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MEMS Microdevice Design and Fabrication

The document describes a class on designing, fabricating, and testing microdevices. The class has students work in teams on projects aimed at advancing research. It meets 1-2 times per week for 1 hour, but requires about 15 hours of work per week. Grades are based on participation, a final report, and the project outcome. Past class projects include piezoresistive cantilevers, interferometric accelerometers, nanomechanical biosensors, and integrating microfluidics with biosensors. The goal for the Fall 2003 class is to integrate PCR amplification with silicon field-effect sensors and microfluidics for real-time DNA analysis.

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Rakesh Agarwal
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123 views7 pages

MEMS Microdevice Design and Fabrication

The document describes a class on designing, fabricating, and testing microdevices. The class has students work in teams on projects aimed at advancing research. It meets 1-2 times per week for 1 hour, but requires about 15 hours of work per week. Grades are based on participation, a final report, and the project outcome. Past class projects include piezoresistive cantilevers, interferometric accelerometers, nanomechanical biosensors, and integrating microfluidics with biosensors. The goal for the Fall 2003 class is to integrate PCR amplification with silicon field-effect sensors and microfluidics for real-time DNA analysis.

Uploaded by

Rakesh Agarwal
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as PDF, TXT or read online on Scribd
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Semiconductor Devices Project Laboratory

How to design, fabricate, and characterize microdevices

Class of spring 2002

Instructors: Scott Manalis and Marty Schmidt


MEMS Project Lab Class

• Purpose: To gain experience in designing, simulating,


fabricating, and testing a microfabricated device.

• Format: ~ 6 students work as a team on a single project.

• Project topic is aimed at advancing current research.


Organization
• Prerequisites: 6.152 or consent of instructors.
• Class officially meets 1-2 times per week for 1 hour.
• Time commitment is ~15 hrs/week.
• Smaller teams of 2-3 are often created for sub-projects.
• Dropping course mid-semester is not allowed.
• Grades are based on participation, final report, and
project outcome.
• Concept of class project is often used for future research.
Spring 1999
A History of MEMS Silicon Piezoresistive
Cantilever
Class Projects

Fall 1999
Interferometric Spring 2000
Accelerometer Interferometric
Accelerometer v2
with Custom
Photodiodes

Spring 2001 Spring 2002


Nanomechanical Biosensor Silicon field-effect
with Interferometric biosensor
Detection
Electronic analysis
of DNA by its
intrinsic charge
Fritz et al., PNAS 2002

Class of Spring 2002


Integrate microfluidics and microelectronics
6.151 Microfabrication Project Laboratory, Fall 2003
Integrating PCR amplification with silicon field-
effect sensors for real-time DNA detection
Instructors: Professors Scott Manalis and Marty Schmidt The project goal for fall 2003 is to integrate PCR, silicon
field-effect sensors, and microfluidics for applications that
Guest Instructor: Dr. Raj Chakrabarti
require real-time and point-of-use DNA analysis. In
Advisors: Maxim Shusteff, Peter Russo and Dr. Paul Benning achieving this goal, students will gain first-hand
Prerequisites: 6.152 or equivalent experience with MEMS design, process development,
fabrication in the Microsystems Technology Laboratory
Time: TBD and device characterization as well as biochemical
First meeting: September 3 at 1 pm in the Adler Room (39-327) methods relevant for performing PCR. This course will
require ~12 hours per week. Please pre-register by
emailing your academic/research background and
1998: Kopp et al. micromachined a course schedule for fall 2003 to: [email protected].
chemical amplifier to perform
polymerase chain reaction (PCR) in
continuous flow at high speed.
(Science 280 1046)

2002: Fritz et al. reported the selective


2002: The 6.151 class successfully
and real-time detection of label-free
integrated PDMS microfluidics with
DNA using a silicon field-effect
planar silicon field-effect sensors.
detector. (PNAS 99 14142)

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