本人刚刚接触matlab,对这些运算不是很懂 计算ni的位置(exp(-E_g./(2.*k.*T))+eps)这个值之前一直是0 加了eps后就有结果显示了 后面部分exp((alfa.*T)./(2.*k.*(T+beita)))一直为无穷大然后结果就为Nan 不知道怎么解决 求大神帮忙
q = 1.602*10^(-19);
k = 1.38*10^(-23);
fai_msf = -0.08;
fai_msb = 0.17;
kexi_Si = 1.05*10^(-12);
kexi_ox = 3.45*10^(-13);
d_fox = 10^(-6);
d_box = 3.8*10^(-5);
d_Si = 3*10^(-5);
%ni = 1.45*10^10;
Dn = 34;
%ni = 1.45*10^10;
%fai_f = 0.29;
fai_T = 0.026;
N_a = 10^15;
N_d = 10^20;
tao = 10^(-7);
s_0 = 10^4;
s_dSi = 10^4;
y = 10^(-7);
Q_oxf = 3*10^10*q;
Q_oxb = 10^10*q;
Q_dep = -q*N_a*d_Si;
Q_sb = 0;
V_BG = 0;
V_A = -1;
V_GK = 0.4;
E_g = 1.21;
alfa = 4.73*10^(-4);
beita = 636;
T = 250:10:350;
ni=3.39.*10^15.*T.^(3/2).*(exp(-E_g./(2.*k.*T))+eps).*exp((alfa.*T)./(2.*k.*(T+beita)));
fai_f = (k.*T./q).*log(N_a./ni);
fai_sb = fai_f;
C_Si = kexi_Si./d_Si;
C_ox = kexi_ox./d_fox;
C_box = kexi_ox./d_box;
A = -fai_msf+Q_oxf/C_ox+Q_dep/(2*C_ox)-(C_Si/C_ox)*(C_box./(C_box+C_Si))*(fai_msb-Q_oxb./C_box-Q_dep./(2*C_box));
B = 1+C_Si./C_ox-(C_Si./C_ox)*(C_box./(C_box+C_Si))*(C_Si./C_box);
C = V_BG-fai_msb+Q_oxb./C_box;
D = C_Si/C_box;
E = Q_dep/(2*C_box);
F = 1+C_Si/C_box;
G = q*N_a*y^2/(2*kexi_Si);
H = (q*N_a*d_Si)/(2*kexi_Si);
fai_sf = (V_GK+A)./B;
fai_sb = (C+D*fai_sf+E)/F;
fai_y = G+((fai_sf-fai_sb)./d_Si-H).*y+fai_sf;
% fai_sf1 = (V_GK2+A)./B;
% fai_sb1 = (C+D*fai_sf1+E)/F;
% fai_y1 = G+((fai_sf1-fai_sb1)./d_Si-H).*y+fai_sf1;
% n_VGK2 = ni*exp((fai_y1-fai_f)/fai_T);
n_y = ni.*exp((fai_y-fai_f)./fai_T);
p_y = ni./exp((fai_y-fai_f)/fai_T);
V_D = fai_T.*log(p_y.*N_d./(ni.^2));
V_D1 = fai_T.*log(N_d.*n_y/(ni.^2));
V_D0 = fai_T.*log(N_a.*N_d./(ni.^2));
V_D10 = fai_T*log(N_d/N_a);
fai_N = (V_D0+V_D10)/2-V_A;
V_A1 = -(fai_N-(fai_y-fai_f)-V_D);
Ld = (2.*kexi_Si.*(V_D-V_A1).*(N_a+N_d)./(q.*N_a.*N_d)).^(0.5);
xp = (2.*kexi_Si.*(V_D-V_A1).*N_d./(q.*N_a.*(N_a+N_d))).^(0.5);
L_d1 = (2.*kexi_Si.*(V_D+(1+V_A1)).*(N_a+N_d)/(q.*N_a.*N_d)).^(0.5);
xp1 = (2.*kexi_Si.*(V_D+(1-V_A1)).*N_d/(q.*N_a.*(N_a+N_d))).^(0.5);
tao_eff = 1/(p_y/(tao*ni)+(s_0+s_dSi)/d_Si);
% tao_eff = tao*ni/p_y;
Ln = (Dn*tao_eff)^(0.5);
L = 2*10^(-3);
L1 = L-xp-xp1;
x = 0:L1/100:L1;
nx = (N_d*exp(q*V_A1/(k*T))-n_y)*sinh(x/Ln)/sinh(L1/Ln)+n_y;
Jnx = q*Dn*(N_d*exp(q*V_A1/(k*T))-n_y)*cosh(x/Ln)/(sinh(L1/Ln)*Ln);
figure(1),plot(x,nx);
figure(2),plot(x,Jnx);