Installation and Use Manual

FC-280 Series
Mass Flow Controllers and Flowmeters
Mass Flow Controllers
FC-280A, FC-280AD, FC-280SA , FC-282S

Mass Flowmeters
FM-380A, FM-380AD
CONTENTS
SYSTEM DESCRIPTION ........................................................4 Bypass..........................................................................................16
PRINCIPLE OF OPERATION...................................................5 Valve..............................................................................................17
Flow Sensor......................................................................................5 Adjustment and Calibration Procedures......................................18
Bypass (Flow Splitter).....................................................................6 Calibration Indicated versus Actual Flow Rate.......................19
Valve...................................................................................................7 FC-280SA/FC-282S Recalibration..........................................19
Electronics........................................................................................8 FC-280SA/FC-282S Dynamic Response Adj........................19
Cover.................................................................................................8 FC-280SA/FM-382S Recalibration..........................................20
INSTALLATION………...........................................................9 FC-280SA/FM-382S Dynamic Response Adj........................20
Gas Connections............................................................................9 Valve Adjustment.........................................................................22
Electrical Connections...................................................................9 Bypass Adjustment.....................................................................22
Integral Display..............................................................................10 Range Change.............................................................................23
Environmental Requirements .....................................................10 Sensor........................................................................................23
Calibration......................................................................................10 Bypass.......................................................................................23
Mounting.........................................................................................11 Valve..........................................................................................25
OPERATING INSTRUCTIONS…….........................................11 Electronics ..............................................................................25
Installation and Start-up..............................................................11 TROUBLESHOOTING PROCEDURES…..................................26
Safety Features and Precautions................................................12 Initial Test.........................................................................................26
Operating Modes...........................................................................13 Replaceable Spare Parts................................................................27
MAINTENANCE, ADJUSTMENT & RANGE CHANGE………….…14 General Troubleshooting................................................................28
Routine and Preventative Maintenance....................................14. Electronics Troubleshooting..........................................................29
Cleaning........................................................................................15 Valve Troubleshooting....................................................................30
Fittings......................................................................................15 Sensor Replacement.......................................................................31
Sensor.......................................................................................15 Solenoid Valve Replacement.........................................................31
CERTIFICATE OF NON-HAZARDOUS CONTAMINATION.........45

LIST OF FIGURES
2. Flow Sensor...........................................................................5
4. Compression Gas Fitting Configuration..........................11
5. FC-280A/FC-280SA/FM-380A Bypass..........................15
6. FC-280S Bypass.................................................................16
7. FC-280A/FC-280SA/FM-380A Solenoid Valve.............18
9. Specifications......................................................................32
10A. FC-280SA/FC-282S Electrical Hook-up Diagram......33
11A. FC-280SA/FC-282S P.C.B. Assembly..........................34
16. FC-280A/FC-280SA/FC-282S Outline Drawing...........35

APPENDICES
Mass Flow Conversion Factors…...........................................36
Use of Conversion Factors..................................................36
Conversion Factor Tables....................................................38
SYSTEM DESCRIPTION
The low flow instruments have a user-adjustable range from 10
Tylan General Mode FC-280 Series Mass Flow Controllers sccm to 30 slm full-scale flow rate. This is accomplished in the
Accurately and reliably measure and control the mass flow rate of flowmeter section by adjusting the bypass. In the controller section,
gases. They have been specifically designed to Allow operation on many changes in flow
any gas having a known molar specific heat. Range can be accomplished by an external adjustment of the
control valve alone. Very large range changes may involve replacing
The FC-280 series of mass flow controllers and flowmeters of the valve orifice.
Include:
The instruments operate on ±15.0 VDC power, provide a 0 to 5.0
Mass Flow Controllers VDC indicated output signal linearly proportional to the flow rate,
Low Flow ( 10 sccm to 30 slm full-scale) are RFI/EMI protected and are both mechanically and electrically
FC-280A Fast response of less than 2 seconds interchangeable with the tylan general FC-260 series flow
FC-280AD Integral 3-1/2 digit display controllers. The “J” option provides 4-20 mA control and output
FC-280AJ 4-20 mA Input and output and is available when specified at tine of order. An adaptor fitting is
FC-280SA Ultra-fast response of 400-800 ms available for interchangeability with the tylan general FC-261 series
FC-280SA-P Ultra-fast response with valve drive instruments. Other inherent design features include:
signal on Pin D
● Enhanced stability of both zero and span
Medium Flow ( 50 slm to 200 slm full-scale) ● Insensitive o mounting position
FC-282S 5 seconds response ● Fast response with minimal overshoot
● External electrical valve override
Mass Flowmeter ● Normally closed solenoid valve with both
FM-380A 10 sccm to 30 slm mechanical and electrical “purge” capability
FM-380AD Integral 3-1/2 digit display ● Ease of maintenance
PRINCIPLE OF OPERATION carried downstream. The resulting shift in temperature makes the upstream

sensor cooler than the downstream sensor. This temperature difference

The flow controller is a self-contained, closed-loop control system (and corresponding electrical resistance difference) is directly proportional

which measures the mass rate of gaseous flow through the to the mass flow rate of the gas through the tube.

instrument, compares this with an externally commanded flow rate, The bridge output, being a direct function of the resistance difference, is
and adjusts the valve to control the flow to the commanded level. amplified and further linearized by the electronics to give a 0 to 5.0 VDC
The flow controller consists of four basic elements which indication of flow rate. Increasing the flow rate well above the full-scale
accomplish this function: range of the instrument will eventually cool the entire sensor tube and the
output signal will reverse and asymptotically approach zero.
● The flow sensor
● The bypass, or flow-splitter, which determines the
full-scale flow range of the measuring section
● The control valve
● The electronics which condition the flow signal and
drive the control valve

Flow Sensor

The flow sensor consists of two self-heated resistance thermometers

wound around the outside diameter of a thin-walled capillary tube. These

coils, each having a resistance of 330 ±13 ohms at 20°C, are connected

in a bridge circuit and supplied with a regulated current. The heat

generated by the power dissipated in the coils raises the tube temperature

approximately 70°C above ambient. At no flow, this heat is symmetrically

The capillary tube is dimensioned to have a minimal mass (for fast
distributed along the tube. With gas flowing in the sensor tube, heat is
response) and an extremely large length-to-diameter ratio to ensure

laminar flow over the full operation range. The optional large bore sensor The bypass consists of a tapered flow restrictor concentrically located in

tube is designed for low vapor press gas applications where the tapered bore of the base. The resulting annular flow path develops the

minimal pressure drop is required, but is limited to full scale flow rates required pressure drop versus flow rate relationship necessary to drive the

of 3 slm or less. sensor flow through its full operating range. Axial adjustment of the

restrictor in relation to the bore varies the thickness of the annular gap and

The housing which encases the sensor tube is precisely configured to thus provides a means for continuous adjustment of the full-scale range of

minimize natural convection natural convection currents from one coil to the instrument from 10 sccm to 30 slm.

the other, thus allowing the instrument to be mounted in any position with

no zero adjustment required to re-establish the original calibration. This The advantages of this patented configuration are as follows:

configuration minimizes the mass of the sensor resulting in a time constant

that is one-third that of other sensors of similar design. Over flow ● Excellent agreement between actual and theoretical gas
controller response can therefore be dynamically controlled to eliminate conversion factors is achieved, allowing the instrument to be
overshoot. used with any gas by simply varying the electrical gain in direct
proportion to the theoretical conversion factor.
Bypass(Flow-splitter)
● A wide adjustment range is provided within the same instrument
The FC-280A/FC-280SA/FM-380A bypass, which is located in the primary eliminating the need for pars replacement in order to change
flow path in the base assembly, produces a linear pressure drop versus the flow range.
flow rate between the inlet and outlet of the sensor tube, which in turn

produces a 0 to 100% sensor flow for 0 to 100% flow of the instrument. In ● Accuracy degradation due to contamination build-up is greatly
order to ensure a constant ratio between sensor flow and total flow reduced due to the large surface area of the restrictor and bore.
(independent of pressure, temperature, and gas properties), the bypass

arrangement has been designed to maintain the flow well within the laminar ● The restrictor can be easily removed and cleaned during
region of fluid flow over the entire range of the instrument. routine maintenance procedures.
 This arrangement provides consistent dynamic response and static
The FC-282S bypass consists of a variable area, cylindrical screen bypass stability with only a minimal need for electronic “tuning.”
which produces the necessary linear pressure drop to drive the sensor

through its operating range. This configuration is necessarily An adjustment on top of the valve is provided to allow for setting the
different from the annular FC-280A/FC-280SA bypass to accomm- odate relative position between the valve poppet and valve seat following re-
the higher flow rates of the FC-282S. assembly after cleaning or seat replacement (see Adjustment Procedures)

this adjusting nut may also be used to mechanically open the valve for

Valve purging purposes in the event of a power failure or an instrument

The control valve is a normally-closed, solenoid valve which is malfunction, which may necessitate removing the instrument from the gas

extremely fast, easily adjusted, and has 2% or better shutoff system.

capability. Except for the dynamic plunger, all gas wetted metal
surfaces are of 316 stainless steel. The plunger is 446 stainless Electronics
steel.
To ensure intrinsically safe operation, the circuit has been designed in

The range of the valve is determined by the size of the control accordance with the basic requirements of ISA-RP12.2, in the that there is

orifice, which is screwed into the controller base. These precision no inductance (except in the solenoid valve itself) and the capacitance

valve seats are 316 stainless steel and provide excellent control values are below the level which will provide enough energy to create a

resolution by engagement with the teflon face of the valve poppet. spark under foreseeable fault conditions. The higher capacitance elements

The valve seats are easily replaceable for cleaning and instrument are in series with large resistance values, which provide the necessary

range changing. current limiting protection.

The valve poppet is uniquely designed to provide a relatively The circuit consists of three interrelated sections: The bridge supply circuit

constant control range (stroke) for each size of the valve seat. consists of an operational amplifier which supplies the flow sensor bridge

different ranges within the full range of a particular valve seat are with a constant current of 13.0 milliamps as determined by the reference

accommodated by the amount of voltage applied to the valve. voltage. The bridge current may be increased to the 15.0 milliamp level
required for operation with the large bore sensor. Linearity results are fed Output and setpoint signal. First, the control deviation is computed. This

back from the flowmeter output to alter the bridge current as a function of signal is then processed by the true P-I-D controller in order to drive the

the output with linearity adjustment potentiometer adjusting the magnitude control valve using a transistor. Control parameters are influenced by

and sign (positive or negative) of this feedback. This linearity control has proportional band, integral action, and differential action. The valve

its maximum effect at 50% output and little or no Effect at 0% and 100% protection circuit disables the valve driver at setpoints below a threshold

output, resulting in virtually independent zero, gain and linearity voltage of 50 mV. Additionally, there is an external setpoint override

adjustments. capability through pins D and L Pin D is internally pulled low to -14V.

Grounding this pin to common overrides the setpoint and closes the valve.

The flowmeter amplifier circuit amplifies the bridge output to give a 0 to 5.0 Similarly, TTL input ‘low ‘ at pin L effectively disables the setpoint and

VDC output signal linearly proportional to flow rate. The gain adjustment closes the valve.

pot provides a 20% gain adjustment, and the zero adjustment pot provides

a ±30% zero adjustment. NOTE: With “P” option (FC-280SA/FC-282S only), grounding pin D opens

the valve to maximum, see Figure 13.

The speed-up circuit (FC-280SA/FC-282S only) provides the necessary

frequency response correction for the output signal. This results in Cover
expanding the sensor cutoff frequency by about one decade, which is

equivalent to “speeding-up” the sensor response time. P4 allows for The cover on the instrument is designed to accept both round and flat

tuning to the original sensor cutoff frequency. cable mating connectors in a single configuration. The cover is made of

high strength plastic and is copper-nickel-chrome plated to provide 60db

The setpoint signal conditioning circuit limits the speed of setpoint (minimum) attenuation of RF noise. This, in conjunction with the eight roll-

changes. A step change of setpoint is converted to a signal with tapered off and filter capacitors in the electronics, provides excellent EMI

edges enabling the controller to follow the setpoint without large control protection.

deviations at any time.

The controller circuit generates the valve drive signal as a function of

INSTALLATION POWER : Any ±15 VDC power supply meeting the requirements as

For maximum performance and service life, the instrument should be designated in the specifications may be used to energize the instrument.

installed in a clean, dry atmosphere, relatively free of shock and vibration.

Sufficient room for access to the electronics and plumbing should be CONTROL SIGNAL : Any 0 to 5.0 VDC command voltage having a source

provided to facilitate maintenance and removal for cleaning. Fitting dust impedance of 2500 ohms or less may be used. The input impedance of the

caps should not be removed from the instrument until installation. flow controller is 1 megohm (minimum). 4-20 ㎃ current option is also

available. Contact factory for details.

Gas Connections
The various types of fittings available are shown in Figures 3 and 4. Tubing OUTPUT INDICATION : Any 0 to 5.0 VDC meter with at least 1000 ohms/volt

should be pre-cleaned and polished to eliminate particulate contamination can be used to provide visual indication of the mass flow rate. Recorders,

and ensure leak-tight operation. After installation of the instrument and voltage dividers (for conversion to engineering units) and other

prior to its use, the plumbing system should be thoroughly leak-tested and instrumentation may be added, provided the total load impedance is mo

purged. Since the control valve in the instrument is not guaranteed to less than 2000 ohms. The source impedance of the flowmeter output

provide positive shut-off, it is recommended that a separate shut-off valve signal is less than 1 ohm. The FC-280AD/FM-380AD contains a built-in

be installed in series (upstream to eliminate a flow surge during turn-on display which may be used to read the output and control signals.

downstream to prevent back migration of contaminants in to the control

valve or both). NOTE : Exercise caution when connecting the instrument to currently

available readout boxes and calibrators which are manufactured by Unit

When the FC-280A/FC-280SA is used to replace the FC-261, an outlet Instruments, Inc. This equipment applies 15VDC to pin E (FC-280SA/FC-

adaptor kit (Tylan General P/N 905516001) is available to extend the overall 282S valve test point). With jumper option “P” (see Figure 13) the valve

length of the flow controller, matching the length of the FC-261. test point is moved to pin D, which makes it compatible with Unit

Instruments’ test sets but no longer retrofittable with the Tylan General FC-

Electrical Connections 260 series soft-start function.

Refer to the appropriate Electrical Hookup Diagram.
 temperature depending upon the molecular structure of the gas, it is

Integral Display (FC-280AD/FM-380AD only) recommended that the instrument be calibrated at the actual operating

The FC-280AD/FM-380AD features a 3-1/2 digit liquid crystal display pressure.

mounted in the side of an otherwise standard FC-280A/FM-380A.

Additional power consumption for the 1.25” X 0.5” display with 1/2” high is NOTE : The pressure coefficient of ±0.007 % per psi (±0.001 % per kPa)

negligible. generally applies to monatomic and diatomic gases only.

During normal operation the display shows the indicated flow rate. The flow controllers, which can be pressurized to 1500 psig (10,500 kPa)

Depressing a momentary push button on the side of the instrument without damage, have a maximum operating pressure of 150 psig and the

switches the display to read the commanded setpoint. The display may be differential pressure (inlet to outlet) must be maintained within the

set to read in engineering units (sccm or slm) or as a percentage of full specified 10 to 40 psid (70 to 275 kPa) range. Lower differential pressure

scale. ranges are available on special order.

The flow controllers may be operated into a vacuum as long as the inlet

Environmental Requirements pressure is 15 psia or greater. Lower differential pressure ranges are

Refer to Figure 9- Specifications. available on special order.

TEMPERATURE : The instrument may be operated at any temperature Calibration

between 0°C and 50°C, provided the gas and ambient temperatures are Each instrument is factory calibrated for the specific flow range and gas

maintained equally. Since the indicated flow rate has a temperature indicated on the nameplate. Standard factory calibration is within ±1.0%

coefficient of ±1 % per °C, the user may want to calibrate the instrument and is referenced to standard temperature and pressure * The calibration

at the actual operating temperature to maximize the measurement accuracy. for other gases can be approximated to ±5% using the conversion factor

charts. Factory calibration utilizes the gases on Gas Flow Conversion

PRESSURE : Flow controllers may be operated at any gas pressure up to Factor Charts. Calibration checks with other gases can show discrepancies

150 psig (1135 kPa). Since the indicated flow late varies in direct of up to ±5%.
proportion to specific heat (Cp), which varies differently with pressure and
To obtain calibration accuracy of ±1% after range change or for other

gases, precision calibration equipment will be required. As detailed in the

Adjustment and calibration procedures section, range changes can be

made to within ±10% by removing the inlet fitting and adjusting the

bypass. Fine tuning to the desired accuracy level can then be

accomplished by adjusting the potentiometers on the printed circuit board

in conjunction with a reference flow standard.

NOTE : In accordance with SEMI Standard E12-91, Standard Pressure and

Temperature are defined as 760mmHg and 0°C respectively.

CAUTION : An instrument originally calibrated for a non –reactive gas

should not be converted for use with a reactive gas unless all of the seals

are replaced with a suitable compound. Additionally, any instrument which

has been in reactive or corrosive gas service should be thoroughly purged OPERATING INSTRUCTIONS
and cleaned prior to conversion to another gas. Instruments are factory

assembled using Viton for non reactives, Neoprene for Ammonia, and Installation and Start-up
Kalrez for all other reactive and corrosive gases unless specified otherwise. The interconnect cable should be tested separately for continuity, pin-to-

Refer to spare parts O-ring Kits. pin shorts, and correct pin assignments per the electrical hook-up diagram

shown in Figure 10. The insulation resistance between pin 2 and the base

Mounting of the instrument should be verified to exceed 50 megohms at 50 VDC,

Two 8-32 UNC tapped holes are provided for mounting. The instrument is and the ground connection between pin 1 and the base should be verified

essentially insensitive to mounting position. Refer to Figure 16 for to be less than 1 ohm. After engaging the mating connector, secure it to

mounting configuration. the cover with two 4-40 X 3/4 inch long screws. Do not over-torque. After
installation in the system and prior to operation, any reactive gas system
should be thoroughly leak checked and then purged with dry nitrogen to voltage voltage is within a few millivolts of the setpoint, the flow controller

eliminate the presence of air and moisture. Because the instrument is is controlling properly. Check for this condition at the highest and lowest

equipped with a normally-closed control valve, it cannot be purged unless flows anticipated at both the highest and lowest input-output pressure

the valve is commanded to open. This can be done electrically in two ways. differentials anticipated.

With ± 15 volt power applied, apply either a full-scale(5 VDC) setpoint or

ground the valve test point (normally pin E, with “P” option, pin D). Safety Features and precautions
Every effort has been made in the design of the instrument to provide safe,

A “cycle” purging technique is more effective in removing atmospheric trouble-free operation. Key features include reverse power supply polarity

contaminants than a simple continuous purge gas flow. To cycle purge, protection, output over-voltage and short circuit protection, low

alternate the flow of purge gas with a pump down of the gas system to component temperatures, and conformance to intrinsic-safety design

vacuum for several cycles. If vacuum is not available, reducing the criteria. Additionally, a built-in “threshold” circuit ensures that the valve is

pressure to zero psig for several cycles is recommended. Cycle purging commanded closed at zero command independent of any existing output

helps remove contaminants from small, blind cavities in the system which offset, and the valve automatically closes in case of a power failure.

together constitute a virtual leak source. A more detailed procedure can be

found in Appendix B. Two other features are provided for the operator’s convenience during

start-up, abnormal, or fault conditions. First, the valve command circuit

Apply ±15 VDC power and allow a 30 minute warm-up time before can be overridden externally to either drive the valve fully open or fully

pressurizing the system with process gas. If the indicated output does not closed. Connecting pin E to 0 VDC will drive the valve open, while

settle to zero to within ± 1% full scale (or the level of zero desired), re- connecting pin D to 0 VDC will drive the valve closed. A second input to

zero the instrument (see Adjustment Procedures) before proceeding. Once close the valve is provided on pin L. This input is active low and conforms

the zero has been verified, pressure may be applied. After establishing that to TTL Logic levels. Second, should there be a need to purge the system

no hazardous condition will be created by the venting of process gas, flow during a power failure or instrument malfunction prior to removing the

controller operation may then be verified over the complete operating instrument from the system for repair, the valve may be mechanically

range. If there is any question that gas system pressures may not be opened by first removing the instrument cover and then turning the
correct, verify operation with the following procedure: If the flow output adjusting nut on top of the valve one or two turns counterclockwise. Re-
adjustment of the valve after purging or repair is described in the sources of RF noise and / or mechanical vibration. If this is

Adjustment Procedures. unavoidable, proven methods of instrumentation filtering cable

shielding, and/ or shock mounting should be utilized.

The following precautions should be taken by the user to prevent damage, 9. See Caution Note on page 6 before converting any instrument for

minimize safety hazards, and maximize performance. operation on a gas other than what is was originally calibrated for

1. Use pre-cleaned tubing, free of particulate contamination. or previously used on.

2. Thoroughly leak test the entire system prior to operation

(recommended level is 1X10-9 cc/sec of helium or less)

3. Use only clean, moisture-free(dry) gases. Operating Modes

4. Purge only with dry nitrogen (or other inert gas) before and after In general, the instruments may be operated at any pressure and

breaking into the system. Connecting pin E to 0 VDC will readily temperature that falls within the limits stated in the specification. Optimum

allow for this by driving the valve open. performance, however, can be achieved and will prevail if the operating

5. DO NOT purge reactive gas systems with inert gases between runs pressure and temperature are pre-determined and controlled to a narrow

unless it is required by the process. Even “dry” gases contain range. Calibrating and “fine tuning” the instruments at the actual operating

some amount of moisture which will result in contamination build- pressure, temperature and flow rates can significantly improve the

up. performance characteristics.

6. NAVER insert or unplug the connecting cable or the control valve

leads with power on if there is a possibility that the ambient The instruments are factory calibrated at an ambient temperature of 23°C

atmosphere might be explosive. ±13 0°C and 30 psig ± 10 psig (315 kPa ±70 kPa) inlet pressure and

7. ALWAYS command no flow or ground pin D or pin L when the gas corrected to standard conditions. Flow controllers are adjusted to pass full

supply is shut off. The command signal should be interlocked with rated flow at 8 psig (160 kPa) inlet pressure (with 0 psig outlet pressure)

a series shutoff valve (as shown in Figure 10) to prevent and shut down to less that 2 % of full scale at 40 psig (380 kPa) inlet

unnecessary over-heating of the control valve during shutoff, and pressure. Response time is verified at both extremes.

excessive flow surges after turn-on.

8. Avoid installation of the instrument in close proximity to high In vacuum systems, flow controllers maintain their calibration accuracy due
to the pressure drop of the control valve downstream of the flow sensing MAINTENANCE, ADJUSTMENT AND RANGE CHANGE
section. The increased pressure drop of the valve due to the increased gas

velocity reduces the full-scale flow rate and unless there is sufficient inlet Routine and Preventative Maintenance
pressure available to overcome the increased pressure drop required, It is recommended that a routine maintenance schedule be established on
increasing the range of the instrument and/or re-adjustment of the valve each instrument in order to maximize its useful service life. This would
and /or the valve voltage may be necessary. include, as a minimum, cleaning and recalibration. The optimum (or

necessary) service period being dependent on usage, environ-mental

Since the control valve is normally closed, it is not necessary to provide an conditions, gas corrosiveness, etc., must be established by the user based

external time-delayed “soft-start” signal provided the command signal is upon historical experience in that particular application.

maintained at zero during the “off” mode and is then applied to the

instrument at the same time (or after) pressure is applied. Alternately, pin D The recommended steps for routine and preventative maintenance are as

connected momentarily to ground prior to applying gas pressure also follows :

prevents excessive flow transients at turn-on. A slower ramp change may 1. Purge the instrument with dry nitrogen for a minimum of 30

also be selected for vacuum systems which have small volumes and large minutes prior to removal from the system.

flow rates or in other applications where a slower ramped change in flow 2. Verify the calibration of the flow metering section by comparison

rate is desirable. with a suitable reference standard or calibrator.

3. Operate the instrument in the control mode over its entire

Flow controllers may be operated at inlet pressures of up to 150 psig operating range (2 to 100 % full scale) at the minimum and

(1150 kPa), provided the differential pressure is maintained within the maximum inlet pressures of 10 and 40 psig(380 kPa). Check

specified range for the full scale flow rate (see Figure 9 Specifications) response, stability and control resolution.

and the outlet pressure of the flow controller is regulated to a relatively 4. Remove the inlet and outlet fittings and visually examine for signs

constant level. Flow controllers can withstand pressure surges of up to of contamination. Examine the seals for any evidence of hardening,

1500 psig (10,500 kPa) without damage, but are not designed to operate swelling or contaminant accumulation.

in a controlling mode above 150 psig (1150 kPa) inlet pressure. 5. Based upon the results of steps 1 through 4 above, either reinstall
in the system (followed by a nitrogen purge) or proceed to the
 applicable Cleaning, Adjustment and/ or Calibration Procedure d. Blow dry with dry nitrogen or air.

described in this manual.

Individual flow-path elements should be cleaned as follows:

Cleaning
Should the instrument show symptoms of internal flow path contamination, Fittings

it should be disassembled and cleaned. The seals on the fittings, sensor Remove the fittings from the base and clean individually.

and valve should be examined for hardening, swelling, inflexibility, and / or

contamination accumulation and should be replaced if any of these Sensor

symptoms prevail relative to new and unused seals. The recommended Remove the P.C.Board from the assembly, then remove the two screws

sequence of solvents used for cleaning (either for flushing the assembled which secure the sensor assembly to the base. Run a .007 inch diameter

instrument or for soaking individual components in an ultrasonic cleaner) is wire (stainless steel or piano) through the full length of the sensor tube 3

as follows: or 4 times. Replace the sensor on the base and flush with solvent during

the Bypass Cleaning Procedure as described below.

For instruments used with all gases except those containing silicon or

germanium compounds:

a. Distilled water (2 to 3 minutes)

b. Alcohol (2 to 3 minutes)

c. Blow dry with dry nitrogen or air.

For instruments used with gases containing silicon or germanium com-

pounds :

a. A solution of 2 % HF : 90% H2O and 8% HNO3 (3 to 5 minutes).

b. Distilled water ( 2 to 3 minutes)

c. Alcohol (2 to 3 minutes)
 If this operation is performed carefully, no further bypass adjustment

Bypass FC-280A/FC-280SA/FM-380A (see Figure 5) should be required to re-establish the original calibration within the

Loosen center locking shoulder screw one turn using a 7/64 inch Allen adjustment range of the potentiometer in the electronics.

wrench. With a 1/4 inch flat head screw-drive, turn the bypass clockwise

fully into the bore of the base. IMPORTANT: Count the exact number of

turns it takes to hit bottom(N) and do not over-torque once the stop is

reached. At this point, the bypass is closed and the sensor passageway

can be solvent flushed and nitrogen purged through the inlet and outlet

ports of the base. (Note: The valve will have to be mechanically opened or

removed from the base during the operation.)

To clean the bypass, back it out of the bore by turning the bypass

counter-clockwise. Either flush in place or, in the case of severe

contamination build-up, remove and clean separately by screwing the

bypass fully off of the shaft.

Bypass FC-282S (see Figure 6)

After cleaning, reinstall the bypass as follows: Remove the inlet fitting. Using a 3/4-inch wide flat blade screwdriver, turn

bypass assembly counter clockwise until it becomes loose and can be

1. Screw the bypass fully into the bore (clockwise) until it bottoms out removed. Note: Be careful not to turn the center adjustment screw. After

in the bore. Do not over-torque once the stop is reached. cleaning, thread the bypass back into the flow body and firmly tighten

2. Turn the bypass exactly (N) turns counter-clock-wise (as against shoulder.

previously noted during disassembly) thereby moving the bypass

back out to its original axial position.

3. Tighten the shoulder screw into the threaded shaft with a torque of
15 to 20 inch-pounds. CAUTION! Do not over-torque.
Valve FC-280A/FC-280SA (see Figure 7) and the valve O-ring and replace if necessary. (NOTE: Be

For minor contamination, the valve can be cleaned in place by sure to re-lubricate the O-ring with Halocarbon grease for

mechanically opening the valve, flushing with solvent, purging with dry Viton O-rings or Krytox grease for Kalrez O-rings prior to re-

nitrogen and then resetting the valve during test as described in the Valve installation into the base).

Adjustment Procedure. To mechanically open the valve, turn the adjusting 5. Reinstall the plunger assembly making certain that the spider
nut on top of the valve 2 to 3 turns counter clockwise with a 5/16 inch spring locates concentrically in the counter-bore of the inner
open-end box wrench. sleeve assembly. Tighten the retaining nut with a torque of 20

(± 3) inch pounds and verify that the spring is positively held

For severe contamination, the valve assembly and valve seat can be in place with no axial or rotational movement.

removed from the vase and cleaned separately. This is done as follows: 6. Replace the valve assembly by inserting it straight down into

1. Unplug the valve from the P.C.Board(CAUTION! Always make the base. Locate the valve coil leads towards the P.C.Board

sure power is off before disconnecting or reconnecting the to provide maximum clearance for the valve adjustment

valve to the P.C.Board). Remove(or loosen) the P.C.Board wrench. Secure the valve in place by alternate tightening of

from the base assembly to provide clearance for the removal the valve flange screws with 15 inch-pounds of torque.

of the valve assembly. 7. Adjust the valve during test as described in the Valve

2. Remove the two screw which secure the valve flange to the Adjustment Procedure.

base and pull the valve assembly out completely.

3. If further disassembly is necessary (due to the level of

contamination), remove the plunger assembly (plunger,

poppet, and spring) by holding the inner sleeve assembly at

the top of the valve with a 5/16 inch ring-wrench and

removing the valve retaining nut with a 1/2 inch open-end

wrench.

4. Thoroughly clean the plunger assembly and the inside of the

inner sleeve assembly. Examine the poppet sealing surface
Valve FC-280S

Due to the complexity of the high flow valve with its necessary sequence

of internal assembly, mechanical adjustments and/or disassembly should

not be attempted by other than qualified Tylan General service personnel.

To clean, do not disassemble the instrument. Energize the valve, solvent

flush then purge with dry nitrogen for 1 hour.

After cleaning or replacement of the sensor, bypass or valve assemblies,

the instrument must be adjusted and recalibrated against a suitable

reference standard or calibrator to re-establish the original calibration and

performance characteristics.

Adjustment and Calibration Procedures

In order to maintain the original factory calibration and performance

characteristics of the instrument, the following adjustments may be

necessary during routine maintenance and servicing and will definitely be

required after disassembly for cleaning and/or parts replacement.

Calibration – Indicated Versus Actual Flow Rate 4. Either mechanically open the valve by turning the adjusting nut on

Each controller is factory calibrated for the specific flow and gases top of the valve 2 to 3 turns counter-clockwise, or electrically drive

indicated on the nameplate. Standard factory calibration is within ±1.0%. the valve open by connecting pin E to pin C (0 VDC). This will

The calibration for other gases can be approximated to ±5% by using the override the control loop, allowing flowmeter operation.

conversion factors shown in the Conversion Factor Tables. 5. Remove the outlet gas line and cap off the instrument to assure zero

flow through the sensor. Adjust ZERO potentiometer P1 to make the

Factory adjustments should not be altered unless precision gas flow indicator read zero.

measuring equipment is available for calibration. Rotameters do not have 6. Reconnect the outlet gas line and adjust the flow to the full-scale

sufficient accuracy for flow measurement calibration unless they have been value. Set the output to read 5.00 VDC at the full-scale flow rate

specifically calibrated and the proper corrections are made for temperature using the Gain potentiometer P2.

and pressure. For access to the electronics, remove the two cover screws 7. Recheck zero as described in step 5.

and carefully lift the cover from the assembly. If electrical adjustments are 8. Linearity adjustments are not normally required. After achieving

made with the cover removed and the PC board exposed, be very careful calibration at zero and maximum flow, the midpoint calibration may

not to break wires or create short circuits while the instrument is open. be checked by setting the flow to one-half of full-scale. If the

indicator does not read 2.50 ±0.025 VDC, adjustment the output to

Recalibration FC-280SA/FC-280S 2.50 VDC using the LINEARITY potentiometer P3. Although this

This may be accomplished as follows : adjustment is essentially independent, steps 5 and 6 should be

repeated until all three points are within the desired calibration.

1. Thoroughly flush and dry the instrument to remove contaminants 9. The flowmeter section of the flow controllers can be calibrated with

(see Cleaning Procedures). the instrument operation in the controller mode and using the

2. Connect a source of gas to the inlet and a suitable flow standard to setpoint control to dial in the desired flow rate. Adjustments should

the outlet. If a volumetric calibrator is used, be sure to apply the be made as in steps 5 through 8. When adjusting the gain and

proper density corrections to maintain the mass flow calibration. linearity potentiometers, the actual flow will change rather than the

3. Connect the power and indicator wires (see Figure 10A Electrical output voltage to the commanded setpoint voltage.
Hook-up Diagram). 10. If the instrument cannot be brought into calibration within the
 adjustment range of P2 or P3, the bypass will have to be adjusted. 3. Supply the instrument with the intended usage gas or a suitable

This procedure is described in the Range Change section of this substitute gas at the intended operating conditions including inlet

manual. pressure.

11. When using a test gas other than the intended usage gas, a 4. Generate step changes of the setpoint signal. For example, 50% to

correction factor equaling the ratio of the conversion factors of the 100% and vice versa, and watch the output signal using a storage

two gases must be applied. See the Conversion Factors section, oscilloscope or a fast chart recorder.

Appendix A for further explanation. 5. Adjust potentiometer P4 and resistor R29 subsequently, until the

instrument shows optimum response characteristics.

Dynamic Response Adjustment(FC-282SA/FC-280S only) potentiometer NOTE : Speeding-up is accomplished by adjusting P4 clockwise. If

P4 provides the means for tuning the speed-up circuit, and R29 is to be instability occurs before the desired speed is established,

changed for optimizing stability and dynamic response characteristics of adjust P4 counter clockwise until stability is achieved. Too

the control loop. While these adjustments are factory set to give repeatable low resistance values of R29 results in oscillation.

response characteristics independent of gas density and inlet pressure, the

user may want to alter the settings for optimized performance under the Recalibration FC-280A/FM-380S

particular operating conditions. This optimizing may also be required after This may be accomplished as follows :

range changes or after range changes or after replacement of sensor or

control valve. When doing any readjustment the following procedure should 1. Thoroughly flush and dry to remove contaminants(see Cleaning

be followed : Procedures).

1. The first step is to verify the calibration of the mass flow controller. 2. Connect a source of gas to the inlet and a suitable flow standard to

The procedure for this is detailed in the calibration section of this the outlet. If a volumetric calibrator is used, be sure to apply the

manual. proper density corrections to maintain the mass flow calibration.

2. Start with the previously set adjustment or alternately center 3. Connect the power and indicator wires (see Figure 10 Electrical

potentiometer P4, and set R29 TO 402㏀ Hook-up Diagram).

NOTE : A resistance decade box is useful for finding the optimum 4. Either mechanically open the valve by turning the adjusting nut on
value of R29. top of the valve 2 to 3 turns counter-clockwise, or electrically drive
 the valve open by connecting pin K to pin F (-15 VDC). This will to the commanded setpoint voltage.

override the control loop allowing flowmeter operation. 10. If the instrument cannot be brought into calibration within the

5. Remove the outlet gas line and cap-off the instrument to assure adjustment range of R9, the bypass will have to be adjusted. This

zero flow through the sensor. Adjust zero potentiometer R3 to make procedure is described in the Range Change section of this manual.

the indicator read zero. 11. If it is desired to calibrate the flow metering section for a gas other

6. Reconnect the outlet gas line and adjust the flow to the full-scale than that of the original factory calibration, determine the gas

value. Set the output to read 5.00 VDC at the full-scale flow rate conversion factor relative to N2 from the Conversion Factor Tables

using the GAIN potentiometer R9. and then activate the appropriate positions ( 1 through 7) of Dip

7. Recheck zero as described in step 5. Switch SW1 in accordance with Figure 15.
8. Linearity adjustments are not normally required. After achieving NOTE : Factory calibration is done with the dip switch set to the

calibration at zero and maximum flow, the midpoint calibration may conversion factor relative to N2 for the nameplate gas. If the

be checked by setting the flow to make the indicator read 2.50 VDC. conversion factor of the nameplate gas is less than 0.50, the dip

The calibrator should then measure half of the full-range flow rate switch is set to 1.00

within ± 0.5% of full-scale. If not, set the flow rate at one-half of 12. When using a test gas other than the intended usage gas, a

the full-scale value, and adjust the output to 2.50 VDC using the correction factor equaling the ratio of the conversion factors of the

LINEARITY potentiometer R19. Although this adjustment is essentially two gases must be applied. See the Conversion Factors section for

independent of the zero and full-scale adjustments, steps 5 and 6 further explanation.

should be repeated until all three points are within the desired

calibration. Dynamic Response Adjustment (FC-280A only)

9. The flowmeter section of the flow controllers can be calibrated with Dip Switch SW1, positions 10.11. and 12 provide the means for optimizing

the instrument operating in the controller mode and using the the stability and dynamic response characteristics of the control loop.

setpoint control to dial in the desired flow rate. Adjustments should While these switch positions are factory set to give repeatable response

then be made as in steps 5 through 8. When adjusting the gain and characteristics independent of gas density and inlet pressure, the user may

linearity potentiometers, the actual flow will change rather than the want to alter the settings for optimized performance under his particular set
output voltage since the controller acts to control the output voltage of conditions (operation pressure, gas, and flow rates). To assist in doing
so, the following explanation of these switch functions are presented (refer resistance to achieve stability (typically from 100K to 30K – i.e., SW1

to Figure 14, FC-280A Schematic). position 11 “on”).

1. SW1 positions 10 and 11 provide four separate selections of the Valve Adjustment (FC-280A/FC-280SA)

dynamic feedback resistance of the control loop. The higher the Valve Adjustment is accomplished through the following procedure :

value of this resistance (positions 10 and 11 “off”), the higher the

A.C. gain. This produces the best response and overshoot 1. Plumb the inlet of the instrument to a regulated supply of the

characteristics, but is prone to control instability. Switching positions appropriate gas. Connect a reference flowmeter in series, or monitor

10 and / or 11 “on” reduces the resistance, thereby improving the the flow as measured by the flow metering section of the instrument

stability at the expense of optinal response characteristics. it self.

2. SW1 position 12 provides selection of the setpoint ramp rate from 2. Remove the cover to permit access to the valve assembly. Plug the

1/2 second (first order time constant) in the “on” position, to 1 valve into the P.C.board prior to applying power to the instrument.

second in the “off” position. The longer time constant typically gives Starting with the valve mechanically open and the input command

better over and undershoot characteristics in response to a step signal at zero, slowly apply inlet pressure to the controller (to 40

change in setpoint and provides a smoother transition in actual flow psig). Mechanically close the valve by turning the adjusting nut

rate. The shorter time constant may be desirable when process runs clockwise until the flow is reduced to less than 2% of full scale.

are very short and the time to reach setpoint is critical to the 3. Set the inlet pressure to the minimum (10 psig for up to 5 SLM full

process. scale, and 15 psig for 6 to 30 SLM full scale) and command 100%

3. The optimal switch settings for full-scale flow rates of 20 SCCM and flow rate. Verify full-scale output. On the FC-280A/FM-380A, set

below are positions 10 and 11 “on” and position 12 is “off”. For SW1 position 9 to “off” for full-scale flow rates of 1 SLM or less or

full-scale rates above 200 SCCM, best results have been achieved “on” for full-scale flow rates greater than 1 SLM before setting the

with positions 10 and 11 “off” and position 12 “on”. inlet pressure.

4. It should be noted that the required valve control voltage has some 4. While monitoring the voltage applied to the valve (pin E to pin F),

influence on the optimization of the dynamic response in that the mechanically “fine-tune” the valve adjustment to achieve as close to
higher voltages require a decrease in the dynamic feedback the optimal 8 VDC control voltage as possible. Repeat this process
 until the valve controls from <2% to 100 % full scale at both use with small bore sensor.

extremes of pressure. FC-280A/FM-380A only

5. After the valve is properly adjusted and tuned dynamically (see Set Dip Switch SW1 position 8 to the proper sensor current (i.e.,

below), tighten the lock nut on the top of the valve with 15 inch- “off” for the small bore sensor to provide 13 milliamps or “on” for

pounds of torque. This will lock the adjusted position in place. the large bore sensor to provide 15 milliamps).

NOTE : Both steps are ultimately important since the increased

Bypass Adjustment current for the large bore sensor is necessary to compensate for

If, during calibration, the desired calibration cannot be achieved within the additional heat loss to maintain the proper temperature rise, and is

range of the potentiometers, the bypass will have to be readjusted. The essential to achieve the specified accuracy and linearity of the flow

procedure for this is detailed in the Bypass Adjustment Procedure listed in signal.

the Range Change section below. 3. Readjust the bypass as described in the Bypass Adjustment

Procedure and recalibrate per the Calibration Procedure previously

Range Change described.

Following are the procedures necessary to convert any instrument from

one full scale flow range to another. Bypass FC-280A/FC-280SA/FC-380A :

The FC-280A, FC-280SA and FM-380A have been purposely designed to

Sensor : minimize the need to replace parts in order to change the full scale flow

In order to change the range of a reactive gas instrument containing a range of the instrument. The continuously adjustable bypass is the key to

large bore sensor (902343-009) to a full-scale flow higher than 3 slm, the the wide range of the instrument. For conversion factors of less than 0.50

sensor must be replaced with the small bore sensor (902343-008). This is on the FC-280A/FM-380A only, set Dip Switch S1 positions 2,5, and 6

done as follows : “off”(conversion factor equal to 1.00) prior to adjustment of the bypass.

Full scale flow ranges of 10 SCCM to 30 SLM are easily achievable as

1. Replace the sensor as detailed in the troubleshooting section. follows :

2. FC-280SA/FC-282S only
Install R37 (=3.48㏀) for use with large bore sensor. Remove R37 for 1. Energize the instrument and adjust the flow rate to give 100%
 indicated output. Center the gain pot of the electronics by rotating To change the range of the instrument, an adjustment may be made if the

the adjustment screw 12 turns from its point of non-influence on desired range is within the range of the installed bypass. Otherwise, it must

either the indicated output (flowmeter) or the actual flow rate (flow be replaced. A three digit number etched on the bypass is used to identify

controller). its range as follows :

2. Measure the actual flow rate (w1) at 100% indicated flow rate using -001 25 to 75 slm

a suitable reference flow standard. -002 76 to 150 slm

3. Remove the inlet fitting and loosen the bypass as explained in the -003 151 to 300 slm

Cleaning Section.

4. Loosen the center locking screw one turn and turn the entire bypass If the desired range is within the range of the installed bypass assembly,

clockwise. For reference, count the exact number of turns it takes to only a simple adjustment is necessary.

solidly bottom out. Do not torque.

5. Refer to the graph in Figure 8 for the number of turns from full 1. First, remove the bypass assembly as described in the cleaning

insertion. section.

6. Turn the adjusting screw N turns clockwise, backing the bypass out 2. Using a Phillips head screwdriver, adjust the center screw by turning

to its new location. counter-clockwise to locate the plug flush with the down-stream

7. Measure the actual flow rate at 100% indicated flow rate and if within end of the screen.

± 15% of the desired flow rate, adjust the gain potentiometer to 3. Thread the bypass back into the flow body and firmly tighten against

bring it into calibration. If the actual flow is more than 15% different shoulder.

from the flow rate, refer to Figure 8 and readjust the bypass 4. Adjust the bypass by turning the adjusting screw clockwise to

accordingly. decrease the full scale flow rate.

8. An in-line adjustment tool (P/N T-900-454) is available to adjust the Adjustment resolution for various high flow bypass sizes are approxi-

bypass with gas flowing through toe instrument in lieu of steps 4 mately as follows :

through7. Contact Tylan General for price and delivery. -001 1.2 slm per turn

-002 2.5 slm per turn

Bypass FC-282S : -003 5.0 slm per turn
 To adjust the minimum flow (leak-through), set the inlet pressure to 50

CAUTION : Press the screw firmly against the bypass nut during adjustment psig or the maximum expected and command zero flow. Loosen the lower

to insure that the threads only engage the plug and not the hub. Make sure knurled nut and rotate the valve housing clockwise to reduce the flow to

that the screw does not thread out of the assembly during counter- between 1% and 3% of full scale. Retighten the knurled nut to lock the

clockwise adjustment. valve in place.

Valve FC-280A/FC-280SA : To adjust the full scale flow, set the inlet pressure to 20 psig or the

Five valve seats with different orifice sizes are available to accommodate minimum expected and command 100 % of range. Loosen the top lock nut

full scale ranges of 10 SCCM through 30 SLM. See Figure 17 for the flow and while monitoring the valve voltage (Pin E to Pin F) turn the top

ranges of each orifice. All five orifices are available in the Tylan General adjustment to give 100% flow at a valve voltage of 9 to 10 VDC. This will

Spare Parts Kit. allow optimum response performance and provide adequate voltage

margin to accommodate changes in operating conditions. Verify operation

When changing ranges, the valve seat may have to be changed at 4%, 50% and 100% of the full scale range before and after tightening
accordingly. This can be accomplished by removing the valve assembly the lock nut.
and replacing the valve seat as described in the Cleaning section.

Readjustment of the valve is recommended (and in most cases is After adjustments are made, it may be necessary to optimize dynamic

necessary) for optimal performance following any range change of 2:1 or response, refer to Dynamic Response Adjustment(FC-280SA/FC-282S)

more. Refer to the Valve Adjustment Procedure previously described. procedure.

Valve FC-282S Electronics FC-280SA/FC-282S :

The FC-282S valve has two adjustments which allow the user to optimize The following components need to be adjusted or selected during the

its performance for the actual operating pressure. These adjustments can calibration procedure or dynamic response optimizing as previously

be made while the flow controller is operating and without removing the described :

valve assembly from the base. Potentiometer P1 Zero Adjustment

Potentiometer P2 Gain Adjustment
Potentiometer P3 Linearity Adjustment through 7 accommodate different gases by conversion factor selection,

Potentiometer P4 Dynamic response Adjustment position 8 is used when converting from the large bore sensor to the small

Resistor R29 Proportional band adjustment bore sensor or vice-versa. Position 9 allows for low differential pressure

Resistor R37 Sensor current Selection and/or higher flow applications. Positions 10 and 11 provide optimization

of the response characteristics via the dynamic feedback resistor in the

Additionally, resistor R36 is be re-selected in case of replacement of the control loop. Position 12 allows selection of the setpoint ramp-rate-time

reference diode D5. The following value should be chosen as a function of constant.

the reference voltage (to be accessed through pin 6 of the card edge

connector, labeled “Zener Test Point” , and measured against pin C, Integral Display (FC-280AD/FM-380AD)

labeled “Return”). The numeric display is factory set for the nameplate range in engineering

units (sccm or slm) The display may also be set to read as a percentage of

full scale. If it becomes necessary to re-range the display, it is

recommended that this service be performed by a factory authorized

service center or contact Tylan General Technical Support for information.

TROUBLESHOOTING PROCEDURES

Initial Test
1. Check setup and procedure against the connection instructions
Note : After replacement of the reference diode D5 or the quad operational given in the installation section. Permanent damage to the
amplifier IC1, recalibration of the instrument is required. instrument may result if purging procedures are not followed, or if

line power is accidentally applied to the signal leads.

Electronics FC-280A/FM-380A : 2. Test line cord for compliance with pin assignments and continuity
Only those changes concerning the Dip Switch (SW1) as previously from all wires to correct pins (see Figures 10 and 10A Electrical
described need be made during a range change. To reiterate, positions 1 Hook-up Diagram). Use a hipot tester to check for any pin-to-pin
 shorts; during the test, flex the cable coming out of the connector to

find intermittent shorts. REPLACEABLE SPARE PARTS

3. Check insulation resistance form pin 2 to base. It should exceed 50

megohms at 50 VDC. Pin 1 to case should measure less than 1 ohm.

4. Connect a source of gas (same as that for which the instrument is

calibrated or equivalent test gas) to the inlet fitting. Apply power and

allow a 10 minute warm-up period. With the inlet pressure between

the specified range for the full scale flow rate, the output signal of

the controller should follow the command setting (i.e.,50% of full

scale at 2.50 VDC commanded voltage). The actual flow (as

measured by a suitable flow standard in series with the controller)

should follow the command setting and agree with the indicated flow

of the controller. If the instrument is malfunctioning or cannot be

recalibrated as previously described in the Adjustment and

Calibration Procedure, check the appropriate symptom in the

Troubleshooting Chart.
Tylan General has maintenance kits available which contain custom-

designed tools that simplify the repair of all Tylan General’s mass flow

equipment.
GENERAL TROUBLESHOOTING

Symptom Possible Cause Remedy

Faulty meter Read output at Pins 3 and 2 directly with alternate tmeter.

No actual flow Check pressures, valve positions, line or filter blockage.

Sensor clogged See Cleaning Procedures.

See Valve section. Measure valve DC resistance (should be 220 ohms ±10 ohms). If coil is
No output
Valve closed
open, replace coil or entire valve assembly.

Electronic failure See Electronics Section.

No input power Check for line power between appropriate pins at mating connector.

Faulty power supply Check input/output voltages (+ & -15 VDC, +5.00 VDC).

Maximum signal (approximately Check valve voltage as measured across valve wires. Valve should close when voltage

200% of full scale): a: Indication Valve failed open decreases below 4.00 VDC. Higher voltage indicates lack of closing command or electronic

correct, flow is high failure; repair or replace electronics.

Faulty power supply or

Check input/output (+ & -15 VDC, +5.00 VDC).
command signal

b: Indication erroneous Open resistance element on

Replace sensor.
sensor

Electronics failure See Electronics Section.

ELECTRONICS TROUBLESHOOTING
(See Figure 10 and 10A Electrical Schematic and Note 1 through 3 list below)

Symptom Possible Cause Remedy

Power supply voltage off of

General failure or miscalibration Check + & -15 VDC. Check sensor and valve or connections.
nominal.

Check sensor resistances, these should be 330 ohms ±10 ohms) green to red and green to

Flow indication saturated (-0.7 or Bridge or sensor failure. brown with power off. Voltage across brown to circuit common should be 8.0 to 10.0 VDC and

+12.0 VDC) regardless of flow Ez to circuit common should be -6.9 ±0.3 VDC.

Component failure. Check zero pot, gain pot, other components and solder joints.

Check these and other components and solder joints. Replace if necessary.
Valve drive open or saturated(FC- Valve drive transistor open or

280SA only) shorted.

(0 or 12 to 15 VDC) Op-amp failed.

All circuits functional, but out of Contamination, or as a result Adjust.

calibration of cleaning or repairing.

Instrument Controls, but output +5.00 VDC supply of the Check +5.00 VDC input reference supply.

voltage does not agree with control control input off nominal. Readjust as necessary.

input pot voltage Large input voltage offset in Replace if necessary, or replace PC Board assembly.

Op-amp
VALVE TROUBLESHOOTING

Symptom Possible Cause Remedy

Signal offset at zero flow Electronics not adjusted. See Adjustment Procedures.

Contamination. See Cleaning Procedures.

Electronics failure. See Electronics Section.

Mechanical damage from over-pressure Adjust or replace valve.

Valve fails to close or other cause.

Operation on wrong gas (e.g., instrument Test on proper gas or mechanically readjust valve.

adjusted for argon may not shut off

completely on hydrogen).

Contamination. See Cleaning Procedures.

Valve fails to open Electrically commanded closed or pot Check command signal ((Pins A and B) and pot. Check for Electronic failure.

shorted

Valve controls at flow rates, but Contamination. See Cleaning Procedures.

not at minimum Erosion or corrosion. Replace valve.

Improper adjustment or inadequate drive. See Adjustment Procedures.

Improper system dynamics due to Reduce upstream pressure regulator setting..

Valve oscillates or hunts excessive inlet pressure.

Improper dynamics in electronics. Check for failed resistor or capacitor. See Dynamic Response Adjustment Procedure.

NOTE 1 : CAUTION: Always command zero flow when the gas supply is shut off. Failure to do so will result in the valve overheating and in excessive flow

transients after the gas supply is turned “on”(see Figures 10 and 10A Electrical Hook-Up Diagram).

NOTE 2: Pin D may be connected to common prior to turning on the gas supply to achieve “soft-start” performance.

NOTE 3 : A threshold circuit in the controller ensures zero valve voltage whenever the commanded signal falls below 1.0% full scale.
Sensor Replacement

If it is determined that either of the sensor elements is open or shorted to case, it will be necessary to replace sensor assembly. This can be done by

unsoldering the three sensor leads from the P.C.Board and and removing the three screws which attach the sensor assembly to the base and the

P.C.Board. The sensor assembly can then be removed and replaced. Before installing the new sensor element, resistance should be checked and

measured as follows:

Upstream…………………………………………………Ru=330±10 ohms

(Brown to Green)

Downstream…………………..…………………………Rd=330±10 ohms

(Red to Green)

Isolation…..…………………..……………………….… > 100 megohms

(All leads to sensor housing)

Solenoid Valve Replacement

If it is determined that the coil of the solenoid valve is open, shorted to case or outside the DC resistance range of 115 to ohms, the valve assembly will

need to be replaced.
MASS FLOW CONVERSION FACTORS
Use of Gas Conversion Factors

The gas conversion factors is a dimensionless ratio describing the sensitivity of a mass flow controller to two different gases. Although this ratio is usually

reported as a dimensionless number, the calculations can be followed much more easily if dimensions are added. The gas conversion factor for nitrogen is

usually set to one, and then all other gases are referenced back to nitrogen. To determine the gas conversion factor referenced to a gas other than

nitrogen, simply ratio the gas conversion factors of both gases referenced to nitrogen. The magnitude of the conversion factor is a function of the heat

capacity, density, and molecular structure. A detailed description of how the gas conversion factors are derived is provided in section 3.0. Under normal

conditions, it is not necessary for the customer to calculate a gas conversion factor from the heat capacity and gas density data.

This section contains a few examples to help understand how the conversion factors are applied. The conversion factors are primarily used when

recalibrating a flow controller or flowing a gas other that the gas for which the controller was calibrated. The first example shows how to calibrate a mass

flow controller with the test gas provided in the manual. In order to minimize the errors created in using conversion factors, the test gas is chosen so that

the gas conversion factor is as close to one as possible. If the only gas available for calibration was something other than the test gas or nitrogen, then

the gas conversion factor must be calculated. This process is shown in example 2. If you are using a mass flow controller for a gas other than the one for

which it was calibrated, but you didn’t want to recalibrate the MFC, then example 3 demonstrates how to determine the actual flow rate of the gas through

the MFC.

Example 1 : Calibrate a 500 sccm Ammonia(NH3) flow controller with Nitrous Oxide.

Conversion Factor (NH3 to N2O) = 1.014

Calculate the flow rate of Nitrous Oxide which equals 500 sccm and 250 sccm of Ammonia.
Example 2 : Calibrate the same 500 sccm Ammonia flow controller with Argon.

Conversion Factor (NH3 to N2) = 0.719

Conversion Factor (Ar to N2) = 1.415

Calculate the flow rate of Argon which equals 500 sccm and 250 sccm of Ammonia.

Example 3 : 200 sccm Carbon Monoxide (CO) flow controller is to be temporarily used in a Carbon Dioxide (CO2) application. How many sccm of CO2

are flowing when the reading is 73% ?

Conversion Factor (CO to N2) = 1.000

Conversion Factor (CO2 to N2) = 0.737

(73%) X (200 sccm CO) X (0.737 CO2 / CO ) = 108 sccm CO2

CONVERSION FACTOR TABLE (relative to nitrogen and test gas)
NOTE : Conversion of controller to or from these gases may alter dynamic response or stability.

In accordance with SEMI Standard E12-91, Standard Pressure is defined as 760 mm Hg(14.7 psia) , Standard Temperature is defined as 0 degrees C.
Recommended Procedures to Avoid Contamination of Highly Reactive Gas System

Gas systems for saline and other highly reactive gases are extremely vulnerable to contamination. When oxygen, water vapor or other gases combine with

highly reactive molecules, solid contaminants, such as silicon dioxide, form in the system and can cause numerous problems with measurement and

control equipment. These particles can be transported in sub-micron sizes that pass through filters, or , can be formed by reactions in the plumbing

downstream of the filter. Although proper use of filters reduces contamination, this potential problem exists throughout the entire system.

The three primary causes of contamination are leaks, impure purge gases, and improper purging procedures. These problems and their solutions are

discussed below.

Leaks
Plumbing leaks cannot be tolerated in a pure gas system. It is commonly believed that if a gas line pressure is above that of the ambient, the surrounding

atmosphere will be prevented from entering the system. However, for any flow through an orifice or leak path, back diffusion from the surrounding gas (air)

takes place into the gas stream. The system can then become contaminated with oxygen or moisture. THEREFORE, AVOID ALL LEAKS. Check the system

when new, after replacing any equipment in the plumbing circuit, and on a periodic schedule. A leak detector capable of detecting leaks in the range of

less than 1 X 10-9 atm cc/sec of helium, is recommended.

Impure Purging Gases

Before and after a highly reactive gas system has been exposed to air, it is necessary to purge the system with an inert gas, i.e. N2 or Ar with less than 10

ppm O2 and water vapor.

Each time a transition is made from purge gas to process gas or process gas to purge gas, there is mixing of the two gases throughout the plumbing ; any

oxygen or moisture in the purge gas reacts and can be left behind as contamination. The practice of purging process lines between runs gives two

potential mixing events per run, and can cause a cumulative buildup or contamination. With leak-tight Plumbing it is not necessary to remove process gas
from the system. Buildup resulting from repetitive purging can be avoided by not purging between runs.
In some installations process gas is fed into a reaction chamber that can be exposed to air, thereby causing oxidation of residual gas in the gas supply line.

As a preventative measure, installation of a shutoff valve in the process line, close to the reaction chamber, is recommended.

Proper Purge Procedure

The most effective method for removing process gases from process tubing is cycle purging. Cycle purging alternates evacuating the gas system and

pressurizing the gas system with an inert purge gas. This procedure causes absorbed molecules and trapped gases to be removed much more quickly

than straight purging. Contaminants trapped in plumbing dead space and micro cavities can communicate with the process stream to cause virtual leak.

Cycle purging helps to purge these cavities. AI-though the application of vacuum to the gas system is very effective, a similar procedure can be adapted

for atmospheric systems.

Vacuum Systems
Figure 1 is a picture of a typical reactive gas flow controller installation. To initiate purge procedure. Close Valves 2 and 2, and open Valve 1. Evacuate the

line to base pressure. Close Valve 1 and open Valve 2 for one or two minutes to pressurize the controller with purge gas. Close Valve 3 and open Valve 1

to evacuate the controller back down to base pressure. Repeat the alternating application of evacuation and pressurization at least 20 times. When

removing the flow controller, pressurize it with the purge gas and then close all 3 valves.
Atmospheric Systems
Although a vacuum pump is highly desirable, a similar procedure can be performed without a pump. An aspirator powered by a high rate of purge gas flow

to exhaust can be used to create a sub atmospheric pressure in the plumbing system. If an aspirator is not available, cycling between atmospheric

pressure and purge gas line pressure is better than simply flowing purge gas. Pressurize and depressurize the controller for about 5 minutes. And repeat

the procedure at least 40 times, rather than the 20 used for vacuum systems.