Thin Films and Spin Coating
Presented by Mallikarjunachari.G (AM12D005) email: [email protected] Department of Applied Mechanics
Indian Institute of Technology, Madras
Chennai - 600036
21 June 2012
Thin Films and Spin coating
Outline of Presentation:
Classification of Films Applications of Thin Films Spin Coating for Polymer Thin Films Modeling of spin coating Objective
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Mallikarjunachari.G
Date:
2/16
Thin Films and Spin coating
Outline of Presentation:
Classification of Films Applications of Thin Films Spin Coating for Polymer Thin Films Modeling of spin coating Objective
Size Material
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Mallikarjunachari.G
Date:
3/16
Thin Films and Spin coating Classification Applications
Spin coating
Modelling
Objective
Classification of Thin Films Based on material Thickness
Thick films Thin films Ultra thin films t > 300 nm 100 < t < 300 nm t < 100 nm
t film
substrate
Thin film: size reduction of bulk material in one direction
Single layer N=1
Aluminium
Multi layer N>1
Material 1 Material 2 Material 3 Material 4
substrate
substrate
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Mallikarjunachari.G
Date:
4/16
Thin Films and Spin coating Classification Applications
Spin coating
Modelling
Objective
Based on material type
Material type
Metal Eg: Al, Cu
Ceramic
Polymer Eg: PMMA, Epoxy resin
Eg: ZnO, ITO
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Mallikarjunachari.G
Date:
5/16
Thin Films and Spin coating
Outline of Presentation:
Classification of Films Applications of Thin Films Spin Coating for Polymer Thin Films Modeling of spin coating Objective
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Mallikarjunachari.G
Date:
6/16
Thin Films and Spin coating Classification Applications
Spin coating
Modelling
Objective
Applications
Electronic Components Electronic Displays Optical Coatings
Magnetic Films for data storage
Optical data storage devices
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Mallikarjunachari.G
Date:
7/16
Thin Films and Spin coating
Outline of Presentation:
Classification of Films Applications of Thin Films Spin Coating for Polymer Thin Films Modeling of spin coating Objective
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Mallikarjunachari.G
Date:
8/16
Thin Films and Spin coating Classification Applications
Spin coating
Modelling
Objective
Schematic Representation of spin coating
Spin 150 Single substrate spin processor
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Mallikarjunachari.G
Date:
9/16
Thin Films and Spin coating
Outline of Presentation:
Classification of Films Applications of Thin Films Spin Coating for Polymer Thin Films Modeling of spin coating Objective
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Mallikarjunachari.G
Date:
10/16
Thin Films and Spin coating Classification Applications
Spin coating
Modelling
Objective
Modeling of spin coating
Key stages:
Deposition
>0
Step 1
Spin - up
= 0
Step 2
Spin - off
Step 3
Evaporation
Step 4
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Mallikarjunachari.G
Date:
11/16
Thin Films and Spin coating Classification Applications
Spin coating
Modelling
Objective
Modeling of spin coating
Film Thickness
Film Thickness
Spin Speed
Spin Time
Thickness Uniformity
Film Thickness
Exhaust Volume
1 2 3 4 5 6 7 8 9 10 11 12 13 14
Exhaust Volume
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Mallikarjunachari.G
Date:
12/16
Thin Films and Spin coating
Outline of Presentation:
Classification of Films Applications of Thin Films Spin Coating for Polymer Thin Films Modeling of spin coating Objective
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Mallikarjunachari.G
Date:
13/16
Thin Films and Spin coating Classification Applications
Spin coating
Modelling
Objective
Objective:
Adhesion: A challenge for concrete repair
Substrate Coating Material Polymer
Cement
Clay
Water
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Mallikarjunachari.G
Date:
14/16
Thin Films and Spin coating Classification Applications
Spin coating
Modelling
Objective
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Mallikarjunachari.G
Date:
15/16
Thin Films and Spin coating Classification Applications
Spin coating
Modelling
Objective
Thank You
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Mallikarjunachari.G
Date:
16/16