MEASUREMENT
APPLICATION
GUIDE
POSITION
CONTROL
INDEX
y Selection Guide·· ···················································· P.2
y Measurement Principle············································ P.3 to 4
y Position Control Using a Reflective Sensor·· ················· P.5
y Position Control Using a Thrubeam Sensor··················· P.6
y Successful Applications·· ·········································· P.7
POSITION CONTROL Selection Guide
Positio n c o nt ro l usin g a ref le c tive s e ns o r P.5
Measuring the position of an Measuring the gap of an Measuring the height of a
XY stage exposure mask dispenser nozzle
Measuring the height of a Measuring the deflection of a Detecting the position of heated
spinless coater tensioned sheet copper pipe
Positio n c o nt ro l usin g a t hr ub e am s e ns o r P.6
Positioning a liquid crystal plate Measuring the gap of a mill roller
Detecting the position of an Measuring the displacement in
optical fibre width of a rubber sheet
2
POSITION CONTROL
MEASUREMENT PRINCIPLE
1D Triangulation Measurement Principle (LK-G Series) HIGH-SPEED WIDE RANGE 12 SENSOR HEADS CONNECTION
At the reference distance At a short distance At a long distance
Semiconductor Light-receiving Semiconductor Light-receiving Semiconductor Light-receiving
laser element laser element laser element
Transmitter Transmitter Transmitter
lens lens lens
Ernostar Ernostar Ernostar
lens lens lens
Light-receiving Light-receiving Light-receiving
element element element
The semiconductor laser emits the laser beam to the target as shown above. The light reflected off the target is focused by the
ernostar lens and forms an image on the light-receiving element. The position of the beam spot on the receiving element varies
with the distance to the target. This variation is evaluated and converted into a measurement of target position.
LT-9000 Series Measurement Principle (Confocal type) HIGH-ACCURACY
High-accuracy measurement method uses the confocal
principle
The laser beam is focused on the target surface through an objective lens
that vibrates up and down at high speed by means of a tuning fork. The
beam reflected off the target surface is converged on a pinhole and then
enters the light-receiving element. By measuring the exact position of the
objective lens at the moment of receiving the light, the sensor measures
the distance to the target surface accurately without being affected by the
VERTICAL
material, colour, or angle of the target.
When focus is not obtained When the focal point is
on the target surface on the target surface
Semiconductor Semiconductor
laser laser
Light-receiving Light-receiving
element element
The coaxial optical system improves Pinhole The received Pinhole The received
measurement performance Tuning fork
light intensity
Tuning fork
light intensity is
is low. high.
High angular characteristics Measurement of film
thickness
Sensor Sensor
A small amount of received light All of the received light passes
passes through the pinhole. through the pinhole.
3
MEASUREMENT PRINCIPLE
1D Thru-beam Measurement Principle (LS-9000 Series) NEW METHOD LONG LIFE HIGH-ACCURACY HIGH-SPEED
[Principle] Green-LED light is emitted as a uniform collimated beam. The
CMOS detects the position of the edge between light and dark edges of the
received light and calculates measured values.
13.3 times
than convenfaster
Fastest in its class tion
systems al
16000 Hz
sampling rate
Fitted with a high-speed exposure CMOS and
High performance High-intensity
condenser Green-LED high-intensity Green-LED to produce a 16000 Hz
Monitor CMOS Target Position CMOS High-speed exposure CMOS Lens unit efficiently High-intensity Green LED lasts sampling rate, surpassing previous systems.
The Monitor CMOS tracks The CMOS measures Proprietary designed measurement focuses LED light longer than traditional LED Improves production line cycle times and ensures
workpiece inclination to the position between the CMOS features an integrated light sources while providing
automatically correct for transmitter and receiver amplifier to maximise performance high intensity and evenly- more stable measurement.
tilt errors. and speed. distributed lighting.
4
POSITION CONTROL
POSITION CONTROL Position Control Using a Reflective Sensor
Measurement method
1. Set the reference point as “0”. Controller
2. The position output is obtained at the reference point (“0”) when the target Reference
passes through. point 0.000
It is possible to obtain the output at the reference point as well as at some
distance "X*" from the reference point.
Movement Position
* “x” is adjustable. output
It is also possible to output the measurement value to an external device.
POINT About position accuracy
Position accuracy depends on the resolution and repeatability of the measuring instrument.
Using the averaging function stabilises the measurement, but makes the response time slower. It is necessary to select the
optimum setting by balancing the two factors.
1st ON position 2nd ON position
Position Position
0 t 0 t
Resolution
Position ON Position ON
output output
OFF
OFF
Position accuracy
(The ON positions vary.)
Variance in the ON position = Position accuracy
Benefits of LK-G Series
LK-G Series features wide measurement range that allows the measurement through glass. It is effective for detecting the position of the robot arm
through a viewport.
* Note for measurement through glass
Setting the glass within the measurement
range may increase the possibility that the
Reflected
off the glass measurement values are affected by dirt on the
surface glass or other factors.
Glass
Set the glass as close to the
sensor head as possible.
Target object Target object
Detecting the position of the robot arm
through the view port
Multiple point simultaneous measurement
LK-G Series allows simultaneous measurement with maximum 12 sensor heads connected to a controller.
5
POSITION CONTROL Position Control Using a Thrubeam Sensor
Measurement method
Indicator Indicator Position
0
t
Movement
0.000 0.000
Auto-zero Position Position ON
input output output
OFF
Set the target at the reference point. Activate Set the judgment value of the indicator to “0”. The position output is obtained at the reference
the auto-zero function of the controller. The point (the point where the indicator is set to “0”) when the target passes through.
auto-zero function instantly sets the indication
of measurement value to “0”. (This operation is
performed for the first time only.)
Positioning a round workpiece
Measuring in the X and Y directions as shown in the figure on Positioning a round target
the right enables positioning of a round workpiece.
Y-axis
direction
Indicator
X-axis
direction X-axis direction 1.342
Y-axis direction 1.676
POINT LS-9000 Series ensures long life due to its solid state design.
The LS-9000 Series has
solved the problem of
motor durability that has
been a disadvantage
of the laser scanning
method.
Semiconductor laser No moving parts used! High-intensity GaN Green LED
A moving part (motor) is used!
Applications
Positioning a liquid crystal plate Measuring the gap of a mill roller Detecting the position of fibre
6
POSITION CONTROL
SUCCESSFUL APPLICATIONS
STEEL/BEARING
Pinch roller total indicator Heated steel pipe positioning Material position control during Temper roller skew
runout measurement welding measurement
AUTOMOTIVE/AIRCRAFT
Engine valve stroke inspection Feed bar backlash Detection of sealant spread Cotter valve height
measurement measurement
WEB/GLASS/Li-ION/SOLAR
T-die extruder adjustment Coating material on door glass Film edge curl measurement Rubber sheet tension control
control height measurement
SEMI/ELECTRONIC PARTS/HDD
Resin mould height Checking of wafer/robot arm Z-axis positioning of a wafer Automatic focus of image
measurement position through a viewport inspection system
ELECTRONIC PARTS/CONNECTOR
Ink level measurement CCD mounting position check Inspection of return speed of Zoom lens characterisation
switch
7
DISPLACEMENT METER/DIMENSION MEASUREMENT SYSTEM LINEUP
Reflective-Type Measurement Instrument
High-Speed, High-Accuracy High-speed 2D/3D Laser Scanner
CMOS Laser Displacement Sensor LJ-V7000 Series
LK-G5000 Series
HIGH-SPEED 2D/3D
WIDE RANGE MULTI POINT
12 SENSOR HEADS CONNECTION HIGH-SPEED
PROFILES
Surface Scanning Laser Confocal Micro-Head Spectral-Interference Laser
Displacement Meter Displacement Meter
LT-9000 Series SI Series
HIGH-ACCURACY COMPACT
DOUBLE-SCANNING NO HEAT
CLEAR TARGET THICKNESS
Thrubeam-Type Measurement Instrument
High-speed Optical Micrometer High-speed 2D Measurement Sensor
LS-9000 Series TM Series
GREEN LED 2D
LONG LIFE MULTI POINT
HIGH-ACCURACY
HIGH-SPEED
SAFETY INFORMATION
Please visit: www.keyence.com Please read the instruction manual carefully in
order to safely operate any KEYENCE product.
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The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice. WW11-1086
Company and product names mentioned in this catalogue are either trademarks or registered trademarks of their respective companies.
Copyright (c) 2011 KEYENCE CORPORATION. All rights reserved. MeasurePosition-WW-TG-E 1074-2 E 600849
