IsolationSection

Valves Three
3
3.1 General Information 2

3.2 N-Series Valves 4

3.3 Poppet Valves 6

3.4 Ball Valves 8

3.5 Genesis Valves & Fittings 10

3.6 Manual Butterfly Valves 27

3.7 Pendulum Valves 28

3.8 Linear Gate Valves 29

3.9 Bellowless Poppet Valves & Leak Valves 32

3.10 Isolation Valve Heaters 33

3.11 Bakeable All Metal Valves 34

Nor-Cal Products, Inc. Tel: 800-824-4166

1967 South Oregon Street or 530-842-4457
Yreka, CA 96097 USA Main Fax: 530-842-9130
Sales Fax: 530-841-9189
www.n-c.com

1
3
Section 3.1
Isolation Valves
General Information

Since 1962, Nor-Cal Products has been improving our valve designs and expanding our product line in order to offer valves for almost every vacuum application.
Our valves provide outstanding performance in the most demanding applications such as semiconductor and compound semiconductor processing.

Valve Applications
Process Valve Unique Sizes Seat Temperature Pressure
Application Type Features (Nominal ID) Seal Range Range Actuation Cycles (1)

N-Series Compact. High Cycle. 3/4 to 2 Viton -20º to 150ºC 1000 to 10-9 Torr Pneumatic 3,000,000
Manual
Poppet Large stroke 3/8 to 4 Viton -20º to 150ºC 1000 to 10-9 Torr 250,000
or Pneumatic
High-Vacuum Small footprint.
roughing Genesis 3/4 to 4 Viton -20º to 150ºC 1000 to 10-9 Torr Pneumatic 1,000,000
Low profile
Bellowless O-ring sealed shaft 3/8 to 2 Viton -20° to 150°C 1000 to 10-9 Torr Pneumatic 250,000
Poppet
Butterfly Low profile. 1/4 swing 3/4 to 11/2 Viton -20º to 150ºC 1000 to 10-9 Torr Manual 30,000

UHV roughing All-metal All-metal seals 3/4 & 11/2 Copper -250º to 400ºC 1000 to 10-11 Torr Manual 10,000 (2)
HV, UHV pump Manual
isolation Gate Highest conductance 5/8 to 12 Viton -20º to 150ºC 1000 to 10-10 Torr 100,000 (3)
or Pneumatic
High-Vacuum Low particle generation.
pump isolation Pendulum 6 to 16 Viton -20º to 150ºC 1000 to 10-9 Torr Pnuematic 200,000
Low vibration
Pump Exhaust Ball 1/4 swing open/close 3/4 to 2 Teflon 20º to 150ºC 1000 to 10-4 Torr Manual 20,000

Gas Introduction Leak Variable leak N/A Copper -250° to 450°C 1000 to >1x 10-11 Torr Manual 300 (2)

(1) MTBF (2) Cycle life is reduced with high temperature bakeouts (3) Optional Million Cycle Valve is available.

Poppet Valves Ball Valves Genesis Valves Linear Gate Valves All-Metal Valves
Our poppet valves are fully Ball valves are a low cost, The Genesis modular vacuum Our linear gate valves have Nor-Cal’s bakeable all-metal seal
opening for high conductance manually or pnuematically valve system provides semicon- an ultra-slim profile, which makes angle valves are intended for use
and to prevent bellows contami- operated, straight through isola- ductor equipment designers with them perfect for applications in UHV or cryogenic applications
nation while the valve is in the tion device. Their simple, robust unlimited possibilities for down- where space is limited, and their where temperature extremes
open position, reducing particle design provides high reliability in stream vacuum subassemblies. smaller volume results in lower preclude the use of our elastomer
contamination when the valve “dirty” applications. They are Nippleless valve bodies and outgassing and faster pump- seal valves. Approved for use in
is cycled. Our bodies are die- commonly used on MOCVD block fittings can be assembled down. Larger sizes have a beamline facilities, these valves
formed from 304 stainless steel and CVD equipment down- by two attachment methods unique feature in the actuator, have a temperature operating
to eliminate sharp inside corners stream from the chamber or using universal ISO-KF centering which dampens the vibration, range from -250°C to 400°C.
and improve conductance. vacuum pump to isolate traps ring/O-ring hardware, provid- which can arise when the
The valves are electropolished or abatement tools. A stainless ing maximum flexibility and gate is opened. This makes
for lower outgassing and better steel body and Teflon seat make the smallest footprint possible. these valves ideal for semi-
corrosion resistance. The welded these valves ideal for corrosive Additionally these valves feature conductor and other vibration
bellows are made from AM-350 environments. Other applica- million cycle reliability, integrated sensitive processes.
stainless steel to provide excellent tions include vacuum and other low-cost soft start circuit and
corrosion resistance and flex- facilities requirements. modular heaters.
ibility. They are designed with
additional segments to provide
extended life.

2
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
New Products
Isolation Valves
General Information
3Section 3.1

N-Series Poppet Valves Custom Valves

Nor-Cal frequently provides custom and modified standard isolation valves to meet
The new N-Series poppet valves are an
our customer’s specific requirements. Single or multiple valves can be integrated with
innovative, compact design with an MTBF of
manifolds, chambers and other components. Many special features can be specified
3 million cycles. A bellows-sealed stem and
by adding options. See page 99.
electropolished stainless steel body provides
long life even in the most demanding applica-
tions. Standard pnuematic actuation is normally Standard Options
closed. N-series valves are available in right angle • Normally open pneumatic actuation
or angle-in-line body styles with tube ends, NW • Microswitch position indication
flanges and CF rotatable flanges. Optional air
• Special O-rings
solenoids are available in multiple voltages and
can be ordered factory installed or as separate • Various air solenoid voltages
kits for easy field installation. • Fitting options for bypass lines
• Heater jackets, insulators
and controllers

Custom Features
• Special port lengths and
Leak Valves configurations for drop-in
Leak valves are used for controlling compatibility with other
gas introduction into high and ultra- manufacturer’s valves
high vacuum systems. They utilize an • Custom flange configurations
optically flat sapphire poppet and a • Special position indicators
metal seal seat, allowing bakeout
• Pump out ports
temperatures to 450ºC.
• Custom finishes
• Gate shields for linear
gate valve O-rings

Spring-to-close
pneumatic
actuator with
gate shield
Manual Butterfly Valves
These Viton O-ring sealed valves provide
a low-cost alternative to bellows sealed
Custom
gate valves. Quarter-turn actuation, small fitting
footprint and the shortest possible gas path option

make manual butterfly valves the preferred

choice for many applications.

Machined
Ball Valves
Our new ball valves are a low cost,
manually or pneumatically operated,
straight through isolation device. Their
simple, robust design provides high
reliability in “dirty” applications. They
are commonly used on MOCVD and
CVD equipment downstream from the
chamber or vacuum pump to isolate Custom valve
manifold
traps or abatement tools. A stainless
steel body and Teflon seat make these
valves ideal for corrosive environments.
A quarter turn of the handle quickly
switches the valve from open to close.
They are available with NW-16 through
NW-50 flanges as standards. Heater
jackets are available to reduce process
by-product accumulation.

3
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
3
Section 3.2
Isolation Valves
N-Series Valves

Specifications
Port OD’s: ¾, 1 and 1 ½ inches
Materials
Body: Electropolished 304 stainless steel
Bellows: Welded AM-350 stainless steel
Bonnet seal: Viton
Poppet seal: Viton
Other O-ring compounds available
Actuation: Spring / Pneumatic
Air-to-open, spring-to-close
Leak Rates: <1x10 -9 std.cc/sec He to
atmosphere, <1x10 -9 std.cc/sec He across
the seat.
Operating Temperature: 150°C Max.
Supply Pressure: 60-100 psig
Differential pressure: Maximum 20 psid across
valve seat
Maximum temperature with Viton seals:
150ºC Max
Vacuum Range: 1000 to 1x10 -9 Torr
Options: Solenoids, optical sensors, Heater
jackets and controllers available for all valves.

The new N-Series poppet valves are an factory installed or as separate kits for easy be ordered factory installed or as separate
innovative, compact design with an field installation. kits for easy field installation.
MTBF of 3 million cycles. A bellows-
sealed stem and electropolished stainless Mounting slots for optional position indi- One rebuild kit fits the four valve sizes
steel body provides long life even in the cators are incorporated into the actuator from NW-16 through NW-50 to reduce
most demanding applications. Standard body resulting in a reduction in overall maintenance inventory costs. Viton
pnuematic actuation is normally closed size and elimination of the risk of physical O-ring seals are standard, however the
(Air-to-Open / Spring-to-Close). N-series damage to the sensors. Sensors are eas- valve is designed to accept alternate seal
valves are available in right angle or angle- ily installed without adjustment. Optical compounds to satisfy your application
in-line body styles with tube ends, NW switch sensors indicate both the open & requirements.
flanges or CF rotatable flanges. Optional closed valve positions. It is possible for
air solenoids are available in each valve to have two sensors installed
multiple voltages and can be ordered for redundancy. Position indicators can

N-Series Options
Please use the following part numbering
Valve Position O-ring Air
tree to add the appropriate options to a Model Number Indicator Type Solenoid
standard N-Series valve model number.
See tables below for option codes. Example: NAP-150-NW-NPN-K91-S11
Right angle N-Seres valve with 1.5 inch bore, NW-40 flanges, optical position
indicators, Kalrez 9100 O-rings, 120VAC and air solenoid option.

O-ring Material Options Air Solenoid Option

Seal Description CODE Kit
Material Code
120VAC, 50/60 Hz -S11 N-S11-K
Viton Default (no code)
24VDC -S21 N-S21-K
Kalrez 4079 -K79
240VAC, 50/60 Hz -S31 N-S31-K
Kalrez 8085 -K85
24VAC, 50/60 Hz -S41 N-S41-K
Kalrez 8575 -K75
Kalrez 9100 -K91
Chemraz E38 -C38 Position Indicator Option
Dupra 192 -D19 Description CODE
Perlast G74P -PP7 Optical - main valve open & closed NPN
All dimensions are in inches (mm) & weights Optical - main valve open & closed PNP
are in pounds (kg), unless otherwise noted.

4
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
 Isolation Valves
N-Series Valves
3
Section 3.2

Pneumatic N-Series Angle Valve 2.77 (70)

MODEL
NUMBER PORT OD DESCRIPTION A B C
NAP-075 0.75 No Flanges 1.42 (36) 3.95 (100) 4.90 (124)
NAP-075-NW 0.75 NW-16 1.57 (40) 4.10 (104) 5.05 (128)
NAP-075-CF 0.75 CF-133, Rotatable 1.91 (49) 4.73 (120) 5.68 (144)
0.95 (24)
NAP-100 1.0 No Flanges 1.82 (46) 4.35 (110) 5.30 (134)
NAP-100-NW 1.0 NW-25 1.97 (50) 4.50 (114) 5.45 (138)
NAP-100-CF 1.0 CF-212, Rotatable 2.28 (58) 4.81 (122) 5.76 (146)
NAP-150 1.5 No Flanges 2.41 (61) 4.94 (125) 5.89 (149)
NAP-150-NW 1.5 NW-40 2.56 (65) 5.09 (129) 6.04 (153)
NAP-150-CF 1.5 CF-275, Rotatable 2.62 (67) 5.15 (131) 6.09 (155) C
NAP-200 1.5 No Flanges 2.61 (66) 5.14 (131) 6.09 (155) B
NAP-200-NW 1.5 NW-50 2.76 (70) 5.29 (134) 6.24 (158)
NAP-200-CF 1.5 CF-338, Rotatable 2.84 (72) 5.37 (136) 6.32 (160)
A

Pneumatic N-Series Angle In-Line Valve
2.77 (70)
MODEL
NUMBER PORT OD DESCRIPTION A B
NAIP-075 0.75 No Flanges 3.64 (92) 4.60 (117)
NAIP-075-NW 0.75 NW-16 3.94 (100) 4.60 (117)
NAIP-075-CF 0.75 CF-133, Rotatable 4.20 (107) 4.60 (117)
NAIP-100 1.0 No Flanges 3.64 (92) 4.00 (102)
NAIP-100-NW 1.0 NW-25 3.94 (100) 4.00 (102)
NAIP-100-CF 1.0 CF-212, Rotatable 4.75 (121) 4.00 (102)
NAIP-150 1.5 No Flanges 4.82 (122) 4.37 (111)
NAIP-150-NW 1.5 NW-40 5.12 (130) 4.37 (111) B
0.95 (24)

NAIP-150-CF 1.5 CF-275, Rotatable 5.24 (133) 4.37 (111)

NAIP-200 1.5 No Flanges 5.21 (132) 4.37 (111)
NAIP-200-NW 1.5 NW-50 5.51 (140) 4.37 (111)
NAIP-200-CF 1.5 CF-338, Rotatable 5.66 (144) 4.37 (111)

N-Series Seal Kit

Model DESCRIPTION
Number
Seal kit for 0.75 through 2 inch sizes, Viton. Includes (1) poppet
NA-075-95 and (1) bonnet O-ring.

N-Series Rebuild Kit

Model DESCRIPTION
Number
Valve rebuild kit for 0.75 through 2 inch sizes. Includes valve
NA-075-99 actuator/bellows assembly.
Note: Seals are not included. Recommend use of the NA-075-95 Seal Kit.

All dimensions are in inches (mm) & weights

are in pounds (kg), unless otherwise noted.

5
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
3
Section 3.3

Specifications
Isolation Valves
Poppet Valve General Information

Construction
Bodies are die-formed from 304 stainless steel to eliminate
Nominal port ODs: 3 / 8 to 4 inch sharp inside corners and improve conductance. The valves
Body: Electropolished 304 stainless steel are electropolished for faster pumpdown, lower outgassing
Bellows: Welded AM-350 stainless steel and better corrosion resistance. The welded bellows
Bonnet seal: Viton or Copper
Poppet seal: Viton are made from AM-350 stainless steel to provide corrosion
Other O-ring compounds available resistance and excellent flexibility. The bellows fully retract
Flanges: CF, NW, ISO or ASA from the side port when the valve is open, eliminating
Maximum temperature with Viton seals buildup of by-products on the bellows and subsequent
See bakeability chart this page particle generation during operation. They are designed
Sustained: <150°C with additional segments to provide extended life.
Intermittent: <204°C
Nor-Cal valves can be operated in any position and
Helium leak tested: 10 -9 std. cc./sec. or less
actuators can be removed quickly for routine inspection
Vacuum range without disassembling the system.
Viton bonnet seal: > 1 x 10-9 Torr - High Vacuum
Copper bonnet seal: > 1 x 10 -10 Torr - UHV
Manual actuation: Bronze nuts/ACME threads Models
Pneumatic actuation: Normally closed Our poppet valves are available in most port configurations with CF, NW, ISO or ASA flanges. Valves through 3 inch OD’s are
Operating Pressure: 60 to 80 psig available with manual or pneumatic actuators and Viton or copper bonnet seals. Valves over three inches are available with pneu-
3/4 to 2 inch ODs: Air-to-open/spring-to-close matic actuators only. Custom port lengths, flange configurations and bellowless valves are also available.
21/2 to 4 inch ODs: Air-to-open/air-to-close
Differential pressure: Max. 20 psia across
valve seat (External differential pressures
greater than 5 psi on the bellows may
Vacuum Range Valve Actuation Thermal Products
result in premature bellows failure) Poppet seals have helium leak rates of Manually operated valves utilize Acme All Nor-Cal poppet valves and gate
10 -9 std. cc./sec. or less. Viton bonnet threads and a self-lubricating bronze nut valves can be provided with silicone
Options: See facing page.
sealed valves can be used in the 10 -9 Torr for fewer turns and smooth, trouble-free foam or fiberglass insulated heater
Thermal: Heater jackets and controllers
available for all valves. Call for details range, while copper bonnet seal valves operation. Pneumatic valves are normally jackets to reduce resident time of
are suited for use in the 10 -10 range. air-to-open, spring-to-close in port ODs corrosives or particle buildup in semicon-
through 2 inches for immediate closure ductor applications. These jackets are
Copper Bonnet Seal in case of electrical or air failure. Larger available with PID controllers or thermo-
Copper bonnet seal poppet valves with valves are normally air-to-open, air-to- stats with high temperature shutoffs.
CF flanges provide metal seals between close. This actuation option is available Jacket and control specifications can be
the inside of the valve and the atmo- on all valves. Most sizes are available with tailored to meet your specific needs.
sphere. They are available in all standard air-to open, air-to-close with spring assist Call for price and model number.
sizes and port configurations. as an option. Operating air pressure for all Refer to Section 11, Thermal Products,
pneumatic valves is 60 to 80 psig. for more information.

Bakeability
The valve’s bakeout temperature should not exceed that of the elastomer that is used in it. See chart below. Standard Viton sealed
ESVP valves are bakeable to 150ºC sustained and 204°C for intermittent periods. However, the Viton O-rings begin to take a set at 150°C.
cutaway High temperature Kalrez O-rings are available as an option and allow these valves to be baked to 220°C for intermittent periods and
view
170°C for extended periods.
Bonnet/poppet Pneumatic Valves Manual valves
Seal Application Open Closed Open Closed
Viton General purpose 150ºC 120ºC 150ºC 100ºC
Kalrez 4079 High temperature 280ºC 220ºC 280ºC 150ºC
Kalrez 2037 Chemical resistant 218ºC 218ºC 218ºC 218ºC
Chemraz Chemical resistant 210ºC 210ºC 210ºC 210ºC
Silicone High temperature 232ºC 232ºC 232ºC 232ºC

Poppet Valve Conductance (Liters per second)

The conductance values in the table below have been calculated for air at room temperature using the formulas for tubes and elbows
presented in the third edition of Roth’s Vacuum Technology: Cv =182(D4/L’)P for viscous flow or Cm =12(D3/L’) for molecular flow.
Port lengths without flanges and inner diameters for the valve sizes and configurations were used. This method is an approximation,
use values accordingly.
Port Angle or Tee Angle-In-Line In-Line Straight-Through
Nom. OD Viscous Molecular Viscous Molecular Viscous Molecular Viscous Molecular
1/ 2 60 3 - - 45 2 - -
3/4 135 5 120 4 105 4 90 4
1 391 12 286 9 270 8 - -
11/ 8 - - - - - - 436 11
11/ 2 1925 37 1324 25 1263 24 1203 23
2 4677 65 3459 48 3113 44 - -
Valve rebuild kits are on page 111
21/ 2 12332 136 7505 83 7610 84 - -
All dimensions are in inches
unless otherwise noted 3 23263 217 12558 115 14258 130 - -
4 57994 396 - - 34577 236 - -
Note: P=air at 1 Torr. L’=Laxial +1.33(0/180)D for elbows.

6 Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com

 Isolation Valves
Poppet Valve Options

One or more options can be added to a particular valve by adding the option suffix to the basic valve model number as
shown below. Heater jackets and controllers are also available for all poppet valves. Call for details and pricing.
Add option suffixes in the following order:
3
Section 3.3

Valve
Model Number
Actuation Micro-
Type Switch
O-ring
Type
Valve
Fitting
Air
Solenoid
Right Angle Valve Fitting Option
Valve
Example of a model number with options: ESVP-1502-CF-AS-M-S11 OPtion Profile Description Ports
-F1 Left 1⁄4 female VCR Both
-F2 Left 3⁄8 female VCR Both
Actuation Option -F3 Left 1⁄8 female NPT Bottom
OPTION Description -F4 Right 1⁄4 female VCR Both
-A Air-to-open/air-to-close -F5 Right 3⁄8 female VCR Both
-AS Air-to-open/air-to-close with spring assist -F6 Right 1⁄8 female NPT Bottom
-SA Spring-to-open/air-to-close Note: Available on ESV, ESVP, CSV and CSVP models only.
Pneumatic valves with port ODs through 2 inches are normally air-to-open/spring-
to-close for immediate closure in case of electrical or air failure. Larger valves are All Nor-Cal right angle valves (ESV, CSV, ESVP and CSVP models) are available with the six
normally air-to-open/air-to close. These actuation options are available on nearly all fitting options described in the table above. These options are designed to make it easy
sizes and port configurations of Nor-Cal pneumatically actuated poppet valves. for our customers to retrofit our valves with thermocouple gauges, leak valves, up-to-air
valves or gas introduction lines. Other fittings or configurations are available.
Micro-Switch

Micro-Switch Option Pneumatic

actuator
OPTION Manual
-M e Port
OD A
Micro-switches are available on all
3/4 1.50
pneumatically actuated Nor-Cal valves.
1 1.22
A pair of 5-amp micro-switches are Right
Left 11/ 2 1.62
opened or closed by the movement of profile profile
the valve stem. One switch closes when 2 - 21/ 4 2.25
the valve is fully open and the other 21/ 2 2.25
when it is fully closed. These can be 3 2.44
connected to control panels with alarms 4 3.22
A
or lights for positive position indication.
Electrical leads are approximately 10
inches long, but may be cut to any length
upon request. A A

Port
OD
3/ 8
E
Air Solenoid Option
2.06
1/ 2 Option Kit Port OD Description
2.06
3/4 2.06 -S11 S11-K 3/8 to 2 3-way, 120VAC, 50/60 Hz
1 2.06 -S21 S21-K 3/8 to 2 3-way, 24VDC
11/ 2 2.06 -S31 S31-K 3/8 to 2 3-way, 240VAC, 50/60 Hz
2 3.54 -S41 S41-K 3/8 to 2 3-way, 24VAC, 50/60 Hz
3 3.54 -S12 S12-K 21/2 to 3 4-way, 120VAC, 50/60 Hz
4 5.01 -S22 S22-K 21/2 to 3 4-way, 24VDC
-S32 S32-K 21/2 to 3 4-way, 240VAC, 50/60 Hz
-S42 S42-K 21/2 to 3 4-way, 24VAC, 50/60 Hz

O-ring Option Note: Use 4-way solenoid option for 1.12 and 1.5 OD STVP and CSTVP models.

Temperature All pneumatic poppet valves can be provided with air solenoids with several current
OPTION compound MIN. MAX. application ratings for electropneumatic actuation. Valves with air-to-open, spring-to-close actuation
Standard Viton -29ºC 204ºC Industry standard require three-way air solenoids, while air-to-open, air-to-close actuators require four-way
-KT Kalrez 4079 -50ºC 316ºC High temperatures solenoids. Both three and four-way air solenoids are available in four current
-KC Kalrez 2037 -54ºC 220ºC Chemical resistant ratings. A pneumatic valve ordered with this option will arrive with an air solenoid
-CR Chemraz 513 -30ºC 210ºC Chemical resistant installed. Fourteen inch long electrical leads are
-S Silicone -55ºC 232ºC High temperatures provided for connection to the power supply.
Standard Nor-Cal valves use chemical resistant Viton O-rings. Viton O-rings should not be Air solenoids can be purchased separately in
heated to above 204°C. Even prolonged exposures of 150°C may degrade the O-rings. a kit complete with instructions for
High temp Kalrez O-rings allow valve bakeouts to 220°C installation by the customer.
intermittently or 170°C for extended periods. When placing your order please
Silicone O-rings provide adequate specify the model number of the
sealing performance in thermal valve that the air solenoid will be
cycling from -55°C to 230°C. installed on, so that our sales staff
can confirm whether a three-way
or four-way solenoid is required.

Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com

7
3
Section 3.3
Isolation Valves
Manual Angle Valves

Manual Viton Seal Angle Valves

Model
Number
ESV-038
Port
OD
3/8

Description
No flanges

A
1.50

B
4.06

C
4.44

D
2.25
ESV-0382-CF 3/8 Rotatable 1.33 CF 1.60 4.16 4.54 2.25
ESV-0382-NWB 3/8 NW-10B 1.65 4.21 4.59 2.25
ESV-050 1/2 No flanges 1.50 4.06 4.56 2.25
ESV-0502-CF 1/2 Rotatable 1.33 CF 1.60 4.16 4.66 2.25
ESV-0502-NWB 1/2 NW-10B 1.65 4.21 4.71 2.25
ESV-075 3/4 No flanges 2.00 4.56 5.31 2.25
ESV-0752-CF 3/4 Rotatable 1.33 CF 2.50 5.06 5.81 2.25
Specifications ESV-0752-NWB 3/4 NW-16B 2.15 4.71 5.46 2.25
Port ODs: 3 / 8 to 3 inches ESV-100 1 No flanges 1.88 4.32 5.32 2.25
Materials ESV-1002-CF 1 Rotatable 2.12 CF 2.05 4.49 5.49 2.25
Body: Electropolished 304 stainless steel ESV-1002-NWB 1 NW-25B 2.03 4.47 5.47 2.25
Bellows: Welded AM-350 stainless steel
Bonnet seal: Copper or Viton ESV-150 11/2 No flanges 2.25 5.63 7.13 3.00
Poppet seal: Viton ESV-1502-CF 11/2 Rotatable 2.75 CF 2.46 5.84 7.34 3.00
Other O-ring compounds available ESV-1502-NWB 11/2 NW-40B 2.40 5.78 7.28 3.00
Actuation: Self-lubricating bronze nuts ESV-200 2 No flanges 3.25 7.85 9.85 3.50
with ACME threads ESV-2002-CF 2 Rotatable 3.38 CF 3.48 8.08 10.08 3.50
Differential pressure ESV-2002-NWB 2 NW-50B 3.40 8.00 10.00 3.50
Maximum 20 psia across valve seat
ESV-2002-ASA 2 Rotatable ASA-5-200R 3.50 8.10 10.10 3.50
Maximum temperature with Viton seals
Sustained: <150°C ESV-250 21/2 No flanges 3.00 8.27 10.77 4.00
Intermittent: <204°C ESV-2502-CF 21/2 Rotatable 4.50 CF 3.38 8.65 11.15 4.00
Vacuum range ESV-2502-ISO 21/2 ISO-63-250-OF 3.25 8.52 11.02 4.00
Viton bonnet seal: >1x 10-9 Torr - High Vacuum ESV-2502-ASA 21/2 Rotatable ASA-5-250R 3.25 8.52 11.02 4.00
Copper bonnet seal: >1x 10 -10 Torr - UHV
ESV-300 3 No flanges 3.25 8.68 11.68 4.50
Options: Fittings and O-rings. See page 101 ESV-3002-CF 3 Rotatable 4.62 CF 3.53 8.96 11.96 4.50
Thermal: Heater jackets and controllers ESV-3002-ISO 3 ISO-80-300-OF 3.50 8.93 11.93 4.50
available for all valves. See page 127
ESV-3002-ASA 3 Rotatable ASA-6-300R 3.50 8.93 11.93 4.50

D Manual Copper Seal Bonnet Angle Valves

Model Port
Number OD Description A B C D
CSV-038 3/8 No flanges 1.50 4.06 4.44 2.73
CSV-0382-CF 3/8 Rotatable 1.33 CF 1.60 4.16 4.54 2.73
CSV-050 1/2 No flanges 1.50 4.06 4.56 2.73
CSV-0502-CF 1/2 Rotatable 1.33 CF 1.60 4.16 4.66 2.73
CSV-075 3/4 No flanges 2.00 4.56 5.31 2.73
C CSV-0752-CF 3/4 Rotatable 1.33 CF 2.50 5.06 5.81 2.73
CSV-100 1 No flanges 1.88 4.32 5.32 2.73
B
CSV-1002-CF 1 Rotatable 2.12 CF 2.05 4.49 5.49 2.73
CSV-150 11/2 No flanges 2.25 5.63 7.13 3.25
CSV-1502-CF 11/2 Rotatable 2.75 CF 2.46 5.84 7.34 3.25
A CSV-200 2 No flanges 3.25 7.85 9.85 4.05
CSV-2002-CF 2 Rotatable 3.38 CF 3.48 8.08 10.08 4.05
CSV-250 21/2 No flanges 3.00 8.27 10.77 4.61
CSV-2502-CF 21/2 Rotatable 4.50 CF 3.38 8.65 11.15 4.61
A CSV-300 3 No flanges 3.25 8.68 11.68 5.62
CSV-3002-CF 3 Rotatable 4.62 CF 3.53 8.96 11.96 5.62

CSV O-ring
ESV O-ring Kits & Gasket Kits
Model Port Port
Number OD Model Number OD
ESV-075-95 3/8-1 CSV-075-95 3/8-1

ESV-150-95 11/2 CSV-150-95 11/2

ESV-200-95 2 CSV-200-95 2
ESV-250-95 21/2 CSV-250-95 21/2
ESV-300-95 3 CSV-300-95 3

Valve rebuild kits available. See page 111

8 Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com

Pneumatic Viton Seal Angle Valves
Model
Number
ESVP-038
Port
OD
3/8

Description
No flanges
Isolation Valves
Pneumatic Angle Valves

A
1.50

B
3.62

C
5.77

D
2.25
3Section 3.3

ESVP-0382-CF 3/8 Rotatable 1.33 CF 1.60 3.72 5.87 2.25

ESVP-0382-NWB 3/8 NW-10B 1.65 3.77 5.92 2.25
ESVP-050 1/2 No flanges 1.50 3.62 5.77 2.25
ESVP-0502-CF 1/2 Rotatable 1.33 CF 1.60 3.72 5.87 2.25
ESVP-0502-NWB 1/2 NW-10B 1.65 3.77 5.92 2.25
ESVP-075 3/4 No flanges 2.00 4.12 6.26 2.25
ESVP-0752-CF 3/4 Rotatable 1.33 CF 2.50 4.62 6.76 2.25
ESVP-0752-NWB 3/4 NW-16B 2.15 4.27 6.41 2.25
ESVP-100 1 No flanges 1.88 3.88 6.02 2.25
ESVP-1002-CF 1 Rotatable 2.12 CF 2.05 4.05 6.19 2.25
ESVP-1002-NWB 1 NW-25B 2.03 4.03 6.17 2.25
ESVP-150 11/2 No flanges 2.25 4.98 7.56 3.00
ESVP-1502-CF 11/2 Rotatable 2.75 CF 2.46 5.19 7.77 3.00 Specifications
ESVP-1502-NWB 11/2 NW-40B 2.40 5.13 7.71 3.00 Port ODs: 3 / 8 to 4 inches
ESVP-200 2 No flanges 3.25 6.74 11.23 3.50 Materials
ESVP-2002-CF 2 Rotatable 3.38 CF 3.48 6.97 11.46 3.50 Body: Electropolished 304 stainless steel
ESVP-2002-NWB 2 NW-50B 3.40 6.89 11.38 3.50 Bellows: Welded AM-350 stainless steel
Bonnet seal: Copper or Viton
ESVP-2002-ASA 2 Rotatable ASA-5-200R 3.50 6.99 11.48 3.50 Poppet seal: Viton
ESVP-250 21/2 No flanges 3.00 7.18 10.10 4.00 Other O-ring compounds available
ESVP-2502-CF 21/2 4.50 CF 3.38 7.56 10.48 4.00 Actuation: Normally closed
3 / 8 to 2 inch ODs: Air-to-open, spring-to-close
ESVP-2502-ISO 21/2 ISO-63-250-OF 3.25 7.43 10.35 4.00 21/ 2 to 4 inch ODs: Air-to-open, air-to-close
ESVP-2502-ASA 21/2 Rotatable ASA-5-250R 3.25 7.43 10.35 4.00 See page 101 for more actuation options
ESVP-300 3 No flanges 3.25 7.62 11.00 4.50 Operating pressure:60 to 80 psig
ESVP-3002-CF 3 Rotatable 4.62 CF 3.53 7.90 11.28 4.50 Differential pressure
ESVP-3002-ISO 3 ISO-80-300-OF 3.50 7.87 11.25 4.50 Maximum 20 psia across valve seat
ESVP-3002-ASA 3 Rotatable ASA-6-300R 3.50 7.87 11.25 4.50 Maximum temperature with Viton seals
Sustained: <150°C
ESVP-400 4 No flanges 4.22 9.55 14.99 6.50 Intermittent: <204°C
ESVP-4002-CF 4 Rotatable 6.00 CF 4.66 9.99 15.43 6.50
Vacuum range
ESVP-4002-ISO 4 ISO-100-400-OF 4.47 9.80 15.24 6.50 Viton bonnet seal: >1x 10-9 Torr - High Vacuum
ESVP-4002-ASA 4 Rotatable ASA-7.5-400R 4.47 9.80 15.24 6.50 Copper bonnet seal: >1x 10 -10 Torr - UHV
Options: Fittings, O-rings, air solenoids,
micro-switches and actuators. See page 101
Pneumatic Copper Seal Bonnet Angle Valves Thermal: Heater jackets and controllers
available for all valves. See page 127
Model Port
Number OD Description A B C D
CSVP-038 3/8 No flanges 1.50 3.75 5.77 2.73
CSVP-0382-CF 3/8 Rotatable 1.33 CF 1.60 3.85 5.82 2.73
CSVP-050 1/2 No flanges 1.50 3.75 5.77 2.73
CSVP-0502-CF 1/2 Rotatable 1.33 CF 1.60 3.85 5.82 2.73
CSVP-075 3/4 No flanges 2.00 4.25 6.26 2.73
CSVP-0752-CF 3/4 Rotatable 1.33 CF 2.50 4.75 6.76 2.73
D
CSVP-100 1 No flanges 1.88 4.00 6.02 2.73
CSVP-1002-CF 1 Rotatable 2.12 CF 2.05 4.17 6.19 2.73
CSVP-150 11/2 No flanges 2.25 4.98 7.56 3.25
CSVP-1502-CF 11/2 Rotatable 2.75 CF 2.46 5.19 7.77 3.25
CSVP-200 2 No flanges 3.25 6.62 11.23 4.05
CSVP-2002-CF 2 Rotatable 3.38 CF 3.48 6.85 11.45 4.05
CSVP-250 21/2 No flanges 3.00 7.18 10.10 4.61
CSVP-2502-CF 21/2 Rotatable 4.50 CF 3.38 7.56 10.48 4.61 C

CSVP-300 3 No flanges 3.25 7.62 11.00 5.62

CSVP-3002-CF 3 Rotatable 4.62 CF 3.53 7.90 11.28 5.62
B
CSVP-400 4 No flanges 4.22 9.55 14.99 6.73
CSVP-4002-CF 4 Rotatable 6.00 CF 4.66 9.99 15.43 6.73
A

CSVP O-Ring
ESVP O-Ring Kits & Gasket Kits A

Model Port Model Port

Number OD Number OD
ESVP-075-95 3 / 8 -1 CSVP-075-95 3 / 8 -1

ESVP-150-95 11/ 2 CSVP-150-95 11/ 2 All dimensions are in inches (mm) & weights
ESVP-200-95 2 CSVP-200-95 2 are in pounds (kg), unless otherwise noted.
ESVP-250-95 21/ 2 CSVP-250-95 21/ 2
ESVP-300-95 3 CSVP-300-95 3
ESVP-400-95 4 CSVP-400-95 4

9
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
3Section 3.3
Isolation Valves
Manual Angle-In-Line Valves

Manual Viton Seal Angle-In-Line Valves

Port
Model Number OD Description A B C D
AIV-075 3/4 No flanges 3.70 3.47 4.01 2.25
AIV-0752-CF 3/4 Rotatable 1.33 CF 4.70 3.47 4.01 2.25
AIV-0752-NWB 3/4 NW-16B 4.00 3.47 4.01 2.25
AIV-100 1 No flanges 3.90 3.42 4.14 2.25
AIV-1002-CF 1 Rotatable 2.12 CF 4.23 3.42 4.14 2.25
AIV-1002-NWB 1 NW-25B 4.20 3.42 4.14 2.25
AIV-150 11/2 No flanges 4.82 4.55 5.61 3.00
D

AIV-1502-CF 11/2 Rotatable 2.75 CF 5.24 4.55 5.61 3.00

AIV-1502-NWB 11/2 NW-40B 5.12 4.55 5.61 3.00
B
AIV-200 2 No flanges 6.70 6.19 9.15 3.50
AIV-2002-CF 2 Rotatable 3.38 CF 7.15 6.19 9.15 3.50
C
AIV-2002-NWB 2 NW-50B 7.00 6.19 9.15 3.50
AIV-250 21/2 No flanges 7.75 6.99 10.31 4.00
AIV-2502-CF 21/2 Rotatable 4.50 CF 8.50 6.99 10.31 4.00
AIV-2502-ISO 21/2 ISO-63-250-OF 8.25 6.99 10.31 4.00
AIV-300 3 No flanges 10.05 7.71 11.38 4.50
AIV-3002-CF 3 Rotatable 4.62 CF 10.61 7.71 11.38 4.50
AIV-3002-ISO 3 ISO-80-300-OF 10.55 7.71 11.38 4.50

Manual Copper Seal Bonnet Angle-In-Line Valves

Specifications Model Port
Port ODs: 3 / 8 to 3 inches Number OD Description A B C D

Materials CAIV-075 3/4 No flanges 3.70 3.47 4.01 2.73

Body: Electropolished 304 stainless steel CAIV-0752-CF 3/4 Rotatable 1.33 CF 4.70 3.47 4.01 2.73
Bellows: Welded AM-350 stainless steel CAIV-100 1 No flanges 3.90 3.42 4.14 2.73
Bonnet seal: Copper or Viton
Poppet seal: Viton CAIV-1002-CF 1 Rotatable 2.12 CF 4.48 3.42 4.14 2.73
Other O-ring compounds available CAIV-150 11/2 No flanges 4.82 4.55 5.61 3.25
Actuation: Self-lubricating bronze nuts CAIV-1502-CF 11/2 Rotatable 2.75 CF 5.24 4.55 5.61 3.25
with ACME threads CAIV-200 2 No flanges 6.70 6.19 9.15 4.05
Differential pressure CAIV-2002-CF 2 Rotatable 3.38 CF 7.15 6.19 9.15 4.05
Maximum 20 psia across valve seat CAIV-250 21/2 No flanges 7.75 6.99 10.31 4.61
Maximum temperature with Viton seals CAIV-2502-CF 21/2 Rotatable 4.50 CF 8.50 6.99 10.31 4.61
Sustained: <150°C
Intermittent: <204°C CAIV-300 3 No flanges 10.05 7.71 11.38 5.62
Vacuum range CAIV-3002-CF 3 Rotatable 4.62 CF 10.61 7.71 11.38 5.62
Viton bonnet seal: >1x 10-9 Torr - High Vacuum
Copper bonnet seal: >1x 10 -10 Torr - UHV
Options: Fittings and O-rings. See page 101
Thermal: Heater jackets and controllers
CAIVP O-Ring
available for all valves. See page 127 AIV O-Ring Kits & Gasket Kits
Port Model Port
Model Number OD Number OD
ESV-075-95 3/8-1 CSVP-075-95 3/8-1

ESV-150-95 11/2 CSVP-150-95 11/2

ESV-200-95 2 CSVP-200-95 2
ESV-250-95 21/2 CSVP-250-95 21/2
ESV-300-95 3 CSVP-300-95 3

All dimensions are in inches (mm) & weights

are in pounds (kg), unless otherwise noted.

10
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
 Isolation Valves
Pneumatic Angle-In-Line Valves

Pneumatic Viton Seal Angle-In-Line Valves

3
Section 3.3

Model Port
Number OD Description A B C
AIVP-075 3/4 No flanges 3.70 4.32 2.25
AIVP-0752-CF 3/4 Rotatable 1.33 CF 4.70 4.32 2.25
AIVP-0752-NWB 3/4 NW-16B 4.00 4.32 2.25
AIVP-100 1 No flanges 3.90 4.27 2.25
AIVP-1002-CF 1 Rotatable 2.12 CF 4.23 4.27 2.25
AIVP-1002-NWB 1 NW-25B 4.20 4.27 2.25
AIVP-150 11/2 No flanges 4.82 5.69 3.00

C
AIVP-1502-CF 11/2 Rotatable 2.75 CF 5.24 5.69 3.00
AIVP-1502-NWB 11/2 NW-40B 5.12 5.69 3.00
AIVP-200 2 No flanges 6.70 7.94 3.50
AIVP-2002-CF 2 Rotatable 3.38 CF 7.15 7.94 3.50 B
AIVP-2002-NWB 2 NW-50B 7.00 7.94 3.50
AIVP-250 21/2 No flanges 7.75 7.64 4.00
AIVP-2502-CF 21/2 Rotatable 4.50 CF 8.50 7.64 4.00
AIVP-2502-ISO 21/2 ISO-63-250-OF 8.25 7.64 4.00
AIVP-300 3 No flanges 10.05 8.70 4.50
AIVP-3002-CF 3 Rotatable 4.62 CF 10.61 8.70 4.50
AIVP-3002-ISO 3 ISO-80-300-OF 10.55 8.70 4.50
A

Pneumatic Copper Seal Bonnet Angle-In-Line Valves

Model Port Specifications
Number OD Description A B C Port ODs: 3 / 8 to 3 inches.
CAIVP-075 3/4 No flanges 3.70 4.32 2.73 Materials
CAIVP-0752-CF 3/4 Rotatable 1.33 CF 4.70 4.32 2.73 Body: Electropolished 304 stainless steel
CAIVP-100 1 No flanges 3.90 4.27 2.73 Bellows: Welded AM-350 stainless steel
Bonnet seal: Copper or Viton
CAIVP-1002-CF 1 Rotatable 2.12 CF 4.48 4.27 2.73 Poppet seal: Viton
CAIVP-150 11/2 No flanges 4.82 5.69 3.25 Other O-ring compounds available
CAIVP-1502-CF 11/2 Rotatable 2.75 CF 5.24 5.69 3.25 Actuation: Normally closed
CAIVP-200 2 No flanges 6.70 7.94 4.05 3 / 8 to 2 inch ODs: Air-to-open, spring-to-close
21/ 2 to 3 inch ODs: Air-to-open, air-to-close
CAIVP-2002-CF 2 Rotatable 3.38 CF 7.15 7.94 4.05 See page 101 for more actuation options
CAIVP-250 21/2 No flanges 7.75 7.64 4.61 Operating pressure: 60 to 80 psig
CAIVP-2502-CF 21/2 Rotatable 4.50 CF 8.50 7.64 4.61 Differential pressure
CAIVP-300 3 No flanges 10.05 8.70 5.62 Maximum 20 psia across valve seat
CAIVP-3002-CF 3 Rotatable 4.62 CF 10.61 8.70 5.62 Maximum temperature with Viton seals
Sustained: <150°C
Intermittent: <204°C
Vacuum range
CAIVP O-Ring Viton bonnet seal: >1x 10-9 Torr - High Vacuum
Copper bonnet seal: >1x 10 -10 Torr - UHV
AIVP O-Ring Kits & Gasket Kits Options: Fittings, O-rings, air solenoids,
Port Model Port micro-switches and actuators. See page 101
Model Number OD Number OD Thermal: Heater jackets and controllers
ESVP-075-95 3/8-1 CSVP-075-95 3/8-1 available for all valves. See page 127
ESVP-150-95 11/2 CSVP-150-95 11/2
ESVP-200-95 2 CSVP-200-95 2
ESVP-250-95 21/2 CSVP-250-95 21/2
ESVP-300-95 3 CSVP-300-95 3

All dimensions are in inches (mm) & weights

are in pounds (kg), unless otherwise noted.

11
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
3Section 3.3
Isolation Valves
Manual In-Line Valves

Manual Viton Seal In-Line Valves

Model
Number
Port
OD

Description

A

B

C

D

E

F
ILV-038 3/8 No flanges 1.50 0.94 1.50 4.06 2.25 4.44
ILV-0382-CF 3/8 Rotatable 1.33 CF 1.60 0.94 1.50 4.06 2.25 4.44
ILV-0382-NWB 3/8 NW-10B 1.65 0.94 1.50 4.06 2.25 4.44
ILV-050 1/2 No flanges 1.50 1.00 1.62 4.19 2.25 4.69
ILV-0502-CF 1/2 Rotatable 1.33 CF 1.60 1.00 1.62 4.19 2.25 4.69
ILV-0502-NWB 1/2 NW-10B 1.65 1.00 1.62 4.19 2.25 4.69
ILV-075 3/4 No flanges 2.00 1.12 1.87 4.44 2.25 5.19
ILV-0752-CF 3/4 Rotatable 1.33 CF 2.50 1.12 1.87 4.44 2.25 5.19
Specifications ILV-0752-NWB 3/4 NW-16B 2.15 1.12 1.87 4.44 2.25 5.19
Port ODs: 3 / 8 to 3 inches ILV-100 1 No flanges 1.88 1.37 2.25 4.69 2.25 5.69
Materials ILV-1002-CF 1 Rotatable 2.12 CF 2.05 1.37 2.25 4.69 2.25 5.69
Body: Electropolished 304 stainless steel
Bellows: Welded AM-350 stainless steel ILV-1002-NWB 1 NW-25B 2.03 1.37 2.25 4.69 2.25 5.69
Bonnet seal: Copper or Viton ILV-150 11/2 No flanges 2.25 1.88 3.12 6.52 3.00 8.02
Poppet seal: Viton ILV-1502-CF 11/2 Rotatable 2.75 CF 2.46 1.88 3.12 6.52 3.00 8.02
Other O-ring compounds available
ILV-1502-NWB 11/2 NW-40B 2.40 1.88 3.12 6.52 3.00 8.02
Actuation: Self-lubricating bronze nuts
with ACME threads ILV-200 2 No flanges 3.25 2.62 4.12 8.73 3.50 10.73
ILV-2002-CF 2 Rotatable 3.38 CF 3.48 2.62 4.12 8.73 3.50 10.73
Differential pressure
Maximum 20 psia across valve seat ILV-2002-NWB 2 NW-50B 3.40 2.62 4.12 8.73 3.50 10.73
Maximum temperature with Viton seals ILV-2002-ASA 2 Rotatable ASA-5-200R 3.50 2.62 4.12 8.73 3.50 10.73
Sustained: <150°C ILV-250 21/2 No flanges 3.00 3.12 4.93 10.20 4.00 12.70
Intermittent: <204°C ILV-2502-CF 21/2 Rotatable 4.50 CF 3.38 3.12 4.93 10.20 4.00 12.70
Vacuum range ILV-2502-ISO 21/2 ISO-63-250-OF 3.25 3.12 4.93 10.20 4.00 12.70
Viton bonnet seal: >1x 10-9 Torr - High Vacuum
Copper bonnet seal: >1x 10 -10 Torr - UHV ILV-2502-ASA 21/2 Rotatable ASA-5-250R 3.25 3.12 4.93 10.20 4.00 12.70
ILV-300 3 No flanges 3.25 3.68 5.62 11.04 4.50 14.04
Options: Fittings and O-rings. See page 101
ILV-3002-CF 3 Rotatable 4.62 CF 3.53 3.68 5.62 11.04 4.50 14.04
Thermal: Heater jackets and controllers
available for all valves. See page 127 ILV-3002-ISO 3 ISO-80-300-OF 3.50 3.68 5.62 11.04 4.50 14.04
ILV-3002-ASA 3 Rotatable ASA-6-300R 3.50 3.68 5.62 11.04 4.50 14.04

Manual Copper Seal Bonnet In-Line Valves

E Model Port
Number OD Description A B C D E F
CILV-038 3/8 No flanges 1.50 0.94 1.50 4.06 2.73 4.44
CILV-0382-CF 3/8 Rotatable 1.33 CF 1.60 0.94 1.50 4.06 2.73 4.44
CILV-050 1/2 No flanges 1.50 1.00 1.62 4.19 2.73 4.69
CILV-0502-CF 1/2 Rotatable 1.33 CF 1.60 1.00 1.62 4.19 2.73 4.69
CILV-075 3/4 No flanges 2.00 1.12 1.87 4.44 2.73 5.19
CILV-0752-CF 3/4 Rotatable 1.33 CF 2.50 1.12 1.87 4.44 2.73 5.19
F
CILV-100 1 No flanges 1.88 1.37 2.25 4.69 2.73 5.69
D
CILV-1002-CF 1 Rotatable 2.12 CF 2.05 1.37 2.25 4.69 2.73 5.69
CILV-150 11/2 No flanges 2.25 1.88 3.12 6.52 3.25 8.02
CILV-1502-CF 11/2 Rotatable 2.75 CF 2.46 1.88 3.12 6.52 3.25 8.02
B CILV-200 2 No flanges 3.25 2.62 4.12 8.73 4.05 10.73
C CILV-2002-CF 2 Rotatable 3.38 CF 3.48 2.62 4.12 8.73 4.05 10.73
CILV-250 21/2 No flanges 3.00 3.12 4.93 10.20 4.61 12.70
CILV-2502-CF 21/2 Rotatable 4.50 CF 3.38 3.12 4.93 10.20 4.61 12.70
CILV-300 3 No flanges 3.25 3.62 5.55 11.04 5.62 14.04
A A CILV-3002-CF 3 Rotatable 4.62 CF 3.53 3.62 5.55 11.04 5.62 14.04

CILV O-Ring
ILV O-Ring Kits and Gasket Kits
Port Port
Model Number Model Number
OD OD
ESV-075-95 3/8-1 CSV-075-95 3/8-1

ESV-150-95 11/2 CSV-150-95 11/2

ESV-200-95 2 CSV-200-95 2
ESV-250-95 21/2 CSV-250-95 21/2
ESV-300-95 3 CSV-300-95 3
All dimensions are in inches (mm) & weights
are in pounds (kg), unless otherwise noted.

12
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
Pneumatic Viton Seal In-Line Valves
Model
Number
Port
OD

Description
Isolation Valves
Pneumatic In-Line Valves

A

B

C

D

E

F
3
Section 3.3

ILVP-038 3/8 No flanges 1.50 0.94 1.50 3.62 2.25 5.76

ILVP-0382-CF 3/8 Rotatable 1.33 CF 1.60 0.94 1.50 3.62 2.25 5.76
ILVP-0382-NWB 3/8 NW-10B 1.65 0.94 1.50 3.62 2.25 5.76
ILVP-050 1/2 No flanges 1.50 1.00 1.62 3.75 2.25 5.89
ILVP-0502-CF 1/2 Rotatable 1.33 CF 1.60 1.00 1.62 3.75 2.25 5.89
ILVP-0502-NWB 1/2 NW-10B 1.65 1.00 1.62 3.75 2.25 5.89
ILVP-075 3/4 No flanges 2.00 1.12 1.87 4.00 2.25 6.14
ILVP-0752-CF 3/4 Rotatable 1.33 CF 2.50 1.12 1.87 4.00 2.25 6.14
ILVP-0752-NWB 3/4 NW-16B 2.15 1.12 1.87 4.00 2.25 6.14
ILVP-100 1 No flanges 1.88 1.37 2.25 4.25 2.25 6.39
ILVP-1002-CF 1 Rotatable 2.12 CF 2.05 1.37 2.25 4.25 2.25 6.39 Specifications
ILVP-1002-NWB 1 NW-25B 2.03 1.37 2.25 4.25 2.25 6.39 Port ODs: 3 / 8 to 4 inches
ILVP-150 11/2 No flanges 2.25 1.88 3.12 5.86 3.00 8.45 Materials
ILVP-1502-CF 11/2 Rotatable 2.75 CF 2.46 1.88 3.12 5.86 3.00 8.45 Body: Electropolished 304 stainless steel
Bellows: Welded AM-350 stainless steel
ILVP-1502-NWB 11/2 NW-40B 2.40 1.88 3.12 5.86 3.00 8.45 Bonnet seal: Copper or Viton
ILVP-200 2 No flanges 3.25 2.62 4.12 7.62 3.50 12.11 Poppet seal: Viton
ILVP-2002-CF 2 Rotatable 3.38 CF 3.48 2.62 4.12 7.62 3.50 12.11 Other O-ring compounds available
ILVP-2002-NWB 2 NW-50B 3.40 2.62 4.12 7.62 3.50 12.11 Actuation: Normally closed
3 / 8 to 2 inch ODs: Air-to-open, spring-to-close
ILVP-2002-ASA 2 Rotatable ASA-5-200R 3.50 2.62 4.12 7.62 3.50 12.11 21/ 2 to 4 inch ODs: Air-to-open, air-to-close
ILVP-250 21/2 No flanges 3.00 3.12 4.93 9.11 4.00 12.03 See page 101 for more actuation options
ILVP-2502-CF 21/2 Rotatable 4.50 CF 3.38 3.12 4.93 9.11 4.00 12.03 Operating pressure: 60 to 80 psig
ILVP-2502-ISO 21/2 ISO-63-250-OF 3.25 3.12 4.93 9.11 4.00 12.03 Differential pressure
ILVP-2502-ASA 21/2 Rotatable ASA-5-250R 3.50 3.12 4.93 9.11 4.00 12.03 Maximum 20 psia across valve seat
ILVP-300 3 NNo flanges 3.25 3.68 5.62 9.98 4.50 13.38 Maximum temperature with Viton seals
Sustained: <150°C
ILVP-3002-CF 3 Rotatable 4.62 CF 3.53 3.68 5.62 9.98 4.50 13.38 Intermittent: <204°C
ILVP-3002-ISO 3 ISO-80-300-OF 3.50 3.68 5.62 9.98 4.50 13.38 Vacuum range
ILVP-3002-ASA 3 Rotatable ASA-6-300R 3.50 3.68 5.62 9.98 4.50 13.38 Viton bonnet seal: >1x 10-9 Torr - High Vacuum
ILVP-400 4 No flanges 4.22 4.88 7.38 12.83 6.50 18.27 Copper bonnet seal: >1x 10 -10 Torr - UHV
ILVP-4002-CF 4 Rotatable 6.00 CF 4.66 4.88 7.38 12.83 6.50 18.27 Options: Fittings, O-rings, air solenoids,
micro-switches and actuators. See page 101
ILVP-4002-ISO 4 ISO-100-400-OF 4.47 4.88 7.38 12.83 6.50 18.27
Thermal: Heater jackets and controllers
ILVP-4002-ASA 4 Rotatable ASA-7.5-400R 4.47 4.88 7.38 12.83 6.50 18.27 available for all valves. See page 127

Pneumatic Copper Seal Bonnet In-Line Valves

Model Port
Number OD Description A B C D E F
E
CILVP-038 3/8 No flanges 1.50 0.94 1.50 3.74 2.73 5.76
CILVP-0382-CF 3/8 Rotatable 1.33 CF 1.60 0.94 1.50 3.74 2.73 5.76
CILVP-050 1/2 No flanges 1.50 1.00 1.62 3.88 2.73 5.89
CILVP-0502-CF 1/2 Rotatable 1.33 CF 1.60 1.00 1.62 3.88 2.73 5.89
CILVP-075 3/4 No flanges 2.00 1.12 1.87 4.12 2.73 6.14
CILVP-0752-CF 3/4 Rotatable 1.33 CF 2.50 1.12 1.87 4.12 2.73 6.14
CILVP-100 1 No flanges 1.88 1.37 2.25 4.38 2.73 6.39
CILVP-1002-CF 1 Rotatable 2.12 CF 2.05 1.37 2.25 4.38 2.73 6.39 F
CILVP-150 11/2 No flanges 2.25 1.88 3.12 5.86 3.25 8.44
CILVP-1502-CF 11/2 Rotatable 2.75 CF 2.46 1.88 3.12 5.86 3.25 8.44 D
CILVP-200 2 No flanges 3.25 2.62 4.12 7.50 4.05 12.11
B
CILVP-2002-CF 2 Rotatable 3.38 CF 3.48 2.62 4.12 7.50 4.05 12.11
C
CILVP-250 21/2 No flanges 3.00 3.12 4.93 9.11 4.61 12.03
CILVP-2502-CF 21/2 Rotatable 4.50 CF 3.38 3.12 4.93 9.11 4.61 12.03
CILVP-300 3 No flanges 3.25 3.62 5.55 9.98 5.62 13.38
CILVP-3002-CF 3 Rotatable 4.62 CF 3.53 3.62 5.55 9.98 5.62 13.38 A A
CILVP-400 4 No flanges 4.22 4.88 7.38 12.83 6.73 18.27
CILVP-4002-CF 4 Rotatable 6.00 CF 4.66 4.88 7.38 12.83 6.73 18.27

CILVP O-Ring
ILVP O-Ring Kits & Gasket Kits
Model Port Port
Model Number
Number OD OD
ESVP-075-95 3/8-1 CSVP-075-95 3/8-1

ESVP-150-95 11/2 CSVP-150-95 11/2 All dimensions are in inches (mm) & weights
ESVP-200-95 2 CSVP-200-95 2 are in pounds (kg), unless otherwise noted.
ESVP-250-95 21/2 CSVP-250-95 21/2
ESVP-300-95 3 CSVP-300-95 3
ESVP-400-95 4 CSVP-400-95 4

13
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
3
Section 3.3
Isolation Valves
Manual Tee Valves
Manual Viton Seal Tee Valves
Model
Numer
ESV-038T
ESV-0383T-CF
Port
OD
3/8

3/8

Description
No flanges
Rotatable 1.33 CF

A
1.50
1.60

B
4.06
4.16

C
4.44
4.54
2.25
2.25

D

ESV-0383T-NWB 3/8 NW-10B 1.65 4.21 4.59 2.25

ESV-050T 1/2 No flanges 1.50 4.06 4.56 2.25
ESV-0503T-CF 1/2 Rotatable 1.33 CF 1.60 4.16 4.54 2.25
ESV-0503T-NWB 1/2 NW-10B 1.65 4.21 4.71 2.25
ESV-075T 3/4 No flanges 2.00 4.56 5.31 2.25
ESV-0753T-CF 3/4 Rotatable 1.33 CF 2.50 5.06 5.81 2.25
ESV-0753T-NWB 3/4 NW-16B 2.15 4.71 5.46 2.25
Specifications
ESV-100T 1 No flanges 1.88 4.32 5.32 2.25
Port ODs: 3 / 8 to 3 inches
ESV-1003T-CF 1 Rotatable 2.12 CF 2.05 4.49 5.49 2.25
Materials
Body: Electropolished 304 stainless steel ESV-1003T-NWB 1 NW-25B 2.03 4.47 5.47 2.25
Bellows: Welded AM-350 stainless steel ESV-150T 11/2 No flanges 2.25 5.63 7.13 3.00
Bonnet seal: Copper or Viton ESV-1503T-CF 11/2 Rotatable 2.75 CF 2.46 5.84 7.34 3.00
Poppet seal: Viton
Other O-ring compounds available ESV-1503T-NWB 11/2 NW-40B 2.40 5.78 7.28 3.00
Actuation: Self-lubricating bronze nuts ESV-200T 2 No flanges 3.25 7.85 9.85 3.50
with ACME threads ESV-2003T-CF 2 Rotatable 3.38 CF 3.48 8.08 10.08 3.50
Differential pressure ESV-2003T-NWB 2 NW-50B 3.40 8.00 10.00 3.50
Maximum 20 psia across valve seat ESV-2003T-ASA 2 Rotatable ASA-5-200R 3.25 8.10 10.10 3.50
Maximum temperature with Viton seals ESV-250T 21/2 No flanges 3.00 8.27 10.77 4.00
Sustained: <150°C ESV-2503T-CF 21/2 Rotatable 4.50 CF 3.38 8.65 11.15 4.00
Intermittent: <204°C
ESV-2503T-ISO 21/2 ISO-63-250-OF 3.25 8.52 11.02 4.00
Vacuum range
Viton bonnet seal: >1x 10 -9 Torr - High Vacuum ESV-2503T-ASA 21/2 Rotatable ASA-5-250R 3.25 8.52 11.02 4.00
Copper bonnet seal: >1x 10 -10 Torr - UHV ESV-300T 3 No flanges 3.25 8.68 11.68 4.50
Options: Fittings and O-rings. See page 101 ESV-3003T-CF 3 Rotatable 4.62 CF 3.53 8.96 11.96 4.50
Thermal: Heater jackets and controllers ESV-3003T-ISO 3 ISO-80-300-OF 3.50 8.93 11.93 4.50
available for all valves. See page 127 ESV-3003T-ASA 3 Rotatable ASA-6-300R 3.50 8.93 11.93 4.50

D Manual Copper Seal Bonnet Tee Valves

Model Port
Number OD Description A B C D
CSV-038T 3/8 No flanges 1.50 4.06 4.44 2.73
CSV-0383T-CF 3/8 Rotatable 1.33 CF 1.60 4.16 4.54 2.73
CSV-050T 1/2 No flanges 1.50 4.06 4.56 2.73
CSV-0503T-CF 1/2 Rotatable 1.33 CF 1.60 4.16 4.66 2.73
CSV-075T 3/4 No flanges 2.00 4.56 5.31 2.73
C CSV-0753T-CF 3/4 Rotatable 1.33 CF 2.50 5.06 5.81 2.73
CSV-100T 1 No flanges 1.88 4.32 5.32 2.73
CSV-1003T-CF 1 Rotatable 2.12 CF 2.05 4.49 5.49 2.73
B CSV-150T 11/2 No flanges 2.25 5.63 7.13 3.25
CSV-1503T-CF 11/2 Rotatable 2.75 CF 2.46 5.84 7.34 3.25
A CSV-200T 2 No flanges 3.25 7.85 9.85 4.05
CSV-2003T-CF 2 Rotatable 3.38 CF 3.48 8.08 10.08 4.05
CSV-250T 21/2 No flanges 3.00 8.27 10.77 4.61
CSV-2503T-CF 21/2 Rotatable 3.38 CF 3.38 8.65 11.15 4.61
A A
CSV-300T 3 No flanges 3.25 8.68 11.68 5.62
CSV-3003T-CF 3 Rotatable 4.62 CF 3.53 8.96 11.96 5.62

CSV-T O-Ring
ESV-T O-Ring Kits & Gasket Kits
Model Port Model Port
Number OD Number OD
ESV-075-95 3/8-1 CSV-075-95 3/8-1

ESV-150-95 11/2 CSV-150-95 11/2

ESV-200-95 2 CSV-200-95 2
ESV-250-95 21/2 CSV-250-95 21/2
ESV-300-95 3 CSV-300-95 3

All dimensions are in inches (mm) & weights

are in pounds (kg), unless otherwise noted.

14
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Pneumatic Viton Seal Tee Valves
Model
Number
ESVP-038T
ESVP-0383T-CF
Port
OD
3/8

3/8

Description
No flanges
Rotatable 1.33 CF
Isolation Valves
Pneumatic Tee Valves

1.50
1.60

A

B
3.62
3.67

C
5.77
5.87

D
2.25
2.25
3
Section 3.3

ESVP-0383T-NWB 3/8 NW-10B 1.65 3.77 5.92 2.25

ESVP-050T 1/2 No flanges 1.50 3.62 5.77 2.25
ESVP-0503T-CF 1/2 Rotatable 1.33 CF 1.60 3.67 5.87 2.25
ESVP-0503T-NWB 1/2 NW-10B 1.65 3.77 5.92 2.25
ESVP-075T 3/4 No flanges 2.00 4.12 6.26 2.25
ESVP-0753T-CF 3/4 Rotatable 1.33 CF 2.50 4.62 6.76 2.25
ESVP-0753T-NWB 3/4 NW-16B 2.15 4.27 6.41 2.25
ESVP-100T 1 No flanges 1.88 3.88 6.02 2.25
ESVP-1003T-CF 1 Rotatable 2.12 CF 2.05 4.05 6.19 2.25
Specifications
ESVP-1003T-NWB 1 NW-25B 2.03 4.03 6.17 2.25
Port ODs: 3 / 8 to 4 inches
ESVP-150T 11/2 No flanges 2.25 4.98 7.56 3.00
Materials
ESVP-1503T-CF 11/2 Rotatable 2.75 CF 2.45 5.19 7.77 3.00 Body: Electropolished 304 stainless steel
ESVP-1503T-NWB 11/2 NW-40B 2.40 5.13 7.71 3.00 Bellows: Welded AM-350 stainless steel
ESVP-200T 2 No flanges 3.25 6.74 11.23 3.50 Bonnet seal: Copper or Viton
Poppet seal: Viton
ESVP-2003T-CF 2 Rotatable 3.38 CF 3.48 6.97 11.46 3.50 Other O-ring compounds available
ESVP-2003T-NWB 2 NW-50B 3.40 6.89 11.38 3.50 Actuation: Normally closed
ESVP-2003T-ASA 2 Rotatable ASA-5-200R 3.50 6.99 11.48 3.50 3 / 8 to 2 inch ODs: Air-to-open, spring-to-close
21/ 2 to 4 inch ODs: Air-to-open, air-to-close
ESVP-250T 21/2 No flanges 3.00 7.18 10.10 4.00 See page 101 for more actuation options
ESVP-2503T-CF 21/2 Rotatable 4.50 CF 3.38 7.56 10.48 4.00
Operating pressure:60 to 80 psig
ESVP-2503T-ISO 21/2 ISO-63-250-OF 3.25 7.43 10.35 4.00
Differential pressure
ESVP-2503T-ASA 21/2 Rotatable ASA-5-250R 3.25 7.43 10.35 4.00 Maximum 20 psia across valve seat
ESVP-300T 3 No flanges 3.25 7.62 11.00 4.50 Maximum temperature with Viton seals
ESVP-3003T-CF 3 Rotatable 4.62 CF 3.53 7.90 11.28 4.50 Sustained: <150°C
ESVP-3003T-ISO 3 ISO-80-300-OF 3.50 7.87 11.25 4.50 Intermittent: <204°C
ESVP-3003T-ASA 3 Rotatable ASA-6-300R 3.50 7.87 11.25 4.50 Vacuum range
Viton bonnet seal: >1x 10-9 Torr - High Vacuum
ESVP-400T 4 No flanges 4.22 9.55 14.99 6.50 Copper bonnet seal: >1x 10 -10 Torr - UHV
ESVP-4003T-CF 4 Rotatable 6.00 CF 4.66 9.99 15.43 6.50 Options: Fittings, O-rings, air solenoids,
ESVP-4003T-ISO 4 ISO-100-400-OF 4.47 9.80 15.24 6.50 micro-switches and actuators. See page 101
ESVP-4003T-ASA 4 Rotatable ASA-7.5-400R 4.47 9.80 15.24 6.50 Thermal: Heater jackets and controllers
available for all valves. See page 127

Pneumatic Copper Seal Bonnet Tee Valves

Model Port
Number OD Description A B C D
CSVP-038T 3/8 No flanges 1.50 3.75 5.77 2.73 D

CSVP-0383T-CF 3/8 Rotatable 1.33 CF 1.60 3.85 5.82 2.73

CSVP-050T 1/2 No flanges 1.50 3.75 5.77 2.73
CSVP-0503T-CF 1/2 Rotatable 1.33 CF 1.60 3.85 5.82 2.73
CSVP-075T 3/4 No flanges 2.00 4.25 6.26 2.73
CSVP-0753T-CF 3/4 Rotatable 1.33 CF 2.50 4.75 6.76 2.73
CSVP-100T 1 No flanges 1.88 4.00 6.02 2.73
CSVP-1003T-CF 1 Rotatable 2.12 CF 2.05 4.17 6.19 2.73
CSVP-150T 11/2 No flanges 2.25 4.98 7.56 3.25 C
CSVP-1503T-CF 11/2 Rotatable 2.75 CF 2.46 5.19 7.77 3.25
CSVP-200T 2 No flanges 3.25 6.62 11.23 4.05
B
CSVP-2003T-CF 2 Rotatable 3.38 CF 3.48 6.85 10.58 4.05
CSVP-250T 21/2 No flanges 3.00 7.18 10.10 4.61
A
CSVP-2503T-CF 21/2 Rotatable 4.50 CF 3.38 7.56 10.48 4.61
CSVP-300T 3 No flanges 3.25 7.62 11.00 5.62
CSVP-3003T-CF 3 Rotatable 4.62 CF 3.53 7.90 11.28 5.62
CSVP-400T 4 No flanges 4.22 9.55 14.99 6.73 A A
CSVP-4003T-CF 4 Rotatable 6.00 CF 4.66 9.99 15.43 6.73

CSVP-T O-Ring
ESVP-T O-Ring Kits & Gasket Kits
Port Port
Model Number Model Number
OD OD
ESVP-075-95 3/8-1 CSVP-075-95 3/8-1

ESVP-150-95 11/2 CSVP-150-95 11/2

ESVP-200-95 2 CSVP-200-95 2 All dimensions are in inches (mm) & weights
ESVP-250-95 21/2 CSVP-250-95 21/2 are in pounds (kg), unless otherwise noted.
ESVP-300-95 3 CSVP-300-95 3
ESVP-400-95 4 CSVP-400-95 4

15
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3
Section 3.3
Isolation Valves
Straight-Through Valves

Manual Viton Seal Straight-Through Valves

Model
Number
STV-075
Port
ID
0.65
Port
OD
3/4

Description
No flanges 5.00

A

B
3.30

C
4.50 2.25

D

STV-0752-CF 0.65 3/4 Rotatable 1.33 CF 6.00 3.30 4.50 2.25

D
STV-0752-NWB 0.65 3/4 NW-16B 5.30 3.30 4.50 2.25
STV-112 1.00 11/8 No flanges 5.50 3.86 5.15 3.00
STV-1122-CF 1.00 11/8 Rotatable 2.12 CF 5.83 3.86 5.15 3.00
C B
STV-1122-NWB 1.00 11/8 NW-40B 5.80 3.86 5.15 3.00
STV-150 1.38 11/2 No flanges 7.00 5.47 7.69 3.50
STV-1502-CF 1.38 11/2 Rotatable 2.75 CF 7.42 5.47 7.69 3.50
STV-1502-NWB 1.38 11/2 NW-40B 7.30 5.47 7.69 3.50

Manual Copper Seal Bonnet Straight-Through Valves

Model Port
A Port OD
Number ID Description A B C D
CSTV-075 0.65 3/4 No flanges 5.00 3.51 4.71 2.73
CSTV-0752-CF 0.65 3/4 Rotatable 1.33 CF 6.00 3.51 4.71 2.73
Specifications CSTV-150 1.38 11/ 2 No flanges 7.00 5.47 7.69 4.05
Port ODs: 3 / 4 to 11/ 2 inches CSTV-1502-CF 1.38 11/ 2 Rotatable 2.75 CF 7.42 5.47 7.69 4.05
Materials
Body: Electropolished 304 stainless steel
Bellows: Welded AM-350 stainless steel
Bonnet seal: Copper or Viton
STV O-Ring Kits
Poppet seal: Viton Model Port
Other O-ring compounds available Number OD

Manual actuation: Self-lubricating ESV-075-95 3/4

bronze nuts with ACME threads STV-112-95 11/8

Pneumatic actuation: Normally closed STV-150-95 11/2
3­/ 4 inch ODs: Air-to-open,
spring-to-close
11/ 8 to 11/ 2 inch ODs: Air-to-open, air-to-close CSTV O-Ring
See page 99 for more actuation options

Operating pressure: 60 to 80 psig
& Gasket Kits
Model Port
Differential pressure Number OD
Maximum 20 psia across valve seat CSV-075-95 3/4

Maximum temperature with Viton seals CSV-150-95 11/2

Sustained: <150°C
Intermittent: <204°C
Vacuum range
Viton bonnet seal: >1x 10-9 Torr - High Vacuum Pneumatic Viton Seal Straight-Through Valves
Copper bonnet seal: >1x 10 -10 Torr - UHV Model Port Port
Options: Fittings, O-rings, air solenoids, Number ID OD Description A B C
micro-switches and actuators. See page 101 STVP-075 0.65 3/4 No flanges 5.00 3.92 2.25
Thermal: Heater jackets and controllers STVP-0752-CF 0.65 3/4 Rotatable 1.33 CF 6.00 3.92 2.25
available for all valves. See page 127 STVP-0752-NWB 0.65 3/4 NW-16B 5.30 3.92 2.25
STVP-112 1.00 11/8 No flanges 5.50 5.10 3.00
STVP-1122-CF 1.00 11/8 Rotatable 2.12 CF 5.83 5.10 3.00
STVP-1122-NWB 1.00 11/8 NW-40B 5.80 5.10 3.00
STVP-150 1.38 11/2 No flanges 7.00 6.11 3.50
STVP-1502-CF 1.38 11/2 Rotatable 2.75 CF 7.42 6.11 3.50
C

STVP-1502-NWB 1.38 11/2 NW-40B 7.30 6.11 3.50

B Pneumatic Copper Seal Bonnet Straight-Through Valves

Model Port Port
number ID OD Description A B C
CSTVP-075 0.65 3/4 No flanges 5.00 3.92 2.73
CSTVP-0752-CF 0.65 3/4 Rotatable 1.33 CF 6.00 3.92 2.73
CSTVP-150 1.38 11/ 2 No flanges 7.00 6.11 4.05
CSTVP-1502-CF 1.38 11/ 2 Rotatable 2.75 CF 7.42 6.11 4.05
A

CSTVP O-Ring
STVP O-Ring Kits & Gasket Kits
Model Port Model Port
Number OD Number OD
All dimensions are in inches (mm) & weights are ESVP-075-95 3/4 CSVP-075-95 3/4
in pounds (kg), unless otherwise noted. STVP-112-95 11/8 CSTVP-150-95 11/2
STVP-150-95 11/2

16
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Complete Valve Rebuild Kits
Isolation Valves
Replacement Parts & Rebuild Kits

Contains all items except valve body (#7), refer to kit contents diagram at right.
Model
Number
For Valve
Model Numbers
8
3Section 3.3

CSV-075-99 CSV, CILV and CAIV, -038 to -100

CSV-150-99 CSV, CILV and CAIV-150 Kit Contents Diagram
CSV-200-99 CSV, CILV and CAIV-200 1. Air cylinder
CSV-250-99 CSV, CILV and CAIV-250 2. Stem O-ring*
CSV-300-99 CSV, CILV and CAIV-300
3. Retaining plate 9
CSVP-075-99 CSVP, CILVP and CAIVP, -038 to -100 1
4. Center plate
CSVP-150-99 CSVP, CILVP and CAIVP-150 10
CSVP-200-99 CSVP, CILVP and CAIVP-200 5. Stem shaft
11
CSVP-250-99 CSVP, CILVP and CAIVP-250 6. Set screw 2* 12
CSVP-300-99 CSVP, CILVP and CAIVP-300 7. Body 13
CSVP-400-99 CSVP, CILVP and CAIVP-400 8. Air filter
ESV-075-99 ESV, ILV, AIV, STV, -038 to -100 3
9. Air cylinder spring 14
ESV-150-99 ESV, ILV, AIV, STV, -150 4
10. Jam nut
ESV-200-99 ESV, ILV and AIV-200 15
ESV-250-99 ESV, ILV and AIV-250 11. Spring retainer
ESV-300-99 ESV, ILV and AIV-300 12. Piston cup 16
ESVP-075-99 ESVP, ILVP, AIVP, STVP, -038 to -100 13. Bonnet screws
ESVP-150-99 ESVP, ILVP, AIVP, STVP, -150 14. Air cylinder O-ring 5
ESVP-200-99 ESVP, ILVP and AIVP-200
15. Body flange O-ring
ESVP-250-99 ESVP, ILVP and AIVP-250 or gasket 6
ESVP-300-99 ESVP, ILVP and AIVP-300
16. Bellows assembly
ESVP-400-99 ESVP, ILVP and AIVP-400
STV-112-99 STV-112 17. Poppet O-ring
* 2 inch ID valves are assembled 17
STVP-112-99 STVP-112
STV-150-99 STV-150 with two stem O-rings.
7
STVP-150-99 STVP-150

O-Ring or Gasket Kits Bellows Assembly Kits

Model Kit Contents Model Contents
Number (See drawing) For Valve Model Numbers Number (See drawing) For Valve Model Numbers
ESV-075-95 2, 14, 15, 17 ESV, AIV, ILV, ESV-T, STV, -038 to -100 CSV-075-16K 6, 16, 17 CSV, CILV, CAIV, CSTV, manual or pnuematic, -038 to -100
ESV-150-95 2, 14, 15, 17 ESV, AIV, ILV, ESV-T, -150 CSV-150-16K 6, 16, 17 CSV, CILV, CAIV, CSTV, manual or pnuematic, -150
ESV-200-95 2, 14, 15, 17 ESV, AIV, ILV, ESV-T, -200 CSV-200-16K 6, 16, 17 CSV, CILV, CAIV, manual or pnuematic, -200
ESV-250-95 2, 14, 15, 17 ESV, AIV, ILV, ESV-T, -250 CSV-250-16K 6, 16, 17 CSV, CILV, CAIV, manual or pnuematic, -250
ESV-300-95 2, 14, 15, 17 ESV, AIV, ILV, ESV-T, -300 CSV-300-16K 6, 16, 17 CSV, CILV, CAIV, manual or pnuematic, -300
STV-112-95 2, 14, 15, 17 STV-112 CSVP-400-16K 6, 16, 17 CSVP and CILVP-400
STV-150-95 2, 14, 15, 17 STV-150 ESV-075-16K 6, 16, 17 ESV, ILV and AIV, manual or pnuematic, -038 to -100
ESVP-075-95 2, 14, 15, 17 ESVP, AIVP, ILVP, ESVP-T, STVP, -038 to -100 ESV-150-16K 6, 16, 17 ESV, ILV and AIV-150, manual or pnuematic
ESVP-150-95 2, 14, 15, 17 ESVP, AIVP, ILVP, ESVP-T, -150 ESV-200-16K 6, 16, 17 ESV, ILV and AIV-200, manual
ESVP-200-95 2, 14, 15, 17 ESVP, AIVP, ILVP, ESVP-T, -200 ESVP-200-16K 6, 16, 17 ESVP, ILVP and AIVP-200, pnuematic
ESVP-250-95 2, 14, 15, 17 ESVP, AIVP, ILVP, ESVP-T, -250 ESV-250-16K 6, 16, 17 ESV, ILV and AIV-250, manual
ESVP-300-95 2, 14, 15, 17 ESVP, AIVP, ILVP, ESVP-T, -300 ESVP-250-16K 6, 16, 17 ESV, ILV and AIV-250, pnuematic
ESVP-400-95 2, 14, 15, 17 ESVP, AIVP, ILVP, ESVP-T, -400 ESV-300-16K 6, 16, 17 ESV, ILV and AIV-300, manual
STVP-112-95 2, 14, 15, 17 STVP-112 ESVP-300-16K 6, 16, 17 ESV, ILV and AIV-300, pnuematic
STVP-150-95 2, 14, 15, 17 STVP-150 ESVP-400-16K 16, 17 ESV, ILV and AIV-400, manual or pnuematic
CSV-075-95 2, 14, 15, 17 CSV, CAIV, CILV, CSTV, -038 to -100
CSV-150-95 2, 14, 15, 17 CSV, CAIV, CILV, -150
CSV-200-95 2, 14, 15, 17 CSV, CAIV, CILV, -200
CSV-250-95 2, 14, 15, 17 CSV, CAIV, CILV, -250
CSV-300-95 2, 14, 15, 17 CSV, CAIV, CILV, -300
CSTV-150-95 2, 14, 15, 17 CSTV-150
CSVP-075-95 2, 14, 15, 17 CSVP, CAIVP, CILVP, CSTVP, -038 to -100
CSVP-150-95 2, 14, 15, 17 CSVP, CAIVP, CILVP, -150
CSVP-200-95 2, 14, 15, 17 CSVP, CAIVP, CILVP, -200
CSVP-250-95 2, 14, 15, 17 CSVP, CAIVP, CILVP, -250
CSVP-300-95 2, 14, 15, 17 CSVP, CAIVP, CILVP, -300
CSVP-400-95 2, 14, 15, 17 CSVP, CAIVP, CILVP, -400
CSTVP-150-95 2, 14, 15, 17 CSTVP-150

17
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3
Section 3.4
Isolation Valves
Ball Valves

Specifications Ball valves are a low cost, manually or

Port OD’s: ¾, 1, 1 ½ and 2 inches pneumatically operated, straight through
Materials: isolation device. Their simple, robust
Body: 304 stainless steel design provides high reliability in “dirty”
Ball: 316L stainless steel applications. They are commonly used
Stem seal: Viton
(other O-ring compounds available) on MOCVD and CVD equipment down-
Ball seal: Teflon stream from the chamber or vacuum
Actuation: Manual and pneumatic/spring pump to isolate traps or abatement tools.
Leak Rates: <1x10 -9 std.cc/sec He to atmosphere, A stainless steel body and Teflon seat
<1x10 -7 std.cc/sec He across the seat. make these valves ideal for corrosive envi-
Operating Temperature: 150°C Max. ronments. A quarter turn of the
Supply Pressure (pneumatic/spring version): handle quickly switches the valve from
80-100 psig open to close. They are available with
Vacuum Range: 1000 to 1x10 -4 Torr NW-16 through NW-50 flanges as stan-
Options: Heater jackets and controllers dards. Heater jackets are available to
available for all valves. reduce process by-product accumulation.

Ball Valve Options

Please use the following part numbering
tree to add the appropriate options to a Valve Actuator Position O-ring Air
standard ball valve model number. See Model Number Type Indicator Type Solenoid
tables below for option codes.
Example: BVP-2003-NW-O-S21
Pneumatic ball valve wth 1.25 inch bore, NW-50 flanges, air-to-open/
spring-to-close, position indicators and 24VDC air solenoid.

O-ring Material Option Air Solenoid Option - BVP

Code DESCRIPTION CODE Kit Description
Default (no code) Viton -S11 BVP-S11-K 120VAC, 50/60 Hz
-K79 Kalrez 4079 -S21 BVP-S21-K 24VDC
-K85 Kalrez 8085 -S31 BVP-S31-K 240VAC, 50/60 Hz
-K75 Kalrez 8575 -S41 BVP-S41-K 24VAC, 50/60 Hz
-K91 Kalrez 9100 -S12 BVP-S12-K 120VAC, 50/60 Hz (Use with -A actuator option)
-C38 Chemraz E38 -S22 BVP-S22-K 24VDC (Use with -A actuator option)
-D19 Dupra 192 -S32 BVP-S32-K 240VAC, 50/60 Hz (Use with -A actuator option)
-PP7 Perlast G74P -S42 BVP-S42-K 24VAC, 50/60 Hz (Use with -A actuator option)

Actuator Option - BVM Actuator Option - BVP

CODE Description Description CODE
(Default) Non-locking handle Air-to-Open/Spring-to-Close (Normally Closed) (Default)
-L Locking handle Spring-to-Open/Air-to-Close (Normally Open) -SA
Air-to-Open/Air-to-Close -A

Position Indicator Option - BVP

Open/closed position indicators detect the valve position. 24 VDC powered.
Description CODE
Optical sensor -O

All dimensions are in inches (mm) & weights

are in pounds (kg), unless otherwise noted.

18
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Manual Ball Valve - BVM
MODEL
NUMBER
BVM-0751
PORT
OD
0.75 (19) 0.56 (14)
BALL
ID
DESCRIP-
TION
No Flanges 3.17 (81)
Isolation Valves

A B

1.85 (47)
C

2.94 (75)
D

1.85 (47)
Ball Valves

5.80 (147)
F

0.93 (24)
3 Section 3.4

BVM-0751-NW 0.75 (19) 0.56 (14) NW-16 3.47 (88) 1.85 (47) 2.94 (75) 1.85 (47) 5.80 (147) 0.93 (24)
BVM-1001-NW 0.75 (19) 0.56 (14) NW-25 3.93 (100) 1.85 (47) 2.94 (75) 1.85 (47) 5.80 (147) 0.93 (24)
BVM-1002 1.0 (25) 0.85 (21.6) No Flanges 3.63 (92) 2.13 (54) 3.33 (85) 1.90 (48) 6.20 (157) 0.98 (25)
BVM-1002-NW 1.0 (25) 0.85 (21.6) NW-25 3.93 (100) 2.13 (54) 3.33 (85) 1.90 (48) 6.20 (157) 0.98 (25) Specifications
BVM-1502-NW 1.0 (25) 0.85 (21.6) NW-40 4.66 (118) 2.13 (54) 3.33 (85) 1.90 (48) 6.20 (157) 0.98 (25) Port OD’s: ¾, 1, 1 ½ and 2 inches
BVM-1503 1.5 (38) 1.25 (31.8) No Flanges 4.36 (111) 2.80 (71) 4.04 (103) 2.80 (71) 7.20 (183) 1.40 (36) Materials:
BVM-1503-NW 1.5 (38) 1.25 (31.8) NW-40 4.66 (118) 2.80 (71) 4.04 (103) 2.80 (71) 7.20 (183) 1.40 (36) Body: 304 stainless steel
Ball: 316L stainless steel
BVM-2003-NW 1.5 (38) 1.25 (31.8) NW-50 4.97 (126) 2.80 (71) 4.04 (103) 2.80 (71) 7.20 (183) 1.40 (36) Stem seal: Viton
BVM-2004 2.0 (51) 1.50 (38) No Flanges 4.67 (119) 3.33 (85) 4.56 (116) 3.33 (85) 7.20 (183) 1.66 (42) (other O-ring compounds available)
Ball seal: Teflon
BVM-2004-NW 2.0 (51) 1.50 (38) NW-50 4.97 (126) 3.33 (85) 4.56 (116) 3.33 (85) 7.20 (183) 1.66 (42)
Actuation: Manual and pneumatic/spring
Call for information on larger sizes.
Leak Rates: <1x10 -9 std.cc/sec He to
E atmosphere, <1x10 -7 std.cc/sec He across
the seat.
Operating Temperature: 150°C Max.
Supply Pressure (pneumatic/spring version):
C 80-100 psig
Vacuum Range: 1000 to 1x10 -4 Torr
Options: Heater jackets and controllers
available for all valves.
B

D A

Pneumatic Ball Valve - BVP

MODEL PORT OD BALL ID DESCRIPTION A B C D E F
NUMBER
BVP-0751 0.75 (19) 0.56 (14) No Flanges 3.17 (81) 10.20 (259) 6.62 (168) 1.85 (47) 2.77 (70) 0.93 (24)
BVP-0751-NW 0.75 (19) 0.56 (14) NW-16 3.47 (88) 10.20 (259) 6.62 (168) 1.85 (47) 2.77 (70) 0.93 (24)
BVP-1001-NW 0.75 (19) 0.56 (14) NW-25 3.93 (100) 10.20 (259) 6.62 (168) 1.85 (47) 2.77 (70) 0.93 (24)
BVP-1002 1.0 (25) 0.85 (21.6) No Flanges 3.63 (92) 10.20 (259) 6.90 (175) 1.90 (48) 2.77 (70) 0.98 (25)
BVP-1002-NW 1.0 (25) 0.85 (21.6) NW-25 3.93 (100) 10.20 (259) 6.90 (175) 1.90 (48) 2.77 (70) 0.98 (25)
BVP-1502-NW 1.0 (25) 0.85 (21.6) NW-40 4.66 (118) 10.20 (259) 6.90 (175) 1.90 (48) 2.77 (70) 0.98 (25) 
BVP-1503 1.5 (38) 1.25 (31.8) No Flanges 4.36 (111) 10.20 (259) 7.57 (192) 2.80 (71) 2.77 (70) 1.40 (36)
BVP-1503-NW 1.5 (38) 1.25 (31.8) NW-40 4.66 (118) 10.20 (259) 7.57 (192) 2.80 (71) 2.77 (70) 1.40 (36)
BVP-2003-NW 1.5 (38) 1.25 (31.8) NW-50 4.97 (126) 10.20 (259) 7.57 (192) 2.80 (71) 2.77 (70) 1.40 (36)
BVP-2004 2.0 (51) 1.50 (38) No Flanges 4.67 (119) 10.20 (259) 8.10 (206) 3.33 (85) 2.77 (70) 1.66 (42)
BVP-2004-NW 2.0 (51) 1.50 (38) NW-50 4.97 (126) 10.20 (259) 8.10 (206) 3.33 (85) 2.77 (70) 1.66 (42)
Call for information on larger sizes.
E B *

*B Actuator option -A (air-to-open / air-to-close)

F reduces dimension to 6.76” (172).

D A

Ball Valve Seal Kit Ball Valve Rebuild Kit

Model Model
DESCRIPTION DESCRIPTION
Number Number All dimensions are in inches (mm) & weights
BVM-1-95 Flange, ball & stem seals BVM-1-99 SS ball & seal kit are in pounds (kg), unless otherwise noted.
BVM-2-95 Flange, ball & stem seals BVM-2-99 SS ball & seal kit
BVM-3-95 Flange, ball & stem seals BVM-3-99 SS ball & seal kit
BVM-4-95 Flange, ball & stem seals BVM-4-99 SS ball & seal kit

19
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3Section 3.5
Isolation Valves
Genesis Modular Valves

Bulkhead Attachment
to Chamber with
Double Stud
Fasteners
Optional
Modular Heater

SPECIFICATIONS The Genesis modular vacuum valve

Port ODs: 3 / 4 to 2 inches. system provides equipment design-
Larger sizes and metric tubing diameters ers with unlimited possibilities for
available on request downstream vacuum subassemblies.
Mating flange s: NW -16 through 50 standard Nippleless valve bodies and block Genesis
Air fittings: 5 / 32 inch One-Touch fittings can be assembled by two Tee Fitting

Materials attachment methods using universal

Body: Electroless nickel coated aluminum ISO-KF centering ring/O-ring hardware, VCR Test Port
Bellows: Welded AM-350 stainless steel attached with
O-rings: Viton standard providing maximum flexibility and the Finger Clamps

Other compounds available. smallest footprint possible.

Air cylinder: Teflon coated aluminum
Simple and robust, Genesis valves are
Service interval: One million cycles
rated at one million cycles before service.
Actuation: Air-to-open/spring-to-close
During testing, these valves were cycled
Operating pressure: 60-80 psi required millions of times while maintaining
Differential pressure vacuum integrity. The welded bellows
25 psia maximum across poppet
is AM-350 stainless steel for corrosion Finger Clamp
Helium leak rate: 1x10 -9 Torr standard resistance, longevity and flexibility. Attachment
cc./sec. maximum
The bellows fully retract from the side Genesis Valve with
Operating temperature Soft Start Actuator Foreline to
Sustained: <150ºC port when the valve is open, eliminating Vacuum Pump

Intermittent: <204ºC buildup of process by-products on the

Options: Soft Start actuator with or without bellows and subsequent particle genera-
orifice, position indicators, air solenoids, tion during operation. Valve center plates Genesis valves and fittings have a patented
and various O-ring compounds Genesis valve bodies and fittings are
have been eliminated in order to provide nippleless body, which provides the highest electroless nickel coated aluminum for
Thermal: Heaters and insulators available. precise alignment between the poppet conductance and smallest footprint avail-
See page 120 excellent thermal characteristics and
and valve seat. A composite stem bush- able. Air solenoids, open/closed position corrosion resistance. Components are
ing resists wear even at high temperatures. indicators, and soft start actuators can be machined from solid 6061-T6 aluminum
Valve return springs are shot peened in added with no addition to size. All valves to eliminate welds, leak paths and
order to provide millions of cycles without are designed for easy O-ring or bellows entrapments. All tapped holes are
loss of force. Teflon coated air cylinders replacement. Design symmetry allows the supplied with stainless steel threaded
feature a 15 micron air filter to prevent air actuator to be oriented at 90º increments inserts for long term serviceability.
particle migration either into or out for easy access to the air solenoid and visibil-
of the air cylinder. ity of position indicators. D

Genesis Aluminum Modular Valves

Model Port Bolt
Number Size Flange A B C D Thread Circle
GNV-072 3/4 NW-16 1.15 2.31 3.04 1.46 12-24 2.031
C
GNV-102 1 NW-25 1.06 2.13 3.14 1.46 12-24 2.031
GNV-152 11/ 2 NW-40 1.25 2.50 3.71 1.88 12-24 2.616
GNV-202 2 NW-50 1.63 3.25 4.44 2.25 1/ 4 -20 3.406
Note: For option descriptions and how to add options, see next page.

Teflon Coated A
Air Cylinder

Double Acting
Air Piston B

Main Valve Stem

Soft Start
Conductance
Stem Option The conductance values in the table below have been calculated
High Temp. for air at room temperature using the formulas for tubes and
Composite elbows presented in the third edition of Roth’s Vacuum Technology:
Stem Bushing
Cv =182(D4/L’)P for viscous flow or Cm =12(D3/L’) for molecular
Heaters, insulators, replacement parts and flow, Port lengths without flanges and inner diameters for the valve
valve rebuild kits are located on Page 120 Welded
AM-350 sizes and configurations were used. This method is an approxima-
Bellows tion, use values accordingly.
Genesis Molecular Flow Viscous Flow
Interchangeable Valve C m (Liters/sec.) C v (liters/sec.)
Orifice
GNV-10 21 717
All dimensions are in inches (mm) & weights GNV-15 59 3115
are in pounds (kg), unless otherwise noted. Nickel Coated GNV-20 114 8183
Aluminum
Body Note: P=air at 1 Torr. L’=Laxial +1.33(0/180)D for elbows.

20
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Follow this part tree to add one or more options to a Genesis valve.
Isolation Valves
Genesis Modular Valve Options

Add options to the basic valve part number in the order shown. Example: GNV-152-S2-P10-KT-B21
3 Section 3.5

Valve Model Number Orifice Option Position Indicator O-ring Air Solenoid

Valve/Orifice Pumpdown Curves Charts

Soft Start Valve Actuator Option Diagram A - TYPICAL PUMP-DOWN
WITH SOFT-START
For reduced particle contamination in load locks and process chambers, Genesis 11/2 or 2 inch valve on 30 Liter Chamber
valves can be provided with a patented low cost soft start actuator with no increase
800
in valve size. A double-acting air piston, opens a soft start circuit inside the valve
when air is supplied to the top of the air cylinder. The soft start by-pass opening 700
Open soft-start with 0.070" orifice
can be provided fully open or with a specified orifice, depending on the desired

Chamber Pressure (Torr)

pumpdown. (See diagram.) After the chamber has been pumped from atmosphere 600

to the desired cross over pressure, the main valve circuit is opened by supplying air to 500
the bottom of the air cylinder. Each circuit can be operated independantly and is Open valve at desired
400 cross-over pressure
air-to-open, spring-to-close.
300
Orifice Option Orifice Parts & Kits Main Valve
Valve Orifice Model Valve Orifice 200 Only
Option Size Size Number Size Size
100
-S0 No orifice GNV-075-SO-1 3/4 to 2 .070
-S1 3/4 to 2 .147 GNV-075-SO-2 3/4 to 2 .109 0
-S2 3/4 to 2 .109 GNV-075-SO-3 3/4 to 2 .147 30 45
0 5 10 15 20 25 35 40
-S3 3/4 to 2 .070 GNV-075-SO-K 3/4 to 2 Kit* TIME (Seconds)
NOTE: Refer to diagrams for orifice selection GNV-075-SO-T All Wrench
* Kits include all orifice sizes and an installation 11/2 & 2 inch valves tested on a 30 liter chamber
wrench for the specified valve size 800

700
Position Indicator Option No Orifice
0.147" Orifice
Chamber Pressure (Torr)

Nor-Cal’s CE certified, shielded, open/closed position indicators detect the piston 600 0.109" Orifice
0.070" Orifice
position in the valve’s air cylinder. The technician has a visual indication of power to the 500
circuit (12 to 24 VDC) and the valve position, as does the operator watching the panel.
400
With the soft start option only one position indicator can be provided for the fully open
position. Operating temperature range is -25ºC to 70ºC for valves with position indica- 300
tors. Call for more information on heated valves with position indicators.
200
Valve
Option Actuator Description 100
-P1O Soft Start/Standard 1 position indicator - main valve open only
0
-P1C Standard 1 position indicator - main valve closed only
-P2 Standard 2 position indicators - main valve open & closed 0 30 60 90 120 150 180 210
Refer to diagram below for dimensions. TIME (Seconds)

Air Solenoid & Position

Indicator Dimensions Air Solenoid Option
Low 1.8 wattage, CE certified air solenoids in several current ratings can be provided on
C
Size A B C D the valve, ready to attach to the house air supply. One three-way air solenoid is required
3/4 B
2.55 4.82 3.76 1.66 for a standard Genesis valve and two three-way air solenoids are required for a soft start ver-
1 2.55 4.82 3.76 1.66 sion. This option includes 24 inch quick disconnect electrical leads and 5/32 inch one-touch
11/2 2.73 5.31 4.06 1.82 air fittings. Remote mount required on heated valves. Air solenoids can also be supplied as
2 3.11 6.05 4.42 2.03 a kit with assembly hardware and instructions. Kit part numbers are in
D A
the second column below.

Option KiT Actuator Description Quantity
O-ring Option -A11 A11-K Standard 120 VAC, 50/60 Hz 1
Genesis modular valves use chemical resistant Viton O-rings for closure. Viton O-rings -A21 A21-K Standard 24 VDC 1
should not be heated to above 204°C. Even prolonged exposures of 150°C may -A31 A31-K Standard 240 VAC, 50/60 Hz 1
degrade the O-rings. High temp Kalrez O-rings allow valve bakeout s to 220°C inter- -A41 A41-K Standard 24 VAC, 50/60 Hz 1
mittently or 170°C for extended periods. Silicone O-rings provide adequate sealing -B11 B11-K Soft Start 120 VAC, 50/60 Hz 2
performance in thermal cycling from -55°C to 230°C. -B21 B21-K Soft Start 24 VDC 2
-B31 B31-K Soft Start 240 VAC, 50/60 Hz 2
Temperature
OPTION compound MIN. MAX. Description -B41 B41-K Soft Start 24 VAC, 50/60 Hz 2
Standard Viton -29ºC 204ºC Industry standard Refer to diagram at left for dimensions.
-KT Kalrez 4079 -50ºC 316ºC High temperatures
-KC Kalrez 2037 -54ºC 220ºC Chemical resistant Valve heaters, insulators, rebuild and
-CR Chemraz 513 -30ºC 210ºC Chemical resistant replacement part kits are located on page 120
-S Silicone -55ºC 232ºC Extreme temps

21
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3Section 3.5
Isolation Valves
Genesis Modular Valve Assembly Hardware

Finger Clamp Component Assembly

Stainless steel finger clamps allow a standard ISO-KF flange to be attached directly to a Genesis valve or
fitting using a standard ISO-KF centering ring and O-ring. Elbows, reducers, chamber ports, roughing
lines, or other vacuum components can be attached directly to valve bodies or fittings with finger clamps.
Unnecessary valve ports have been eliminated, shortening the gas path and increasing system
0.815 conductance. For ultimate versatility standard nipples and elbows can be attached with finger
clamps in order to make a drop-in replacement valve, such as an angle-in-line or tee valve.
Once the finger clamp bolt is loosened it can be pivoted out of the way in order to
remove or install the flange and centering ring. The finger clamp does not need
to be removed from the valve or fitting. The clamp is self-aligning when tight-
ened, for ease of flange installation. Each kit contains four finger clamps, hex
head bolts and washers for one connection.
Model Valve
Number Size Bolt Torque
GNCP-150-S 3/4 to 11/2 12-24 x 7/8 60 in/lb
GNCP-200-S 2 1/4-20 x 7/8 100 in/lb

Block Subassemblies with

Double Stud Fasteners
Stainless steel double stud fasteners allow two Genesis components to be connected
A
using a standard ISO-KF centering ring and O-ring. Special subassemblies, such as
diverter valves or roughing/high vacuum circuits can be assembled quickly using
0.375 double stud fasteners with valves and block fittings. These subassemblies can be
provided as a unit from Nor-Cal or you may choose to assemble them from
individual components. They are ideal for limited space
installations, such as on cluster tool frames, and provide
highest conductance, while eliminating unnecessary
hardware. Double stud fasteners can be used to make a
bulkhead attachment from a valve directly to a chamber.
Stud fasteners can be installed using a jeweler’s screw-
driver and a 3 / 8 inch ignition wrench. An installation tool
for stud fasteners is provided with each stud fastener kit
or assembly, or one can be purchased separately. Each kit
contains four double stud fasteners for one connection
C B and an installation tool.

0.15 Model Valve

Number Size Description Thread A B C
GNSF-150 3/4 to 1 (4) double stud fasteners 12-24 0.625 2.28 4.40
GNSF-150 11/2 (4) double stud fasteners 12-24 0.625 2.65 5.15
GNSF-150-K 3/4 to 11/2 (4) double stud fasteners with install tool 12-24 0.625 - -
GNSF-200 2 (4) double stud fasteners 1/4-20 0.730 3.40 6.65
GNSF-200-K 2 (4) double stud fasteners with install tool 1/4-20 0.730 - -
GNSF-T All Double stud install tool - - - -

Valve heaters, insulators, rebuild and

replacement part kits are located on page 120

22
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 Isolation Valves
Genesis Modular Fittings
3
Section 3.5

OPTIONAL HEATER
Genesis Modular Fittings
Genesis fittings provide the most compact, highest conductance, corrosion resistant
vacuum connection available when used with Genesis valves, fittings and double
stud fasteners. These fittings can also attach with finger clamps to standard ISO-KF SPECIFICATIONS
components with universal O-rings, which are also available from Nor-Cal Products. Port ODs: 1, 11/ 2 and 2 inches. Other sizes
B Typ. 0.750 and metric tubing diameters available
Body: Electroless nickel coated 6061 T-6
90º Elbow aluminum with SS threaded inserts
OPTIONAL HEATER

O-rings: Viton standard

Model Valve Bolt
A Typ. Number Size A B Thread Circle Assembly
Fitting to fitting: Double-stud fasteners
GNF-102 1 2.125 1.063 12-24 2.031 Fitting to flange: Finger clamps
GNF-152 11/2 2.500 1.250 12-24 2.616 Helium leak rate: 1x10 -9 Torr standard
GNF-202 2 3.250 1.625 1/4-20 3.406 cc./sec. maximum
Operating temperature
Sustained: 150ºC
Intermittent: 204ºC
B Typ.
Options: Modular heaters and heater jackets
Tee
Model Valve Bolt
Number Size A B Thread Circle
A Typ.
GNF-103 1 2.125 1.063 12-24 2.031
GNF-153 11/2 2.500 1.250 12-24 2.616
GNF-203 2 3.250 1.625 1/4-20 3.406

B Typ.

4-Way Cross
Model Valve Bolt
Number Size A B Thread Circle
A Typ.
GNF-104 1 2.125 1.063 12-24 2.031
GNF-154 11/2 2.500 1.250 12-24 2.616
GNF-204 2 3.250 1.625 1/4-20 3.406

B Typ.

5-Way Cross
Model Valve Bolt
Number Size A B Thread Circle
A Typ.
GNF-105 1 2.125 1.063 12-24 2.031
GNF-155 11/2 2.500 1.250 12-24 2.616
GNF-205 2 3.250 1.625 1/4-20 3.406

B Typ.

6-Way Cross
Model Valve Bolt
Number Size A B Thread Circle
A Typ. GNF-106 1 2.125 1.063 12-24 2.031
GNF-156 11/2 2.500 1.250 12-24 2.616
GNF-206 2 3.250 1.625 1/4-20 3.406

B Typ.

Tri-Bow
Model Valve Bolt
Number Size A B Thread Circle
A Typ. GNF-107 1 2.125 1.063 12-24 2.031
GNF-157 11/2 2.500 1.250 12-24 2.616
GNF-207 2 3.250 1.625 1/4-20 3.406

Heaters and insulators are available on page 120

23
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3Section 3.5
Isolation Valves
Genesis Stainless Steel Valves

Genesis stainless steel poppet valves offer equipment designers the high performance and optimized conductance of Genesis
modular valves in Nor-Cal’s standard stainless steel poppet valve body. These simple, robust valves are available with standard and
soft start air-to-open/spring-to-close actuation in port sizes from 3 /4 to 4 inches. Viton O-ring seals are standard. Other O-ring
compounds, open/closed position indicators and air solenoids are available as options. Heater jackets and insulators are also available.
During testing, the valves were cycled millions of times while maintaining vacuum integrity. The welded bellows is AM-350 for
corrosion resistance, longevity and flexibility. The bellows fully retracts from the side port when the valve is open, eliminating
SPECIfications buildup of process by-products on the bellows and subsequent particle generation during operation. Valve center plates have been
Port ODs: 3 / 4 to 4 inches.
Larger sizes and metric tubing eliminated in order to provide precise alignment between the poppet and valve seat. A composite stem bushing resists wear even
diameters available on request at high temperatures. Valve return springs are shot peened in order to provide millions of cycles without loss of force. Teflon coated
Mating flange s: NW -16 through ISO-100 air cylinders feature a 15 micron air filter to prevent particle migration either into or out of the air cylinder. All valves are designed for
standard easy O-ring or bellows replacement. Design symmetry allows the air actuator to be oriented at 90º increments for easy access to the
Air fittings: 5 / 32 inch One-Touch air solenoid and visibility of position indicators.
Materials For reduced particle contamination in load locks and process chambers, Genesis stainless steel valves are offered with a patented low
Body: 304 stainless steel
Bellows:Welded AM-350 stainless steel cost soft start actuator with no increase in valve size. A double-acting air piston, opens a soft start circuit inside the valve when air is
O-rings: Viton standard supplied to the top of the air cylinder. The soft start by-pass opening can be provided fully open or with a specified orifice, depend-
(Other compounds available.)
Air cylinder: Teflon coated aluminum ing on the desired pump down. After the chamber has been pumped from atmosphere to the desired cross over pressure, the main
valve circuit is opened by supplying air to the bottom of the air cylinder. Each circuit can be operated independently and is air-to-
Service interval: One million cycles
open/spring-to-close. Soft start Genesis stainless steel valves are offered standard with no orifice. Various orifice size options and
Actuation: Normally closed
Air-to-open/spring-to-close multiple size orifice kits are available. See next page.
Operating pressure: 60-80 psi required
Differential pressure: 20 psi maximum Conductance
across poppet This table has been calculated in liters per second for air at room temperature using the for-
Helium leak rate: 1x10 -9 Torr standard mulas for tubes and elbows presented in the third edition of Roth’s Vacuum Technology.
cc./sec. maximum
Cv =182(D4/L’)P for viscous Port Angle Angle-In-Line
Operating temperature OD Viscous Molecular Viscous Molecular
Sustained: <150ºC flow or Cm =12(D3/L’) for 1/ 2 60 3 - -
Intermittent: <204ºC molecular flow 3/4 135 5 120 4
Option: Air solenoids, open/closed position Note: Calculations were based on
indicators, soft start with various orifice port lengths without flanges and 1 391 12 285 9
sizes and various O-ring compounds inner diameters for the valve sizes 11/ 8 - - - -
and configurations.
P = air at 1 Torr. 11/ 2 1925 37 1324 25
L’=Laxial +1.33(0/180)D for elbows. 2 4677 65 3459 48
21/ 2 12332 136 7505 83
E 3 23763 217 12558 115
D
4 57994 396 - -
Genesis Stainless Steel Angle Valves
Model Flange Port
Number Actuation Type OD A B C D E
GNVS-072-NWB Standard NW-16 3/4 1.50 3.40 4.78 1.46 2.13
GNVS-072-NWB-S0 Soft Start NW-16 3/4 1.50 3.40 4.78 1.46 2.13
C GNVS-102-NWB Standard NW-25 1 2.42 4.19 5.57 1.46 2.13
B
GNVS-102-NWB-S0 Soft Start NW-25 1 2.42 4.19 5.57 1.46 2.13
GNVS-152-NWB Standard NW-40 11/2 2.49 4.51 6.20 1.88 2.50
GNVS-152-NWB-S0 Soft Start NW-40 11/2 2.49 4.51 6.20 1.88 2.50
A
GNVS-202-NWB Standard NW-50 2 3.22 5.56 7.66 2.25 3.25
GNVS-202-NWB-S0 Soft Start NW-50 2 3.22 5.56 7.66 2.25 3.25
A
GNVS-302-ISO Standard ISO-80 3 3.86 7.33 10.85 4.13 5.45
GNVS-302-ISO-S0 Soft Start ISO-80 3 3.86 7.33 10.85 4.13 5.45
GNVS-402-ISO Standard ISO-100 4 4.25 8.38 13.04 5.00 6.40
GNVS-402-ISO-S0 Soft Start ISO-100 4 4.25 8.38 13.04 5.00 6.40
E
D

Genesis Stainless Steel Angle-In-Line Valves

B Model Flange Port
Number ACtuation Type OD A B C D E
GNVSAI-072-NWB Standard NW-16 3/4 4.20 3.76 4.37 1.46 2.13
GNVSAI-072-NWB-S0 Soft Start NW-16 3/4 4.20 3.76 4.37 1.46 2.13
GNVSAI-102-NWB Standard NW-25 1 4.00 3.85 4.63 1.46 2.13
GNVSAI-102-NWB-S0 Soft Start NW-25 1 4.00 3.85 4.63 1.46 2.13
GNVSAI-152-NWB Standard NW-40 11/2 5.12 4.47 5.28 1.88 2.50
GNVSAI-152-NWB-S0 Soft Start NW-40 11/2 5.12 4.47 5.28 1.88 2.50
A GNVSAI-202-NWB Standard NW-50 2 7.00 5.79 7.00 2.25 3.25
C
GNVSAI-202-NWB-S0 Soft Start NW-50 2 7.00 5.79 7.00 2.25 3.25
GNVSAI-302-ISO Standard ISO-80 3 10.55 8.88 11.62 4.13 5.45
Valve rebuild and replacement part GNVSAI-302-ISO-S0 Soft Start ISO-80 3 10.55 8.88 11.62 4.13 5.45
kits are available on page 120
GNVSAI-402-ISO Standard ISO-100 4 12.00 10.75 13.81 5.00 6.40
GNVSAI-402-ISO-S0 Soft Start ISO-100 4 12.00 10.75 13.81 5.00 6.40

24
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 Isolation Valves
Genesis Stainless Steel Valve Options

Follow this part tree to add one or more options to a Genesis valve.
Add options to the basic valve part number in the order shown.
3Section 3.5

Valve Model Number Orifice Option Position Indicator O-ring Air Solenoid

Example: GNVSAI-302-ISO-P1O-KT-A11

Orifice Option Valve/Orifice Pumpdown Curves Charts

11/2 & 2 inch valves tested on a 30 liter chamber
Genesis stainless steel valves with Soft Start actuation come standard with no orifice. 800
To order these valves with an orifice replace the “S0” part number suffix with one of the
700 No Orifice
following options. Example: Change standard valve part number
0.147" Orifice

Chamber Pressure (Torr)

GNVS-072-NWB-S0 to GNVS-072-NWB-S1. 600 0.109" Orifice
0.070" Orifice
500
Orifice Valve Orifice Orifice Valve Orifice
Option Size Size replacements Size Size
400
-S0 No orifice GNV-075-S0-1 3/4 to 2 .070
-S1 3/4 to 2 .147 GNV-075-S0-2 3/4 to 2 .109 300
-S2 3/4 to 2 .109 GNV-075-S0-3 3/4 to 2 .147 200
-S3 3/4 to 2 .070 GNV-300-S0-1 3&4 .055
-S4 3&4 .055 100
GNV-300-S0-2 3&4 .093
-S5 3&4 .093 GNV-300-S0-3 3&4 .128 0
-S6 3&4 .128 GNV-300-S0-4 3&4 .201
0 30 60 90 120 150 180 210
-S7 3&4 .201 GNV-075-S0-K 3/4 to 2 Kit* TIME (Seconds)
NOTE: Refer to diagrams for GNV-300-S0-K 3&4 Kit*
orifice option selection 3 and 4 inch valves tested with various Soft-Start orifices on a 30 liter
GNV-075-S0-T 3/4 to 4 Wrench chamber and 232 CFM Edwards mechanical blower pump package.
* Kits include all orifice sizes and an installation 800
wrench for the specified valve size
No Orifice
700
0.201" Orifice
Open/Closed Position Indicator Option
Chamber Pressure (Torr)

0.128" Orifice
600
0.093" Orifice
Nor-Cal’s CE certified, shielded, open/closed position indicators detect the piston 0.055" Orifice
500
position in the valve’s air cylinder. The technician has a visual indication of power to the
circuit (12 to 24 VDC) and the valve position, as does the operator watching the panel. 400
With the soft start option only one position indicator can be provided for the fully 300
open position. Operating temperature range is -25ºC to 70ºC for valves with position
indicators. Call for more information on high temperature position indicators. 200

Valve 100
Option Actuator Description
0
-P1O Soft Start/Standard 1 position indicator - main valve open only
-P1C Standard 1 position indicator - main valve closed only 0 10 20 30 40 50 60 70 80 90 100 110 120
TIME (Seconds)
-P2 Standard 2 position indicators - main valve open & closed

Air Solenoid Option

Low 1.8 wattage, CE certified three-way air solenoids can be provided on the valve in sev-
O-ring Option eral electrical current ratings, with 24 inch quick disconnect electrical leads, and 5/32 inch
Standard Genesis valves are furnished with Viton O-rings are resistant to most one-touch air fittings - ready to attach to the house air supply. One solenoid is required
chemicals, but should not be heated to temperatures in excess 204ºC. Even prolonged for standard Genesis stainless valves. Two solenoids are required for soft start versions.
exposures of 150ºC may degrade the O-rings. High temperature Kalrez O-rings allow Remote mount is required on heated valves. Air solenoid kits with assembly hardware and
the valve to be heated to 220ºC intermittently or 170ºC for prolonged periods . instructions are available. Kit part numbers are in the second column below.

Option Compound Applications Option KiT Actuator Description Quantity
-KT 4079 Kalrez High temperature -A11 A11-K Standard 120 VAC, 50/60 Hz 1
-KC 2037 Kalrez Chemical resistant -A21 A21-K Standard 24 VDC 1
-CR 513 Chemraz Chemical resistant -A31 A31-K Standard 240 VAC, 50/60 Hz 1
-S Silicone Extreme temperatures -A41 A41-K Standard 24 VAC, 50/60 Hz 1
-B11 B11-K Soft Start 120 VAC, 50/60 Hz 2
-B21 B21-K Soft Start 24 VDC 2
-B31 B31-K Soft Start 240 VAC, 50/60 Hz 2
-B41 B41-K Soft Start 24 VAC, 50/60 Hz 2

25
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
3
Section 3.5
Isolation Valves
Genesis Heaters & Replacement Kits

Genesis Modular Valve Heaters & Insulators

A unique, UL listed modular heater provides 120ºC or 150ºC internal temperatures in valves or fittings at a fraction of the cost
of other heaters. Genesis heaters use thick film technology to provide uniform heat throughout the component. Each heater
SPECIFICATIONS contains a control set point and a resetable high temperature shut off. The 11/2 and 2 inch sizes also have a low temperature alert
Compatible Valves: Genesis Modular Valves that can be connected to a remote alarm. Each thermostat can be replaced without destroying the heater. The same heater can
Heaters and controllers for stainless steel
Genesis Valves available. Call for details. be attached to a valve body or fitting with two screws. A trim-to-fit, molded insulator covers the heated component and mating
flanges. These clean room compatible insulators are constructed of 1/2 inch thick molded silicone. When in use, the exterior
Insulator Body: 1/2 inch thick, trimable, molded
silicone construction. Touch safe exterior surface remains touch-safe. Insulators meet UL 94 V-O requirements. Insulators for other components are available upon request.
Heater Heater jackets and controllers for Genesis Stainless Steel Valves are available. C
E D
Voltage: 120 or 240 VAC standard Call for information and pricing.
Set points: 120ºC or 150ºC
Manual reset: 200ºC with over temp shutoff


Low temperature alert: standard on
11/2 and 2 inch valves
Heaters
Model Valve Set F
Connections Number Size Point Watts A
Power cord: 12 inch with AMP 3-pin HT-GN-100-120-1 3/4
&1 120ºC 120 2.13 B

Optional Heater
Alert cords: Two 12 inch with
AMP MR connectors standard HT-GN-100-150-1 3/4
&1 150ºC 120 2.13
A
on 11/ 2 & 2 inch valves HT-GN-150-120-1 11/2 120ºC 120 2.50
Certification HT-GN-150-150-1 11/2 150ºC 120 2.50
Insulators: UL 94 V-O HT-GN-200-120-1 2 120ºC 160 3.25
Heaters:UL listed. CE certification pending
HT-GN-200-150-1 2 150ºC 160 3.25 0.75

NOTE: Replace “-1” with “-2” for 240V heaters.

Heater Insulators Heater Power Cords

Molded Insulator Model Valve Model
Number Size B C D E F Number Length
Replaceable
Set Point HI-GNV-100 3/4
&1 6.00 4.50 3.13 2.50 3.64 HT-GN-PCD-6 6 ft.
Thermostat
HI-GNV-150 11/2 6.63 5.00 3.63 2.88 4.25 HT-GN-PCD-12 12 ft.
Resetable HI-GNV-200 2 8.00 5.88 4.38 3.31 5.00
High Temp
Thermostat

Genesis Valve Assembly Kits and Replacement Hardware

The kits below are for use with Genesis modular valves and with Genesis stainless steel valves. First maintenance is recommended
at one million cycles, depending on the cleanliness of the process. Typical valve service will require O-ring replacement.

Modular Thick
Bellows Assembly Kits Viton O-Ring Kits
Film Heater Includes bellows, top flange and poppet weldment Includes bellows O-ring and poppet O-ring.
assembly. Requires O-ring kit to seal. Other O-ring compounds are available on request.
Kit Valve Kit Valve
Number Size Actuator Number Size ActuatoR
GNV-100-16 3/4&1 Standard GNV-100-95 3/4
&1 Standard
GNV-100-16-S0 3/4&1 Soft Start GNV-100-95-S0 3/4
&1 Soft Start
GNV-150-16 11/2 Standard GNV-150-95 11/2 Standard
GNV-150-16-S0 11/2 Soft Start GNV-150-95-S0 11/2 Soft Start
GNV-200-16 2 Standard GNV-200-95 2 Standard
GNV-200-16-S0 2 Soft Start GNV-200-95-S0 2 Soft Start
GNV-300-16 3 Standard GNV-300-95 3 Standard
GNV-300-16-S0 3 Soft Start GNV-300-95-S0 3 Soft Start
GNV-400-16 4 Standard GNV-400-95 4 Standard
GNV-400-16-S0 4 Soft Start GNV-400-95-S0 4 Soft Start

Valve Rebuild Kits

Includes all standard parts except valve body and position
indicator. Your valve’s position indicator type must be specified
when ordering. Example: GNV-150-99-S0-P10
Kit Valve
Number Size Actuator
GNV-100-99 3/4
&1 Standard
GNV-100-99-S0 3/4
&1 Soft Start
GNV-150-99 11/2 Standard
GNV-150-99-S0 11/2 Soft Start
GNV-200-99 2 Standard
All dimensions are in inches (mm) & weights GNV-200-99-S0 2 Soft Start
are in pounds (kg), unless otherwise noted. Bellows assembly GNV-300-99 3 Standard
GNV-300-99-S0 3 Soft Start
GNV-400-99 4 Standard
GNV-400-99-S0 4 Soft Start

26
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 Isolation Valves
Manual Butterfly Valves
3Section 3.6

Specifications
Port ODs: 3 / 4 to 2 inches
Materials
Body: 304 stainless steel
Knob: Aluminum
Port seal: Viton
Actuation: Manual using knurled knob
Maximum temperature with Viton seals
Sustained: <150°C
Intermittent: <204°C
Vacuum range
Viton o-ring: >1x 10-9 Torr - High vacuum

Patented design

Our manual butterfly valves provide a low-cost alternative to bellows sealed gate valves. These valves easily actuate from the
fully-closed position to fully open with only a quarter turn of the knob. A patented design allows the sealing disk to center itself when
closing, with even pressure around the Viton O-ring seal. This design also helps to lower the amount of scuffing or rolling of the
o-ring. Quarter-turn actuation, small footprint and the shortest possible gas path make manual butterfly valves the preferred choice
for many applications.

Manual Butterfly Valves

Model Valve Flange
Number Diagram Size Type A B C D
BFV-0752-CF 1 3/4 1.33 CF 0.75 2.01 0.75 -
BFV-0752-NWB 2 3/4 NW 16 0.75 2.01 0.75 1.75
BFV-1002-CF 1 1 2.12 CF 1.00 2.75 1.00 1.04
BFV-1002-NWB 2 1 NW 25 1.00 2.75 1.00 2.00
BFV-1502-CF 1 11/2 2.75 CF 1.25 3.71 0.75 1.34
BFV-1502-NWB 2 11/2 NW 40 1.25 3.71 1.37 2.25
BFV-2002-CF 1 2 3.38 CF 1.75 4.90 1.00 1.90
BFV-2002-NWB 2 2 NW 50 1.75 4.90 1.00 2.25

A A

B B

C C
Diagram 1 Diagram 2
D D

Replacement O-rings
Model Valve O-RING
Number Size COMPOUND
BFV-075-95 3/4 Viton
All dimensions are in inches (mm) & weights
BFV-100-95 1 Viton are in pounds (kg), unless otherwise noted.
BFV-150-95 11/2 Viton
BFV-200-95 2 Viton

27
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
3Section 3.7
Isolation Valves
Isolation Pendulum Valves

specifications
Materials Nor-Cal Products’ pneumatically actuated
Body: Cast aluminum A356.0 isolation pendulum valves contain the same pat-
Valve plate: Aluminum 6061-T6
Other parts: A6061, A7075, SS304, ented Penduroll mechanism that is found in the
SS316, Inconel X-750 and Viton Intellisys throttling pendulum valves. These valves
Seals: Viton standard. Kalrez, Chemraz, offer the user a highly reliable, compact and low
Perlast and other materials available
Body and plate surface treatment cost alternative to competitive designs. In addition,
Bare aluminum standard. the smooth actuation results in low particle
Hard Type III anodizing optional generation and rapid open-to-close speeds.
Compressed air source
CDA or equivalent at 65 to 85 PSIG In-situ serviceability of the valve is made possible
Differential pressure through the incorporation of a removable bonnet
With valve fully sealed: 15 psi maximum cover. The entire gate assembly and sealing O-ring
across the valve plate can be accessed without removing the valve from
While opening the valve
20 Torr (DN160 and DN200) the system, making regular inspections, cleanings
24 Torr (DN250) and O-ring replacements quick and easy.
29 Torr (DN350)
The valve body can be heated to 150ºC with
Operating pressure: 3.8 × 10 -8 to 760 Torr
optional heater jackets. Call for information
Heating or bakeout capabilities
and pricing.
Body: 150ºC maximum with Heated pendulum valve assembly in our 3000 square foot Class 1000 clean room
optional heater kits
Actuator: 60ºC maximum Isolation Pendulum Valves
Ambient operating temps: 0 - 60ºC Model Nominal Weight
Number ID A B C D E F G in lbs.
Leak rate: 1 × 10 -9 atm·scc/sec He
across seat and to atmosphere IPV-600-ISO-160 6 3.15 3.78 15.90 12.20 5.32 5.87 8.50 40 lbs.
(1 × 10 -6 atm·scc/sec He for IPV-800-ISO-200 8 3.46 3.78 19.90 14.40 6.50 5.28 9.29 49 lbs.
hard anodized body or gate) IPV-1000-ISO-250 10 3.94 3.78 23.80 16.60 8.46 5.47 9.49 62 lbs.
Maximum speed: Customer adjustable IPV-1200-ISO-320 12 4.72 4.06 30.20 22.00 10.60 7.24 12.80 123 lbs.
depending on size
IPV-1400-JIS-350 14 4.92 4.06 32.30 22.00 12.20 7.64 12.80 143 lbs.
Reliability: 99% confidence level IPV-1600-ISO-400 16 5.91 5.00 36.00 24.70 12.80 7.83 15.00 231 lbs.
in clean environment
O-ring cycle life: 200K cycles open Note: Other sizes and flange configurations available. Call for details. See page 141 for bolt hole specifications. N-MxL
to fully closed
MTBF: >10,000 hrs. continuous operation
Options: Heater jackets, other O-ring materials
and flange configurations available
E C
(Maintenance Space)

JIS Flange O-Rings G

SIZE O-Rings
350 OR-JIS-350
D
Position R
(Default)

N-MxL

Position T

All dimensions are in inches (mm) & weights

are in pounds (kg), unless otherwise noted.
A

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 Gate Valve General Information & Options
Isolation Valves

Nor-Cal stainless steel gate valves share with our poppet valves
the innovative design, highest grade materials and superior
workmanship that has made us a major supplier of valves to the
3
Section 3.8

vacuum industry. The estimated service interval on these valves

is 100,000 cycles, depending on the application.
Our gate valves have an ultra-slim profile which makes them
perfect for applications where space is limited, and their smaller
volume results in lower outgassing and faster pumpdown. Specifications
Larger sizes have a unique feature in the actuator which damp- General
Nominal IDs: 5 / 8 to 12 inch
ens the vibration which can arise when the gate is opened. This Helium leak rate: <2x10 -9 std. cc./sec.
makes these valves ideal for semiconductor and other vibration Materials
sensitive processes. The carriage assembly and actuator can be Body: 304 SS vacuum furnace brazed body
removed without disassembling the body from the system for Bellows: Welded AM-350
O-ring: Viton (standard)
easy maintenance. The 304 stainless steel bodies are vacuum Other compounds available.
furnace brazed to 1100°C at 10-6 Torr before being electropol- Finish: Electropolished inside and out
ished inside and out. The welded AM-350 bellows have a Maximum pressure differential
short stroke for a longer cycle life. At opening: 20 Torr
Closed: 760 Torr in either direction
Nor-Cal gate valves are available with NW (ISO-KF), ISO (clamp
Vacuum range
and bolt type), CF and ASA flanges in port sizes from 5 / 8 to 12 Viton Seal Bonnet: >10 -9 Torr
inches. Larger sizes are available upon request. Choose from Copper Seal Bonnet: >10 -10 Torr
manual or pneumatic actuation and Viton or copper seal bonnet. Temperature range
Viton Seal Bonnet: <150°C
Nor-Cal gate valves with Viton seal bonnet and gate and standard Copper Seal Bonnet: <200°C with CF
Reed-switch position indicators are bakeable to 150°C, as long as flanges and gate in open position
the actuator is not baked above 60°C. A gate valve with copper Pneumatically actuated:
Air-to-Open, Air-to-Close (standard)
seal bonnet, Viton gate and micro-switch option can be baked to 80 psi max. air pressure (standard)
200°C, except for the actuator. With the air solenoid and posi- (Higher operating pressures available upon
tion indicators removed, a copper seal bonnet valve with high request)
temperature Kalrez gate O-ring can be baked to 250°C with the Position indicator:
Reed-switch position indicator, standard
gate in the open position. Silicone heater jackets for bakeouts up on 1.5” and larger valves
to 200°C can be provided. Please call for pricing. Manually actuated
Acme threads for fewer turns
Thermal: Heater jackets and controllers
Gate Valve Options available. Call for information and pricing
Options:
One or more options can be ordered by adding the option • Air solenoid
suffix to the basic valve model number. Please add the option • Microswitch position indicator
suffixes in the following order: • O-ring compounds
• Spring-to-Close Option
• Million Cycle Option
• High pressure air actuator
Valve Model Number Micro-Switch O-ring Type Air Solenoid

Example: GVMP-4002-CF-KT-S22

O-rings Micro-Switch
Temperature OPTION
OPTION compound MIN. MAX. Description
Standard Viton -29ºC 204ºC Industry standard -M
-KT Kalrez 4079 -50ºC 316ºC High temperatures Micro-switches are available on all
-KC Kalrez 2037 -54ºC 220ºC Chemical resistant. pneumatically actuated Nor-Cal valves.
-CR Chemraz 513 -30ºC 210ºC Chemical resistant One switch closes when the valve is
-S Silicone -55ºC 232ºC Extreme temperatures fully open and the other when it is fully
closed. These can be connected to
Air Solenoids control panels with alarms or lights for
positive position indication.
Option Description
-S12 4-way, 120V AC, 60 Hz
-S22 4-way, 24V DC
-S32 4-way, 240V AC, 50/60 Hz
-S42 4-way, 24V AC, 50/60 Hz

Air solenoids require 4 watts of power to actuate. Solenoids are mounted on all Viton
seal bonnet gate valves with 4 inch ID and larger. Solenoids for Viton seal bonnet
gate valves with under four inch ID and all sizes of copper seal gate valves are shipped
unmounted with the valve.
Silicone heater jackets for bakeouts up to
200°C can be provided for all gate valves.
(See page 127 for detals.)

29
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
3Section 3.8
Isolation Valves
Gate Valves
Manually Operated Viton Seal Gate Valves
Model
Number
GV-0622-NW
GV-0622-CF
Nom.
ID
5/8

5/8
Flange
Type
NW-16
1.33 CF
Conductance
(molecular-l/sec.)
12
12

A
2.39
2.39

B
1.75
1.75

C
2.96
1.56

D
1.49
1.49

E
1.80
1.80

F
1.88
1.88

G
1.31
1.31
GV-1502-NW 11/2 NW-40 98 4.69 3.40 1.99 2.00 3.61 3.31 2.45
GV-1502-CF 11/2 2.75 CF 130 4.69 3.40 2.03 2.00 3.61 3.31 2.45
GV-2002-NW 2 NW-50 220 5.60 4.12 1.99 2.00 3.61 3.81 2.96
GV-2002-CF 2 3.38 CF 300 5.60 4.12 2.28 2.00 3.61 3.81 2.96
GV-2502-CF 21/2 4.50 CF 520 6.50 4.81 2.40 2.00 3.61 4.37 3.52
GV-2502-ASA 21/2 ASA-6* 610 6.50 4.81 2.03 2.00 3.61 4.37 3.52
GV-2502-ISO 21/2 ISO-63 610 6.50 4.81 2.03 2.00 3.61 4.37 3.52
GV-2502-ISO-OF 21/2 ISO-63-OF 320 6.50 4.81 3.46 2.00 3.61 4.37 3.52
GV-3002-CF 3 4.62 CF 840 7.70 5.77 2.53 2.00 3.61 4.94 4.28
GV-3002-ASA 3 ASA-7.5* 1,070 7.70 5.77 2.03 2.00 3.61 4.94 4.28
GV-3002-ISO 3 ISO-80 1,070 7.70 5.77 1.97 2.00 3.61 4.94 4.28
GV-3002-ISO-OF 3 ISO-80-OF 550 7.70 5.77 3.84 2.00 3.61 4.94 4.28
GV-4002-CF 4 6.00 CF 1,700 10.76 8.13 2.97 3.11 7.90 7.00 5.65
GV-4002-ASA 4 ASA-9* 2,100 10.76 8.13 2.41 3.11 7.90 7.00 5.65
GV-4002-ISO 4 ISO-100 2,100 10.76 8.13 2.41 3.11 7.90 7.00 5.65
GV-4002-ISO-OF 4 ISO-100-OF 1,400 10.76 8.13 4.25 3.11 7.90 7.00 5.65
GV-6002-CF 6 8.00 CF 5,400 14.07 10.64 3.17 3.11 7.90 8.75 7.55
GV-6002-ASA 6 ASA-11* 7,100 14.07 10.64 2.41 3.11 7.90 8.75 7.55
GV-6002-ISO 6 ISO-160 7,100 14.07 10.64 2.36 3.11 7.90 8.75 7.55
GV-6002-ISO-OF 6 ISO-160-OF 4,000 14.07 10.64 4.25 3.11 7.90 8.75 7.55
GV-8002-CF 8 10.00 CF 12,200 18.42 13.93 3.35 3.11 7.90 11.25 10.02
GV-8002-ASA 8 ASA-11* 14,500 18.42 13.93 2.76 3.11 7.90 11.25 10.02
GV-8002-ISO 8 ISO-200 15,200 18.42 13.93 2.66 3.11 7.90 11.25 10.02
GV-8002-ISO-OF 8 ISO-200-OF 9,500 18.42 13.93 4.25 3.11 7.90 11.25 10.02
Specifications GV-10002-CF 10 12.00 CF 24,900 24.04 18.30 3.65 8.98 12.00 13.44 11.99
General
Nominal IDs: 5 / 8 to 12 inch GV-10002-ASA 10 ASA-16* 24,800 24.04 18.30 3.15 8.98 12.00 13.44 11.99
Helium leak rate: <2x10 -9 std. cc./sec. GV-10002-ISO 10 ISO-250 26,900 24.04 18.30 3.15 8.98 12.00 13.44 11.99
Materials GV-10002-ISO-OF 10 ISO-250-OF 15,400 24.04 18.30 5.51 8.98 12.00 13.44 11.99
Body: 304 SS vacuum furnace brazed body GV-12002-CF 12 14.00 CF 34,600 28.89 22.03 3.89 8.98 12.00 15.90 14.28
Bellows: Welded AM-350
O-ring: Viton (standard) GV-12002-ASA 12 ASA-16* 42,800 28.89 22.03 3.15 8.98 12.00 15.90 14.28
Other compounds available. GV-12002-ISO 12 ISO-320 42,800 28.89 22.03 3.15 8.98 12.00 15.90 14.28
Finish: Electropolished inside and out *Note: All ASA flanged valves are provided without O-ring grooves. Grooves can be provided on request.
Maximum pressure differential
At opening: 20 Torr
Closed: 760 Torr in either direction
Manually Operated Copper Seal Bonnet Gate Valves
Model Nom. Flange Conductance
Vacuum range Number ID Type (molecular-l/sec.) A B C D E F G
Viton seal bonnet: >10 -9 Torr GVM-0622-CF 5/8 1.33 CF 12 2.39 1.75 1.56 1.49 1.80 1.88 1.31
Copper seal bonnet: >10 -10 Torr
GVM-1502-CF 11/2 2.75 CF 130 4.69 3.40 2.03 2.00 3.57 3.31 2.45
Temperature range
Viton Seal Bonnet: <150°C GVM-2002-CF 2 3.38 CF 300 5.60 4.12 2.28 2.00 3.61 3.81 2.96
Copper Seal Bonnet: <200°C with GVM-2502-CF 21/2 4.50 CF 520 6.50 4.81 2.40 2.00 3.61 4.37 3.52
CF flanges and gate in open position
GVM-3002-CF 3 4.62 CF 840 7.70 5.77 2.53 2.00 3.61 5.24 4.28
Manually actuated
Acme threads for fewer turns GVM-4002-CF 4 6.00 CF 1,700 10.76 8.13 2.97 3.11 7.90 7.00 5.65
GVM-6002-CF 6 8.00 CF 5,400 14.07 10.64 3.17 3.11 7.90 8.75 7.55
Options:
• O-ring compounds GVM-8002-CF 8 10.00 CF 12,200 18.42 13.93 3.35 3.11 7.90 11.25 10.02
• Spring-to-Close Option GVM-10002-CF 10 12.00 CF 24,900 24.04 18.30 3.65 8.98 12.12 13.44 11.99
• Million Cycle Option
• Heater Jackets GVM-12002-CF 12 14.00 CF 34,600 28.89 22.03 3.89 8.98 12.12 15.90 14.28

F D

E
Handles
extend on all
10" and 12"
manual gate
valves

To order gate valve replacement O-rings, pin A

and bearing kits or O-ring/gasket kits, you must

provide us with your valve’s serial number.

G C

30
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
Pneumatically Actuated Viton Seal Gate Valves
Model
Number
GVP-0622-NW
GVP-0622-CF
Nom.
ID
5/8

5/8
Flange
Type
NW-16
1.33 CF
Conductance
Isolation Valves

(molecular-l/sec.)
12
12

A
2.39
2.39

B
1.75
1.75

C
2.96
1.56

D
1.00
1.00
Gate Valves

E
2.55
2.55

F
1.88
1.55

G
1.31
1.31
3
Section 3.8

GVP-1502-NW 11/2 NW-40 98 4.69 3.40 1.99 2.00 5.29 3.31 2.45
GVP-1502-CF 11/2 2.75 CF 130 4.69 3.40 2.03 2.00 5.29 3.31 2.45
GVP-2002-NW 2 NW-50 220 5.60 4.12 1.99 2.00 5.29 3.81 2.96
GVP-2002-CF 2 3.38 CF 300 5.60 4.12 2.28 2.00 5.29 3.81 2.96
GVP-2502-CF 21/2 4.50 CF 520 6.50 4.81 2.40 2.00 5.29 4.37 3.52
GVP-2502-ASA 21/2 ASA-6* 610 6.50 4.81 2.03 2.00 5.29 4.37 3.52
GVP-2502-ISO 21/2 ISO-63 610 6.50 4.81 2.03 2.00 5.29 4.37 3.52
GVP-2502-ISO-OF 21/2 ISO-63-OF 320 6.50 4.81 3.46 2.00 5.29 4.37 3.52
GVP-3002-CF 3 4.62 CF 840 7.70 5.77 2.53 2.00 5.29 4.94 4.28
GVP-3002-ASA 3 ASA-7.5* 1,070 7.70 5.77 2.03 2.00 5.29 4.94 4.28
GVP-3002-ISO 3 ISO-80 1,070 7.70 5.77 1.97 2.00 5.29 4.94 4.28
GVP-3002-ISO-OF 3 ISO-80-OF 550 7.70 5.77 3.84 2.00 5.29 4.94 4.28
GVP-4002-CF 4 6.00 CF 1,700 10.76 8.13 2.97 2.97 6.95 7.00 5.65
GVP-4002-ASA 4 ASA-9* 2,100 10.76 8.13 2.41 2.97 6.95 7.00 5.65
GVP-4002-ISO 4 ISO-100 2,100 10.76 8.13 2.41 2.97 6.95 7.00 5.65
GVP-4002-ISO-OF 4 ISO-100-OF 1,400 10.76 8.13 4.25 2.97 6.95 7.00 5.65
GVP-6002-CF 6 8.00 CF 5,400 14.07 10.64 3.17 2.97 6.95 8.75 7.55
GVP-6002-ASA 6 ASA-11* 7,100 14.07 10.64 2.41 2.97 6.95 8.75 7.55
GVP-6002-ISO 6 ISO-160 7,100 14.07 10.64 2.36 2.97 6.95 8.75 7.55
GVP-6002-ISO-OF 6 ISO-160-OF 4,000 14.07 10.64 4.25 2.97 6.95 8.75 7.55
GVP-8002-CF 8 10.00 CF 12,200 18.42 13.93 3.35 2.97 6.95 11.25 10.02
GVP-8002-ASA 8 ASA-11* 14,500 18.42 13.93 2.76 2.97 6.95 11.25 10.02
GVP-8002-ISO 8 ISO-200 15,200 18.42 13.93 2.66 2.97 6.95 11.25 10.02
GVP-8002-ISO-OF 8 ISO-200-OF 9,500 18.42 13.93 4.25 2.97 6.95 11.25 10.02
GVP-10002-CF 10 12.00 CF 24,900 24.04 18.30 3.65 4.75 9.47 13.44 11.99 Specifications
General
GVP-10002-ASA 10 ASA-16* 24,800 24.04 18.30 3.15 4.75 9.47 13.44 11.99 Nominal IDs: 5 / 8 to 12 inch
GVP-10002-ISO 10 ISO-250 26,900 24.04 18.30 3.15 4.75 9.47 13.44 11.99 Helium leak rate: <2x10 -9 std. cc./sec.
GVP-10002-ISO-OF 10 ISO-250-OF 15,400 24.04 18.30 5.51 4.75 9.47 13.44 11.99 Materials
GVP-12002-CF 12 14.00 CF 34,600 28.89 22.03 3.89 4.75 9.47 15.90 14.28 Body: 304 SS vacuum furnace brazed body
Bellows: Welded AM-350
GVP-12002-ASA 12 ASA-16* 42,800 28.89 22.03 3.15 4.75 9.47 15.90 14.28 O-ring: Viton (standard)
GVP-12002-ISO 12 ISO-320 42,800 28.89 22.03 3.15 4.75 9.47 15.90 14.28 Other compounds available.
*Note: All ASA flanged valves are provided without O-ring grooves. Grooves can be provided on request Finish: Electropolished inside and out
Maximum pressure differential
Pneumatically Actuated Copper Seal Bonnet Gate Valves At opening: 20 Torr
Closed: 760 Torr in either direction

Model Nom. Flange Conductance Vacuum range

Number ID Type (molecular-l/sec.) A B C D E F G Viton seal bonnet: >10 -9 Torr
GVMP-0622-CF 5/8 1.33 CF 12 2.39 1.75 1.56 1.00 2.55 1.88 1.31 Copper seal bonnet: >10 -10 Torr
GVMP-1502-CF 11/2 2.75 CF 130 4.69 3.40 2.03 2.00 5.29 3.31 2.45 Temperature range
GVMP-2002-CF 2 3.38 CF 300 5.60 4.12 2.28 2.00 5.29 3.81 2.96 Viton seal bonnet: <150°C
Copper seal bonnet: <200°C with CF flanges
GVMP-2502-CF 21/2 4.50 CF 520 6.50 4.81 2.40 2.00 5.29 4.37 3.52 and gate in open position
GVMP-3002-CF 3 4.62 CF 840 7.70 5.77 2.53 2.00 5.29 5.24 4.28 Pneumatically actuated:
GVMP-4002-CF 4 6.00 CF 1,700 10.76 8.13 2.97 2.97 6.95 7.00 5.65 Air-to-Open, Air-to-Close (standard)
GVMP-6002-CF 6 8.00 CF 5,400 14.07 10.64 3.17 2.97 6.95 8.75 7.55 80 psi max. air pressure (standard)
(Higher operating pressures available upon
GVMP-8002-CF 8 10.00 CF 12,200 18.42 13.93 3.35 2.97 6.95 11.25 10.02 request)
GVMP-10002-CF 10 12.00 CF 24,900 24.04 18.30 3.65 4.75 9.47 13.44 11.99 Position indicator:
GVMP-12002-CF 12 14.00 CF 34,600 28.89 22.03 3.89 4.75 9.47 15.90 14.28 Reed-switch position indicator, standard
on 1.5” and larger valves
F D
Options:
• Air solenoid
• Microswitch position indicator
• O-ring compounds
E • Spring-to-Close Option
• Million Cycle Option
• High pressure air actuator
• Heater Jackets

To order gate valve replacement O-rings, pin

and bearing kits or O-ring/gasket kits, you
must provide us with your valve’s serial number.

G C

31
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
3Section 3.9
Isolation Valves
Bellowless Poppet Valves & Leak Valves

Pneumatic Bellowless Angle Valves

Right angle bellowless poppet valves are now available in sizes from 3 / 8 thru 11/2 inches. These valves are typically used for
applications with large differential pressures, extremely high cycle rates or “dirty” processes that cause frequent bellows failures.
Poppet shafts are sealed with double O-rings. Heater jackets and other port and flange configurations are available on request.

Model Port Flange Conductance

Number Nom. OD Type (molecular-l/sec.) A B C D
ESVP-0382-NWB-5 3/8 NW-10B 0.66 1.65 3.77 5.92 2.25
ESVP-0752-NWB-5 3/4 NW-16B 5.00 2.15 4.27 6.41 2.25
ESVP-1002-NWB-5 1 NW-25B 12.00 2.03 4.03 6.17 2.25
ESVP-1502-NWB-5 11/2 NW-40B 128.00 2.40 5.13 7.71 3.00

Specifications
Port ODs: 3 / 8 to 11/ 2 inches
Replacement O-Ring & Valve Rebuild Kits
Model Port
Materials Number OD Description
Body: Electropolished 304 stainless steel
Bonnet seal: Viton ESVP-075-95-5 3/8-1 O-ring kit
Poppet seal: Viton ESVP-150-95-5 11/2 O-ring kit
Other O-ring compounds available Complete rebuild kit, includes all valve
C ESVP-075-NWB-99-5 3/8-1
parts except valve body
Actuation: Normally closed
3/ 8 to 11/2 inch ODs: Air-to-open, spring-to-close Complete rebuild kit, includes all valve
ESVP-150-NWB-99-5 11/2 parts except valve body
See page 101 for actuation options
Operating pressure: 60 to 80 psig B

Differential pressure
Port side: Maximum 100 psi A
Poppet: Maximum 20 psia
Maximum temperature with Viton seals
Sustained: <150°C
Intermittent: <204°C A
Vacuum range: >1x 10-9 Torr - High Vacuum
Options: Fittings, O-rings, air solenoids,
micro-switches and actuators. See page 101

Specifications Leak Valves

Materials Leak valves are used for controlling gas introduction into high- and ultra-high vacuum systems. They utilize an optically flat sapphire
Body: Electropolished 304 stainless steel
Flanges poppet and a metal seal seat, allowing bakeout temperatures to 450ºC. These valves are manually actuated by a cantilever arm with
Inlet: 1.33 CF, rotatable, precision adjustment threads. The adjustment knobs can be set to allow controlled leak rates as small as 1x10 -10 Torr l./sec.
clearance bolt holes Replacement sapphire and gasket assemblies are available. Call for pricing.
Outlet: 2.75 CF, nonrotatable,
clearance bolt holes
Poppet: Sapphire Model
Poppet seat: Copper Number
Actuation: Manual, adjustable set point LL-275-133
Maximum temperature
Sustained: <250°C 1.750
Intermittent: <450°C
Vacuum range: >1x 10 -11 Torr - UHV
Minimum leak rate
Normal: 1x10 -10 Torr l/sec.
Non-condensible gas: 1x10 -8 Torr l/sec.
Inlet gas pressure: 500 psig maximum
Poppet seat life
Unbaked: 250 to 300 closures
<250ºC: 80 to 100 closures Rotatable
<450ºC: 20 to 30 closures 4.350

1.298

Nonrotatable
All dimensions are in inches (mm) & weights
are in pounds (kg), unless otherwise noted. 1.717 1.190

32
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
Poppet Valve, Ball Valve and Gate Valve Heaters
Many semiconductor processes are
Isolation Valves
Isolation Valve Heater s

pumps and reduce the efficiency of the temperature set-points up to 200 ºC,
3
Section 3.10

carried out in vacuum chambers with scrubber. This buildup can be reduced a UR/CE certified heater with a Type K
internal temperatures of several hundred or eliminated by heating vacuum lines thermocouple and PID controller can pro-
degrees Celsius. Process by-products exit and associated components from the vide precise temperature control.
the chamber in vapor phase, but subli- chamber to the scrubber, or by using a
mate in the foreline and vacuum pump combination of heaters and foreline traps, Standard ½” insulation add-on heaters
exhaust when gas temperatures drop which collect the by-products preventing are available for all poppet valves and gate
sufficiently for them to form solids. The them from continuing downstream. valves. (Aluminum Genesis valves have
resultant buildup can increase wafer their own integrated heater.) These can
defects from particle backstreaming, Heater jackets with a UL recognized be purchased and installed separately
reduce throughput of vacuum lines, electronic thermostat for fixed set-point provided that the valve is fitted with the
impede the function of throttle valves applications is available for temperatures proper high temperature seals and other
and isolation valves, damage some dry up to 150ºC. For fully adjustable thermally compatible components.

Heater Jacket Part Number and Ordering Information

Please use the following part numbering tree to specify the heater jacket to fit your poppet
valve or gate valve.

Note: All part number combinations may not be valid or available. Contact Nor-Cal
Control Type Valve Type Valve Size Temp. / Voltage
Products for the latest pricing, availability and other options.

Control Type Valve Type Valve Size Temperature/Voltage

Control VALVE Valve Temperature
Type Code TYPE CODE Size CODE & voltage CODE
PID control* HC Angle-in-line AIV 0.38 038 HC type, 120 VAC 201
Electronic thermostat HTE Manual Ball valve BVM 0.50 050 HC Type, 208 VAC 202
Pneumatic Ball Valve BVP 0.75 075 HTE type, 90ºC, 120 VAC 091
* Requires separate PID controller.
(See controllers Section 6.) Angle valve ESV 1.00 100 HTE type, 90ºC, 208 VAC 092
SS Genesis (stainless steel) GNVS 1.50 150 HTE type, 120ºC, 120 VAC 121
SS Genesis angle-in-line GNVSAI 2.00 200 HTE type, 120ºC, 208 VAC 122
Gate valve with CF flange GVC 2.50 250 HTE type, 150ºC, 120 VAC 151
Gate valve with ISO flange GVI 3.00 300 HTE type, 150ºC, 208 VAC 152
In-line valve ILV 4.00 400
N-Series angle NAP 6.00 600
N-Seres angle-in-line NAIP 8.00 800
10.00 1000

Example: HTE-NAP-150-091
Electronic thermostatically controlled heater jacket for 1.5 inch N-Series angle
valve, 90ºC, 120VAC.

33
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com
3Section 3.11
Isolation Valves
Bakeable All Metal Valves

Nor-Cal’s metal seal angle valves are

intended for use in UHV or cryogenic
applications where temperature extremes
preclude the use of our elastomer seal
valves. Approved for use in beamline
facilities, these valves have a temperature
operating range from -250°C to 400°C.
Heater jackets and controllers are
available on request.

The pulled-port method is used for

the fabrication of the stainless steel
bodies resulting in higher conductance
and better cleanliness. Heater jackets
and controllers are available on request.

The life of the copper poppet seal is

dependent upon the temperature at
which the valve is used. Maximum
temperature bakeouts may require copper
poppet seal replacement after 50 cycles,
while hundreds of cycles are possible
with moderate bakeouts. As many as
10,000 cycles have been obtained
from the same seal during testing.

A dial indicator at the top of the valve

indicates the proper torque for closure
and also when the seal should be replaced.
The copper poppet seal is easily replaced
by opening the valve with a slotted screw
driver. The seal is removed through the specifications. (See torque specifica- screw. The valve may be closed to this
side port and a new one replaced in a tions table.) After closing the valve to its mark indefinitely. Periodic checks with a
like manner. After seal replacement the normal torque value loosen the set screw torque wrench will indicate seat wear
valve must be torqued to a higher value below the closure nut, rotate the indica- and the proper mark to use for alignment.
than during normal operation to make it tor to the furthest counter-clockwise line When the indicator has reached the last
seat. Do not exceed the maximum torque on top of the valve and retighten the set mark we recommend seal replacement.

Specifications Model Port Flange Conductance (l/sec.) (Open)

Port ODs: 3 / 4 and 11/ 2 inch Number OD Type Molecular Viscous A B C
AMV-0752-CF 3/4 Rotatable 1.33 CF 3 56 1.50 5.40 1.50
Finish: Electropolished
AMV-1502-CF 11/ 2 Rotatable 2.75 CF 10 356 2.45 6.87 1.50
Assembly: Clean room
NOTE: Port lengths that match other manufacturers’ products are available upon request.
Materials
Pulled port body: 304 stainless steel
Bellows: Formed 321 stainless steel
Poppet seal: OFHC Copper C
Actuation: Manual using self-lubriating Closure nut
bronze nuts with ACME threads
Operating temperature: -250ºC to 400ºC Indicator collar
Replacement Seals
with set screw Model Port
Maximum bakeout temperature Number OD
Open: 400°C
Closed: 300°C 321 stainless steel bellows AMV-075-95 0.75
Vacuum rated: >1x 10 -10 Torr - UHV Copper poppet seal AMV-150-95 1.50
Helium leak rate: 10 -10 std. cc./sec. or less
Options: Heater jackets and controllers
B S.S. knife
edge seal
Torque Specifications
Model Seating Normal Maximum
Number Inch/Lbs Inch/Lbs Inch/Lbs
AMV-075-CF 60 50 120
A AMV-150-CF 120 100 200
All dimensions are in inches (mm) & weights
are in pounds (kg), unless otherwise noted.

34
Ultra-High Vacuum Components Since 1962 • 800-824-4166 • www.n-c.com