Honeywell ZephyrTM

Digital Airflow Sensors

HAF Series–High Accuracy
±50 SCCM to ±750 SCCM

Datasheet
 Honeywell ZephyrTM Digital Airflow Sensors
HAF Series - High Accuracy
Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and
compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors
provide a fast response to air or gas flow.
Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are
available at ±50, ±100, ±200, ±400 or ±750 SCCM. Custom flow ranges are also available. The sensors are fully calibrated
and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).
The HAF Series is compensated over the temperature range of 0 °C to 50 °C [32 °F to 122 °F] and operates across a
temperature range of -20 °C to 70 °C [-4 °F to 158 °F]. The state-of-the-art ASIC-based compensation provides digital (I2C)
outputs with a response time of 1 ms.
These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge
Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films
of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully-designed airflow channel to
provide repeatable response to flow.
Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability
to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable
substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.

What makes our sensors better?

Fast response time
Wide range of airflows
Customizable flow ranges and configurable package styles
Linear output
High stability
Low pressure drop

TIGHT TOTAL ERROR BAND • fast response TIME • Wide Range of Airflows
2 sensing.honeywell.com
Features
and Benefits
Total Error Band (TEB) As low as 0.25%FSS*
Allows for precise airflow measurement, often ideal for demanding applications with
high accuracy requirements.

All Possible Errors

Offset

+
Full Scale Span

+
Linearity = Accuracy

+
Flow Hysteresis

= Total
+
Error Band
Repeatability

+
Temperature Offset

+
Temperature Span

+
Thermal Hysteresis

Figure 1. Total Error Band vs. Accuracy

Other airflow sensor manufacturers only report on accuracy, while Honeywell reports Total Error Band.

FAST RESPONSE TIME*

Allows a customer’s application to respond quickly to airflow change, important in
critical medical (e.g., anesthesia) and industrial (e.g., fume hood) applications.

Wide range of airflows*

Zephyr measures mass flow at standard flow ranges of ±50, ±100 ±200, ±400
or ±750 SCCM, or custom flow ranges, increasing the options for integrating the
sensor into the application.

Customizable flow ranges and configurable package

styles*
Meet specific end-user needs.

FULL CALIBRATION AND TEMPERATURE COMPENSATION

Typically allow customer to remove additional components associated with signal
conditioning from the PCB, reducing PCB size as well as costs often associated
with those components (e.g., acquisition, inventory, assembly).

*Competitive Differentiator sensing.honeywell.com 3

Features LINEAR OUTPUT*
Provides more intuitive sensor signal than the raw output of basic airflow sensors,
and Benefits which can help reduce production costs, design, and implementation time.

Low pressure drop*

Typically improves patient comfort in medical applications, and reduces noise and
system wear on other components such as motors and pumps.

HIGH 12-BIt resolution

Increases ability to sense small airflow changes, allowing customers to more precisely
control their application.

Low 3.3 Vdc operating voltage option and low power

consumption
Allow for use in battery-driven and other portable applications.

ASIC-based I2C digital output compatibility

Eases integration to microprocessors or microcontrollers, reducing PCB complexity
and component count.

Insensitivity to altitude
Eliminates customer-implemented altitude adjustments in the system, easing
integration and reducing production costs by not having to purchase additional
sensors for altitude adjustments.

Small size
Occupies less space on PCB, allowing easier fit and potentially reducing production
costs; PCB size may also be reduced for easier fit into space-constrained
applications.

RoHS-compliant materials
Meet Directive 2002/95/EC.

*Competitive Differentiator
4 sensing.honeywell.com
Potential Applications
MEDICAl

Anesthesia Delivery machines

Ventricular Assist Devices (Heart Pumps)

Nebulizers

Oxygen concentrators

Patient monitoring systems (respiratory monitoring)

Sleep apnea machines

Spirometers

Ventilators

LAPAROSCOPY

INDUSTRIAL

AIR-TO-FUEL RATIO

FUEL CELLS

GAS LEAK DETECTION

VAV SYSTEM ON HVAC SYSTEMS

GAS METERS

HVAC FILTERS

sensing.honeywell.com 5
Honeywell ZephyrTM Digital Airflow Sensors
HAF Series–High Accuracy
Table 1. Absolute Maximum Ratings1
Characteristic Parameter
Supply voltage -0.3 Vdc to 6.0 Vdc
Voltage on I/O output pin -0.3 Vdc to Vsupply
Storage temperature range -40 °C to 125 °C [-40 °F to 257 °F]
Maximum flow change 5.0 SLPM/s
Maximum common mode pressure 25 psi at 25 °C [77 °F]
Maximum flow 10 SLPM
1
Absolute maximum ratings are the extreme limits that the device will withstand without damage to the device. However, the electrical and mechanical characteristics are not
guaranteed as the maximum limits (above recommended operating conditions) are approached, nor will the device necessarily operate at absolute maximum ratings.

CAUTION CAUTION
IMPROPER USE PRODUCT DAMAGE
Do not use these products to sense liquid flow. Do not disassemble these products.
Failure to comply with these instructions may result in Failure to comply with these instructions may result in
product damage. product damage.

Table 2. Operating Specifications

Characteristic Parameter Notes
Supply voltage
3.3 Vdc 3.3 Vdc ±10% —
5.0 Vdc 5.0 Vdc ±10%
Power:
3.3 Vdc 40 mW max. 1
5.0 Vdc 65 mW max.
Compensated temperature range 0 °C to 50 °C [32 °F to 122 °F] 2
Operating temperature range -20 °C to 70 °C [-4 °F to 158 °F] —
Accuracy See Table 3. 3, 4
Total Error Band (TEB) See Table 3. 4, 5
Null accuracy 0.1 %FSS 4, 6
Response time 1 ms typ. 7
Resolution 12 bit min. —
Start-up time 17 ms 8
Warm-up time 30 ms 9
Calibration media gaseous nitrogen 10
2
Bus standards I C fast mode (up to 400 kHz) 11
Null stability Null will not deviate beyond the specified TEB. —
Reverse polarity protection no —
1
Maximum Power: Is measured under the conditions of the highest supply voltage Vsupply + 10%, 70° C, full scale flow and with the minimum pull-up resistors for SDA and SCL
according to the I2C specification.
2
Custom and extended compensated temperature ranges are possible. Contact Honeywell for details.
3
Accuracy: The maximum deviation from the nominal digital output over the compensated flow range at a reference temperature of 25 °C. Errors include offset, span, non-linearity,
hysteresis and non-repeatability.
4
Full Scale Span (FSS): The algebraic difference between the digital output at the forward Full Scale (FS) flow and the digital output at the reverse FS flow. Forward flow is defined as
flow from P1 to P2 as shown in Figure 4. The references to mass flow (SCCM) refer to gas flows at the standard conditions of 0 °C and atmospheric pressure 760 (101.3 kPa).
5
Total Error Band (TEB): The maximum deviation in output from ideal transfer function over the entire compensated temperature and flow range. Includes all errors due to offset, full
scale span, flow hysteresis, flow repeatability, thermal effect on offset, thermal effect on span and thermal hysteresis.
6
Null accuracy: The the maximum deviation in output at 0 SCCM from the ideal transfer function over the compensated temperature range. This includes offset errors, thermal airflow
hysteresis and repeatability errors.
7
Response time: The time to electrically respond to any mass flow change at the microbridge airflow transducer (response time of the transducer may be affected by the pneumatic
interface).
8
Start-up time: The time to first valid reading of serial number proceeding streaming 14-bit flow measurements.
9
Warm-up time: The time to the first valid flow measurement after power is applied.
10
Default calibration media is dry nitrogen gas. Please contact Honeywell for other calibration options.
11
Refer to the Technical Note “I2C Communications with Honeywell Digital Airflow Sensors” for I2C protocol information.

6 sensing.honeywell.com
±50 SCCM to ±750 SCCM

Table 3. Bidirectional Forward Flow Optimization

Accuracy Error Band Total Error Band

Error (%FSS) Error (%FSS)

See table below for null accuracy.
See table below for null accuracy.

Sensor
Range Airflow (SCCM) Airflow (SCCM)
(SCCM)

Applied Flow Accuracy Error TEB

Applied Flow (SCCM)
(SCCM) (%FSS) (%FSS)
-50 to -16.7 ±6% reading -50 to -14.3 ±7% reading
-16.7 to 0 ±1 -14.3 to 0 ±1
±50 00 ±0.16 00 ±0.16
0 to 20 ±1 0 to 14.3 ±1
20 to 50 ±5% reading -14.3 to 50 ±7% reading
-100 to -14.3 ±7% reading -100 to -14.3 ±7% reading
-14.3 to 0 ±0.5 -14.3 to 0 ±0.5
±100 00 ±0.12 00 ±0.12
20 ±0.5 0 to 16.7 ±0.5
20 to 100 ±5% reading 16.7 to 100 ±6% reading
-200 to -11.1 ±9% reading -200 to -11.1 ±9% reading)
-11.1 to -0 ±0.25 -11.1 to -0 ±0.25
±200 1 00 ±0.01 00 ±0.1
0 to 40 ±0.25 0 to 22.2 ±0.25
40 to 200 ±2.5% reading 22.2 to 200 ±4.5% reading
-400 to -26.7 ±9% reading -400 to -32 10% reading
-26.7 to -0 ±0.3 -32 to -0 ±0.4
±400 00 ±0.1 00 ±0.1
0 to 68.6 ±0.3 0 to 71.1 ±0.4
68.6 to 400 ±3.5% reading 71.1 to 400 ±4.5% reading
-750 to -31.3 ±12% reading -750 to -31.25 ±12% reading
-31.3 to -0 ±0.25 -31.25 to -0 ±0.25
±750 00 ±0.1 00 ±0.1
0 to 68.2 ±0.25 0 to 50 ±0.25
68.2 to 750 ±5.5% reading 50 to 750 ±7.5 reading
1
The short port sensors are only specified down to -100 SCCM.

sensing.honeywell.com 7
Honeywell ZephyrTM Digital Airflow Sensors
HAF Series–High Accuracy

CAUTION
LARGE PARTICULATE DAMAGE
Use a 5-micron filter upstream of the sensor to keep media
flow through the sensor free of condensing moisture and
particulates. Large, high-velocity particles or conductive
particles may damage the sensing element.
Failure to comply with these instructions may result in
product damage.

Table 4. Environmental Characteristics Table 5. Wetted Materials

Characteristic Parameter Characteristic Parameter

Humidity 0% to 95% RH, non-condensing Covers high temperature polymer

Shock 100 g, 11 ms Substrate PCB

Vibration 15 g at 20 Hz to 2000 Hz Adhesives epoxy

Electronic
silicon, gold
ESD Class 3B per MIL-STD 883G components
Compliance RoHS, WEEE

Table 6. Recommended Mounting and Implementation

Characteristic Parameter
Mounting screw:
size 5-40
torque 0,68 N m [6 in-lb]
Silicon tubing for long port style 70 durometer; size 0.125 in inside diameter, 0.250 in outside diameter silicone tubing
O-ring:
for short port style AS568A, Size 7, Silicone, Shore A 70
for long port style AS568A, Size 10, Silicone, Shore A 70
Filter 5-micron filter upstream of the sensor

Figure 2. Nominal Digital Output

18000
Digital Output (Counts)

16000
14000
12000
10000
8000
6000
4000
2000
0
-2000
-150.00% -100.00% -50.00% 0.00% 50.00% 100.00% 150.00%
Flow (%FS)

8 sensing.honeywell.com
±50 SCCM to ±750 SCCM

Figure 3. ideal Transfer Function

Digital Output Code = 16384 * [0.5 + 0.4 * (Flow Applied/Full Scale Flow)]

Flow Applied = Full Scale Flow * [(Digital Output Code/16384) - 0.5]/0.4

Figure 4. Nomenclature and Order Guide

For example, a HAFBLF0200C4AX5 part number defines a Honeywell ZephyrTM Digital Airflow Sensor, bidirectional forward flow optimized, long port, fastener mount, 200 SCCM,
I2C output with address 0x49, 10% to 90% transfer function, 5.0 Vdc supply voltage.

HAF B L F 0200 C 4 A X 5

Flow Transfer Reserved for Supply

Product Series Direction Port Style Housing Style Flow Range2 Unit Output Format Function Future Use Voltage
HAF Series
High Accuracy B Bidirectional L Long port1 F Fastener 0050 50 long port C SCCM 4 Digital I2C address:
A 10% to 90% of X XXXXX 3 3.3 Vdc
forward flow mount style only 0x49 Full Scale Output
Airflow Sensor optimized Snap 100 long port Digital I C address:
2 (FSO)
S Short port S mount1 0100 style only
5 5 5.0 Vdc
0x59
S Bidirectional 200 long or Digital I2C address:
symmetric 0200 short port
6
0x69
400 long port Digital I2C address:
0400 style only
7 0x79
750 long port
0750 style only

The Long Port Port Style with the Snap Mount Housing Style is not a valid configuration.
1

The 200 SCCM Flow Range is available in the Long and Short Port Styles.
2

Apart from the general configuration required, other customer-specific requirements are also possible. Please contact Honeywell.

Figure 5. All Available Standard Configurations

LF: Long port, fastener mount SF: Short port, fastener mount SS: Short port, snap mount

sensing.honeywell.com 9
Honeywell ZephyrTM Digital Airflow Sensors
HAF Series–High Accuracy
Figure 6. Wave Solder Profile

300
Max. temp. = 243 °C
250
Temperature (°C)

Max. temp. = 205 °C

200
Housing temp. (top of device)
150 Pin temp. (bottom of device)
100
50
0
0 20 40 60 80 100
Time (s)

Figure 7. Long Port Style Flow vs Pressure

Flow Typical Pressure Drop
(SCCM) mbar inH2O Pa
-750 -0.2517 -0.1011 -25.17
-550 -0.1499 -0.0602 -14.99
-400 -0.0891 -0.0358 -8.91
0.12
Pressure Drop (inH2O)

-300 -0.0578 -0.0232 -5.78

0.06 -200 -0.0321 -0.0129 -3.21
N -100 -0.0114 -0.0046 -1.14
0
-50 -0.0035 -0.0014 -0.35
-20 -0.0007 -0.0003 -0.07
-0.06
0 0.0000 0.0000 0.0000
-0.12 20 0.0007 0.0003 0.07
-750 -600 -450 -300 -150 0 150 300 450 600 750
50 0.0035 0.0014 0.35
Flow (SCCM)
100 0.0014 0.0046 0.14
200 0.0321 0.0129 3.21
300 0.0578 0.0232 5.78
400 0.0891 0.0358 8.91
550 0.1499 0.0602 14.99
750 0.2517 0.1011 25.17

Figure 8. Short Port Style Flow vs Pressure

Flow Typical Pressure Drop
0.6
(SCCM) mbar inH2O Pa
Pressure Drop (inH2O)

0.4
-200 -1.1707 -0.470 -117.07
0.2 -150 -0.7074 -0.284 -70.74

0
-100 -0.3562 -0.143 -35.62
-50 -0.1120 -0.045 -11.20
-0.2
0 0.0000 0.000 0.0000
N -0.4 50 0.1196 0.048 11.96
-0.6 100 0.3462 0.139 34.62
-200 -150 -100 -50 0 50 100 150 200
150 0.7149 0.287 71.49
Flow (SCCM)
200 1.2589 0.452 125.89

10 sensing.honeywell.com
±50 SCCM to ±750 SCCM

Dlgital Interface
For additional details on the use of Zephyr with digital output see the Technical Note “I2C Communications with Honeywell Digital Airflow
Sensors”.

The sensor uses the I2C standard for digital communication with a slave address specified in the Nomenclature and Order Guide in Figure
4. Following sensor power-up, each of the first two read sequences shown in Figure 9 will respond with 2 bytes of the unique 4-byte Serial
Number. The first read after power-up will respond with the two most significant bytes of the Serial Number, while the second read will respond
with the two least significant bytes of the Serial Number. For reliable performance, allow sensor to be powered for the sensor start-up time
before performing the first read, then allow a 10 ms command response time before performing the second read.

Figure 9. Sensor I2C Read and Write Sequences

I2C Read: Slave responds to Master with data

Data Byte 0 (Most Significant) Data Byte 1 (Least Significant)
SDA S A6 A5 A4 A3 A2 A1 A0 1 SA D7 D6 D5 D4 D3 D2 D1 D0 MA D7 D6 D5 D4 D3 D2 D1 D0 MN S
SCL

I2C Read: Master sends data to Slave

Command Byte
SDA S A6 A5 A4 A3 A2 A1 A0 1 SA D7 D6 D5 D4 D3 D2 D1 D0 MA S
SCL

Bit Name Description

S Start condition Master pulls SDA from high to low while SCL remains high
S Stop condition Master allows SDA to float from low to high while SCL remains high
A6 Address bit I2C Slave Address is the 7 Most Significant Bits for the first transmitted byte
1 Read/write bit Read = 1, Write = 0
D7 Data bit
SA Slave ACK Slave pulls SDA low
MA Master ACK Master pulls SDA low
MN Master NACK Master allows SDA to float high

After the power-up read sequence described above, the sensor will respond to each I2C read request with a 16-bit (2 byte) digital flow reading.
Read requests taken faster than the Response Time (1 ms) are not guaranteed to return fresh data. The first two bits of each flow reading will be
‘00’.

The maximum sink current on SCL or SDA is 2 mA. Therefore, if the pull-up resistors are biased by VDD, and if VDD reaches the maximum supply
voltage of 6 V, then the pull-up resistors for SCL and SDA must be greater than 3.0 kΩ to limit the sink current to 2 mA. The typical value for SCL
and SDA pull-up resistors is 4.7 kΩ (this value depends on the bus capacitance and the bus speed).

sensing.honeywell.com 11
Honeywell ZephyrTM Digital Airflow Sensors
HAF Series–High Accuracy
Figure 10. Mounting Dimensions (For reference only: mm [in].)
LF: Long port, fastener mount

MODEL NUMBER
LOT CODE
Honeywell Zephyr™
HAFBLFXXXXXXXXX
0x123456789

7(50,1$/6,'( Mounting Footprint

3,0 2,00 TYP. 7,20
[0.12] [0.079] 1,00
[0.04] 3,50 [0.28] 36,00
    [0.14] [1.42]
18,00
[0.71]
10,3
[0.40]
   
7,20
[0.28]
10,00
[0.39] 4X DIA. 0,812
[0.032]
2X DIA. 5,35
[0.21] 2X DIA. 3,40
;32576 [0.134]
6(1625)22735,17
6,50
[0.26] 9,(:(')5207(50,1$/6,'(

7,20 19,90
[0.28] [0.78]

2X DIA. 3,40
[0.13]
6,35
[0.25]
12,70
[0.50] 28,80
36,00 [1.13]
[1.42]

AIRFLOW DIRECTION, PORT SIDE

SF: Short port, fastener mount

MODEL NUMBER
LOT CODE
Honeywell Zephyr™
HAFBSFXXXXXXXXX
0x123456789

7(50,1$/6,'(
Mounting Footprint
3,0 2,00 TYP. 7,20
[0.12] [0.079] 1,00
[0.04] 3,50 [0.28] 36,00
[1.42]
1 2 3 4 [0.14] 18,00
[0.71]

10,3
[0.40]
   
7,20
[0.28]
2X DIA. 4,00
2,50 [0.16] 4X DIA. 0,812
[0.10] [0.032]

6,50 2X DIA. 3,40

;32576 6(1625)22735,17 [0.134]
[0.26]
9,(:(')5207(50,1$/6,'(
7,20 19,90
[0.28] [0.78]

2X DIA. 3,40
[0.13]
6,35
[0.25]
12,70
[0.50] 28,80
36,00 [1.13]
[1.42]

AIRFLOW DIRECTION, PORT SIDE

12 sensing.honeywell.com
±50 SCCM to ±750 SCCM

Figure 10. Mounting Dimensions (For reference only: mm [in], continued.)

SS: Short port, snap mount
22,00
[0.87]

DIA. 2,30 MODEL NUMBER

[0.09] LOT CODE

Honeywell Zephyr™
HAFBSSXXXXXXXXX
0x123456789

7(50,1$/6,'( 6,50 10,40 Mounting Footprint

[0.26] [0.41]
26,00 7,20 2X DIA. 2,2 [0.086] THRU
[1.02] [0.28] 4X DIA. 0,812
HOLES FOR MOUNTING
2,00 TYP. 4,60 [0.032] 22,0
3,3 [0.079] 1,00 [0.18] 3,80
[0.866] [0.150]
[0.13] [0.04]
4,80 3,00 0,65
    [0.19] [0.12] [0.026]
1,80     4,00
[0.071] [0.157] 2X 7,20
10,3 12,8 [0.28]
[0.40] [0.50]
2X 2,50
[0.098]
2,50 ;32576
[0.10] 26,00
[1.024]
6(1625)22735,17
9,(:(')5207(50,1$/6,'(

19,90
[0.78]

6,35
[0.25]
12,70
[0.50] 28,80
[1.13]

AIRFLOW DIRECTION, PORT SIDE

10
Table 8. Pinout
Pin 1 Pin 2 Pin 3 Pin 4
SCL Vsupply ground SDA

sensing.honeywell.com 13
ADDITIONAL INFORMATION
WARNING
The following associated literature is available at sensing.
PERSONAL INJURY
honeywell.com:
DO NOT USE these products as safety or emergency stop
• Product line guide
devices or in any other application where failure of the product
• Product part listing/nomenclature tree could result in personal injury.
• Product range guide Failure to comply with these instructions could result in
• Technical Information: death or serious injury.
– I2C Communications with Honeywell Digital Airflow
Sensors WARNING
– Gas Media Compatibility and Correction Factors MISUSE OF DOCUMENTATION
• Installation instructions • The information presented in this product sheet is for
• Application-specific information reference only. Do not use this document as a product
installation guide.
• Complete installation, operation, and maintenance
information is provided in the instructions supplied with each
product.
Failure to comply with these instructions could result in
death or serious injury.

WARRANTY/REMEDY
Honeywell warrants goods of its manufacture as being free of
defective materials and faulty workmanship. Honeywell’s standard
product warranty applies unless agreed to otherwise by Honeywell
in writing; please refer to your order acknowledgement or consult
your local sales office for specific warranty details. If warranted
goods are returned to Honeywell during the period of coverage,
Honeywell will repair or replace, at its option, without charge
those items it finds defective. The foregoing is buyer’s sole
remedy and is in lieu of all other warranties, expressed or
implied, including those of merchantability and fitness for
Find out more a particular purpose. In no event shall Honeywell be liable
Honeywell serves its customers for consequential, special, or indirect damages.
through a worldwide network
of sales offices, representatives While we provide application assistance personally, through our
and distributors. For application literature and the Honeywell website, it is up to the customer to
assistance, current specifications, determine the suitability of the product in the application.
pricing or name of the nearest
Authorized Distributor, contact Specifications may change without notice. The information we
your local sales office. supply is believed to be accurate and reliable as of this printing.
To learn more about Honeywell’s However, we assume no responsibility for its use.
sensing and control products,
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