0.43 MHz/s (from t ¼ 20 s to t ¼ 60 s), whereas
melting process and eventually stabilized. The total change in DfEMS3 with an RF signal of 1.9 W, the decrease rate was increased to
was increased with the volume of the ice droplet, demonstrating that 1.84 MHz/s (from t ¼ 35 s to t ¼ 40 s).
the sensing system can distinguish between ice and water. In the second set of experiments, the SAW device was fixed on a
For de-icing, the RF signal with a frequency of f ¼ 9.88 MHz was cooling plate, and the loop antenna was placed directly above the SAW
applied to the SAW device for generating the de-icing effect. device, as shown in Fig. 7(a). Both the antenna and SAW device were
Simultaneously, we tracked the changes of resonant frequency fEMS3 placed inside a square box with a size of 40 40 40 cm3. To mini-
induced by the IDT configuration to monitor ice melting status. Figure mize the influences of ice melting on the antenna, a smaller SAW
6(b) shows the recorded DfEMS3–t plot when the RF signal to SAW res- device with an acoustic resonance frequency of 40 MHz was used,
onator was set at 0, 0.36, 0.95, and 1.9 W, respectively. It is evident that where the IDT wavelength was k ¼ 64 lm, and the dimensions were
the rate of decrease in fEMS3 increased with the RF signal power. L1 ¼ 3 mm, L2 ¼ 1.5 mm, L3 ¼ 3.8 mm, W1 ¼ 5.6 mm, W2 ¼ 0.5 mm,
Moreover, in the case where the SAW device was powered by an and g ¼ 0.8 mm.
amplified RF signal, the total decrease in fEMS3 was greater than that A water droplet of 5 ll was put onto the IDT area of the SAW
observed during the natural melting of ice droplet. We observed that device using a pipette, and then the cooling plate was turned on. After
when the RF signal power exceeds 0.95 W, the DfEMS3–t curves bend the water was frozen, the signal generator and amplifier were then
upwards after reaching their lowest point. This was because the melted switched on. The effect of ice temperature on the de-icing effect of sur-
water began to evaporate after spreading over the surface of the SAW face acoustic waves was investigated. The RF signal power was fixed at
device. Figures 6(d) and 6(e) show photographs of the ice droplet, 0.95 W, and the temperatures of the cooling plate were set to be 3.8,
taken at different durations during the natural melting process of 9.8, 12, and 16 C, respectively. Figure 7(b) shows the DfEMS3–t
droplet [corresponding to the blue curve in Fig. 6(b)] and the melting curves obtained at different temperatures. The results indicate that
process of droplet when the RF signal was 1.9 W [corresponding to the lower ice temperatures resulted in longer de-icing times, which is
yellow curve in Fig. 6(b)]. expected since ice at lower temperatures requires more energy to melt.
Figure 6(c) presents a comparison of DfEMS3–t curves between Figure 7(c) shows the dependence of DfEMS3 on time at different RF
the natural melting of droplet (blue curve) and the melting process of signal power levels, with the cooling plate temperature fixed at
droplet when the power amplifier was turned on (red curve). In the 16 C. As clearly shown in this figure, the lower RF signal power
FIG. 7. Ice monitoring and de-icing: (a) experimental setup for de-icing process, (b) the dependence of DfEMS3 on time at different ice temperatures with the RF signal power
set at 0.95 W, (c) the DfEMS3–t curves at different RF signal power with the temperature of the cooling plate set at 16 C, (d) the results of periodic de-icing tests when the RF
signal power is 3.21 and 0.95 W, (e) the dependence of the surface temperature of the SAW device and fEMS3 on time under different RF signal power, and (f) dependence of
the surface temperature of the SAW device and fEMS3 vs time for the SAW device applied with a power of 5.78 W.
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TABLE I. Comparative analysis of our integrated device with existing de-icing devices.
Specific energy/
De-icing method power requirements Energy consumption/savings Additional notes
turned on for 20 s and then turned off for 40 s, repeated cyclically for surface of the SAW device. When the RF signal was applied, the melt-
4 min. The cooling plate’s temperature was maintained at 16 C. The ing of this rime ice led to a decrease in DfEMS3.
results obtained showed that DfEMS3 was decreased as the ice was The periodic variations of temperatures and resonant frequen-
melted and returned to the initial value when the melted water was cies of DfEMS3 as a function of time are shown in Fig. 7(f). Although
refrozen, demonstrating the effectiveness of the EMS in distinguishing the DfEMS3 values were varied periodically with temperature changes
between ice and water. Additionally, for the same de-icing duration, a when there was no droplet on the surface of the SAW device, the
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surface of the device affected the change of resonant frequency, which DATA AVAILABILITY
was increased when the droplets were frozen, and vice versa. On the The data that support the findings of this study are available from
other hand, when the IDTs were used in conjunction with the piezo- the corresponding authors upon reasonable request.
electric thin film as an actuator (SAW device), the platform could be
effectively used for de-icing. Effects of different volumes of the ice
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