Digital
Microscope Guide
Full-Focus Imaging & Depth Composition
                                         Vol.3
        Digital Microscope Guide
            Vol.3
    Full-Focus Imaging &
     Depth Composition
                                      INDEX
    Lens magnification & depth-of-field................................ 03
    Basics of digital depth composition................................ 04
    High-quality depth composition...................................... 05
    Edge displacement & zoom correction............................ 06
    Real-time depth composition.......................................... 07
    3D display function......................................................... 08
    High-accuracy 3D images with the accurate D.F.D. method.... 09
    Creating 3D images of highly-reflective objects.............. 10
    Real-time 3D measurement............................................ 11
    Displaying height data..................................................... 12
2
Vol.3 Full-Focus Imaging & Depth Composition                                                               Digital Microscope Guide
 Lens magnification & depth-of-field
The depth-of-field (DoF) represents the vertical range in which a lens will provide an in-focus or
sharp representation of a target.
The higher the resolution of the lens the shallower the depth-of-field becomes simply due to
optical principles.
Conversely, the larger the depth-of-field, the lower the resolution of the lens. Although the
depth-of-field depends on the lens design, the principle above still applies.
In order to overcome the limitations associated with resolution
and depth-of-field, the VHX-7000 Digital Microscope makes use
of an extended focus function called Depth Up. With this
technology, it is possible to gather focus over an entire area                                        Depth-of-field
while still maintaining high-resolution and magnification.
Users finally have the ability to image any target with an
                                                                                                                       Depth of
unlimited depth-of-field, without the need for an SEM (scanning                                                        focus
electron microscope).
      Change of depth-of-field according to
      magnification
      100×
                                                                                                                          Compound
                                                                                                                          lens
                                                                                     Near point
                                                                         Far point
                                                    500×
      Correlation between magnification and
      depth-of-field (Example)
                                                                                     Depth-of-field
      10
       8
       6
       4
       2
       0
                 50      100     150      200     250
                                                                                                                                      3
    Vol.3 Full-Focus Imaging & Depth Composition                                               Digital Microscope Guide
     Basics of digital depth composition
    Even when the depth-of-field is shallow and the overall focus is poor, some areas of a target are
    still in-focus.
    As the distance between the lens and the object change, the area of focus also changes. By
    moving the lens throughout the different focal planes on a target, the VHX captures every pixel
    that comes into focus at each level and combines them into a single, fully-focused image.
    A Focus at the highest point
                                                                        Depth composition image
    B Focus at the middle point
                                             Extraction &
                                             composition
                                                                                                A           B          C
    C Focus at the lowest point
                                                                                                        B
                                                                                                            Cross-section image
4
Vol.3 Full-Focus Imaging & Depth Composition                                             Digital Microscope Guide
  High-quality depth composition
Advanced technology is required to precisely extract the in-focus areas from target
images. Sometimes, conventional technologies cannot obtain clear images
because they are unable to distinguish portions that contain strong light reflections.
This occurs because conventional technologies simply recognise portions with
strong reflective light intensity as an in-focus area.
High-quality depth composition is a technology that uses KEYENCE’s original
algorithm to adjust for discrepancies in an observed image and then accurately
compile the true focal areas into a fully-focused image.
           High-quality depth
           composition is complete.
                         Battery safety valve (700×)
                                                                                                                    5
    Vol.3 Full-Focus Imaging & Depth Composition                                                Digital Microscope Guide
     Edge displacement & zoom correction
    The challenges for acquiring high-quality depth composition images are to overcome the
    misalignment caused by undesired motion of the lens or target and changes in the field-of-view/
    magnification due to non-telecentric lens characteristics. Without making adjustments for these
    possible limitations, even a microscope with precise focused-pixel extraction software becomes
    useless.
    The Auto Adjust function, an advanced edge displacement and zoom correction technology,
    enhances the practical utility of our depth composition technology by automatically adjusting for
    these issues.
       Conventional composition                                     With Auto Adjust function
    The advanced edge and zoom correction algorithm allows a user to generate an image with
    unlimited depth-of-field, even when observing at low magnification, without having to rely on a
    lens’ telecentric characteristics.
6
Vol.3 Full-Focus Imaging & Depth Composition                                                                                                 Digital Microscope Guide
  Real-time depth composition
The advancement of depth composition technology also extends to processing speed in addition
to image quality. No matter how brilliant a technique can be, it is not practical if the operation or
calculation takes too long.
The high-speed processing technique of the VHX-7000 advances the technology to benefit users’
analysis tools.
The real-time depth composition function allows you to display fully-focused images, in real-time,
simply by moving the stage to the area of interest.
High-quality depth composition images can be generated in QXGA resolution with high-speed
calculations and position/magnification correction.
                                                    Capture the area of interest—no other operation required
                                      Real-time depth composition & 3D display function
                                                                                                      You can quickly observe a depth composition
                                                                                                      image by just moving the motorised X-Y stage
                                                                                                      to view a desired area.
                                                                                                                      Quick depth composition
                                                                                                                Faster observation and better analysis
                                                                                                                       using more sample data
                                                             Connector pins (50×)
                                                         How depth composition works
                                                 0.0 s
      Capturing images
      Focus on the lowest area.                  0.1 s
      Camera instantly moves up and down.
                                                 0.2 s
                                                                                                                         Depth                        Display
                                                                                                                       composition
                                                 0.3 s
                                                                                                                            Image
                                                 0.4s                                                                    composition
                                                                                                                          algorithm
                                                 0.5 s
                                                                      Among the captured images, the area             KEYENCE’s original
                                                 0.6 s                with the best focus is selected as the base     graphics engine
                                                                      for depth composition.                          processes image data quickly.
                                                 0.7 s
      When real-time depth composition begins,
      images are captured sequentially
      at 50 frames per second.                                        Depth composition is complete
                                                 0.8 s
                                                                      when the highest plane is processed.
                                                                                                                                                                        7
    Vol.3 Full-Focus Imaging & Depth Composition                                                       Digital Microscope Guide
      3D display function
    It is very difficult for conventional optical microscopes to observe an object at high magnification
    while viewing from an angle.
    The 3D Display function allows a user to generate a fully-focused, three-dimensional image of a
    target, which can then be freely manipulated.
       2D display                                                          3D display
       How to change the 3d display
       A 3D image can be created and viewed from any angle
                                                    ❚ Enlargement                             ❚ Rotation
                                                    Drag downward while pressing the scroll   Drag while pressing the left button of the
                                                    wheel of the mouse.                       mouse.
                                                    ❚ Reduction                               ❚ Move
          3D images are displayed and
          controlled via mouse.                     Drag upward while pressing the scroll     Drag while pressing the right button of the
                                                    wheel of the mouse.                       mouse.
8
Vol.3 Full-Focus Imaging & Depth Composition                                          Digital Microscope Guide
  High-accuracy 3d images with the accurate D.F.D. Method
D.F.D. stands for Depth from Defocus. The D.F.D. method
calculates three-dimensional depth information based on the
amount of defocusing of two-dimensional images.
When the lens is shifted vertically towards the target to capture
images at different heights, the focus level of an individual
point changes gradually.
When a position on the target is higher, in a topographical
sense, that part of the image will come into focus sooner
(when moving the lens downward toward the part).
When a position on the target is lower, that part of the image
will come into focus as the lens is moved closer to the target.
                                                                                              Each of the in focus
By calculating the height position of the lens when each point                                layers are compiled to
                                                                                              provide a 3D image.
in the image comes into focus, a 3D image can be created.
Even if perfect focus is unable to be obtained for some areas,
the Accurate D.F.D. algorithm is still capable of calculating the
height location of those pixels and obtaining detailed texture
information.
   Conventional 3D image                                            Accurate D.F.D.
                                                                                                                       9
     Vol.3 Full-Focus Imaging & Depth Composition                                                    Digital Microscope Guide
      Creating 3D images of highly-reflective objects
     Metal and mirrored surfaces have hindered 3D image creation in the past due to their high level
     of reflectivity.
     Areas with glare can’t provide the level of colour contrast information that would help distinguish
     between an in-focus or out-of-focus pixel.
     Now, by combining glare removal functions and 3D image compilation technologies, it is possible
     to construct an accurate 3D profile even on targets with extremely reflective surfaces.
                                                                  Conventional image
                                                                  Deciphering contrast in a white glare spot makes
                                                                  acquiring height information impossible.
                                                                  Image with glare-removal
                                                                  and Quick 3D display processing
                                                                  By removing the glare spots with the glare-removal
                                                                  technology, we are able to gather colour contrast and
                                                                  height information for each pixel, resulting in the
                                                                  compilation of a highly-accurate 3D structure.
10
Vol.3 Full-Focus Imaging & Depth Composition                                                Digital Microscope Guide
 Real-time 3D measurement
A 3D image contains data in XY and Z axes, providing for measurements such as volume,
distance, plane angle, and profile. These are typically impossible to perform with conventional
optical microscopes.
                                                                       Advanced measurement tools
                                                                            Ln - Ln               Cir - Pt
      ■ Height
                                                                             Ln - Pt              Arc R
                                                                             Pt - Pt              Angle
      ■ Arc radius
                                                                            Cir - Cir             CrsSct
      ■ Cross sectional area
                                                                            Cir - Ln              Height
                                                                                                                       11
     Vol.3 Full-Focus Imaging & Depth Composition                                               Digital Microscope Guide
      Displaying height data
     A height-colour map allows users to examine the entire structure of an object at a glance.
     The 3D image is rendered into a colour scale, which maps higher elevations in red and lower
     elevations in blue.
     The colour-scaled image can then be displayed on top of the raw image, creating an enhanced
     topographical view.
     To facilitate measurement, a scale for the X, Y, and Z axes can be automatically calculated and
     displayed according to the image size and rotational position of the 3D image.
                  3D raw image
                                                                 3D raw image + topographic image.
                  3D topographic image
                                                                                                       Emboss (200×)
12
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