Ultra Final Series bearings for clean environment with enhanced durability

and lower particle generation at high temperatures, clean rooms and vacuums

!/E
CAT. No. 3028-!
 CONTENTS
NTN bearings for clean environments

1. Standard specifications of bearings for clean environments ⋯2

2. Ultra-clean bearings (vacuum / high temperature) ⋯⋯⋯⋯⋯4
3. Long life ultra-clean bearings (vacuum / high temperature)⋯5
4. Bearings with low particle generation grease
(atmosphere / room temperature)⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯6
5. Bearings with low particle generation grease for vacuum
environment (vacuum / high temperature)⋯⋯⋯⋯⋯⋯⋯⋯⋯7
6. Dimensions
6.1 Ultra-clean bearings / part No. examples ⋯⋯⋯⋯⋯⋯⋯⋯⋯8
6.2 Long life ultra-clean bearings ⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯9
6.3 Bearings with low particle generation grease ⋯⋯⋯⋯⋯⋯⋯10
6.4 Bearings with low particle generation grease for vacuum
environment⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯11

7. Introduction of bearings for special environments ⋯⋯⋯⋯12

7.1 Cam followers
7.2 Bearing units・stainless steel series
7.3 Ball screws
7.4 Miniature sliding screws with plastic nut
7.5 Plastic rolling bearings
NTN bearings for clean environments
Ultra Final Series bearings for clean environments are bearings that produce
minimal dust for vacuum equipment, transfer equipment, and equipment for
manufacturing semiconductors, liquid crystal and electronic components.

Range of NTN bearings for clean environment

10−6

10−4
Vacuum level (Pa)

10−1

102

104

105 −30 0 50 70 100 150 200 260 300

Temperature (˚C)

1
 1. Standard specifications of bearings for clean environments

The standard specifications of bearings for clean environments are as follows.

For more details, contact NTN Engineering.

Classification of bearings Appearance Lubricant Configuration

Raceway groove
Ultra-clean bearings Special PTFE and rolling elements

Long life Special PTFE

Raceway groove
＋
Ultra-clean bearings and rolling elements
Special ball

Bearings with low

particle generation NTN low particle
grease generation grease

Bearings with low

particle generation
Fluorine grease
grease for vacuum
environment

2
 Materials Page of bearing
Inner and outer rings Rolling elements Cage Shield dimension table

Martensite
Page 8
stainless steel

Martensite
stainless steel
Page 9
＋
Special ball

Martensite Austenite Austenite

stainless steel stainless steel stainless steel

Page 10

Martensite
stainless steel

Page 11

3
 Bearings for clean rooms and transfer equipment

2. Ultra-clean bearings (vacuum / high temperature)

¡Appearance and configuration ¡Standard specifications

Inner and outer rings : Martensite stainless steel

Rolling elements : Martensite stainless steel
Cage : Austenite stainless steel
Lubricant : Special PTFE
Shield : Austenite stainless steel

¡Characteristics of particle generation and durability

1）Part No. ：608 1）Part No. ：608
2）Axial load ：10N 2）Axial load ：10N
3）Rotational speed ：50min−1 3）Rotational speed ：360min−1
4）Vacuum level ：10−5Pa 4）Vacuum level ：10−5Pa
clean bearings Ultra-clean
clean bearings Ultra-clean

150˚C
bearings
bearings

NTN
NTN

Room
Room temperature
temperature
Company A
Company A

150˚C
Room
temperature
Room
temperature

0 100 200 300 400 500 0 500 1000 1500 2000 2500

Relative number of particles (pieces/400 h) Endurance time (h)

¡Features ¡Application example: Transfer equipment of LCD panel

1. Low particle generation, corrosion resistance.
2. Low torque.
3. Can be used in high temperature and high vacuum
conditions. Bearing
4. Long life.

¡Ex.) part No.

LCD panel Bearing
MT2−SEB08J1ZZ1C3／0G

¡Operating temperature
∼ 260˚C

4
 3. Long life ultra-clean bearings (vacuum / high temperature)

¡Appearance and configuration ¡Standard specifications

Inner and outer rings : Martensite stainless steel

Rolling elements : Martensite stainless steel
Cage : Austenite stainless steel
Lubricant : Special PTFE and special ball
Shield : Austenite stainless steel

¡Durability
1）Part No. ：608
2）Axial load ：10N
3）Rotational speed ：2500min−1
ultra-clean bearings

Atmosphere 4）Atmosphere/vacuum (10−4Pa)

Long life

Vacuum

Room
Ultra-clean

Atmosphere temperature
bearings

300˚C

Vacuum

0 500 1000 1500 2000

Endurance time (h)

¡Features ¡Application example: Transfer equipment of HD substrate

1. Low particle generation, corrosion resistance.
2. Low torque. Carrier section
3. Longer life than ultra-clean bearing.
8 carriers/pallet
2 bearings/carrier
¡Ex.) part No.
MT2−5PT−SEB08J1ZZ1C3／0G Pallet section

¡Operating temperature
Bearing
∼300˚C

5
 Bearings for clean rooms and transfer equipment

4. Bearings with low particle generation grease (atmosphere / room temperature)

¡Appearance and configuration ¡Standard specifications

Inner and outer rings : Martensite stainless steel

Rolling elements : Martensite stainless steel
Cage : Austenite stainless steel
Lubricant : NTN low dusting grease
ZD-1 (L635)
Shield : Austenite stainless steel

¡Characteristics of particle generation and durability

1）Part No. ：608 1）Part No. ：6204
2）Axial load ：10N 2）Axial load ：67N
3）Temperature ：Room temperature 3）Rotational speed ：10000min−1
generation grease

bearings generation grease

1500min−1
Bearings with

Bearings with
low particle

low particle
NTN

NTN

100˚C
5000min−1
clean grease
clean grease

B company

1500min−1
B company

bearings

100˚C
5000min−1

0 10000 20000 30000 40000 0 500 1000 1500 2000

Number of particles (pieces/30 min) Endurance time (h)

¡Features ¡Application example: Transfer robot

1. Low particle generation, corrosion resistance.
2. Low torque.
3. Long life.

¡Ex.) part No.

SEB08J1ZZ1C3／L635QMP

¡Operating temperature
∼70˚C

Cam follower and bearing unit with low particle generation grease are available.
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 5. Bearings with low particle generation grease for vacuum environment (vacuum / high temperature)

¡Appearance and configuration ¡Standard specifications

Inner and outer rings : Martensite stainless steel

Rolling elements : Martensite stainless steel
Cage : Austenite stainless steel
Lubricant : Low particle generation
grease for vacuum
environment (LX23)
Shield : Austenite stainless steel

¡Dusting characteristics of particle generation

1）Part No. ：608
2）Axial load ：29.4N
3）Rotational speed ：200min−1
NTN Bearings 4）Vacuum level ：10−5Pa
with low particle
generation grease
for vacuum
environment

Bearings with
general fluorine
grease

0 2000 4000 6000 8000

Relative number of particles (pieces/24 h)

¡Features ¡Application example: LCD transfer robot

1. Low particle generation, corrosion resistance.
2. Can be used in high temperature and high vacuum
conditions.
3. Long life.

¡Ex.) part No.

SEB08J1ZZ1C3／LX23Q109

¡Operating temperature
∼200˚C

Cam follower and bearing unit with low particle generation grease for vacuum environment are available.
7
 6. Dimensions

6. 1 Ultra-clean bearings

B Main dimensions (mm) Allowable radial load 3）

r Part No.
d D B rs min1） N kgf

8 2 0.08 MT2-F-BC4-8C3 4） 1 0.10

r 9 2.5 0.1 MT2-F-684AX50C3 4） 1.6 0.16
4 10 3 0.16 MT2-F-BC4-10C3 4） 1.6 0.16
12 4 0.2 MT2-F-604ZZ1C3 4） 2.5 0.26
φD φd 13 5 0.2 MT2-SEB24J1ZZ1C3/0G 3.4 0.35

10 3 0.15 MT2-F-BC5-10C3 4） 1.7 0.17

13 4 0.2 MT2-SEB95AJ1ZZ1C3/0G 2.6 0.27
5 14 5 0.2 MT2-F-605ZZ1C3/0G 3.5 0.36
16 5 0.3 MT2-SEB25J1ZZ1C3/0G 4 0.41

12 3 0.15 MT2-F-BC6-12C3 4） 1.8 0.18

15 5 0.2 MT2-SEB96J1ZZ1C3/0G 3.7 0.38
Open type 2） 6 17 6 0.3 MT2-SEB06J1ZZ1C3/0G 6.1 0.62
19 6 0.3 MT2-SEB26J1ZZ1C3/0G 13.1 1.34

17 5 0.3 MT2-SEB97J1ZZ1C3/0G 3.9 0.40

r 7 19 6 0.3 MT2-SEB07J1ZZ1C3/0G 10.4 1.06
22 7 0.3 MT2-SEB27J1ZZ1C3/0G 16.9 1.72

19 6 0.3 MT2-SEB98J1ZZ1C3/0G 5.3 0.54

r 8 22 7 0.3 MT2-SEB08J1ZZ1C3/0G 16.9 1.72
24 8 0.3 MT2-SEB28J1ZZ1C3/0G 24.8 2.53

9.525 22.225 7.142 0.3 MT2-F-R6J1ZZ1C3/0G 4） 16.5 1.68

22 6 0.3 MT2-SEB900J1ZZ1C3/0G 13.4 1.37

26 8 0.3 MT2-SEB000J1ZZ1C3/0G 24 2.45
10 30 9 0.5 MT2-SEB200J1ZZ1C3/0G 27.8 2.84
35 11 0.6 MT2-SEB300J1ZZ1C3/0G 55.6 5.67

24 6 0.3 MT2-SEB901J1ZZ1C3/0G 14.1 1.44

12 28 8 0.3 MT2-SEB001J1ZZ1C3/0G 27.8 2.84
Shielded type 32 10 0.6 MT2-SEB201J1ZZ1C3/0G 37.4 3.82

28 7 0.3 MT2-SEB902J1ZZ1C3/0G 17.8 1.82

15 32 9 0.3 MT2-SEB002J1ZZ1C3/0G 31.2 3.18
35 11 0.6 MT2-SEB202J1ZZ1C3/0G 48.8 4.98

30 7 0.3 MT2-SEB903JR1XZZ1C3/0G 24.8 2.53

17 35 10 0.3 MT2-SEB003J1ZZ1C3/0G 37.1 3.79
40 12 0.5 MT2-SEB203J1ZZ1C3/0G 62.2 6.35

37 9 0.3 MT2-SEB904J1ZZ1C3/0G 36.3 3.70

20 42 12 0.6 MT2-SEB004J1ZZ1C3/0G 48 4.90
47 14 0.5 MT2-SEB204J1ZZ1C3/0G 77.1 7.87

42 9 0.3 MT2-SEB905J1ZZ1C3/0G 48 4.90

1) Minimum allowable chamfer dimension. 25 47 12 0.6 MT2-SEB005J1ZZ1C3/0G 63.2 6.45
2) Groove may be provided for seal in some cases. 52 15 0.5 MT2-SEB205J1ZZ1C3/0G 99 10.10
3) Allowable radial load is the maximum load when
47 9 0.3 MT2-SEB906J1ZZ1C3/0G 51.5 5.25
radial load is applied.
4) Allowable temperature for this bearing is 120˚C.
30 55 13 1 MT2-SEB006J1ZZ1C3/0G 103.5 10.56
For others, 260˚C. 62 16 0.5 MT2-SEB206J1ZZ1C3/0G 129.4 13.20

〈Example part No:〉 MT2 − SEB08 J1 ZZ1 C3 ／ 0G

Grease lubricant code
Internal clearance code (C3 clearance) Solid lubricant…OG
Low particle generation grease…L635
Shield code: Austenite stainless steel…ZZ1 Low particle generation fluorine grease
: No shield… No code …LX23
Cage code: Austenite stainless steel: J1
Basic No.
Solid lubricant code: Special PTFE …MT2 (ultra-clean bearing)
…MT2-5PT (long life ultra-clean bearing)
Grease lubrication…No suffix (indicated at end of part part No.)
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6. 2 Long life ultra-clean bearings

B Main dimensions (mm) Allowable radial Basic load ratings

load 2） dynamic static
Part No.
r d D B rs min1） N kgf （N） （N）

6 19 6 0.3 MT2-5PT-SEB26J1ZZ1C3/0G 13.1 1.34 2 340 885

r
7 22 7 0.3 MT2-5PT-SEB27J1ZZ1C3/0G 16.9 1.72 3 350 1 400

22 7 0.3 MT2-5PT-SEB08J1ZZ1C3/0G 16.9 1.72 3 350 1 400

8
φD φd 24 8 0.3 MT2-5PT-SEB28J1ZZ1C3/0G 24.8 2.53 4 000 1 590

26 8 0.3 MT2-5PT-SEB000J1ZZ1C3/0G 24.0 2.45 4 550 1 960

10 30 9 0.6 MT2-5PT-SEB200J1ZZ1C3/0G 27.8 2.84 5 100 2 390
35 11 0.6 MT2-5PT-SEB300J1ZZ1C3/0G 55.6 5.67 8 200 3 500

28 8 0.3 MT2-5PT-SEB001J1ZZ1C3/0G 27.8 2.84 5 100 2 390

12 32 10 0.6 MT2-5PT-SEB201J1ZZ1C3/0G 37.4 3.82 6 100 2 750

28 7 0.3 MT2-5PT-SEB902J1ZZ1C3/0G 17.3 1.77 3 650 2 000

Shielded type
15 32 9 0.3 MT2-5PT-SEB002J1ZZ1C3/0G 31.2 3.18 5 600 2 830
35 11 0.6 MT2-5PT-SEB202J1ZZ1C3/0G 48.8 4.98 7 750 3 600

30 7 0.3 MT2-5PT-SEB903JR1XZZ1C3/0G 22.4 2.29 4 650 2 580

17 35 10 0.3 MT2-5PT-SEB003J1ZZ1C3/0G 37.1 3.79 6 800 3 350
40 12 0.6 MT2-5PT-SEB203J1ZZ1C3/0G 62.2 6.35 9 600 4 600

37 9 0.3 MT2-5PT-SEB904J1ZZ1C3/0G 31.9 3.26 6 400 3 700

20 42 12 0.6 MT2-5PT-SEB004J1ZZ1C3/0G 48.0 4.90 9 400 5 050
47 14 1.0 MT2-5PT-SEB204J1ZZ1C3/0G 77.1 7.87 12 800 6 650

42 9 0.3 MT2-5PT-SEB905J1ZZ1C3/0G 42.6 4.35 7 050 4 550

25 47 12 0.6 MT2-5PT-SEB005J1ZZ1C3/0G 54.0 5.51 10 100 5 850
52 15 1.0 MT2-5PT-SEB205J1ZZ1C3/0G 99.0 10.01 14 000 7 850

47 9 0.3 MT2-5PT-SEB906J1ZZ1C3/0G 46.6 4.75 7 250 5 000

30 55 13 1.0 MT2-5PT-SEB006J1ZZ1C3/0G 90.2 9.20 13 200 8 300
1) Minimum allowable chamfer dimension.
2) Allowable radial load is the maximum load when radial load is applied.

9
 6. Dimensions

6. 3 Bearings with low particle generation grease

B Main dimensions (mm)

r Part No.
d D B rs min1）

12 4 0.2 F-604ZZ1C3/L635QMP
r 4 13 5 0.2 SEB24J1ZZ1C3/L635QMP

13 4 0.2 SEB95AJ1ZZ1C3/L635QMP
5 14 5 0.2 F-605ZZ1C3/L635QMP
φD φd
16 5 0.3 SEB25J1ZZ1C3/L635QMP

12 4 0.15 F-WBC6-12ZZ1C3/L635QMP
15 5 0.2 SEB96J1ZZ1C3/L635QMP
6 17 6 0.3 SEB06J1ZZ1C3/L635QMP
19 6 0.3 SEB26J1ZZ1C3/L635QMP

17 5 0.3 SEB97J1ZZ1C3/L635QMP
Shielded type 7 19 6 0.3 SEB07J1ZZ1C3/L635QMP
22 7 0.3 SEB27J1ZZ1C3/L635QMP

19 6 0.3 SEB98J1ZZ1C3/L635QMP
8 22 7 0.3 SEB08J1ZZ1C3/L635QMP
24 8 0.3 SEB28aJ1ZZ1C3/L635QMP

9.525 22.225 7.142 0.3 F-R6J1ZZ1C3/L635QMP

22 6 0.3 SEB900J1ZZ1C3/L635QMP
26 8 0.3 SEB000J1ZZ1C3/L635QMP
10 30 9 0.5 SEB200J1ZZ1C3/L635QMP
35 11 0.6 SEB300J1ZZ1C3/L635QMP

24 6 0.3 SEB901J1ZZ1C3/L635QMP
12 28 8 0.3 SEB001J1ZZ1C3/L635QMP
32 10 0.6 SEB201J1ZZ1C3/L635QMP

28 7 0.3 SEB902J1ZZ1C3/L635QMP
15 32 9 0.3 SEB002J1ZZ1C3/L635QMP
35 11 0.6 SEB202J1ZZ1C3/L635QMP

30 7 0.3 SEB903JR1XZZ1C3/L635QMP
17 35 10 0.3 SEB003J1ZZ1C3/L635QMP
40 12 0.5 SEB203J1ZZ1C3/L635QMP

37 9 0.3 SEB904J1ZZ1C3/L635QMP
20 42 12 0.6 SEB004J1ZZ1C3/L635QMP
47 14 0.5 SEB204J1ZZ1C3/L635QMP

42 9 0.3 SEB905J1ZZ1C3/L635QMP
25 47 12 0.6 SEB005J1ZZ1C3/L635QMP
52 15 0.5 SEB205J1ZZ1C3/L635QMP

47 9 0.3 SEB906J1ZZ1C3/L635QMP
30 55 13 1 SEB006J1ZZ1C3/L635QMP
62 16 0.5 aTSEB206J1ZZ1C3/L635QMP
1) Minimum allowable chamfer dimension.

10
6. 4 Bearings with low particle generation grease for vacuum environment

B Main dimensions (mm)

r Part No.
d D B rs min1）

12 4 0.2 F-604ZZ1C3/LX23Q8 2）
4
r 13 5 0.2 SEB24J1ZZ1C3/LX23Q12

13 4 0.2 SEB95AJ1ZZ1C3/LX23Q20
5 14 5 0.2 F-605ZZ1C3/LX23Q8 2）
φD φd 16 5 0.3 SEB25J1ZZ1C3/LX23Q24

12 4 0.15 F-WBC6-12ZZ1C3/LX23Q7 2）
15 5 0.2 SEB96J1ZZ1C3/LX23Q30
6 17 6 0.3 SEB06J1ZZ1C3/LX23Q15
19 6 0.3 SEB26J1ZZ1C3/LX23Q31

17 5 0.3 SEB97J1ZZ1C3/LX23Q6
Shielded type 7 19 6 0.3 SEB07J1ZZ1C3/LX23Q24
22 7 0.3 SEB27J1ZZ1C3/LX23Q19

19 6 0.3 SEB98J1ZZ1C3/LX23Q22
8 22 7 0.3 SEB08J1ZZ1C3/LX23Q109
24 8 0.3 SEB28J1ZZ1C3/LX23Q5

9.525 22.225 7.142 0.3 F-R6J1ZZ1C3/LX23Q18 2）

22 6 0.3 SEB900J1ZZ1C3/LX23Q19
26 8 0.3 SEB000J1ZZ1C3/LX23Q67
10 30 9 0.5 SEB200J1ZZ1C3/LX23Q38
35 11 0.6 SEB300J1ZZ1C3/LX23Q13

24 6 0.3 SEB901J1ZZ1C3/LX23Q14
12 28 8 0.3 SEB001J1ZZ1C3/LX23Q48
32 10 0.6 SEB201J1ZZ1C3/LX23Q59

28 7 0.3 SEB902J1ZZ1C3/LX23Q14
15 32 9 0.3 SEB002J1ZZ1C3/LX23Q33
35 11 0.6 SEB202J1ZZ1C3/LX23Q100

30 7 0.3 SEB903JR1XZZ1C3/LX23Q10
17 35 10 0.3 SEB003J1ZZ1C3/LX23Q34
40 12 0.5 SEB203J1ZZ1C3/LX23Q91

37 9 0.3 SEB904J1ZZ1C3/LX23Q17
20 42 12 0.6 SEB004J1ZZ1C3/LX23Q41
47 14 0.5 SEB204J1ZZ1C3/LX23Q50

42 9 0.3 SEB905J1ZZ1C3/LX23Q18
25 47 12 0.6 SEB005J1ZZ1C3/LX23Q46
52 15 0.5 SEB205J1ZZ1C3/LX23Q63

47 9 0.3 SEB906J1ZZ1C3/LX23Q12
30 55 13 1 SEB006J1ZZ1C3/LX23Q35
62 16 0.5 SEB206J1ZZ1C3/LX23Q65
1) Minimum allowable chamfer dimension.
2)Allowable temperature for this bearing is 120˚C. For others, 200˚C.

11
 7. Introduction bearings for special environments

7. 1 Cam followers 7. 2 Bearing units /Stainless steel series

CAT. NO. 36040

Features
¡NTN offers a rich assortment of stainless steel cam followers
that use low dusting grease or solid grease to maintain a clean
environment.

7. 3 Ball screws CAT. NO. 3903/E0

Features
¡Housing and inner/outer rings are made of stainless steel.
Maintain a clean environment by using low particle generation
grease or bearings with solid grease.

7. 4 Miniature sliding screws with plastic nut

CAT. NO. 60020

Features
¡All parts are made of stainless steel except the dust seal.
¡Ball screws are vacuum grease sealed or provided with
RAYDENT depending on working environment and conditions.
¡Low dusting; can be used in both atmosphere and vacuums.

7. 5 Plastic rolling bearings

CAT. NO. 5112/E00

Features
¡Combination of nuts made of BEAREE AS5000 and screws
made of stainless steel (SUS304) provides resistance to
various environments, like corrosion and high temperature etc.
¡Less noise than stainless steel ball screws.

CAT. NO. 30230

Features
¡Equipped with self-lubricating, corrosion-resistant plastic
raceways and glass or ceramic balls.
¡Doesn't require lubrication; offers lower torque than sliding
bearings.
¡Low dusting.
12