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SEM
Scanning Electron
Microscope
Alfarih Faza 1506736934
Fitria Yunita 1506669974
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• Introductions
Outlines • History of SEM
• Construction of SEM
• Example Product of SEM
• Example Appllications of SEM
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SEM or Scanning Electron Microscope is a powerful
imaging technique by using electron instead of light
Introductions The principle is based on the wave particle duality of
matter
The ability to resolve small objects depends on a
wavelength smaller.
The wavelength of an electron accelerated
through 10 eV is 0.388 nm, 1000 times
smaller than that of violet light.
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1932 1935 1937
First invention by Max Knoll present a Manfred von Ardenne
History of SEM McMullan Photo with 50 mm field- invented a True
width showing Microscope with High
Channeling Constrast by magnification
the use of electron beam
scanner
1942 1965
Zworykin’s Group Cambridge Scientific
developed The First SEM Instrument as
“Stereoscan” who had
first commercialized
SEM
Construction of SEM
• Electron Gun (Filament)
• Condenser Lenses
• Objective Aperture
• Scan Coils (Deflection Coils)
• Chamber (specimen test)
• Detectors
• Computer Hardware & Software
[Link]
Electron Gun (Filament)
The filament is heated by giving a voltage
around 0-6,3 V as heater voltage.
The anode positioned in front of the
filament is given a high voltage around
100-5000V as the Acceleration Voltage,
the electron from the filament will be
accelerated to the anode.
[Link]
[Link]/elektronenbahnen/en/kanone/klassis
ch/[Link] The process is done in a Vacuum.
Condenser Lenses
The Condenser lenses which is used
in SEM aren’t made of Glass called
“Electromagnetic Lenses”
Similar to glass lenses in optical
microscopes, its role is to
demagnify the source of electrons
to form a much smaller diameter
probe incident of the sample.
[Link]
m/site/itfinalkmitl/mai
n-component-in-sem
Objective Aperture
• Diameter of the aperture can be
varied.
• Control the number of electrons
which reach the sample.
• Control the final convergence
angle of the electron beam onto
the sample which hence
determines the depth of field.
[Link]
Scan Coils (Deflection Coils)
[Link]
• The scanning coils consist of two solenoids oriented in such a way as to create two
magnetic fields perpendicular to each other.
• Varying the current in one solenoid causes the electron to move left to right (X+ and X-)
• Varying the current in the other solenoids forces these electrons to move upwards and
downwards (Y+ and Y-)
Chamber (Specimen Test)
• The chamber is a place where all of main
component of SEM (except computer) and the
sample is placed
• The sample chamber must be insulated from
vibration to produce clear image
• The chamber must in vacuum to avoiding
electron from electron gun from colliding with
a gas inside the chamber
• The chamber have a pipe and vacuum pump
outside the chamber to fills out gas inside the
chamber
[Link]
ng+electron+microscope+(SEM)
Detectors
When the electron has scanning the sample by hitting the sample, the electron will be
backscattered. The backscattered electron is detected by the detectors called
backscattered electron detectors (BSE). The detector’s signal is amplified by the amplifier
before the signal is processed by computer.
Computer Hardware and Software
Computer is used to process the
signal from SEM Backscattered
Electron Detectors (BSE). The
Computer will be visualizing and
displaying the surface of the
sample.
Example Product of SEM
Nikon JCM-6000 Plus
Main Features:
Automatic image formation after sample introduction
within 3 minutes
High resolution (60,000X) and large depth of field
Multi-touch screen interface for intuitive operation
Advance automatic functions (focus, stigmation,
brightness/contrast) Sources: [Link]
gb/product/jcm-6000-plus-neoscope
High and low vacuum modes
Three selectable accelerating voltages
Secondary electron and solid state backscattered
electron detector
Large sample coverage (up to 70 mm diameter)
Options include: motor drive stage and EDS
Example Product of SEM
• Main Specifications:
Example Applications of SEM
• Materials, Biological, Medical
Sciences
• Semiconductor inspection
• Forensic investigation
• Soil and rock sampling
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Thanks!
Any questions?
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References ○ [Link]
cope+(SEM)
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components/
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[Link]/elektronenbahnen/en/kanone/klassisch/[Link]
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