Active Sensors

CERAVAC Transmitters CTR 100 / CTR 91

The CERAVAC Transmitter with its
diaphragm made of pure aluminium
oxide ceramics offers excellent
accuracy and reproducibility.

Advantages to the User Typical Applications

- Excellent accuracy - General pressure measurements
in the fine and rough vacuum
- Corrosion resistant
range, also for corrosive process
- High resolution gases
- Very good temperature stability - Chemical process engineering
- Electrically and mechanically - Semiconductor production pro-
compatible with the conventional cesses
capacitance manometers with
- Suited as a reference sensor for
stainless steel diaphragm
monitoring test instruments in
- Heated and unheated types are accordance with DIN/ISO 9000
available

- RS 232 C interface (only CTR 100)

The Ceramics Diaphragm

The stiffness of aluminium oxide Since the diaphragm is not impaired diaphragms take several minutes to
ceramics is greater than that of metal by overpressures or frequent pres- return to their rest position.
so that the ceramics material offer sure changes, no blocking valves will
Whereas metal diaphragms suffer
improved long term stability charac- be required – a significant contribu-
from residual tensions and unavoid-
teristics when exposed to frequent tion towards reducing costs.
able irregularities due to their produc-
pressure changes or overpressures.
Moreover, aluminium oxide ceramics tion process, diaphragms made of
The aluminium oxide ceramics dia-
diaphragms return faster to their aluminium oxide ceramics are excep-
phragm of the CERAVAC sensors is
initial position compared to metal tionally homogeneous, and owing to
capable of returning precisely to its
diaphragms; the time need between the firing process at 2500 °C entirely
initial position with respect to a cer-
the processes for the measurement free of tensions. This considerably
tain pressure so that the measure-
to stabilise is reduced. This is par- reduces part to part variations in the
ments will be highly reproducible.
ticularly important in the case of mea- sensors.
surements close to Zero where metal

C16 18 Oerlikon Leybold Vacuum Full Line Catalog

 CERAVAC Sensor
CTR 100
Technical Data (Temperature Compensated)
Full Scale (FS) / Measurement range 1 Torr / 1 x 10-4 - 1 Torr 10 Torr / 1 x 10-3 - 10 Torr
100 Torr / 0.01 - 100 Torr
1000 Torr / 0.1 - 1000 Torr
Pressure Units: Pressure Units:
1 Torr = 1.33 mbar = 133 Pascal 1 Torr = 1.33 mbar = 133 Pascal

Materials exposed to gases ceramic (Al2O3), stainless steel 316, Vacon 70 ceramic (Al2O3), stainless steel 316, Vacon 70

Max. overrange pressure 2000 Torr for 1/10/100 Torr sensors, 2000 Torr for 1/10/100 Torr sensors,
3000 Torr for 1000 Torr sensors 3000 Torr for 1000 Torr sensors

Measurement uncertainty 0.2% of reading ± temperature effect 0.2% of reading ± temperature effect

Resolution 0.003% of FS for 0.1/1 Torr sensors 0.003% of FS for 10/100/1000 Torr sensors

Temperature effects
Zero coefficient %/°C 0.015 of Full scale 0.005 of Full scale
Span coefficient %/°C 0.01 of reading 0.01 of reading

Response time ms ⱕ 30 ⱕ 30

Nominal temperatur range °C +5 to +50 +5 to +50

Supply voltage V DC +14 to +30 +14 to +30

Power consumption W ⱕ1 ⱕ1

Signal Output V 0 - 10; linear 0 - 10; linear

Interface 0.26 (0.57) 0.26 (0.57)

Weight approx. kg (lbs) RS 232 C RS 232 C

Dead Volume cm3 6 6

Connection cable see section see section

“Connection Cable for active Sensors” “Connection Cable for active Sensors”

Calibration see section “Miscellaneous”, para. see section “Miscellaneous”, para.

“Oerlikon Leybold Vacuum Calibration Service” “Oerlikon Leybold Vacuum Calibration Service”

1.1xF.S.
1.0xF.S.
0.9xF.S.
0.8xF.S.
Pressure p

0.7xF.S.
0.6xF.S.
0.5xF.S.
0.4xF.S.
0.3xF.S.
0.2xF.S.
0.1xF.S.
0.0xF.S.
0 1 2 3 4 5 6 7 8 9 10
Measurement signal Uout [V]

Characteristic of the CERAVAC Transmitter CTR 100

Oerlikon Leybold Vacuum Full Line Catalog

19 C16
 CERAVAC Sensor
Technical Data CTR 91
(45 °C heated)
Full Scale (FS) / Measurement range 0.1 Torr / 1 x 10-5 - 0.1 Torr 1 Torr / 1 x 10-4 - 1 Torr
10 Torr / 1 x 10-3 - 10 Torr
100 Torr / 0.01 - 100 Torr
1000 Torr / 0.1 - 1000 Torr
Pressure Units: Pressure Units:
1 Torr = 1.33 mbar = 133 Pascal 1 Torr = 1.33 mbar = 133 Pascal

Materials exposed to gases ceramic (Al2O3), stainless steel 316, Vacon 70 ceramic (Al2O3), stainless steel 316, Vacon 70

Max. overrange pressure 1000 Torr for 0.1 Torr sensors 2000 Torr for 1/10/100 Torr sensors,
3000 Torr for 1000 Torr sensors

Measurement uncertainty 0.2% of reading ± temperature effect 0.15% of reading ± temperature effect

Resolution 0.0025% of FS for 0.1 Torr sensors 0.0025% of FS for 1 Torr sensors
0.0015% of FS for 10/100/1000 Torr sensors

Temperature effects
Zero coefficient 1/10/100/1000 Torr sensor
%/°C 0.005 of Full scale 0.0025 of Full scale
Span coefficient %/°C 0.01 of reading 0.01 of reading

Reaction time ms  30  30

Nominal temperatur range °C +15 to +40 +15 to +40

Supply voltage V DC either ± 15 or +24 either ± 15 or +24

Power consumption W  19  19

Signal Output V 0 - 10; linear 0 - 10; linear

Weight approx. kg (lbs) 0.6 (1.32) 0.6 (1.32)

Dead Volume cm3 6 7

Connection cable see section see section

“Connection Cable for active Sensors” “Connection Cable for active Sensors”

Calibration see section “Miscellaneous”, para. see section “Miscellaneous”, para.

“Oerlikon Leybold Vacuum Calibration Service” “Oerlikon Leybold Vacuum Calibration Service”

1.1xF.S.
1.0xF.S.
0.9xF.S.
0.8xF.S.
Pressure p

0.7xF.S.
0.6xF.S.
0.5xF.S.
0.4xF.S.
0.3xF.S.
0.2xF.S.
0.1xF.S.
0.0xF.S.
0 1 2 3 4 5 6 7 8 9 10
Measurement signal Uout [V]

Characteristic of the CERAVAC Transmitter CTR 91

C16 20 Oerlikon Leybold Vacuum Full Line Catalog

Ordering Information CERAVAC Sensor
CTR 100 CTR 91
DN 16 ISO-KF
1000 Torr Part No. 230 300 Part No. 159 25
100 Torr Part No. 230 301 Part No. 159 26
10 Torr Part No. 230 302 Part No. 159 27
1 Torr Part No. 230 303 Part No. 159 28
0.1 Torr – Part No. 159 29
DN 16 CF-R
1000 Torr Part No. 230 305 Part No. 159 35
100 Torr Part No. 230 306 Part No. 159 36
10 Torr Part No. 230 307 Part No. 159 37
1 Torr Part No. 230 308 Part No. 159 37
0.1 Torr – Part No. 159 39
Cajon 8-VCR
1000 Torr Part No. 230 310 Part No. 159 45
100 Torr Part No. 230 311 Part No. 159 46
10 Torr Part No. 230 312 Part No. 159 47
1 Torr Part No. 230 313 Part No. 159 48
0.1 Torr – Part No. 159 49
1/2" tube
1000 Torr Part No. 230 315 Part No. 159 55
100 Torr Part No. 230 316 Part No. 159 56
10 Torr Part No. 230 317 Part No. 159 57
1 Torr Part No. 230 318 Part No. 159 58
0.1 Torr – Part No. 159 59
Accessories The installation of a spiral tube The installation of a spiral tube
is recommended in connection is recommended in connection
with applications involving contamination with applications involving contamination
(oil vapors or dusts) (oil vapors or dusts)

A ↓ View A
3,8

89
CTR91

113
117

44
(26)

1/2" Tube DN 16 KF DN 16 CF-R

8-VCR

Dimensional drawing for the CERAVAC Transmitter CTR 100 Dimensional drawing for the CERAVAC Transmitter CTR 91

Oerlikon Leybold Vacuum Full Line Catalog 21 C16