Pamphlet

SFC1480FX
SFC2480FX series

Hitachi Metals, Ltd.

 Passing along the tradition from F to FX, a

SFC1480FX
SFC2480FX series

From F to FX: Passing along the tradition

Since the first of our SFC480 series, SAM brand high- Our flow rate sensor, another key component in mass flow
performance mass flow controllers have been carrying forward a controllers, employs a coil type thermal sensor based on
tradition. We use a waveform diaphragm made of a Ni-Co alloy technology we have been accumulating for half a century, and it
(YET 101), developed by Hitachi Metals, which also proves that is extremely reliable. In the SFC1480F series, thanks to the
we are a manufacturer of high class metal materials. By employ- latest digital control technology, we have developed a dual-range
ing this excellent diaphragm in the flow rate control valve, the mass flow controller,
key component in a mass flow controller, we incorporate a and a hybrid mass flow Coil 1 Coil 2
simple valve design that controller in which digital
qs Sensor tube
does not use any sliding control technology
sections and reduces the reaches its peak. Our
Gas Gas
occurrence of particulate reputation is solid inlet outlet
Q qs
contamination. With a high because our customers
corrosion resistance and feel we offer an Bypass
stable control performance, incomparable product. Basic design of the sensor
we leave the competition
behind and our customers By inheriting the full tradition of the SAM brand, the
satisfied. Diaphragm valve SFC1480FX/SFC2480FX series are our most advanced models.

Circuit
・Less overshoot Valve actuator
・High speed response: 0 to 100%; 1.0 sec. max. ・Uses a layered-piezoelectric element
0 to 20%; 1.5 sec. max.
・Guaranteed precision when actually measuring gas

Metal diaphragm
Sensor ・Waveform Ni-Co alloy diaphragm (A proprietary
・Larger diameter that doesn't clog easily development of Hitachi Metal)
・Ni-free sensor (standard) ・Extremely corrosion-proof with stable control
・Ni sensor for CIF3, HF ・No sliding surfaces and less creation of particles

Housing material Valve orifice

・SUS316L (standard) ・Simple flow route

Surface finish
・Our unique, special electro-polishing

2
bold advancement to the next generation.
A bold advancement into the next generation, from G to FX
Conceptual diagram of the MG/MR (multi-gas/multi-range) mass flow controller

MFC MFC MFC MFC MFC MFC

Ar O2 H2 C 2H 4 SF6 SiH4

MFC MFC MFC MFC MFC MFC

N2

CF4 PH3 C2F6 NF3 SiF4 CO

While inheriting the tradition of our earlier mass flow controllers, the The reference values for these coefficients have been based of a
SFC1480FX/SFC2480FX series is a bold advance into the next variety of values, including calculated values, actually measured
generation. The major element of innovation in this new series is the values, and empirical values. And, these were merely guidelines or
combination of many new technologies derived from the develop- reference values with some gas types. Although the MG/MR function is
ment of the G series all-in-one mass flow controller, in a new, next included, if the gas data deviates from the characteristics of the actual
generation mass flow controller. gas, the mass flow controller cannot perform as its designed level
With the FX series mass flow controller, in addition to the flow rate
One core technology that has been fed back from this development reference for N2 gas (that ensures conformance with the national
is the MG/MR (multi-gas/multi-range) function. In conventional mass standard using the conventional gravimetric method), we installed
flow controllers, one controller could only handle one type of gas and full scale actual gas metering and exhaust gas processing facilities
one full scale flow rate range. This means that customers needed to at our factory. Using these facilities, measurement is made for each
have another mass flow controller for each different system, and for type of gas at each full-scale range, and record the data. This is then
each different process recipe. used as actual gas data.
Since the FX series flow rate controller is equipped with the MG/MR
function, and by preparing up to 14 recipes (full scale ranges of 2 The advancements in the FX series are not limited to the features
SCCM to 50 SLM) to match the intended flow range, you can above.
change the gas type and flow rate to match the actual gas you want The PI (Pressure Insensitive) function improves the controller's
to handle. When connected to a personal computer, the metering ability to tolerate variations in the primary pressure. This function
conditions can be changed instantly (See page 6). improves durability and is currently highly desired in mass flow
controllers. The G1 series was developed from the G series as a
Hitachi Metals actual gas flow rate accuracy guarantee system backs mass flow controller containing a PI pressure sensor. The FX series
up this MG/MR function. A conventional mass flow controller only inherited the PI technology of the G1 series. Although the FX series
guarantees the flow rate precision with N2 gas. To get the flow rate models do not have a pressure sensor, they employ a sensor
conditions for your actual gas using a conventional MFC, a conver- method and housing that can be used with the new PI technology.
sion factor must be used as a coefficient to convert the flow rate. So, even though the FX series is not as advanced as the G1 series
with its full scale PI function, they have greater PI performance by
Abbreviation Standard full-scale flow rate range design, when compared with the existing F series.
(N2 equivalent)
MG/MR Flow range
FR-01 2∼5 SCCM
FR-02 6∼14 SCCM
FR-03 15∼27 SCCM
FR-04 28∼38 SCCM
FR-05 39∼71 SCCM
FR-06 72∼103 SCCM
FR-07 104∼192 SCCM
FR-08 193∼279 SCCM
FR-09 280∼754 SCCM N2 gas reference flow rate
FR-10 755∼2037 SCCM
FR-11 2038∼5500 SCCM
FR-12 5501∼11000 SCCM
FR-13 11001∼30000 SCCM
FR-14 30001∼50000 SCCM Actual gas flow rate measurement facility
3
 SFC1480FX / SFC2480FX series
For both the 1.5" and 1.125"IGS MG/MR Mass Flow Controllers

Dimensions Zero calibration

Alarm LED
FLOW Alarm LED
FLOW Zero calibration

Digital interface connector

Digital interface connector D-subminiature 9-pin
RJ-12 x2 RJ-12 x2 D-subminiature 9-pin

（5.6）

（5.6）
93
16.9 100.6
27.2 70.8
84

27.7

50.8
12.1

12.1
H

H
25.4

25.4
W-seal 79.8 4-φ5.6 W-seal 92 4-φ4.4
Model name H
Model name H
1480

21.8
28.6
127 2480

20
1470

30
39
15
2470 127
1481 147
1471 2481 147
1482 2471 50.6 20 2xM4, 3mm deep
1472 42.5 20 2xM4, 3mm deep 2482
1483 167 2472
2483 167
1473
1480FX-4UG-L 2473 2480FX-4SUG-L

Item Specifications *1
SFC1480FX SFC1481FX SFC1482FX SFC1483FX
Model name
SFC2480FX SFC2481FX SFC2482FX SFC2483FX
Standard full scale flow rate 5SCCM
∼11SLM ∼30SLM ∼ 50SLM
(N2 equivalent)   ∼5,500SCCM
Function Multi-gas/multi-range
Valve operation Normally closed / normally open
Flow rate control range 2∼100% F.S.
0.05∼0.3 MPa (G) 0.1∼0.3 MPa (G) 0.2∼0.3 MPa (G)
Operation pressure Inlet pressure
7.3∼43.5 PSI (G) 14.5∼43.5 PSI (G) 29.0∼43.5 PSI (G)
*2
Outlet pressure Vacuum to ambient pressure
Proof pressure 1.0 MPa (G) 145 PSI (G)
Operation 5∼50 ℃
Temperature Accuracy guaranteed 15∼35 ℃
Heating temperature when not powered 65℃ maximum
Humidity 35∼80%RH (non condensing)
Installation position Horizontal, Vertical Horizontal, Vertical (option)
10∼100% ± (0.5% S.P. + 0.15% F.S.)
N2 gas
2∼10% ±0.2% F.S.
Accuracy
10∼100% ± (1.5% S.P. + 0.35% F.S.)
Actual gas
2∼10% ±0.5% F.S.
N2 gas ±0.3% F.S.
Linearity
Actual gas ±1.0% F.S.
10∼100% ± (0.1% S.P. + 0.05% F.S.)
Repeatability
2∼10% ±0.06% F.S.
Flow rate sensor guaranteed zero point deviation range ±0.5% F.S. / year, max.
Zero point ±0.01% F.S. / ℃ (15∼35 ℃)
Temperature dependence
Span ±0.01% S.P. / ℃ (15∼35 ℃)
0% → (20∼100%) Max. 1.0 sec. to reach ±2% S.P of the set value.
Response Time
0% → (2∼20%) Max. 1.5 sec. to reach ±0.4% S.P of the set value.
External leakage standard Max. 1x10-11 Pa・m3/s (He)
Flow rate setting signal 0.1 to 5 VDC (absolute rating: Max. ±15 VDC)
Flow rate output signal 0 to 5 VDC (maximum output: ±15 VDC)
+15 VDC ±4%, 140 mA max
Required power
-15 VDC ±4%, 140 mA max
Housing, flange, valve seat SUS316L
Material of gas Diaphragm YET101 (Ni-Co alloy)
wetted surface Flow sensor SUS316L Ni
Seal *3 SUS316L
Surface finish of components that contact the gas Specially electro-polished (standard)
Fitting *4 W seal, C seal, H1G seal, 1/4” HMJ (UJR) male
*1: The specifications above are guaranteed values when the MFC was measured by itself in standard conditions. The MFC may not meet the specifications above, depending on the
measurement conditions.
*2: The SFC147*FX/SFC247*FX are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure difference models.
*3: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications.
*4: An H1G seal is only available on the SFC14**FX series
4
SFC1480FX-D / SFC2480FX-D series
DeviceNetTM communication type For both the 1.5" and 1.125"IGS MG/MR Mass Flow Controllers
Zero calibration
FLOW
Dimensions Zero calibration
FLOW

Service connector (RJ-12) DeviceNetTM Connector Service connector (RJ-12)

(RS-232C) Male Micro Connector (RS-232C) DeviceNetTM Connector
93
16.7 Male Micro Connector
62
17.2 （16） 84

(16)

13.5
27

36

H
H

25.4
25.4
100.6

W-seal 79.8 4-φ5.6 W-seal

92 4-φ4.4
Model name H
Model name H

28.6
2480

21.8
20
1480 2470 127
127

30
15

39
1470 2481
1481 2471 147
1471 147 50.6 20 2xM4, 3mm deep
2482
1482 42.5 20 2xM4, 3mm deep 2472
1472 2483 167
1483 167
2473
1473
1480FX-4UG-D 2480FX-4SUG-D

Item Specifications *1
SFC1480FX-D SFC1481FX-D SFC1482FX-D SFC1483FX-D
Model name
SFC2480FX-D SFC2481FX-D SFC2482FX-D SFC2483FX-D
Standard full scale flow rate 5SCCM
∼11SLM ∼30SLM ∼50SLM
(N2 equivalent) ∼5,500SCCM
Function Multi-gas/multi-range
Valve operation Normally closed / normally open
Flow rate control range 2∼100% F.S.
0.05∼0.3 MPa (G) 0.1∼0.3 MPa (G) 0.2∼0.3 MPa (G)
Operation pressure Inlet pressure
7.3∼43.5 PSI (G) 14.5∼43.5 PSI (G) 29.0∼43.5 PSI (G)
*2
Outlet pressure Vacuum to ambient pressure
Proof pressure 1.0 MPa (G) 145 PSI (G)
Operation 5∼50 ℃
Temperature Accuracy guaranteed 15∼35 ℃
Heating temperature when not powered 65℃ maximum
Humidity 35∼80%RH (non condensing)
Installation position Horizontal, Vertical Horizontal, Vertical (option)
10∼100% ± (0.5% S.P. + 0.15% F.S.)
N2 gas
2∼10% ±0.2% F.S.
Accuracy
10∼100% ± (1.5% S.P. + 0.35% F.S.)
Actual gas
2∼10% ±0.5% F.S.
N2 gas ±0.3% F.S.
Linearity
Actual gas ±1.0% F.S.
10∼100% ± (0.1% S.P. + 0.05% F.S.)
Repeatability
2∼10% ±0.06% F.S.
Flow rate sensor guaranteed zero point deviation range ±0.5% F.S. / year, max.
Zero point ±0.01% F.S. / ℃ (15∼35 ℃)
Temperature dependence
Span ±0.01% S.P. / ℃ (15∼35 ℃)
0% → (20∼100%) Max. 1.0 sec. to reach ±2% S.P of the set value.
Response Time
0% → (2∼20%) Max. 1.5 sec. to reach ±0.4% S.P of the set value.
External leakage standard Max. 1x10-11 Pa・m3/s (He)
Flow rate setting signal
DeviceNetTM communication *3
Flow rate output signal
Required power +24 VDC, 0.3 A max
Housing, flange, valve seat SUS316L
Material of gas Diaphragm YET101 (Ni-Co alloy)
wetted surface Flow sensor SUS316L Ni
Seal *4 SUS316L
Surface finish of components that contact the gas Specially electro-polished (standard)
Fitting *5 W seal, C seal, H1G seal, 1/4” HMJ (UJR) male
*1: The specifications above are guaranteed values when the MFC was measured by itself in standard conditions. The MFC may not meet the specifications above, depending on the
measurement conditions.
*2: The SFC147*FX/SFC247*FX are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure difference models.
*3: For information about DeviceNetTM communication, see page 6.
*4: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications.
*5: An H1G seal is only available on the SFC14**FX series

5
 How to use the MG/MR conversion program
Gas type and flow rate can be converting using
an MG/MR conversion program. Connect the Users can change the gas type and flow rate.
mass flow controller to a personal computer <MG/MR conversion program> Select the correction amount data
using a digital communication cable, and use our
according to the gas type and flow rate you want to control
proprietary program. One can convert the data
easily with a simple GUI interface program. RS232C
Following the program instructions, first select RS485 Before
conversion
the gas type, and then flow rate units. A flow rate
range will appear, and it can be changed. Enter
a flow rate value and the setting is complete.

HOST PC
N2 500SCCM
Simple operation to set the gas type and flow rate. After
conversion
Select a gas type

The flow rate range

is displayed
(user settable).

SF6 100SCCM O2 300SCCM HBr 400SCCM

Enter a flow rate
* For details about the operation, see the instruction manual

A screen that shows

the program is converting.

Models compatible with the DeviceNetTM communication system

About DeviceNetTM
This is a field network recognized world wide, and it is approved PLC Master
as a standard sensor bus by the SEMI.
Field devices can be connected using serial communication in
+24VDC
place of an I/O connection, allowing transfer of a large volume
POWER
of data effectively.
The DeviceNetTM specifications are administrated by the ODVA
(Open DeviceNet Vendor Association, Inc.) a non-profit body
established to promote the spread of this system world-wide.
PLC bus line
Distribution
box
What are the advantages of employing DeviceNetTM DeviceNetTM cable

1) By using serial communication from an I/O connection, one does not

need an AD / DA / O board which can decrease configuration and
set up costs.
2) Only network cables are needed and this reduces cabling costs,
which decreses required man-hours, shortening engineering periods,
and avoids problems from incorrect wiring.
3) DeviceNetTM employs a CAN (Controller Area Network) as a
communication controller, and you can use a variety of CAN error
detection functions.
4) The DeviceNetTM specifications are administrated by the ODVA, and
have been normalized as international standards by IEC and SEMI.
With this normalization, they are completely open, and lots of control
devices are available from multiple venders. You can choose the
optimum device for your application.
5) The power for DeviceNetTM is only +24 VDC. You do not need to
supply ±15 VDC for the mass flow controller.

6
 Communication connector pin assignment

Analog interface connector (D-Sub 9-pin)

Connector used : D-Subminiature, 9-pin connector (M3 screw)
Compatible plug : 17JE-13090-02 (D8B) (made by DDK) or equivalent
1) Connector model : L type 2) Connector model: Q type
Pin number Function Pin number Function
1 Valve open/close input (+15 VDC = Fully open; -15 VDC = Fully closed) 1 Valve Full open (operate by connecting to COM)
2 Output (0 to 5 VDC) 2 Out put (0 to 5 VDC)
3 +15 VDC 3 +15 VDC
4 COM (±15 VDC) 4 COM (±15 VDC)
5 -15 VDC 5 -15 VDC
6 Input (0.1 to 5 VDC) 6 Input (0.1 to 5 VDC)
7 COM (output) 7 COM (output)
8 COM (Input) 8 COM (Input)
9 Valve valtage (0 to 5VDC) 9 Valve Full-close (operate by connecting to COM)

Digital interface connector

Connector used : 43814-6621 (made by Molex) (RJ-12 x 2 connectors)
Signal name
Pin number
RS232C RS485
1 COM (Siginal)
1 2 3 4 5 6
2 No Connection
3 Rxd RS-
4 Txd RS+
5 N.C.
6 N.C.
Note 1 : Rxd, Txd: RS232C Input and output
Note 2 : RS-, RS+: RS480 Input and output

DeviceNetTM connector
Connector used : DeviceNetTM Male Micro Connector (CM02-8DR5P(D5) made by DDK, or equivalent)
Pin number Signal name 4 CAN_H 3 V-
1 Drain
2 V+ 5 CAN_L
3 V-
4 CAN_H
1 Drain 2 V+
5 CAN_L

Additional functions
Function name Description Setting and reading methods
Alarm function See the item for the alarm function By command
Flow sensor zero reset function Reset the flow sensor zero By command or when the switch on the top is pressed
Lamp response function Reset the flow rate using a specified time for the step flow rate setting. By command
Flow control valve voltage monitor output function Set the flow control valve opening (0 to 5 VDC) By command or analog voltage output (only L type)
Flow control valve fully open / close function Open and close the flow control valve completely By command, ±15 VDC, or contact point connection

Alarm function
Alarm cause Alarm LED display Alarm output condition
Normal operation Green LED blinks at 1 Hz No alarm
Flow rate setting does not the match Red LED lights The mis-match between the flow rate setting and the flow rate output is 10% or more of the full
flow rate output scale and has continued for 10 seconds or longer
Abnormal ±15 VDC power supply Turns off The ±15 VDC power supply is outside the range of ±12 VDC to ±17 VDC, and has been for 0.5 seconds or longer.
EEPROM access error Red LED lights Abnormal value in the EEPROM data.
Digital communication error Red LED goes on Did not receive a normal digital command
Change in flow rate control status Red LED blinks at 2 Hz The change in the preset value was 10% or more of the full scale and continued for 10 seconds
(Change from the preset status) or longer.
・Flow rate setting changed Or, the cumulative value of the zero point correction amount for the flow sensor is more than
・Flow rate output changed ±20% of full scale
・Flow control valve open level changed
・Abnormal zero point
correction value for the flow sensor

7
 Precautions to ensure safe use
In order to use our products safely, make sure to read the relevant instruction manuals before use.

SFC1480FX/SFC2480FX series ordering information

Model name
Controller
Size Temperature Pressure Flow range Series Seal Operation
or meter
SFC 1 4 8 2 FX M C
SFC Mass flow controller
FMT Mass flow meter
1 1.5" size
2 1.125" size
4 Normal temperature type
5 High temperature type (80℃)
6 Ultra-high temperature type (150℃)
8 Normal pressure type
7 Low inlet pressure type
0 5∼5,500 SCCM (FR-01∼11)
1 11 SLM (FR-12)
2 30 SLM (FR-13)
3 50 SLM (FR-14)
FX Multi gas, multi range, digital
M Metal seal
R Rubber seal
Blank Mass flow meter
Optional code C Normally closed
Gas-contact Communication Flow sensor O Normally open
Fitting Connector Protocol
surface finish method material
4UG L B L N
4V * 1/4” HMJ (UJR) male
4UG 1.5” W
4AG 1.5” C
4H1G ** 1.5" H1G seal (Hitachi IGS seal)
4SUG *** 1.125" W seal
4SAG *** 1.125" C seal
L D-sub 9-pin (top mount), valve fully open / fully closed signal, ±15VDC type
Q D-sub9 (top mount), valve fully open / fully closed signal, COM connection type
T *** D-sub 9-pin (upstream side), digital output type
D DeviceNetTM
Blank Special electro-polished
K Machine processed finish
Blank RS232C or DeviceNetTM
B RS485
Blank SAM protocol or DeviceNetTM
L protocol
Blank Ni free
Note: * Can measure a 124 mm gap between the faces of a 1/4” HMJ (UJR) male.
N Ni sensor
** Only the SFC1480FX series can be used with a 4H1G fitting
*** Only the SFC2480FX series can be used with 4SUG, 4SAG fittings and a T connector

SAM™・FANTAS・YET 101 is a registered trademark of Hitachi Metals, Ltd.

Hitachi Metals, Ltd.

http://www.hitachi-metals.co.jp

Head Office The contents of this pamphlet are correct as of Jan 2016.
Piping Components Business Unit The specification, appearance, etc. of products listed in this pamphlet may be changed without prior notice.
Due to printing reasons, the product colors in this pamphlet may be different from the actual product colors.
Sales Dep. of Fine Flow This pamphlet is copyright 2007 by Hitachi Metals Ltd., all rights reserved. Duplication of any part of the
Shinagawa Season Terrace, 2-70, Konan 1-chome, Minato-ku, Tokyo 108-8224 Japan contents without prior written approval is strictly prohibited.
Tel.+81-3-6774-3530 Fax.+81-3-6774-4348 If you have questions about anything described in this pamphlet, please contact the address shown on the left.
DeviceNetTM is a registered trademark of ODVA.
Sales agent: We are not liable for and do not accept responsibility for any loss, direct or indirect, caused by incorrect use,
careless handling, force majeure, war, terrorism, fire, pollution, use in unapproved environments, salt damage,
or any natural disasters (such as wind or flood damage, earthquakes or lightning), or for any consequential
damage.

The above contact numbers are subject to change. If you cannot reach us using those numbers, please try the
following:
Hitachi Metals, Ltd. Toll-free 0800-500-5055 (in Japan), Tel.+81-3-6774-3001
All rights reserved.

Pamphlet number: HL-K244-E

Created January, 2016 (T)GT2