EEL5225: Principles of MEMS Transducers

Principles of MEMS Transducers

Huikai Xie Department of Electrical Engineering University of Florida

8/23/2004

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Introduction and Orientation

Agenda:

Introduction Syllabus MEMS

Orientation

Next time: Reading: Senturia, pp. 1-14.

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EEL5225: Principles of MEMS Transducers

Introduction

Instructor: Prof. Huikai Xie

Dept. of Electrical and Computer Engineering Office: Email: 221 Benton Hall [email protected]

Office hours: 10:40am-12:00pm MWF

TA: Hongwei Qu ([email protected]) Office hours: TBA

Guest Instructors: Prof. Toshi Nishida ([email protected]) Prof. Mark Sheplak ([email protected])

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EEL5225: Principles of MEMS Transducers

Syllabus (1)
1. 2. 3.
4.

COURSE TITLE: INSTRUCTOR:

Principles of MEMS Transducers Dr. Huikai Xie; 221 Benton; 846-0441; [email protected]

TEXTBOOK: Stephen D. Senturia, Microsystem Design (Kluwer Academic Publishers, Boston, 2001) WWW site: http://www.mems.ece.ufl.edu/EEL5225 SOFTWARE: Coventorware, PSPICE, Matlab HOMEWORK: Homework problems will be assigned on a weekly or biweekly basis. It's OK to talk about the class and the assignments with your friends. It's not OK to just copy their work. Cheating and plagiarism will be punished according to UF's standard procedures. Late homework is only accepted with permission of instructor, and will be graded with a 20% reduction per day. GRADING: 20% Homework, 40% 2 Tests, 40% Design Project
Tentative schedule for the two tests: Test 1 (10/6); Test 2 (11/17) 50 minutes for each test, closed-book, one formula sheet allowed.

5. 6.

7.

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Syllabus (2)

Goals: To analyze and design MEMS transducers utilizing principles of sensing and actuation, properties of materials available for fabrication, microfabrication technologies, and understanding of circuit and system issues, packaging, calibration, and test. Topics: Introduction and Orientation (1) Sensors and Actuators Technologies (1) Fabrication Technology, Part I (2) Fabrication Technology, Part II (4) Transduction Mechanisms (7) Modeling (6) Dynamics (2) Interface Circuits for Sensors (5) Case Studies (8)

Accelerometer Pressure sensor Microbridge gas sensor

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Syllabus (3)
REFERENCES:

Books 1. G. Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill,1998. 2. M. Madou, Fundamentals of Microfabrication, 2nd ed., CRC Press, 2002. 3. N. Maluf, An Introduction to Microelectromechanical Systems Engineering, Artech House, 2000. Journals 1. IEEE/ASME Journal of Microelectromechanical Systems (JMEMS) 2. Sensors & Actuators 3. IEEE Sensors Journal 4. Journal of Micromechanics and Microengineering (JMM) Conferences 1. IEEE MEMS conference 2. Solid-State Sensors and Actuators workshop (Hilton Head) 3. Transducers 4. IEEE Sensors conference 5. IEEE/LEOS Optical MEMS conference 6. SPIE MEMS clearinghouse: http://www.memsnet.org
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What is MEMS?

Micro-electro-mechanical Systems (MEMS) US

Implies electrical component or functionality Implies mechanical component or functionality

Microsystems or Microsystems Technology (MST) Europe

Very small systems Systems made of small components

No specific bias on functionality or manufacturing method

Micromachines Japan In practice, MEMS applies to broader functional groups (electrical, mechanical, thermal, magnetic, fluidic, optical, chemical etc.)
Making miniature sensors and actuators Involving almost every discipline Leveraging the existing IC technology Enabling technology for many emerging markets

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What is MEMS? -- Applications

Biosensors Micro-pumps, needles, Lab-on-chip Gyroscopes, Accelerometers Micro propulsion systems

Ink-jet nozzles Displays Data storage

Chemical sensors Micro fluidics Mass spectroscopy Inertial sensors Gas sensors Pressure, liquid level,
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Micromirrors All-optical switches Microphones Microspeakers

EEL5225: Principles of MEMS Transducers

What is MEMS?
Some statistics
The MEMS industry was a $2-5 billion industry in 2000, expected to reach $8-15 billion by 2004 Today 1.6 MEMS devices per person in the US 5 devices per person by 2004 Over 70% of MEMS companies were founded between 1995 and 2001, with an average of 10 MEMS companies per year founded in the past three years.
Source: the MEMS Industry Group (http: //www.memsindustrygroup.org)

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What is MEMS? -- Markets

Source: http://www.memsindustrygroup.org

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What is MEMS? -- Markets

2002

2007

Source: http://www.memsindustrygroup.org

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What is MEMS? -- Technology

Bulk micromachining Surface micromachining
structural layer Wet etch Substrate Sacrificial layer

DRIE Micromotor

www.bco-technologies.com DRIE: deep reactive ion etch

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www.mit.edu

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EEL5225: Principles of MEMS Transducers

Renowned MEMS Devices

Micromirror arrays for compact projectors Accelerometers for automotive Micromirrors for optical switching Many others

microstructures

Texas Instruments Digital Micromirror Device

Analog Devices Accelerometer

Lucent Technologys 2D micromirror for optical switch

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Manufacturing--Methods

Microfabrication + Micromachining Microfabrication

Borrowed from silicon integrated circuit fabrication > 40 years of collective equipment and process experience Key processes:
Pattern Transfer (Etching) Impurity Doping Heat Treatment (Annealing) Layer Deposition

Lithography

Contact Projection

Wet Dry (Plasma, RIE)

Ion implant Solid source

Furnace RTA

Physical Chemical

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Manufacturing--Methods

Microfabrication + Micromachining Micromachining

Specialized techniques for fabricating mechanical structures May not be compatible with standard CMOS processing Key processes:
Bulk Micromachining Surface Micromachining MicroElectroDischarge Machining

Wafer Bonding

LIGA

Laser Ablation

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Manufacturing--Materials

Microfabrication

Single-crystalline silicon (starting wafer substrate) AND silicon dioxide, silicon nitride, polycrystalline silicon, aluminum, tungsten, copper Same + Micromachine-application specific materials Example: Lead zirconate titanate (PZT) for piezoelectric applications Example: Self-assembled monolayers for chemical sensing

Micromachining

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Project

The class will be divided into design teams. A design project will be assigned to each design team. Information given to each design team: Project Scope and Design Specifications. Literature review First order design

Design a process flow and mask set that produces a sensor with the desired specifications. Design a more complete model that takes into account important factors that may affect the accuracy of the results. Develop a control circuit for the sensor. Develop a packaging solution Analyze the effect of the package on the sensor specifications.

Second order design

Control

Packaging

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Project

Design deliverables:

Literature review (Due September 27)

Literature review report with bibliography (one per design team)

First order design review

First order design presentation (5 minutes per design team) (10/25) First order design report (one per design team) (10/22) Statement of individual contributions Elements: cover page, table of contents, project scope, design specifications, literature review, first order design, and summary.

Final design project summary

Final design project summary presentation (15 minutes per design team) (12/6, 12/8) Final design project technical report (one per design team) (Due December 14) Statement of individual contributions Elements: cover page, table of contents, project scope, design specifications, literature review, first order design, second order design, control, packaging, and summary.

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Survey
EEL5225 Principles of MEMS Transducers Fall 2004 Semester (3th Period, MWF, LAR 239) Participant Survey: Name:_____________________________________ Email Address: ______________________________ Department:_________________________________ Office: _________________ Office phone: _________________ Standing: Undergraduate Graduate Faculty/staff Registered ?: (Yes/No) (Note: Students must be registered for course) If graduate student, indicate graduate advisor(s):_______________ (or not applicable) and current degree program (MS or PhD) Please describe your area of interest in MEMS or sensors and actuators including expectations for this course. (Please use the back of this page if necessary.)
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