Tunnel Current in Mim System PDF
Tunnel Current in Mim System PDF
nn tt m
m dd tt .. cc oo m
m
E∞
where
∞ ∞
1
n( p z ) =
4π 3h 3 ∫ ∫ f ( E )(1 − f
−∞−∞
1 2 ( E + eV ))dp x dp y (2)
∞
where ϕ – average barrier height relative to Fermi
m
= ∫ f ( E )(1 − f ( E + eV ))dEr z2
1
2π 2 h 3 ∫ φ ( z )dz ;
1 2
level of the negative electrode; φ =
0
δz z1
(3) 2m
A = 2β , β – dimensionless factor defined in
h2
Substituting (3) in (1), we obtain
the Appendix (A6).
E∞ ∞
m
N1 =
2π 2 h 3 ∫ D( E z )dE z ∫ f1 ( E z + Er )(1 − f 2 ( E z + Er + eV ))dEr
0 0
At T = 0 K
(4)
⎧eV , при E z ∈ [0; μ − eV ];
me ⎪⎪
The number of electrons N2 tunneling back from ξ ( E z ) = 2 3 ⎨μ − Ez , при E z ∈ [μ − eV ; μ ] (9)
electrode 2 into electrode 1 is calculated in the same 2π h ⎪
way. According to (4) from chapter "Tunneling ⎩⎪0, при E z > μ
Effect in Quasiclassical Approximation", the
potential barrier transparency in the given case will Introducing (8) and (9) into (7), we obtain
be such as if positive voltage V is applied to
[ ]
μ −eV
electrode 1 relative to electrode 2. In this case me ⎧⎪
J = 2 3 ⎨eV ∫ exp − Aδ z μ + φ − E z dEz +
E∞ ∞ 2π h ⎪⎩ 0
m
N2 = ∫ D( E )dE ∫ f ( E z + Er + eV )(1 − f1 ( E z + Er ))dEr
[ ]⎫⎪
μ
2π 2 h 3
z z 2
∫ μ δ μ φ
0 0
+ ( − E ) exp − A + − E dE z⎬ (10)
(5) z z z
⎪⎭
μ − eV
[ ]}
me
ξ1 ( E z ) =
2π 2 h 3 ∫ f ( E )(1 − f
0
1 2 ( E + eV ))dEr J=
α
δ z2
{ ( )
φ exp − Aδ z φ − (φ + eV )exp − Aδ z φ + eV
(11)
∞
me
ξ 2 (Ez ) =
2π 2 h 3 ∫f
0
2 ( E + eV )(1 − f1 ( E ))dEr
where α = e / 4π 2 β 2 h .
∫ [ f ( z) − f ] dz
1 2
2. John G. Simmons. J. Appl. Phys. - 1963. - V. 34 β = 1− (A6)
1793. 8 f δz
2
z1
∫
z1
f ( z )dz (A1)
J=
α
{ [
φ exp(− Aδ z φ ) − (φ + eV ) exp − Aδ z φ + eV ]}
δ z2
Defining f as (1)
z2
1 2m
f =
δz ∫ f ( z)dz
z1
(A2) where α = e / 4π 2 β 2 h , A = 2 β
h2
, φ – average
z2
⎧⎪
z2
[
f ( z) − f ] [
f ( z) − f ] ⎫⎪⎬dz
2
where γ =
e 2m
. Since φ >> eV , we can
∫ f ( z )dz = f ∫ ⎨1 +
z1 ⎪
2f
−
8f 2 ⎪⎭
4βπ 2 h 2
z1 ⎩
consider that φ doesn't depend on V. Thus, in the
(A4) case of small applied voltage, the tunneling current
proportionate to V. Energy diagram of the MIM
The second term in (A4) vanishes upon integration, system then φ >> eV is shown on Fig. 1.
therefore (A4) can be expressed as
z2
∫
z1
f ( z )dz = β f δz (A5)
( Ae) 2 Ae 2
where σ = −
96φ δ z2 32δ zφ 3 2
Intermediate voltage
e3 F 2 ⎧⎪ ⎡ 2β 3 2 2m ⎤
J= ⎨exp ⎢− φ1 ⎥−
8π 2 hφ1 β 2 ⎪⎩ ⎣ eF h ⎦
(4)
Fig. 2. Potential barrier in the MIM system then eV < φ2 . ⎛ 2eV ⎞ ⎡ 2 β 3 2 2m 2eV ⎤ ⎫⎪
⎜⎜1 + ⎟⎟ exp ⎢− φ1 1+ ⎥⎬
φ1 φ2 φ1 ⎠ ⎣ eF φ1
⎝ h ⎦ ⎪⎭
and – work function of the left and right metals,
respectively
In [2] it is shown, that for this case the tunneling where F = V / L – electric field strength.
current-voltage relation is given by