VIGNAN BHARATHI

Institute of technology and science PRODDATUR KADAPA

A paper presented on

NANOTECHNOLOGY AND MEMS

nikhil 099K1A0323
Email: [email protected]

CONTENTS Introduction Larger to smaller: a materials perspective Simple to complex: a molecular perspective Molecular Nanotechnology: a long-term view Current researches Nano materials Tools and techniques Nanotechnology facilities and capabilities MEMS Fabricating MEMS and Nanotechnology Current challenges Advantages of MEMS and Nanotechnology Applications of MEMS and Nanotechnology Conclusion

ABSTRACT

Technology is making rapid progress and is making many things easier. The innovative ideas that have been emerged from the tender minds of young scientists led to the evolution of many technologies where our present topic Nanotechnology and MEMS fits in. Nanotechnology, the successor of micro technology is much discussed these days as an emerging frontier-a realm in which devices operate at scales billions of a meter. In the fast changing turmoil world we dwell in the Nanotechnology as culminated in the heights, the heights that human brain finds ambiguous to fathom. The word nano comes from Greek word dwarf. Nanotechnology is based upon scaling down of existing technology to the next level of precision. Formally, it is based on the development of molecular machine systems able to build a wide range of products inexpensively, without atomic precision. We, in this paper intend to throw chunks of light on MEMS, the acronym for Micro Electro-Mechanical Systems. MEMS is an integration of mechanical elements, sensors, actuators, and electronics on a common silicon

substrate

through

micro

fabrication

technology. It is the technology of the very small, and merges at the nano scale into Nano Electro Mechanical systems (NEMS) and nanotechnology. It promises to revolutionaries nearly every product category by bringing together silicon based micro-electronics with micro- machining technology, making possible the realization of complete system-on-a-chip. This paper further describes the fabrication of MEMS and Nanotechnology devices and the current challenges faced by these devices. We then specify the numerous examples of MEMS and Nanotechnology and explain some of them in brief. The paper concludes with the pros and cons of this technology and its future. We are sure that Nanotechnology is going to be responsible for massive changes in the way we live, the way we interact with one another and with the environment. INTRODUCTION: Nanotechnology, the successor of micro technology is the development of engineering processes at the atomic and molecular level of matter. It is manipulating and constructing matter measured in nanometers. A nanometer is

one-billionth (thousand millionth) of a meter, or ten hydrogen atoms side by side, or about one-thousandth of the length of a typical bacterium. Since a single human hair is around 80,000 nanometers in width, objects measured in a few hundred nanometers are invisible to the human eye. The word nano comes from the Greek word dwarf. However, the term is not simply about miniaturization, although in a lot of cases the technology will lead to smaller components, for example, computer chips.The technology relates to materials and devices that are engineered at the billionth of a meter, or 10-9 scale. At this scale of atoms and molecules, novel properties that are not often evident in the bulk material can be engineered. The genesis for nanotechnology has its roots in the colloidal science of the late 19th century. Nanotechnology is based upon scaling down of existing technology to the next level of precision(draws upon a wide variety of existing theories and techniques including those in quantum physics, molecular electronic biology, engineering, chemistry and

level, the laws of classical physics may fail, and those of quantum physics prevail. The term nanotechnology is often reserved for inorganic materials, although combinations with organic molecules are feasible. Nanotechnology has a wide range of applications in every field of science. Its techniques include those used for fabrication of nanowires, those used in semiconductor fabrication such as deep ultraviolet lithography, electron beam lithography, focused ion beam machining, nanoimprint lithography, atomic layer deposition, and molecular vapor deposition, and further including molecular self-assembly techniques such as those employing di-block copolymers. The manufacture of polymers based on molecular structure, or the design of computer chip layouts based on surface science are examples of nanotechnology in modern use. Colloidal suspensions also play an essential role in nanotechnology. LARGER TO SMALLER: A MATERIALS PERSPECTIVE: A unique aspect of nanotechnology is the vastly increased ratio of surface area to volume present in many nanoscale materials which opens new

biochemistry etc).At this microscopic

possibilities in surface-based science, such as catalysis.

clumps ("agglomerates") is a serious technological problem that impedes such applications. Another concern is that the volume of an object decreases as the third power of its linear dimensions, but the surface area only decreases as its second power. SIMPLE MATERIALS TO COMPLEX: PERSPECTIVE:

Preparing small molecules to almost any structure are used today to produce a Carbon nano tube A number of physical properties change when compared to macroscopic systems. Broadly speaking, nanotechnology is the synthesis and application of ideas from science and engineering towards the understanding and production of novel materials and devices. Materials reduced to the nanoscale can suddenly show very different properties compared to what they exhibit on a macro scale, enabling unique applications. For instance, opaque substances become transparent (copper);etc. Nanosize powder particles (nanoparticles) are potentially important in ceramics, powder metallurgy and similar applications. The strong tendency of small particles to form MOLECULAR NANOTECHNOLOGY: TERM VIEW: nanotechnology, to the concept A LONG Advanced sometimes of called wide variety of useful chemicals such as pharmaceuticals or commercial polymers. These approaches utilize the concepts of molecular self-assembly and/or supramolecular chemistry to automatically arrange themselves into some useful conformation through a bottom-up approach. The concept of bottom-up methods much cheaper than top-down methods, but could potentially be overwhelmed as the size and complexity of the desired assembly increases.

molecular manufacturing, is a term given engineered

nanosystems operating on the molecular scale. The term "nanotechnology" is referred to a future manufacturing technology based on molecular machine systems. The premise was that a manufacturing technology based on the mechanical functionality of these components (such as gears, bearings, motors, and structural members) would enable programmable, positional assembly to atomic.

As nanotechnology is a very broad term, there are many disparate but sometimes overlapping subfields that could fall under its umbrella. Some of the subfields Molecular gears Though biology clearly demonstrates that molecular machine systems are possible, non-biological molecular Spacemachines are today only in their infancy. CURRENT RESEARCH: filling model of the nanocar on a Graphical representation of rotaxane, useful wheels. Surface, using fullerenes as as a molecular switch. of nanotechnology are as follows: Nanomaterials: This includes subfields which develop or study materials having unique properties arising from their nanoscale dimensions. Colloid science has given rise to many materials which may be useful in nanotechnology, such as carbon nanotubes and other fullerenes, and various nanoparticles and nanorods. Bottom-up approaches: complex These seek assemblies.

to arrange smaller components into more

DNA Nanotechnology construct welldefined structures out of DNA and other nucleic acids. Top-down approaches: These seek to

Another variation of the bottom-up approach is molecular beam epitaxy or MBE. MBE allows scientists to lay down atomically-precise layers of atoms and, in the process, build up complex structures. NANOTECHNOLOGY FACILITIES & CAPABILITIES: It is a revolution in industry that deliver wave after wave of innovative products and services. Carbon Wires expand Nano toolkit:

create smaller devices by using larger ones to direct their assembly. Solid-state techniques can also be used nanoelectromechanical systems or NEMS, which are related to microelectromechanical systems or MEMS which is described later in this paper. TOOLS AND TECHNIQUES:

Japan have found a way to make carbon The top-down approach anticipates nanodevices that must be built piece by piece in stages, much as manufactured items are currently made. Scanning important probe microscopy both synthesis and is an for of force CNW could eventually be used in ultrastronger fibers, as friction-free bearings &in space shuttle nose cones. Carbon nano tubes are very strongly having useful electrical properties, because they are solid, and they should be even stronger than nano tubes. technique nano wires that measure only a few carbon atoms across.

characterization nanomaterials.

Atomic

microscopes and scanning tunneling microscopes can be used to look at surfaces and to move atoms around.In contrast, bottom-up techniques build or grow larger structures atom by atom or molecule by molecule. These techniques include assembly chemical and synthesis, selfpositional assembly.

Nano tubes boost storage: Multiwalled carbon nano tubes tips (rather then silicon) to make denser, more efficient data Storage devices. It was possible to use multi walled carbon nano tubes to write data on to a polymer film. Binary data is written by heating the polymer to make indentation that represent 1s; blank space represent 0s.nanotubes tips can be used to write more than 250 gigabytes.

MEMS, an acronym for Microelectromechanical Systems is the technology of the very small, and merges at the nanoscale into "Nanoelectromechanical" Systems (NEMS) and Nanotechnology. These devices generally range in size from a micrometer (a millionth of a meter) to a millimeter (thousandth of a meter). Due to MEMS' large surface area to volume ratio, surface effects such as electrostatics and wetting dominate volume effects such as inertia or thermal mass. They are fabricated using modified silicon fabrication technology (used to make electronics), molding and plating, wet etching and dry etching, electro discharge machining , and other technologies capable of manufacturing very small devices. Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical and elements, sensors, actuators, and electronics on a common silicon substrate through micro fabrication technology. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micro mechanical components are fabricated using compatible "micro machining"

Societal implications: Potential risks of nanotechnology can broadly be grouped into three areas:

the

risk

to

health

environment from nanoparticles and nanomaterials;

societal risks. the risk posed by molecular (or advanced

manufacturing nanotechnology). MEMS:

processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices. Microelectronic integrated circuits can be thought of as the "brains" of a system and MEMS augments this decisionmaking capability with "eyes" and "arms", to allow microsystems

relatively low cost. MEMS technology can be implemented using a number of different materials and manufacturing techniques; some of the materials that can be used for manufacturing of MEMS are: silicon,polymers,metals etc. FABRICATING MEMS AND and

NANOTECHNOLOGY:MEMS

Nano devices are extremely small -- for example, MEMS and Nanotechnology has made possible electrically driven motors smaller than the diameter of a human size. MEMS making systems and hair but MEMS and Nanotechnology is not primarily about The deep insight of Nano is as a new

manufacturing technology, a way of complex using electromechanical batch fabrication

techniques similar to those used for integrated circuits, and uniting these A mite next to a gear set produced using MEMS. environment. Because MEMS devices are manufactured using batch fabrication techniques similar to those used for integrated circuits, unprecedented levels of functionality, reliability, and sophistication can be placed on a small silicon chip at a MEMS and Nanotechnology is currently used in lowor medium-volume applications. Some of the obstacles preventing its wider adoption are: electromechanical with electronics. CURRENT CHALLENGES: elements together

Limited Options:Most companies who wish to explore the potential of MEMS and Nanotechnology have very limited options for prototyping or manufacturing devices, and have no capability or expertise in micro fabrication technology. Few companies will build their own fabrication facilities because of the high cost Packaging:The packaging of MEMS devices and systems needs to improve considerably from its current primitive state. MEMS packaging is more challenging than IC packaging due to the diversity of MEMS devices and the requirement that many of these devices be in contact with their environment. Fabrication Knowledge Required: Currently the designer of a MEMS device requires a high level of fabrication knowledge in order to create a successful design. MEMS device design needs to be separated from the complexities of the process sequence. ADVANTAGES OF MEMS AND NANOTECHNOLOGY: MEMS and Nanotechnology are extremely diverse technologies

that could significantly affect every category of commercial and military product. These are used for tasks ranging from indwelling blood pressure monitoring to active suspension systems for automobiles MEMS and Nanotechnology blurs the distinction between complex mechanical systems and integrated MEMS allows manufactured fabrication decreasing the circuit and the using cost electronics. complex batch and Nanotechnology

electromechanical systems to be techniques,

increasing the reliability of the sensors and actuators to equal those of integrated circuits. Faster, lighter computers are possible with Nanotechnology. APPLICATIONS OF MEMS AND NANOTECHNOLOGY: numerous possible There are for applications

MEMS and Nanotechnology. As a breakthrough technology, many new MEMS and Nanotechnology applications will emerge, expanding beyond that which is currently identified

or known. Here are a few applications of current interest:

to their integrated counterparts if they are made using MEMS and Nanotechnology.

inkjet printers, which use piezoelectric or bubble ejection to deposit ink on paper. Biotechnology: MEMS and Nanotechnology is enabling new discoveries in science and engineering such as the PCR Microsystems for DNA amplification and identification, micro machined STMs, biochips for detection of hazardous chemical and biological agents, and microsystems for highthroughput drug screening and selection. Accelerometers: MEMS accelerometers are quickly replacing conventional accelerometers for crash air-bag deployment systems in automobiles. The conventional approach uses several bulky accelerometers made of discrete components mounted in the front of the car with separate electronics near the air-bag; this approach costs over $50 per automobile. MEMS and Nanotechnology has made it possible to integrate the accelerometer and electronics onto a single silicon chip at a cost between $5 to $10. These MEMS accelerometers are much smaller, more functional, lighter, more reliable, and are produced for a fraction of the cost of the

accelerometers in modern cars for a large number of purposes including airbag deployment in collisions.

MEMS gyroscopes used in modern cars and other applications to detect yaw; e.g. to deploy a roll over bar or trigger dynamic stability control.

pressure sensors e.g. car tire pressure sensors, and disposable blood pressure sensors.

displays e.g. the DMD chip in a projector based on DLP technology has on its surface several hundred thousand micro mirrors.

optical switching technology which is used for switching technology for data communications.

Communications: Electrical components such as inductors and tunable capacitors can be improved significantly compared

conventional macro scale accelerometer elements. Improving public health:These combinations will provide biosensors, biomaterials and new breeds of biochips for treating life-threatening conditions, including cancer and heart disease. Such bioengineered devices, in the form of body implants, will deliver smart drugs or carry new cells to repair damaged tissue. CONCLUSION: Nanotechnology is breaking free from the shackles of fiction and is now a serious science. This technology is making the thought in mind into a thing in hand. It is going to be responsible for massive changes in the way we live, the way we interact with one another and our environment. It presents a whole new spectrum of opportunities new space to build It device is an components and systems for entirely architectures. expected future upcoming technology that will make most products lighter, stronger, cleaner, less expensive & more precise. Nanotechnology has been the driving force behind a steady stream of practical

applications coming to the market. It is an enabler of accomplishment in a truly diverse mix of science and engineering field. Nanomedicine is the application of nanotechnology and it has the potential to change medical science in twenty first century. Although the future of medicine lies unclear, it is certain that nanotechnology will have a significant impact. Some of the future developments of nanotechnology will have revolutionary potential with applications ranging from aircrafts and antibiotics to ICs. REFERENCES: www.nano.com en.wikipedia.org/wiki/Nanotechnology www.nanotechnology.net.nz