J. Pure Appl. & Ind. Phys. Vol.
3 (3), 205-210 (2013)
Modelling and Simulation of Thermal Actuator Using
Polysilicon Material
GIRIJA. M. NIMBAL, S. V. HALSE, NAZIYA, FIRDOUS G.,
SUVARNA.V and B. JYOTI
Karnataka State Womens University Bijapur, INDIA.
(Received on: June 20, 2013)
ABSTRACT
Electro-thermal micro actuators that operate by virtue of
constrained thermal expansion induced by Joule heating have
recently received considerable attention. We use electro-thermal
actuation to create monolithic compliant devices with embedded
actuation in which the actuator and the
mechanism are
indistinguishable. These devices can be made at micro (micron
size) or meson (hundreds of iron stone a millimetre size) scales
using any conducting material. The scaling effects on these
devices, and also present a comparative study of essential and
natural boundary conditions used in the thermal analysis. This
present paper consists of a two thermal actuator made of
polysilicon. The actuator is activated through thermal expansion.
The temperature increase required to deform the two actuators,
and thus displace the actuator is obtained through Joule heating.
The greater expansion of the actuator arms, compared to the
another arm, causes a bending of the actuator. The material
properties of polysilicon are temperature dependent, which means
that the involved physics phenomena are fully coupled. The
electric current through the another arms increases the temperature
in the actuator, which in turn causes thermal expansion and
changes the electrical conductivity of the material.
Keywords: MEMS, Thermal Actuator, Comsol Multiphysics.
INTRODUCTION
The operating principle of electrothermal micro actuators is the constrained
thermal expansion of a flexible continuum of
material as a result of Joule heating.
Recently, these actuators have received
considerable attention1-7. A micro-actuator is
Journal of Pure Applied and Industrial Physics Vol.3, Issue 3, 1 July, 2013, Pages (193-228)
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Girija M. Nimbal, et al., J. Pure Appl. & Ind. Phys. Vol.3 (3), 205-210 (2013)
the key device for micro-systems to perform
physical functions. Micro- mechanical
actuators have become the hallmark of
micro-electro mechanical systems (MEMS)
since their inception about thirty years ago.
The actuation principles that have been used
piezo-electric2,
are
electrostatic1,
electromagnetic3, electro-thermal4,5, thermopneumatic6, electrochemical7, electro- and
magnetostrictive, shape memory and mass
transport effects. Large displacements (more
than 20 m) and large forces (more than 40
mN) made the electro-thermal actuation one
of the most popular actuation mechanisms.
The electro thermal actuators are designed
by
the
solution
of
thermo-elastic
deformation and heat transfer problem.
Many authors have solved the heat transfer
problem analytically, we consider that the
beam has no internal heat sources and the
radiation is neglected. Here the convection
heat transfer coefficient h is unit form on all
the surfaces, and the physical properties
thermal conductivity k, specific heat at
constant pressure Cp, density is constant.
The length l is considered sufficiently larger
than the height a and the width b to neglect
the variation of the temperature T along axes
y and z. consequently.
MODEL GEOMETRY
Fig.1 Geometric Model of Thermal Actuator
All three arms are mechanically
fixed at the base of the three anchors. The
dimples can move freely in the plane of the
substrate (the xy-plane in the figure) but do
not move in the direction perpendicular to
the substrate (the z direction). The
temperature of the base of the three anchors
and the three dimples is fixed to that of the
substrates constant temperature. Because
the structure is sandwiched, all other
boundaries interact thermally with the
surroundings by conduction through thin
layers of air. The heat transfer coefficient is
given by the thermal conductivity of air
divided by the distance to the surrounding
surfaces for the system. This exercise uses
Journal of Pure Applied and Industrial Physics Vol.3, Issue 3, 1 July, 2013, Pages (193-228)
Girija M. Nimbal, et al., J. Pure Appl. & Ind. Phys. Vol.3 (3), 205-210 (2013)
different heat transfer coefficients for the
actuators upper and other surfaces. In this
paper attempt has been made to calculate
and simulate deformation in thermal actuator
for different geometry.
Polysilicon is
selected as material for the substrate. The
material properties of the polisilicon
accounted are youngs modulus (163GPa),
Poissons ratio (0.22) density (=
2330Kgm3). The analytical equation used to
calculate for thermal actuator is given by
equation (1)
(1)
Cp utrans.T= .(k.T) +Q
207
MESH
The figure shows the deformation of
thermal actuator in comsol multiphysics top
of the portion where voltage is applied and is
separated by grounded actuator by gap of
2m is shown in 2. The element size of the
parameters are maximum element size is
1.32E-5, Minimum element size 96E-7,
Maximum element Growth rate 1.4,
Resolution of curvature 0.4 Resolution of
narrow regions 0.7 and the mesh element has
5670.
Fig.2 Thermal actuator mesh
MODELLING IN COMSOL:
The present paper shows the how
the thermal actuator using different applied
voltage which gives different Temperature is
observed respect temperature. Is shown in
figure 3. Applied Voltage and Temperature.
Figure 4 shows the electric potential of slice.
Figure .3: Applied Voltage and Temperature
Journal of Pure Applied and Industrial Physics Vol.3, Issue 3, 1 July, 2013, Pages (193-228)
208
Girija M. Nimbal, et al., J. Pure Appl. & Ind. Phys. Vol.3 (3), 205-210 (2013)
Figure 4: Electric potential for Slice
RESULTS
The result part shows the how the applied voltage increasing then temperature is
increased is shown in below figures.
Journal of Pure Applied and Industrial Physics Vol.3, Issue 3, 1 July, 2013, Pages (193-228)
Girija M. Nimbal, et al., J. Pure Appl. & Ind. Phys. Vol.3 (3), 205-210 (2013)
CONCLUSION
The temperature increase required to
deform the two actuators, and thus displace
the actuator is obtained through Joule
heating. The greater expansion of the
209
actuator arms, compared to the another arm,
causes a bending of the actuator. The
material properties of polysilicon are
temperature dependent, which means that
the involved physics phenomena are fully
coupled. The electric current through other
Journal of Pure Applied and Industrial Physics Vol.3, Issue 3, 1 July, 2013, Pages (193-228)
210
Girija M. Nimbal, et al., J. Pure Appl. & Ind. Phys. Vol.3 (3), 205-210 (2013)
arms increases the temperature in the
actuator, which in turn causes thermal
expansion and changes the electrical
conductivity of the material. The micro
actuator is subjected to controlled thermal
expansion by applying a voltage through
parts of the structure which induces joule
heating of the parts. The external expansion
causes the actuation to deflect.
The
simulation predicts the deflection as a
function of the operating conditions for
different designs.
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Journal of Pure Applied and Industrial Physics Vol.3, Issue 3, 1 July, 2013, Pages (193-228)
