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A Review on Current Research Aspects in Tool-Based Micromachining Processes

Article  in  Materials and Manufacturing Processes · December 2014

DOI: 10.1080/10426914.2014.952037

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 Materials and Manufacturing Processes, 29: 1291–1337, 2014
Copyright # Taylor & Francis Group, LLC
ISSN: 1042-6914 print=1532-2475 online
DOI: 10.1080/10426914.2014.952037

A Review on Current Research Aspects in Tool-Based

Micromachining Processes
S. P. Leo Kumar, J. Jerald, S. Kumanan, and R. Prabakaran

Department of Production Engineering, National Institute of Technology, Tiruchirapplli, Tamil Nadu, India

Technology development has led to the need of micro and miniaturized products in the field of automobile, aerospace, electronics,
medical implants, biomedicine, robotics, and so on. Micromachining is the key technology to satisfy the need of the industry in terms of
functionality and miniaturization in size. In this article, state-of-the-art review on tool-based micromachining processes such as microturn-
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ing, microdrilling, micromilling, electric discharge micromachining (Micro-EDM), and electrochemical micromachining (Micro-ECM) has
been carried out. The review begins with an overview of micromachining, classifications, and discussions about different aspects of
tool-based micromachining processes. The research works carried out for the past 10 years are analyzed in terms of materials perspective,
process parameters, size effects, performance characteristics, condition monitoring, product development, micro features generation, and
fabrication of micro tools. A statistical analysis has been performed with respect to the previous review articles, numbers of publications
in the related area, and their research gap. Finally, the possible future research direction is presented.

Keywords Microdrilling; Micro-ECM; Micro-EDM; Micromachining; Micromilling; Microturning; Size effects.

INTRODUCTION Photolithography is the key technique that supports

The need for meso (500 mm–10 mm) and microscale micromanufacturing; it has certain limitations in
(1–500 mm) products with desired functionality is rapidly producing high aspect ratio structures, high initial invest-
increasing in aeronautical, biomedical, automobile, ment, and limited use of work material (Asad et al. [3]).
optical, nuclear, and semiconductor fields. The products Nonlithography-based techniques have been developed
need to be available in a series of materials including to overcome the above limitations in the past two dec-
ceramics, metals, polymers, and so on [1]. Micromanu- ades. It is classified into three main categories: mechanical
facturing is the key technology that can ensure the reali- micromachining, advanced micromachining, and finish-
zation of micro and miniature features in a product. In ing and forming processes (Petar et al. [4]). Mechanical
earlier days, wristwatch parts were manufactured as a micromachining refers to microcutting using geometri-
typical micro product. However, a recent change due cally designed microcutting edges. It has several advan-
to technology development requires the need for micro tages over lithography techniques in terms of material
and miniature industrial products such as semiconduc- choice, complexity of product geometry, cost, and relative
tor devices, fuel injection nozzles, biotechnology pro- accuracy. Mechanical micromachining is further classi-
ducts, medical tools for inspection, and surgery fied into conventional tool-based and advanced microma-
(Masuzawa [2]). The introduction of micro electro mech- chining=nanofinishing techniques as shown in Fig. 2.
anical systems (MEMS) has led to the popularity of Conventional tool-based micromachining techniques
micromachining and various analyses being performed include microturning, microdrilling, and micromilling
to formulate 3D microstructures. Any part consisting processes. Advanced micromachining techniques are
of more than one micro feature can be called a micro- classified into three broad categories according to the
part. It clearly defines that the part may be miniature energy sources: mechanical, thermal, and chemical=
or macro in size, but if more than one feature is in electrochemical energy-based micromachining processes.
micron size, it can be called a micropart as per the Micro The subdivisions under each category are shown in
Meso Mechanical Manufacturing (4 M) Association. Fig. 2. Mechanical energy includes ultrasonic machining
In general there are two types of micromanufacturing: (USM), abrasive jet machining (AJM), abrasive water
lithography and nonlithography techniques, which are jet machining (AWJM), and water jet machining (WJM).
shown in Fig. 1. Thermal energy includes electric discharge microma-
chining (Micro-EDM), ion beam machining (IBM),
plasma arc machining (PAC), laser beam machining
Received May 23, 2014; Accepted July 28, 2014
(LBM), wire-electric discharge micromachining (Micro-
Address correspondence to S. P. Leo Kumar, Department Wire-EDM), and microwire electric discharge microwire
of Production Engineering, National Institute of Technology, grinding (Micro-Wire-EDG). Chemical energy includes
Tiruchirapplli, Tamil Nadu, India; E-mail: [email protected] electrochemical micromachining (Micro-ECM), petro-
Color versions of one or more of the figures in the article can be chemical micromachining (PCMM), and so on. Further
found online at www.tandfonline.com/lmmp. micro=nanofinishing processes include abrasive flow

1291
 1292 S. P. LEO KUMAR ET AL.

one micromachining process to inherit the advantages of

both processes. It includes electrochemical discharge
machining (ECDM), electric discharge grinding (EDG),
chemical mechanical polishing (CMP), electrolytic in-
process dressing (ELID), electro chemical spark micro-
machining (ECSM), and so on. (Jain [5]). In this article,
tool-based micromachining processes including micro-
turning, drilling, end milling, and advanced micromachin-
ing process such as micro-EDM, Wire—Micro-EDM, and
Micro-ECM, are considered for analysis. The related
research works carried out for the past 10 years are
reviewed in terms of materials, microfeatures, microtools,
performance characteristics, and process variables, and
the issues related to them are presented. The present work
FIGURE 1.—Classification of micromanufacturing techniques (Petar et al. is organized as follows: the preliminary section of each
[4]). phase deals with the process overview and its characteristic
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study. The main segment deals with a comprehensive

finishing (AFF), magnetorheological finishing (MRF), review on major research activity carried out in various
magnetic abrasive finishing (MAF), magnetic float polish- aspects of micromachining processes. The final phase dis-
ing (MFP), elastic emission finishing (EMF), and so on. cusses the current issues, future trends, and their research
Hybrid process deals with the combination of more than direction for tool-based micromachining processes.

FIGURE 2.—Classification of micromachining and nanofinishing processes (Jain [5]).

 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1293

MICROTURNING et al. [9] performed machinability study on polyamide

The tool-based microturning process has received material in the form of cutting speed (CS), cutting force
powerful research attention in the production of micro- (CF), surface finish, and power consumption with a
systems on diverse materials including brass, aluminum PCD tool. It was observed that the specific CF has an
(Al), stainless steel (SS), and so on. The working indirect effect on feed rate (FR) values. Rahman et al.
phenomenon for microturning is analogous to conven- [10] fabricated a brass micropin of size 276 mm diameter
tional machining operation. The material is removed and 2 mm length as shown in Fig. 4 by combining
from the workpiece by means of microtools; it has cer- straight and taper turning operation. Deflection of the
tain characteristics due to its significant size reduction. workpiece is a major problem associated with micro-
In micromachining, the selection of material for a spe- turning. Hence, the concept of step turning operation
cific application is a challenging task. Since the size is is employed to avoid deflection. Aly et al. [11] presented
very small, materials property plays a major role in a new technique to perform finite element analysis
functionality. Robinson and Jackson [6] performed a (FEA) of the microturning process. Material properties
review of micro- and nanomachining in terms of were collected from the simulation of molecular dynam-
materials perspective. ics (MD). Material properties were obtained from the
Development that has been made in the field of cut- stress–strain theory and automatically fed for FEA, to
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ting tool materials, coating, high-speed machining appraise the forces necessary for the machining of silicon
regimes, and machine tools is discussed. The typical wafer. Comparison between the force model and the
setup for microturning on tungsten carbide (WC) using investigational results is carried out and good agreement
polycrystalline diamond (PCD) tool is shown in Fig. 3. was observed between the results.
In general, higher spindle speed is used for microma- In microturning operation, the important response is a
chining compared to conventional macromachining. surface finish influenced by many parameters, in which
CNC programming is commonly used to control the plastic side flow is affected significantly. Liu et al. [12]
tool’s and work’s relative motion accurately and pre- presented a model to predict the surface roughness
cisely (Asad et al. [3]). (SR) in tuning an Al 5083-H116 alloy by taking into
consideration the effects of process parameters, tool
Cutting Force Prediction, Plastic Side Flow, and geometry, and plastic side flow. It was observed that
Product Development the model combines the effect with precise judgment of
the mean flow stress at the micron scale [12]. The pro-
In microturning operation, machining forces influence posed model was evaluated with a series of microturning
the accuracy of the finished microparts; hence, the experiments. It was observed that SR is directly pro-
control of reaction force is imperative. Rahman et al. portional to FR up to a certain limit, beyond which it
[8] performed machinability studies on Al alloy, SS, has an indirect relationship with the FR value. Nga
and brass materials for different tool and work material et al. [13] investigated microscale and nanoscale charac-
combinations. Machinability assessment was performed teristics of the nonferrous and Al 7075-T6 alloy as
based on chip, force analysis, and tool wear condition. shown in Fig. 5. The effect of process variables on
Finally, a compound micropin of size 500 mm is machining forces, surface finish, and chip geometry
produced with the optimized parameters. has been presented and compared with macroscale
The inherent property of polyamides allows them to machining. Egashira et al. [14] artificially developed
be used in place of many metallic materials. Gaitonde

FIGURE 3.—Microturning setup with PCD insert (Palani et al. [7]). FIGURE 4.—SEM image of micropin (Rahman et al. [10]).
 1294 S. P. LEO KUMAR ET AL.

microturning tools of sizes 25–50 mm with cemented car-

bide material using the EDM process. The optimum FR
and depth of cut (DC) values, which prevent tool failure,
are determined by a set of experiments. It is found that
the proposed method reduces hole circularity down to
0.25 mm. Pyrolytic carbon has various applications in
medical implants, biomedical industries, heart valves,
prosthesis, and nuclear equipments [15]. Bajpai and
Singh [15] performed microgrooving on anisotropic
paralytic material to determine its significant impact
on thrust force, SR, and chip morphology. The profile
is described in Fig. 6. It was observed that the mean
CF and thrust force are decreased by 118% and 88%,
respectively.
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Size Effects and Parameter Optimization

In conventional machining, the effect of mechanical
FIGURE 5.—Experimental setup (Nga et al. [13]). behavior may be negligible in the majority of cases. In
miniaturization, the influence of the affected region
has a significant impact, which may affect the size.
Janssen et al. [16] performed an analysis of plastic yield-
ing in a uniaxial tension of Al sheet. The specimens are
processed with a laser, mechanical cutting, and grinding
processes. The results of laser and mechanical cuts are
shown in Fig. 7 and it is observed that the size effect
on miniaturization causes a significant increase in yield
stress value around 200%.
The effect of grinding operation is further analyzed by
nanoindentation process. Figure 8 shows the average
force values at different depths, and observation shows
that surface grinding results in an increase of indentation
force. The results clearly show the importance of
processing-induced size effects in the design of miniatur-
ized systems. Jin and Altintas [17] presented a slip-line
model that considered temperature property and strain
rates during the microcutting process. The variations
in stress distribution because of round tool edge are
considered in this work. The deformation zones are dif-
ferentiated into primary and secondary deformation. In
this region, the chip flows over the rake face. In the ter-
tiary area, the material bifurcates to result in a chip [17].
FIGURE 6.—Typical profile of machined groove (Bajpai and Singh [15]). CF is determined by examining the entire force beside

FIGURE 7.—(a) Laser-cut specimens. (b) Mechanically cut specimens (Janssen et al. [16]).
 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1295

FIGURE 10.—Finite element model configuration (Liu and Melkote [20]).

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FIGURE 8.—Annealing treatments influence (Janssen et al. [16]). chip formation is changed from ductile to brittle mode
when its cutting edge and radius are smaller than the
the tool edge in feed and tangential direction. It is pre- deformed chip’s thickness. Liu and Melkote [20] per-
dicted by the shear and normal stress distribution beside formed FEA to examine the sway of tool edge radius
the boundary lines AS, SB, BC, and CD as shown in on size effect on Al5083-H116 alloy.
Fig. 9. Since BC and CD are in the secondary shear The FEM model is shown in Fig. 10, and the analysis
zone, and SB and AS are in the tertiary shear zone, shear suggests that increase in CS produces considerable
stress and static pressure need to be modeled in the sec- changes in the DC value, during which nonlinearity in
ondary and tertiary shear zones with respect to slip-line cutting energy takes place. Durairaj and Gowri [21] per-
geometry and stress distribution. A set of microturning formed parametric optimization using genetic algorithm
experiments have been performed for a range of DC (GA) for two conflicting objectives such as tool wear
and CS values. The total force is obtained by the sum and SR in Inconel 600 alloy. DT-110-integrated multi-
of cutting and plowing force. It is observed that CF is process micromachine tool was used for the experi-
in agreement with the investigational results, which mental purpose. Experiments were carried out with full
clearly indicates that CF can be predicted by the slip-line factorial with various combinations of cutting para-
model. meters including speed (25, 31, and 37 m=min), feed (5,
Woon et al. [18] also analyzed the consequence of tool 10, and 15 mm=rev), and DC (30, 50, and 70 mm) [18]
edge with tool-based micromachining. Li et al. [19] and the values were recorded. The regression model
investigated the disparity of tool geometry and its influ- was framed to represent the relationship among the vari-
ence on nanoscale machining with silicon wafer. The two ables and the objective function was formed and optimi-
transformations include wear of the material the gener- zation performed. It can be inferred that the parametric
ation of micro- or nanogrooves. It was observed that influence results in the best surface finish with low CS,
low FR, and low DC for Inconel 600 alloy.

MICRODRILLING
Mechanical drilling using a microdrill is a cost-
efficient method used for the generation of microholes
in miniature parts. Unlike other micromachining pro-
cesses, the electrical property does not influence the
microdrilling operation. Metals, plastics, and compo-
sites can be processed effectively. The setup for micro-
drilling on brass is shown in Fig. 11. Generation of
microholes in printed circuit boards (PCBs) is the best
example. Processing time can be preserved, since the
process is stable when proper FR is set.

Burr Formation, Chip Morphology, and Effect of

Lubrication
FIGURE 9.—Hydrostatic pressure determination in the primary zone (Jin Various research works have been conducted in
and Altintas [17]). microdrilling such as analysis of chip formation, effects
 1296 S. P. LEO KUMAR ET AL.

of 0.1 mm diameter was used to drill PCB at a speed

of 300 krpm and the hole qualities are observed. Chip
morphology for Al, copper, and copper foils is shown
in Figs. 12–14. It is observed that the chip characteristics
and the hole quality depend on material properties.
Conical chips are formed from copper foil and Al, and
discontinuous chips are formed from glass fiber
material. It is also observed that the hole wall in copper
foil seems to be smoother compared to the fiber cloth
layer.
Process variables including FR, speed, and tool wear
have a direct influence on chip morphology and hole
quality. In general, coating improves the performance
and the life of a cutting tool. Kao [23] and Kao et al.
[24] performed an analysis on coated microdrill bits.
The sputtering technique was used to deposit coating
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along with nitrogen on M2steel disks and microdrills.

The behavior of the coated drills was examined through
hole drilling on the PCB specimen. The life of the coated
drill was evaluated using nail head ratio, SR, corner
wear, and flank wear. The disparity of SR, corner wear,
FIGURE 11.—Microdrilling on brass material.
nail head ratio, and flank of the coated tool are com-
pared with uncoated tool as shown in Figs. 15–18. In
of coating, profile generation, burr formation, lubri- summary, the results show that the Zr-C:H:N17% coating
cation, and product development. has the most favorable performance, extending the tool
Zheng et al. [22] analyzed the uniqueness of chip life by four times compared to the uncoated drill and
configuration on multimaterial sheets. Microdrill size yielding a development in machining quality.

FIGURE 12.—Aluminum chips morphology (D¼0.1 mm, vf¼40 mm=s, n¼295 krpm 25, and vr¼383 mm=s) (Zheng et al. [22]).

FIGURE 13.—Copper chip morphology (D¼0.1 mm, vf¼30 mm=s, n¼295 krpm, and vr¼383 mm=s) (Zheng et al. [22]).

FIGURE 14.—Copper foil and resin=glass fiber (D¼0.1 mm, vf¼25 mm=s, n¼295 krpm, and vr¼383 mm=s) (Zheng et al. [22]).
 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1297

FIGURE 17.—Variation of nail head ratio for coated microdrills (Kao [23]).
FIGURE 15.—Variation of SR for uncoated and coated microdrills (Kao
[23]).
developed a chart for burr control for PCB with fiber-
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reinforced substrate. Taguchi-based design of experi-

Yao et al. [25] and Yao [26] evaluated the performance ments (DOE) was used to determine the most important
of TiN=AlN coatings on drills. The concept of high rate parameter affecting the burr formation. It helps in
sputtering was used to determine the relationship selecting the constructive drilling parameters to predict
between wear and behavior. The results showed that the preferred burr type. The result indicates that burr
for a thickness of 3.6 nm, a multilayer film shows out- height variation directly depends on drill diameter.
standing wear resistance and machining performance.
Nam et al. [27] performed a characterization study with
the minimum quantity lubrication (MQL) approach. Product Development
Experiments were carried out with compressed air, Application of ceramic plates with microfeatures is
nanofluid MQL, and pure MQL. Carbide twist drill of widespread. It is used for electronic accessories, electri-
size 200 mm was used to make holes in the Al 6061 cal components, thermal equipments, and catalytic con-
material. Nanodiamond particles of size 30 nm were verters. To minimize cost and maximize productivity, it
used with the vegetable oils for nanofluid MQL. This is important to realize an efficient method for drilling
extensively increases the number of holes and minimizes microholes in ceramic plates [30]. Its machinability is
the thrust forces and drilling torque [27]. Prasanna et al. poor because of its poor thermal conductivity, and
[28] performed parameters optimization for Ti6Al4V medium to high hardness and brittleness. Lee et al.
alloy using the Taguchi method and grey relational [30] performed drilling in alumina green bodies to
analysis. Carbide drill bit of size 400 mm was chosen manufacture ceramic MCPs, followed by sintering the
and the experiments were performed under dry con- machined green bodies. Alumina green bodies were
dition. Spindle speed, FR, and air pressure were chosen drilled with electrodeposited diamond grit. It was found
as the parameters and thrust force, overcut, circularity, that due to wear and chip loading, the tool life decreased
and taper were chosen as the characteristics. ANOVA linearly with respect to FR as shown in Fig. 19, from
table was formulated to determine the significant impact which a suitable microdrilling condition was determined.
of process condition and optimization was performed. Moon et al. [31] proposed the backstitch tool path
From the investigation, it is observed that speed and method for microdrilling on multilayered PCB to mini-
air pressure have a significant impact on hole accuracy. mize misalignment error and to increase hole quality.
It was also observed that speed and FR have a signifi- The proposed approach was compared with a conven-
cant impact on thrust force. Bhandari et al. [29] tional tool path by examining the hole positioning error,
drilling thrust force, drilling torque, and duration of

FIGURE 16.—Corner wear variation (Kao [23]). FIGURE 18.—Variation of flank wear with number of holes (Kao [23]).
 1298 S. P. LEO KUMAR ET AL.

FIGURE 19.—Tool life and volume of material removed (Lee et al. [30]).

drilling under various conditions. The effects of each Cutting Tool Material, Characteristics, and Wear
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process parameter are analyzed. It is observed that hole Aspects

positioning error is much larger at the bottom side of the One of the tool materials for micromachining is dia-
bottom plate for most of the cases and is also affected by mond. It possesses a strong affinity for iron, and hence
the bending stiffness of the tool tip. Backstitch tool path it is suitable for nonferrous materials such as copper,
showed better effects when the hole positioning error is Al, brass, and so on. Weulel et al. [34] performed micro-
larger; it particularly reduces the positioning error by up cutting with carbide tools to meet the need of miniatur-
to 55% in the case of a 0.4-mm tool. Thrust force is also ized components. The influence of cutting velocity on
reduced considerably. In microscale machining, energy SR is displayed in Fig. 20.
consumption while machining is negligible when com- Cutting velocity is an important parameter, and it
pared with the energy consumed by the machine tool depends on work material hardness; increase in cutting
elements. Yoon et al. [32] developed a methodology velocities leads to a fine surface finish. Egashira and
for the control of cost and energy saving during micro- Mizutani [35] performed microdrilling to fabricate 3D
drilling of PCB. Experiments were performed to gather higher AR features in silicon material. Tool fabrication
information regarding the energy consumption and for by wire EDG and drilling with the fabricated tool were
tool life. The effects are analyzed in terms of machining performed. It was observed that a tool clearance angle
parameters. Machining times and operating cost are larger than 0
prevents fractures at the hole entrance.
indirectly proportional to each other and the user can A hole of size 6.7 mm was produced successfully as
select the appropriate parameters. Kondo and Shimana shown in Fig. 21. An AR of 4 was obtained during drill-
[33] analyzed the competence of thrust force, AE signals, ing of 22 and 90 mm-deep microhole as shown in Fig. 22.
and motor current spindle in order to monitor the pre- Imran et al. [36] performed a study on the surface
failure phase and to find the drill breakage. It was found characteristics and wear mechanisms on Inconel 718
that the thrust force is the dominant parameter and under different cutting conditions and a characterization
hence needs proper monitoring. study was also undertaken. The tool wear under both
conditions is shown in Fig. 23. It was observed that

FIGURE 21.—Hole of 6.7 mm dia. and 10 mm depth (FR ¼ 0.03 mm=s)

FIGURE 20.—Influence of SR (Weulel et al. [34]). (Egashira and Mizutani [35]).
 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1299

influence on hole characteristics were analyzed. It was

proved that the mechanism that controls the deterio-
ration of the drill is abrasion wear. Nam et al. [27] per-
formed a characterization study using nanofluid
lubrication. Experiments were carried out with air,
MQL, and nanofluid MQL. Diamond particles of size
30 nm were used with the base fluid for nanofluid MQL.
Carbide drill bit of size 200 mm and Al6061 work material
were chosen for the investigation, and the experimental
setup is shown in Fig. 24. The experimental results reveal
that the MQL appreciably increases the number of drilled
holes and reduces the thrust forces and drilling torques.
Also, the nanofluid effectively prevents the remaining
burrs from enhancing the quality of drilled holes.
Insufficient supply of cutting fluid and an uneven
increase in machining depth lead to unstable drilling
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FIGURE 22.—Microhole of 22 mm dia. and 90 mm depth (FR ¼ 0.1 mm=s) process. It is addressed that when the AR is more than
(Egashira and Mizutani [35]). 10 during deep hole drilling on steel, catastrophic failure
of the tool takes place. Kim et al. [38] performed a study
for the improvement of tool life with peck drilling and
machining conditions played a major role in finding force monitoring. Thrust force and its frequency domain
depth, frequency of misorientation, microstructures, were analyzed. Finally, one-step feed length for stable
and energy consumption. The formation of alternate machining was determined and it found to be about 10
surface takes place according to the cutting temperature times that of tool size. Lee et al. [39] proposed a chip
and the coolant. Wet cutting wear mechanism includes flow model for the approximation of tool life with the
abrasion, microchipping, and diffusion and dry cutting investigated results of alumina body with WC drills.
includes abrasion, catastrophic failure, macrochipping, The axial force values are studied in terms of machining
and high adhesion. The bond of work material with time. Finally, tool life was determined with the help of
the tool, connected with the diffusion and the abrasion axial forces.
phenomenon is the foremost contributor for the wear.
Zheng et al. [37] analyzed the wear mechanism of WC
drill bit during microdrilling of PCB. Drill bit of size Size Effects, Modeling, and Analysis
0.1–0.3 mm and a spindle of 300 krpm were taken The term ‘‘size effect’’ in micromachining changes
into account. The factors affecting flank wear and their the principle of removal of material compared with

FIGURE 23.—(a) Flank face and chisel edge tool wear, (b) Rake face during wet drilling, (c) Flank face, and (d) Rake face in dry drilling (Imran et al. [36]).
 1300 S. P. LEO KUMAR ET AL.

macromachining. However, the removed material has

the same magnitude as the grain size of the work
material. Abouridouane et al. [40] performed a micro-
drilling test in C45 steel to analyze the size effects with
dissimilar machining conditions and the results were
compared with the conventional drilling results.
Three size effects, namely, plowing, microstructure,
and built-up edge, are observed during the experiments
as shown in Figs. 25–27. It can be inferred that plowing
leads to an increase in feed force and torque. Built-up
edge formation occurs at higher CSs. It also leads to
an increase in feed force and torque, and ultimately
reduces the surface quality of the machined surface.
Klocke et al. [41] investigated the size effects during
microdrilling of sizes between 50 mm and 1 mm on AISI
105 steel. Drill diameter, feed, and CS were chosen as
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cutting conditions and compared with the conventional

drilling method. In addition, the Victor–Kienzle formula
FIGURE 24.—Experimental setup (Nam et al. [27]).
was modified to model the feed force.
Afazov et al. [42] performed FEA of ceramic Macor
nozzles (Corning Inc., NY, USA) for scanning droplet
systems. Spindle speak frequency (SPK) concept was
used to determine the stable drilling parameters. It
requires only natural frequency of the drilling tool and
does not require damping, modal stiffness, and material.
Finite element prediction of the Macor model is shown
in Fig. 28. Finally, the developed method was implemen-
ted for the manufacture of Macor nozzles.
Rahman et al. [43] analyzed the parameters effect on
hole characteristics with brass material in stipulations
of burr configuration, surface superiority, and dimen-
sional accuracy. Experiments were carried out using
an HSS drill bit of size 0.5–1.0 mm by varying the
speed and FR at three different levels. Form the results
it was observed that as speed and feed increase, the SR
decreases. Also when the tool size, FR, and speed
FIGURE 25.—Size effect microstructure (Abouridouane et al. [40]). increase, the drilled hole dimensional accuracy

FIGURE 26.—Drill geometry (Abouridouane et al. [40]).

 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1301
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FIGURE 27.—The size effect of plowing (Abouridouane et al. [40]).

decreases. The increase of peripheral speed and FR the optimum levels. From the analysis, it was observed
mostly affect the tool wear and burr size on the holes that the utmost stress concentration was 4.46 times of
frame. The drill radial runout is the major problem idyllic hole.
associated with the ultrahigh-speed drilling. Watanabe
et al. [44] analyzed radial runout of microdrills on hole
superiority during microdrilling on the PCB material MICROMILLING
with 100 mm size. A high-speed video camera was used Micromilling is used to manufacture complex 2.5 and
to observe the drilling behavior at the contact surface. complex 3D microparts and microfeatures in micro and
The relationship between the runout and hole accuracy, miniature components in assortment of materials,
hole wall thickness, burr height, and enlargement error especially engineering alloys. It is similar to conventional
was analyzed effectively. It was inferred that radial milling operation, in which the spindle rotates the end
runout is insensitive because of centripetal action. Guu mill cutter to remove a portion of the material from
et al. [45] performed optimization for minimum stress the workpiece (Filiz et al. [46]). It generates a profile with
concentration in titanium alloy. FEA was used to ana- desirable accuracy in various fields, including micro-
lyze the stress concentration characteristics. Taguchi- molds, microdies, microchannels, microgears, fluidic
based DOE and ANOVA were performed to decide devices, micropropellers, and microheat exchangers. It
is one of the promising technologies to overcome the dif-
ficulties associated with EDM and grinding processes
such as low material removal rate (MRR), burning
effect, and long throughput time (Malekian et al. [47]).
Commonly used microtools for micromilling operations
are end mill, ball nose, and engraving tools. It is made
up of WC, possesses good hardness and strength at elev-
ated temperatures, and also of diamond material when
not machining ferrous material.
Generally, sizes down to 0.1 mm are available and
sizes down to 25 mm can be produced by ion beam
machining but they are not reliable. Micromilling setup
using carbide tool for polymethylmethaacrylic (PMMA)
material is shown in Fig. 29. Chae et al. [49] performed a
review on current micromechanical research and appli-
cations, especially in micromilling operations. Also
future research directions in macro- and micromachin-
ing areas were examined. Cardoso and Davim [50] per-
formed a review on micromilling in terms of materials
perspective. Inputs such as characteristics, materials,
FIGURE 28.—FEA of the Macor (Afazova et al. [42]). spindle, rigidity, and machining parameters and their
 1302 S. P. LEO KUMAR ET AL.

materials with an emphasis on minimum chip thickness,

size effect, CF, cutting temperature, tool wear, tool fail-
ure, burr formation, and surface quality. A case study
analysis was also carried out on Al alloy.

Performance Characteristics
Luo et al. [52] performed a review on precision
machine tools and its importance for the production of
miniature and microproducts. The current trend of
tooling, machine development, work material, and
machining processes is discussed. In the area of micro-
machining, regenerative chatter is a challenging prob-
lem. It is an unbalanced quivering that causes harsh
tool wear and breakage. Rahnama et al. [53] performed
suppression of chatter with the help of process damping.
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The concept of equivalent quantity boundary was used

to decide the damping variables. Experimental setup
FIGURE 29.—Micromilling of PMMA using 700 mm carbide end mill cutter for chatter test is shown in Fig. 30.
(Leo Kumar et al. [48]). Receptance coupling technique is used to decide the
dynamics, and cutting tests are performed to obtain
the mechanistic cutting coefficients. Finally, experiments
are performed to examine the chatter stability. The main
source for the thermal errors is the spindle of the
machine tool. Creighton et al. [54] discussed the spindle
growth adjustment method that aims towards reducing
thermal-induced errors. FEA was carried out to deter-
mine the structural deformation of the spindle at critical
points, and are obtained by the thermocouples and
capacitance gages as shown in Fig. 31. Accordingly, a
thermal displacement model was formulated with the
investigated results. It effectively predicts the displace-
ment under different speeds. In micro-end-milling, tool
alignment and production errors are high compared
with machined features and load on the chip. The
parameters are addressed to signify the consequence
on accurateness and outcome.
Leo Kumar et al. [48] performed an experimental
investigation using carbide end mill cutter on PMMA
FIGURE 30.—Experimental setup for chatter test (Rahnama et al. [53]). material and optimization of process conditions for
good surface finish and optimum machining time. Inte-
grated multiprocess micromachine tool was used for
influence on size effect, chip thickness, tool wear, failure, investigation and response surface methodology (RSM)
burr formation, surface quality, CF, and cutting tem- was used for modeling. Cutter sizes of 700 and 1000 mm
perature were discussed. Pedro Cardoso and Davim were used, and FR and spindle speed were considered
[51] performed a review on micromilling of metallic for the investigation. It was observed that FR is

FIGURE 31.—Thermocouples for characterization tests (Creighton et al. [54]).

 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1303

directly proportional to SR and indirectly proportional

to machining time. Further multiobjective optimization
was carried out using GA. Optimum results are vali-
dated with confirmation experiments.
Jun Martin et al. [55] defined two effective parameters,
namely, rotation and disparity in radii, to establish the
effects on machining accuracy and process performance.
A series of tests was performed to predict the error vari-
ables at dissimilar orientations and significant variations
were observed. It was inferred that the assessment of
error parameters is important to achieve excellent
performance in end milling [55]. Özel and Liu et al.
[56] projected a mechanics model for process planning
for machining of micromold cavities. Mechanics based
on the logical model was used to choose the range of
feed to avoid size effects.
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FIGURE 33.—Percent reduction in tool diameter vs. feed (Filiz et al. [46]).
Machinability, Chatter Prediction, and Parameters
Optimization
Improving the machinability of the tool steel is a very Thepsonthi and Özel [58] performed optimization for
tricky task because of poor thermal conductivity, more minimization burr formation and SR for Ti-6Al-4V Al
strength, and higher work hardening propensity. Ding alloy. Taguchi-based DOE, RSM-based modeling, and
et al. [57] applied 2D vibration-assisted micro-end- particle swarm optimization (PSO) technique were used.
milling in hardened tool steel to obtain better machin- Surface plots for top burr formation and SR are shown
ability. The experiments were performed to study the in Fig. 35. From the investigation, it can be inferred that
influence of vibration parameters, as shown in Fig. 32. the axial depth becomes the major variable causing top
It was found that the reduction of tool wear up to burr formation. Higher FR yields good surface quality
20% and SR improvement was achieved with the larger in contrast with conventional milling, thereby leading
amplitude and higher frequency of vibration conditions. to higher productivity. Periyanan et al. [59] performed
Finally, the process and the material were recommended optimization for maximization of MRR for micro-end-
for production of mold and dies. milling. The Taguchi experimental design was used for
Filiz et al. [46] performed an investigation on pure the process variables. ANOVA was employed to exam-
copper 101 with WC end mills. Responses such as tool ine the significant consequence of parameters. From
wear, burr formation, and SR were analyzed under the study, it was observed that medium surface speed,
varying FR and speeds. It was inferred that at superior high feed, and DC are found to be the optimum
FRs, the forces resemble conventional milling. It was conditions for maximum MRR.
observed that the lowest speed and FR leads to Finally, microchannel is machined with the optimum
maximum tool wear. The minimum wear at the upper- parameter as shown in Fig. 36. Chern and Chang [60]
most FR is shown in Fig. 33. Similarly SR will be examined the outcome of vibration-assisted machining
maximum for uppermost CS for the given FR and mini- on Al alloy. The preferred vibration projected on the
mum for lower FR and CS as shown in Fig. 34. workpiece by a 2D vibrating worktable is shown in

FIGURE 34.—Surface roughness as a function of FR and cutting speed

FIGURE 32.—Vibration-assisted micromilling setup (Ding et al. [57]). (Filiz et al. [46]).
 1304 S. P. LEO KUMAR ET AL.

FIGURE 35.—Surface plot for (a) Top burr width and (b) surface roughness (Thepsonthi and Özel [58]).
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Fig. 37. The slot shaped by the end milling operation inherent property. Mohammed et al. [62] performed
was premeditated by investigating accuracy and geo- machining of silicon using the ductile-mode concept.
metric shape. The chips are compared with normal The work material was positioned in an inclined man-
micromilling as shown in Fig. 38. It can be observed that ner. A 15 mm-deep fracture-free slot was machined suc-
the slot’s placement, oversize, and surface quality cessfully on a silicon wafer. Impulsive life of tool and
improved with vibration cutting. It was also found that early catastrophic failure are the two important draw-
productivity can be increased within tolerance, when backs of microcutting, especially with carbide cutters.
higher amplitude and proper frequency values are set. Rahman et al. [63] performed a study to predict the fail-
Microchannels are emblematic features normally used ure mechanism with dissimilar helix angles. It was found
in medical equipment intended for medication dosing that chip size differs with conventional cutting, but the
and for cell culture analysis. Vázquez et al. [61] shapes remain the same. It was observed that tool wear
developed arrays of microchannels of titanium and Al has a major effect on CFs.
plates, and their accuracy and surface finish were mea- Rusnaldy et al. [64] discussed chip formation mech-
sured. Multiobjective optimization for the required anism for silicon material with diamond-coated tools.
accuracy was obtained by the nontraditional PSO tech- It consists of cutting action and crushing action by tool
nique. The optimum feed=tooth of 1.25 mm and speed diffusion. The performances were investigated by force
of 10,000 rpm were found to be optimum parameters measurements and the experimental result shows that
for titanium alloy under wet condition yields. the cuttings force possesses intricate function.
Tungsten–copper materials are used in diverse applica-
Material Aspects, Chip Formation, and Force Prediction tions and act as electrode for EDM. Uhlmann et al.
[65] carried out micromilling on composite materials
Silicon is a promising material for microelectronics
and semiconductor industry. Machining of silicon using
conventional process is extremely difficult due to its

FIGURE 36.—Fabricated microchannel (Periyanan et al. [59]). FIGURE 37.—Vibrating worktable (Chern and Chang [60]).
 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1305

FIGURE 38.—Machined chips: (a) without, and (b) with vibration cutting (Chern and Chang [60]).
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and the influence of process variables were analyzed. minimum CF for BMG materials. Biermann et al. [69]
Improvements in surface characteristics and their opti- performed micromilling of NiTi-shaped alloys with ball
mization were also carried out. Consequence of FR on nose cutters. The influence of machining variables and
tool wear is shown in Fig. 39. tool inclinations is analyzed. A comparison of machin-
Arif et al. [66] performed a study on ductile machining ing properties and simulation-based approach was con-
of glass with micro-end-milling. Fracture-free slots were ducted to optimize numerical control (NC) programing.
cut in soda-lime glass workpiece and the experimental
result proves that fracture-free slots can be made under
controlled cutting conditions. Feed and axial depth were Burr Formation, Condition Monitoring, and Surface
identified as critical factors. Rodrı́guez and Labarga [67] Generation
developed a model for the forecast of machining force The determination of optimal micromilling force is an
with the help of size effect, runout, and deflection of important activity which prevents extreme wear of tool
tool. The model is developed for side micro up and down and deprived surface quality apart from keeping more
milling. Results with steel and Al were found to have an productivity. Plowing phenomenon takes place when
excellent relationship. the thickness of the chip is lower than the least value.
Bakkal and Naksiler [68] investigated the effect of FR Malekian et al. [47] proposed a force model taking into
on surface finish, machining force, and burr structure on the account the runout, dynamics, and the consequence
the milling of bulk metallic glass (BMG) materials; the of elastic revival of the material.
cutting mechanics were also analyzed. The experimental Receptance coupling method was used for the
setup with force measurement using a dynamometer is measurement. The developed model was verified with a
shown in Fig. 40(a) and milling using a 1 mm WC cutter case study experimental condition. Wang et al. [70] ana-
with different FR values is shown in Fig. 40(b). The lyzed the effect of machining conditions on the quality
force values are compared with Al alloy and SS materi- of surface with the help of a miniaturized machine tool.
als, and it was found that an SR of 0.13 mm can be The milling setup is shown in Fig. 41 and the selected
achieved. It was also observed that the lowest FR of parameters are tool size, speed, DC, and FR values. It
0.25 mm=tooth yields better SR, burr formation with was observed that the SR increased linearly for increase

FIGURE 39.—Consequence of feed rate on tool wear (Uhlmann et al. [65]).

 1306 S. P. LEO KUMAR ET AL.
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FIGURE 40.—(a) Experimental setup and (b) milling with 1 mm WC cutter with different FR (Bakkal and Naksiler [68]).

in tool size and speed. FR plays a significant role when produces a rougher surface; however, increasing number
keeping the remaining parameters constant. Moreover, of flutes tends to smooth the surface.
higher vibration leads to poor surface quality. It can Malekian et al. [72] performed tool wear monitoring
be concluded that maximization of tool stiffness and during micromilling operation to obtain better product
machine tool structure and minimization of spindle quality and long tool life. Factors affecting tool wear
oscillation are important ways to stimulate surface were examined using different sensors and signals were
characteristics. merged with the neuro fuzzy concept to determine the
Vivek et al. [71] performed burr formation and surface form of tool. Optical microscope was used to monitor
characteristics study during the milling of TI6Al4V. Pro- the tool condition as shown in Fig. 42. Combination
cess variables including DC, speed, number of flutes, of experiments was carried out and the wear rate was
feed, and cutter diameter were considered in the study observed. The effectiveness of the tool condition moni-
and the following observations were made. The burr toring was also investigated.
height decreased by 62% and 53%, respectively, if the Prakash and Kanthababu [73] performed in-process
spindle speed changed from 10,000 to 90,000 rpm and condition monitoring to predict the tool condition using
FR changed from 1 to 5 mm=s. The burr height increases acoustic sensor during micromilling of Al, copper, and
multifold if the cutting depth increases from 10 to 50 mm. alloy steels. The experimental setup is shown in Fig. 43.
Tool size and the number of flutes do not influence burr From the analysis, it can be observed that there is a
size [71]. Increase of speed, DC, and feed result in an relationship among acoustic signals, flank wear, and
improved surface finish. Increase in tool diameter chip morphology. Tool wear mechanisms such as plastic

FIGURE 41.—Micro-end-milling setup (Wang et al. [70]). FIGURE 42.—Experimental setup for tool condition (monitoring) [72].
 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1307

apart from size reduction. One of the most significant

characteristics is the size effects (Xinmin et al. [74]).
Mian et al. [75] performed micromilling test to study
the implication of cutting variables on size effect in
Inconel 718 using a 500 mm carbide end mill cutter.
Taguchi-based DOE and ANOVA were performed to
determine the significant impact of parameters. The
observation shows that cutting velocity was the domi-
nant factor. Jin and Altintas [17] developed a milling
force model based on the slip-line theory and machining
concepts. Experiments were carried out with oxygen-free
high conductivity copper using a 0.1 mm-diameter min-
iaturized machine tool. It was observed that there is a
correlation between the estimated and the investigated
results as shown in Figs. 45 and 46. Chip characteristics
and size effect were analyzed with the proposed model
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and the influence of chip thickness and strengthening

behavior was also addressed. Machining force predic-
tion at the micron scale is an imperative activity to
FIGURE 43.—In-process condition monitoring setup (Prakash and establish an optimum choice of parameters.
Kanthababu [73]). Bissacco et al. [76] proposed a model for micromilling
force estimation, by considering size effect, chip flow
deformation and adhesion were analyzed using scanning angle, and tool runout, based on the modified inclusion
electron microscopy (SEM) on the selected materials as of the mechanics of cutting. The substantiation of the
shown in Fig. 44. proposed model was carried out by measuring the force
components. It was inferred that the force unbalance
was minimized by the tool deflection. Hongtao et al.
Size Effects [77] experimentally investigated dimension control, sur-
Micromilling operation has noteworthy influences on face integrity, tool wear, and size effect during milling
tool edge radius, size effect, and thickness of the chip, of hardened tool steels. 2D FE models were designed

FIGURE 44.—SEM image of different materials (Prakash and Kanthababu [73]).

 1308 S. P. LEO KUMAR ET AL.

FIGURE 47.—Finite element model setups (Hongtao et al. [77]).

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to imitate the continuous chip formation beneath two

FIGURE 45.—Specific shear energy and size effects (Jin and Altintas [17]). configurations: microslotting and micro-side-cutting
as shown in Fig. 47. The surface finish of the machined
surface was measured using an interferometric surface
profiler. The tool flank wear and nose wear during
side cutting were investigated during the side-cutting
experiments. Tool wear patterns are shown in
Fig. 48.
The stable state machining warmth was analyzed by
heat transfer observation. The comparison between FE
model and experimental data shows that the projected
model is competent enough for modeling built-up edge
and continuous chip formation in micromilling consider-
ing the size effect. Hongtao et al. [78] also performed
modeling and analysis on Inconel 718, Ti6Al4V, and
SS AISI 422 using laser-assisted micro milling (LAMM)
process. The work material temperature increase and the
temperature variance were examined. The FE model
simulation shows that the LAMM can decrease built-up
edge formation by suitable heating of the work material
proceeding to the cutting tool.

FIGURE 46.—Milling force comparisons and size effect (Jin and Altintas FIGURE 48.—Tool wear measurements for a tool after 6 min of side cutting
[17]). (Hongtao et al. [78]).
 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1309

ELECTRIC DISCHARGE MICROMACHINING (MICRO-EDM) Product Development and Burr Formation Analysis
Electric discharge micromachining (micro-EDM) Precision ophthalmic lenses, sensors, and sunglasses
becomes a choice method to manufacture microstruc- are made of polymer materials, which need higher accu-
tures. The main advantages include low setup cost, racy. Speich et al. [82] used a new process sequence for
accuracy, huge design flexibility, and independent of manufacturing mold for optics. The existing process
work material hardness. Compared with etching techni- chain is modified with an industrial robot for lapping
ques, micro-EDM can generate complex 3D shapes and honing. It replaces the existing diamond machining,
with higher AR (Lim et al. [79]). It is an idyllic process manual polishing, and nickel plating steps. Polishing
to produce micron-sized apertures in electrical conduc- agents, diverse tool materials, and the parameters are
tivity work materials (Mahardika et al. [80]). It is not tested and compared with FE simulation to attain excep-
addition of the conventional EDM process with eroding tional results. Wang et al. [83] designed an integrated
at the micron or nano level; the discharge power is route for micro-EDM parts. In this technique, the struc-
abridged to the order of 106–107 J in order to diminish ture of the part is divided into fundamental structural
the unit MRR. Application of micro-EDM includes components and their respective micro-EDM technique
micromolds, dies, injection nozzles, biomedical equip- is determined according to the microfeatures. The errors
ment, surgery equipment, and grippers. Power supply during the integrated machining are investigated and
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is an important source to induce micro-EDM, and the proposed method is verified for the microreducer
hence it needs to be controlled to ensure proper ero- product.
sion. The available power supply for micro-EDM Khalid et al. [84] performed processing of carbon
includes (1) rotary impulse, (2) RC pulse, and (3) RC nanotube forests configuration of high AR 3D micro-
relaxation type. In rotary impulse type, voltage is structures. High-frequency pulses were developed to
generated based on the DC motor principle. In RC process the nanotubes to fashion shapes in a forest.
pulse type, solid-state device is used to generate single The optimal dispensation level was established in air
capacitance discharge and there is no constant voltage with 30 V voltage and 60 mA current for a 10 mm dis-
and current. RC relaxation type is based on charging charge gap. Discharge energy and gap were shown to
and discharging of the capacitor coupled with the attain AR of 20 with a 5 mm feature. Nakaokua et al.
power supply. [85] performed an experimental study with four types
Development of microfeatures with micro-EDM is of sintered diamond (SD) using micro-EDM; WC was
categorized into five types: micro-EDM die-sinking, in tested for comparison as shown in Fig. 49. Basic charac-
which microelectrodes are generally used to create teristics were investigated by through-hole machining
its image on a workpiece. In micro-wire-EDM, wire of and trenches in SD plates. The surface characteristics
size down to 20 micron is employed to machine a con- of SD were found to be in good quality for micromold
ductive work material. In electric discharge microdril- applications.
ling, electrodes of size less than <100 mm are normally Because of greater decay and wear confrontation,
used. In electric discharge micromilling, electrodes of PCD is a perfect material for microparts fabrication.
size down to 5–10 mm are used to produce 3D profiles. Wang et al. [86] investigated microhole machining per-
In electric discharge microgrinding process, a sacrificial formance for PCD to analyze the polarity and the effects
electrode is used to fabricate the microelectrode. of process variables in process performance. The results
Pham et al. [81] discussed various research issues show that negative polarity is suitable for PCD, since it
regarding the micro-EDM process. The work increases the strength due to adhesion with electrode.
presents recent trends in micro-EDM and their related It was observed that a suitable degree of adhesion of
processes. It can be inferred that efficiency depends on electrode could improve the MRR and also reduce the
the relationship between the parameters and their opti- TWR. Machining of through-holes using PCD in opti-
mization. Several research works have been carried out mal circumstances shows acceptable consequences as
on various micro-EDM processes in terms of product shown in Fig. 50. Uhlmann et al. [87] presented an out-
development, performance characteristics, process line for dissimilar process variants of micro-EDM. A
development, condition monitoring, and so on, in the survey was carried out regarding their capability to
past few decades. machine the microstructures on forming tools.

FIGURE 49.—Holes machined in SD plates with various diamond particle sizes (Nakaokua et al. [85]).
 1310 S. P. LEO KUMAR ET AL.

FIGURE 50.—Images of hole on 650 mm PCD: (a) entrance, (b) exit (Wang et al. [86]).
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Diver et al. [88] performed ED microdrilling of was examined and influencing factors were investigated.
tapered holes for industrial products. It replaces the The result shows negligible discharge energy, inadequate
capability of conventional EDM, and it can produce positioning accuracy, and form error because of sway of
straight and parallel holes. Tapered hole with 100 mm controlled gap.
as the entry diameter and 160 mm as the exit diameter Generally the production of high AR through holes
was produced and the quality of the hole was examined. and intricate blind holes is a tricky task in micro-EDM.
Ferraris et al. [89] performed microdrilling of high The concentration of the debris between the discharge
AR > 30 holes. The coated tools on the sidewalls were gap leads to superfluous wear of electrode and to
used in the work to prevent secondary spark. The per- reduced precision. Yu et al. [92] offered a novel method-
formance of the tool was compared in the form of shape ology with planetary rotation. Microholes with AR of
quality; machining time and tool wear are shown in 18 are produced. The planetary movement provides an
Fig. 51. It was observed that microholes <200 mm with additional space for debris exclusion. It results in an
AR of 130 can be produced in one hour. Micropunching increase of MRR and a decrease of EWR. The projected
die was also realized with the help of micro-wire-EDM. method ensures higher AR and noncircular blind
Burr formation is an unavoidable phenomenon in microholes.
most machining processes. As feature size decreases, Manufacture of microelectrode is an imperative pro-
the burr troubles become increasingly complex to cess to avoid the errors arising during clamping, and
resolve. Jeong et al. [90] performed deburring of micro- to preserve accurateness. Lim et al. [79] performed
features using a low-energy and small-diameter tool. The machining of microstructures in two stages. The first
generated burr geometry was analyzed using micro- stage deals with the fabrication of high AR microelec-
EDM for Al, copper, and SS workpieces as shown in trode in machine and the next stage deals with eroding
Table 1. Han et al. [91] performed submicrometer order of the work material, as shown in Fig. 52. An optical
size machining, in which the smallest machinable size sensor is used to control and compute the electrode
dimension throughout the tool fabrication process.
The performance is evaluated in terms of TWR, MRR,
and reliability of machining. Influence of process para-
meters such as gap, resistance, voltage, and capacitance
values is discussed. Tai et al. [93] performed drilling deep
holes for a depth of 320 mm on hot tool steel.
An electrode of size 26 mm was fabricated by
wire-electric discharge grinding (wire-EDG) process.
Influence of variables on EWR, hole enlargement, and

TABLE 1.—Deburring results with Micro-EDM (Jeong et al. [90]).

Averaged peak burr height (mm) Surface roughness Ra (nm)

After rough After fine After flat-end After edge

Materials deburring deburring milling finishing

Aluminum 6.5 0.7 26 528

Copper 8 0.57 59 351
FIGURE 51.—Holes produced with coated and uncoated tools (Ferraris Stainless steel 5.4 0.58 103 308
et al. [89]).
 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1311

FIGURE 52.—Process of high-AR microstructures with micro-EDM (Lim et al. [79]).

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MRR was observed. The result shows that pulse voltage to overcome the limitation of RC pulse-type generator
between 60 and 100 V and capacitance between 80 and and developed a transistor-type iso-pulse generator.
220 pF are the optimum parameters. It is also pragmatic The system performance was verified in terms of MRR
that when the depth exceeds 200 mm, the hole turns into and it was observed that the proposed system yields
almost taper owing to corner wear and secondary three times higher MRR.
discharge along the electrode side. Owing to the Son et al. [100] investigated the effect of pulse dur-
development of wire-EDG process, it became possible ation and pulse on=off time ratio on MRR, accuracy,
to produce very small electrodes, ejection pins for mold and tool wear. It was observed that the shorter voltage
inserts, and so on. Fleischer et al. [94] fabricated a and current pulse ensure precision micropart with
micromilling cutter of size 100 mm on WC material using maximum MRR and minimum tool wear; the observed
the wire-EDG technique. Gwo-Lianq et al. [95] carried values are shown in Figs. 53(a) and 53(b).
out a detailed study on burr formation. The microtools Yan and Chiang [101] developed a transistor-
were made using the WEDG technique. A WC tool, controlled power supply to guarantee a high-frequency
31 mm in diameter, was fabricated and it was able to and low-energy pulse for micro-wire-EDM. The
perform micromilling and grinding processes. Burr result shows that low-energy pulses with 185 kHz
formation was investigated experimentally, and the iso-frequency and 0.7 discharge current are produced
mechanisms and their relationship discussed. successfully. Gurule and Pansare [102] discussed the
influence of electrical parameters on micro-EDM perfor-
Power Supply mance and their applications. Rasheed [103] used ultra-
short pulses with the help of RC-type pulse generator to
The objective of micro-EDM is to minimize the ero- generate microholes. The performance in terms of MRR,
sion of workpiece in a single discharge. The erosion is surface integrity, and dimensional accuracy is compared
directly related to the energy of the spark; a single with laser machining. Kunieda (Challenges to miniatur-
capacitor RC pulse generator is the simplest form of cir- ization in micro EDM, personal communication)
cuitry element. Various research works have been per- addressed the various issues of micro-EDM including
formed to address the effects of electrical parameters stray capacitance, electrode feeding, residual stress,
on the finished micro and miniature parts in terms of microstructure of materials, and their possible sugges-
surface quality and functionality. Mahendran et al. tions for improvement. Yeo et al. [104] developed a
[96] discussed different power supply, their potential novel pulse perceptive technique to monitor the EDM
use for micro-EDM, and their characteristics. Wong process. The proposed method classifies discharge pulses
et al. [97] proposed a single-spark technique to learn into delayed, normal, short circuit, and arcing precisely.
about erosion behavior. It was concluded that the vol- Also an adaptive control system for speed was proposed.
ume and size of microcraters are consistent at lower- The observation shows that system can reduce machin-
energy discharge. The required specific energy for ing time by 50% and improvement in dimensional
material removal was found to be considerably low at accuracy by 3–4%.
lower energies (<50 mJ). The predictable erosion
efficiency was found to be 7–8 times higher. Han et al.
[98] described the machining characteristics with Performance Characteristics and Optimization
transistor and servo control generator. Integration of During micro-EDM process, concentrated heat is
the system increases the MRR to 24 times higher than generated due to discharge in dielectric fluid, resulting
a conventional generator. It was also found that in the creation of microcraters. Plaza et al. [105] per-
efficiency of the servo control was higher in the finishing formed experimental investigation on ED-microdrilling
process, whereas transistor type was more efficient in the of Ti6Al4V alloy and its effects on hole quality, MRR,
semifinishing process. Han et al. [99] performed a study machining time, and EWR were studied. The concept of
 1312 S. P. LEO KUMAR ET AL.
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FIGURE 53.—MRR and tool wear rate on (a) pulse current and (b) pulse voltage (Son et al. [100]).

FIGURE 54.—Cryogenic setup (Jafferson and Hariharan [108]).

helical-shaped electrode was proposed to promote the Fig. 54. A 58% decrease of TWR for W, 51% for brass,
removal of debris when the hole depth increases. The and 35% for copper electrodes were observed. Yahagi
influence of helix angle and flute depth with respect to et al. [108] used the electrostatic induction feeding method
process performance is addressed. The result shows, in to induce high rotational speed of electrode for
overall, 56% reduction in machining time at a helix angle micro-EDM drilling process. Noncontact method makes
of 45
with a full depth of 150 mm. An AR of 10 success- the electrode to rotate at 50,000 rpm. The influence of
fully made on the Ti6Al4V alloy. Jahan et al. [106] ana- speed on AR of the hole is shown in Fig. 55. It is predicted
lyzed the effect of process variables during micro-EDM that deep microholes can be produced with good straight-
of WC material. Experiments were carried out with the ness at lower TWR for higher rotational speeds.
aim of obtaining the desired quality microholes with fine
surface finish, improved dimensional accuracy and good
circularity. It was found that the RC-generator can pro-
duce fine microholes and the debris can be easily
removed, resulting in resolidified molten metal and free
of burrs. Kadirvel et al. [107] performed investigation
on the electrode performance on die steel. The perfor-
mance is estimated in terms of MRR, overcut, circularity,
and heat-affected zone (HAZ) with copper tungsten, cop-
per, tungsten, and silver tungsten electrodes. The result
reveals that the copper electrode yields maximum
MRR. Jafferson and Hariharan [108] analyzed the beha-
vior of cryogenically heat-treated electrodes during
micro-EDM in terms of resistivity, crystal size, micro-
hardness, and structure analysis; its setup is shown in FIGURE 55.—Increase of AR with rotation speed (Yahagi et al. [109]).
 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1313

performed optimization of micro-EDM drilling process

for the maximization of surface quality and minimiza-
tion of machining time. Hole size of 150 mm was drilled
with a combination of process variables within the
range. It was inferred that the surface texture can be pre-
dicted by peak-to-valley distance; the machined image is
shown in Fig. 57.
Somashekhar et al. [112] performed optimization of
MRR using intelligent techniques such as GA and arti-
ficial neural network (ANN) for good prediction and for
parameters optimization. Lin et al. [113] used the grey
Taguchi method to optimize the parameters for better
surface quality in Ti-6Al-4V alloy. Electrode depletion,
overcut, and MRR were analyzed. Öpöz et al. [114] per-
formed a study on the shape and geometry of microholes
in terms of machining time. Work material made of plas-
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FIGURE 56.—Fabrication of noncircular microelectrodes using WEDG tic mold steel, WC tool material, and hydrocarbide
(Gwo-Lianq et al. [95]).
dielectric liquid were used in the study. End tip variation
of holes with increase in machining time is shown in
Gwo-Lianq et al. [95] performed a study on Fig. 58. Finally, it was inferred that microhole size line-
vibration-assisted eroding with the design of vibrating arly increases within 20 mm bandwidth due to machining
type of worktable and it was observed that better surface time.
finish can be achieved. Circular and noncircular holes of
diameter <200 mm are fabricated and the setup is shown Process Monitoring Control, Prediction, and Simulation
in Fig. 56. Finally, punching of microholes was per- Mahardika et al. [80] developed a technique for moni-
formed successfully on brass strip. toring of micro-EDM process by counting the discharge
Jerald et al. [110] performed optimization of process pulses and performed a primary study to determine the
parameters for micro-EDM on Inconel 600 alloy to total energy; the experimental setup is shown in Fig. 59.
minimize TWR and to maximize MRR. Effect of The results obtained with the different machining
machining parameters investigated in the study and conditions using the new monitoring method show a
multiresponse optimization was carried out using good concord between total energy and discharge pulses.
Taguchi-based DOE and GRA. Rashed et al. [111] Owing to electrode vibration, the processing time is

FIGURE 57.—The SEM images of the AISI 440C steel at (a) high pulse energy (HE) and (b) low pulse energy (LE) (Rashed et al. [111]).
 1314 S. P. LEO KUMAR ET AL.

theoretical and experimental data are due to the forma-

tion of debris, the rotation of electrode, and temperature
change during machining due to variance in fluid beha-
vior. Hao et al. [118] designed a micro-EDM drilling
equipment to produce spray holes for the fuel injector.
To progress process efficiency, the electrode feed head
is modified with a novel taper swinging mechanism.
Piezoelectric actuator to assist the oscillation and
dual-clamps for wear compensation were used.
FIGURE 58.—Variation of holes with machining time (Öpöz et al. [114]).
Performance test was carried out to determine the
consistent accuracy in machining multiple nozzles. The
minimized. Compensation factor for tool wear was result shows that the equipment meets the requirements
calculated to attain high accuracy. As a result, good per- of diameter between 140 and 300 mm, taper angles, space
formance of micro-EDM process was achieved. A accuracy, dimensional accurateness, and feed efficiency.
high-energy and power aperture material is molyb- Measuring the microfeature is the challenging task.
denum because its properties include high melting point Noncontact measurement has major applications in
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and thermal conductivity. Allen et al. [115] performed the field of miniaturization. Jafferson and Hariharan
stress analysis and process simulation. MRR was ana- [119] investigated the quality of microholes by machine
lyzed by means of a numerical model, which simulates vision techniques.
the single-spark phenomenon. The special effects of
pulse duration on crater and tool wear were studied by
means of numerical models. Single-spark craters were Material Aspects
analyzed with the help of SEM and the results are com- WC and their composites are extensively used in
pared. Results from the thermal structural FEA are also mold- and die-making industries because of their excel-
presented. lent mechanical and physical properties. Micro-EDM
Hun Jeong and Byung-Kwon [116] projected a simula- is an effective method for machining hard and brittle
tion model for EDM drilling using a cylindrical tool. 2D electrically conductive materials. Jahan et al. [120] per-
matrix method was used to represent the tool and work- formed investigations to obtain fine surface finish on
piece geometry. Single-spark crater is shown in Fig. 60. WC using copper tungsten (CuW), W, and silver tung-
Spark frequency, tool motion, spark gap width, crater, sten (AgW) electrodes. The surface topography is shown
and TWR are considered as the simulation parameters. in Fig. 62 and it is observed that the surface quality
It was observed that the geometry prediction and experi- depends on discharge energy. It can be seen that the fine
mental results are in good agreement. Jian Zhong et al. finish requires minimum pulse energy. In addition, the
[117] proposed a numerical model made on fluid mech- surface finish is influenced by the properties of the elec-
anics and surface tension concept to predict the AR of trode material. AgW produces a smoother nanosurface
the hole produced by the EDM process. Experiments with the lowest Ra and Rmax among the electrodes.
were carried out under different operating conditions During finishing operation, vey less amount of material
for verification, and are shown in Fig. 61. It was found migrates from the AgW electrode. W electrode has the
that the experimental results are in good conformity lowest wear [120]. Overall, AgW appears to be the best
with the theoretical results. The errors among the choice for finish die-sinking of WC.

FIGURE 59.—Measurement method of micro-EDM (Mahardika et al. [80]).

 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1315

Borosilicate glass is extensively used as a substrate for

MEMS because of its excellent surface integrity and
bonding property. Yeo et al. [121] performed processing
of zirconium-based BMG to demonstrate the feasibility
of discharge energy.
Two input energy levels 13.4 and 0.9 mJ and three elec-
trodes, including tungsten, brass, and copper tube, were
employed to determine the consequence machining cir-
cumstances on surface irregularity. It was inferred that
the lower input energy levels and tube electrode yield
better results. Meena and Azad [122] performed GRA
to determine optimum process variables for machining
of titanium alloy. The effect of current, voltage, fre-
quency, and width on MRR, TWR, and overcut was
studied. Jahan et al. [123] performed an assessment on
conventional and EDM of WC. The research develop-
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ments, current trends, problems, and future research

direction were also presented. Mahendran et al. [96] also
performed a review on micro-EDM in terms of charac-
teristics, MRR, and TWR. Yan et al. [124] proposed
an eroding technique that combines micro ultrasonic
FIGURE 60.—Crater image of molybdenum (Allen et al. [115]). vibration machining (MUSM) and micro-EDM to pro-
duce precise microholes with high AR. A circular tool
was fabricated using micro-EDM to produce a hole in
a glass as shown in Fig. 63. The investigation shows that
with appropriate process variables, the diameter vari-
ation could reach the value of 2 mm with a diameter of
150 mm and depth of 500 mm.
It was observed that the diameter variation could be
improved with the help of appropriate slurry concen-
tration. During the roundness investigation, it was
found that tool rotation speed has a close relationship
and a value of 2 mm could be achieved with the appropri-
ate rotational speed. Maradia et al. [125] used graphite
electrodes to perform microscale and mesoscale EDM.
Initially, graphite electrodes were machined with high
exactness as shown in Fig. 64. It was inferred that low
tool wear technology ensures an effective solution for
microscale processing. A branch of micro-EDM extends
its capabilities with the help of a microenergy pulse gen-
erator. It is an excellent process for micromachining due
to noncontact machining and high accuracy [126].
Shichun et al. [126] performed an analysis of kerfs width
in micro-wire-EDM. A mathematical model for break-
down distance and wire vibration was developed to ana-
lyze its performance. Kerf width variation with
FIGURE 61.—Comparison of theoretical and experimental results (Jian machining parameters is shown in Fig. 65. A 30.8 mm
Zhong et al. [117]). slot was made on SS with a wire of size 30.8 mm. It was

FIGURE 62.—Topography of micro-EDM surface of WC at 60 V, stray capacitance (Jahan et al. [120]).

 1316 S. P. LEO KUMAR ET AL.

observed that open voltage has a major impact on kerfs

width.
Klocke et al. [127] used thin electrodes of diameters
20, 25, 30, and 50 mm to fabricate microparts. The forces
on thin wires and crater wear were analyzed. Finally, the
craters were located and dimensions were measured
using a microscope. Mu-Tian and Hsing-Tsung [128]
developed a control system shown in Fig. 66. The effects
of eroding FR, pulse interval, workpiece thickness, arc
discharge, and short circuit were analyzed. It was
observed that more pulse interval leads to an increase
FIGURE 63.—Experimental setup of MUSM (Yan et al. [124]).
of the short ratio. An increase of workpiece height or
high machining FR results in an increase of the short
ratio. Experimental results indicate that the developed
system can drastically reduce the short sparking fre-
quency and arc discharge. Sivaprakasam et al. [129] pre-
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sented a methodical move toward the analysis of process

performance on Al matrix composite using the RSM
technique. The outcomes of the process variables on
MRR, kerf width, and SR were analyzed. ANOVA table
was formulated to determine the significant impact of
process parameters and finally the optimum values were
determined. Geng et al. [130] performed a study on
rotating structure using micro-wire-EDG. NC program
was developed using CAD=CAM technologies to per-
form high-speed processing. The SEM image of the bel-
lows core mold is shown in Fig. 67. RSM was used to
analyze the influence of process variables on MRR.
FIGURE 64.—Machining of graphite electrodes (Maradia et al. [125]).

FIGURE 65.—Kerf width variation with machining parameters (Shichun et al. [126]).

FIGURE 66.—Discriminating and control system (Mu-Tian and Hsing-Tsung [128]).

 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1317
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FIGURE 67.—SEM image of bellows core mold (Geng et al. [130]).

FIGURE 69.—Micro-WEDG setup (Chern et al. [132]).

Microtools Fabrication
Fabrication of microtool that reassembles the shape for grinding microgrooves in optical glass. Experiments
of microfeature with tight control of process parameters were carried out to analyze the quality characteristics; it
is a challenging task. Yamazaki et al. [131] fabricated a was observed that good dimensional accuracy and good
microrod by combining self-drilling and EDM process. SR were achieved.
Initially, the rod acts as a negative electrode and drilling Micro stylus tip of size less than 0.1 mm is used in
operation is performed on the anode plate. Then the rod micro coordinate measuring machine to measure micro-
position is off-centered and the electric polarity is features including slots, grooves, holes, microchannels,
reversed. It is then fed to the plate electrode to form a and so on. Tsai et al. [135] used hybrid micro electro
microrod; its operation sequence is shown in Fig. 68. chemical machining (micro-ECM) and one-pulse electric
Chern et al. [132] developed a microtool to generate discharge (OPED) process to produce a microball-ended
microfeatures on Al6061-T6 material and also perfor- stylus tip; its experimental setup is shown in Fig. 71.
med burr formation analysis. First, the microtool was
generated by micro-WEDG as shown in Fig. 69. Then
the microslots and thin-wall microstructures were pro-
duced. Finally, burr formation analysis was performed
and their relationship with the process conditions was
addressed.
Hwang et al. [133] used combined micropeck drilling
and reverse EDM to fabricate a micropin. Initially,
microholes were produced on the workpiece by
vibration-assisted peck drilling. Then reverse EDM
was used to fabricate micropin array as shown in
Fig. 70. The effect of chip removal mechanism, type of FIGURE 70.—Micropin array (Hwang et al. [133]).
microhole, and its density were analyzed. It was
observed that the proposed method can produce high
hardness, high quantity, high density, and a uniform-
diameter micropin [133]. Chen and Lin [134] used
micro-WEDM technique to perform dressing and truing
operation to make a thin grinding wheel that can be used

FIGURE 68.—Principle of obtaining microrods (Yamazaki et al. [131]). FIGURE 71.—Fabrication of micro stylus tip (Tsai et al. [135]).
 1318 S. P. LEO KUMAR ET AL.

achieved successfully. Gurguı́a et al. [137] analyzed the

influences of process variables on microfeature gener-
ation in SS316L material used for medical applications.
Effects of electrical parameters were analyzed and qual-
ity of microcavities was rated with different grades as
shown in Fig. 73.

Microfeatures Generation
Micro-EDM and their allied process ensure the
generations of microfeatures including slots, grooves,
cavities, and so on, on a variety of difficult-to-cut mate-
rials. Uhlmann et al. [138] performed a review on
micro-EDM and their allied processes on microfeature
fabrication.
Micro-EDM-related processes are described in terms
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FIGURE 72.—Inverse slab experimental setup (Gil et al. [136]).

of geometry complexities that can be handled, structure
dimensions, surface quality, and its applications. Cylin-
drical electrode of size 25 mm and rectangular electrode
The process variables of micro-ECM and OPED in of size 40 mm were produced on WC using WEDG as
terms of electrolyte concentration, feeding speed, and shown in Figs. 74(a) and 74(b). Cao et al. [139] used
pulse duration were investigated. hybrid LIGA and parallel micro-EDM technology for
Gil et al. [136] fabricated a high AR micropin using an the fabrication of high AR complex micromolds. The
inverse slab electric discharge milling process as shown proposed approach overcomes the AR difficulties with
in Fig. 72. Influence of process variables and its effects LIGA process and complex microstructures limitations
on efficiency, surface finish, and accuracy are discussed. with micro-EDM. SS 304 material was processed by
Finally, a micropin of size 200 mm with AR of 90 was parallel micro-EDM as shown in Fig. 75.

FIGURE 73.—Effect of electrical parameters on quality of microcavities (Gurguı́a et al. [137]).

FIGURE 74.—(a) Cylindrical electrode and (b) rectangular electrode (Uhlmann et al. [138]).
 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1319
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FIGURE 75.—SS 304 part produced by parallel micro-EDM (Cao et al.

FIGURE 78.—Cutting of soda glass by MWEDC (Han et al. [141]).
[139]).

Karthikeyan et al. [140] performed an experimental

investigation as shown in Fig. 76 to analyze the influence
of process parameters such as rotational speed, feed, and
AR on MRR and tool wear rate. A new approach was
introduced to determine the volume of the eroded
material. It was observed that rotational speed has a sig-
nificant effect on stable discharge. Surface morphology
was analyzed using SEM [140]. Han et al. [141] used a
cylindrical tool with microfeatures as shown in Fig. 77
to perform micro-wire electrochemical discharge cutting
(micro-WEDC) of glass and ceramic materials. Partial
insulation of the tool was carried out to minimize the
reactive tool area and the fabricated glass profile is
shown in Fig. 78.
Schubert et al. [142] integrated the concept of
‘‘Assisting Electrode Method’’ shown in Fig.79 to per-
form micro-EDM milling on nonconductive zirconia
material. SR and characteristics of machining were
FIGURE 76.—Experimental setup for micro-EDM milling (Karthikeyan compared and recommendation was provided for the
et al. [140]). improvement of process variables.
Richard and Demellayer [143] discussed the key fea-
tures of micro-EDM milling over other micromachining
processes and their process capabilities. Skoczypiec and
Ruszaj [144] performed a review on micro-ECM
and micro-EDM process in terms of accuracy and

FIGURE 77.—Tool for MWEDC (Han et al. [141]). FIGURE 79.—Assisting electrode setup (Schubert et al. [142]).
 1320 S. P. LEO KUMAR ET AL.

productivity. The merits of integrating two processes on and two-sided micro-ECM. In the other group, material
the same machine tool were reviewed. Finally, integra- removal is directly controlled by high localization. It is
tion of micro-EDM=ECM and the need for CAD=CAM further classified into jet, capillary type, and 3D
CAM support was also presented. micro-ECM.
The typical setup of Micro-ECM is shown in Fig. 81.
Power supply, voltage, pulse, type of electrolyte and
ELECTROCHEMICAL MICROMACHINING (MICRO-ECM) concentration, IEG, tool shape, and design are the
Electrochemical micromachining (micro-ECM) has major characteristics of micro-ECM. A quantum of
become a promising micromachining technology due research works have been performed in the last few dec-
to its potential advantages including high machining ades interrelated to performance characteristics study,
rate, better surface finish, no tool wear, stress free, better process parameters, tool fabrication, and profile gener-
precision, and a range of materials can be processed ation under micro-ECM and their related processes.
(Bhattacharya et al. [146]). It differs from conventional Micro-ECM can be used for high-precision application;
ECM in terms of process variables, ultrashort pulses, accuracy is of the order of 1 mm on 50 mm.
inter-electrode gap (IEG), electrical layer, and so on Bhattacharya et al. [146] performed a review on
(Joshi and Marla [145]). Micro-ECM is a wet etching micro-ECM and analyzed the influencing factors includ-
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process where the tool is the cathode and the work is ing power supply, interelectrode gap, accuracy of metal
the anode in an electrolytic cell. Salt solution is used removal, microtool development, and electrolyte. Spie-
as an electrolyte and metal removal takes place from ser and Ivanov [147] addressed the problem associated
the anode, when the current flows through it (Jain [5]). with micro-ECM and their solutions in terms of process
An assortment of metals and alloys including conductive monitoring and control, electrical parameters, machin-
ceramics can be processed by micro-ECM. It is classified ing characteristics, and so on. Also future research direc-
into two broad categories based on localization effects, tion was presented. Micro-ECM ensures smooth surface
as shown in Fig. 80. In one group, material removal is finish and good tolerance values for numerous industrial
constrained by applying photoresist pattern. According applications. Sen and Shan [148] performed a review
to the masking direction, it is classified into one-sided on EC microdrilling and analyzed the key factors

FIGURE 80.—Types of micro-ECM processes (Jain [5]).

FIGURE 81.—Electrochemical micromachining setup (Rathod et al. [160]).

 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1321

influencing the quality of microholes. Moreover, a rela- analyzed in terms of change in electrolyte concentration,
tive study was performed to address the versatility of the voltage, pulse on time, and gap distance for improved
process. shape and surface finish. The optimum values were as
follows: 100 mm gap distance, 1400 ns pulse on time,
Power Supply 500 kHz frequency, 18 V voltage, and 3 M of electrolyte
concentration. Das and Saha [153] analyzed the influ-
Pulsed current delivers more possibilities for the ence of electrical parameters on material dissolution rate
enhancement of micro-ECM. Low current density (75– experimentally. It was observed that the increase in pulse
100 A=cm2) and voltage (1–10 V) are required for proper on time, voltage, and power supply frequency leads to
machining [5]. Higher current density leads to the con- increase in MRR. At the same time, increase in electro-
tamination of the tool electrode. Short pulse duration lyte concentration reduces MRR. Das and Saha [154,
leads to the improvement in dimensional accuracy due 155] performed machining of holes on SS 304 by
to the minimum amount of metal removal [149]. Pulsat- micro-EC sinking using short pulses and analyzed the
ing current has three variables: pulse on time, off time, influence of electrical parameters on hole characteristics
and current density. It can be modified in parallel based including taper angle and overcut. Optimum parameters
on the required machining rate and to control the were found to be 7 V, 500 kHz, and 0.1 M for the
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dimensional accuracy and surface quality. The typical minimum value of radial overcut and taper angle.
setup of pulsed micro-ECM is shown in Fig. 82.
Ahn et al. [149] used an ultrashort pulse technique to Effect of Process Variables
localize the dissolution on electro chemical micro drilling Process variables have a direct influence on the perfor-
(EC microdrilling) of size 8 mm on SS sheet and its effects mance of micro-ECM, especially electrical parameters,
on process parameters were analyzed. Voltage and pulse IEG, concentration, and so on. HAZ is a major problem
durations were controlled to adjust the localization with electro chemical discharge micro drilling
distance. Finally, stepped and taper-free holes were pro- (ECDMD). Kim et al. [156] analyzed the effect of voltage
duced successfully. Zhang et al. [150] developed ultra- pulse frequency and duty ratio during ECDMD on pyrex
short pulse (minimum of 50 ns) and high-frequency glass. It was observed that the frequency and duty ratio
power supply for micro-ECM to enhance the accuracy are inversely proportional to each other for the minimum
and surface characteristics. A series of chopper and value of HAZ of the drilled hole. It was also observed
protection circuit was developed to stimulate the high that as the tool diameter decreases, the clearance value
frequency and to guard the workpiece against damage. increases. Ryu [157] performed EC microdrilling and
The performance of the system was evaluated through micromilling operation with citric acid as the electrolyte
real-time experiments. Munda et al. [151] developed a on SS workpiece. Characteristics were studied in terms of
mathematical model to represent stray current and concentration and electrical conditions through a series
microspark using RSM and the optimum values were of experiments. Microholes, microsquare, and circular
derived. The optimum parameter reduces the microspark cavities were produced under optimum process con-
and stray-current-affected zone down to 0.0001 mm. It ditions as shown in Figs. 83(a) and 83(b).
was observed that the combination of machining para- Yong et al. [158] performed an investigation to analyze
meters derived from the model yields good surface finish. the influence of parameters, especially electrode shape
Microtools have been produced successfully with the and pulse on time, on surface quality and precision. A
development of pulsed micro-ECM. Das and Saha complex non-uniform rational B-Spline (NURBS) curve
[152] fabricated a cylindrical microtool using micro-EC was successfully produced with the experimental results
form turning process and the variation in length was as shown in Fig. 84. Thanigaivelan and Arunachalam
[159] investigated the influence of the shape of tool tip
on machining rate and overcut in the SS 304 material.
Rounded, flat, and conical shapes are used in the study
and the shaped holes are shown in Fig. 85. It is observed
that the conical shape with rounded tip minimizes the
overcut by 1.7 times and the cone tip improves the
machining time by 4.4 times compared with the flat tip.
Rathod et al. [160] analyzed the influence of parameters
on machining accuracy in terms of depth and width over-
cut and MRR on the SS material. Then microgroove with
an AR of 2.31 was produced with optimum parameters.
Nguyen et al. [161] performed modeling of radial gap
to predict the layer thickness for electro chemical
reaction in a micro-ED=EC (MEDEC) process. Simula-
tion was performed with different pulse values and the
data was verified with experimental results as shown in
Fig. 86. It was observed that the pulse parameters
FIGURE 82.—Schematic setup of pulsed micro-ECM (Ahn et al. [149]). directly influence the dimension of the microhole.
 1322 S. P. LEO KUMAR ET AL.

FIGURE 83.—(a) Square cavity and (b) circular cavity (Ryu [157]).
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FIGURE 84.—NURBS curve (Yong et al. [158]).

FIGURE 85.—SEM image of the machined hole with different electrode tip (Thanigaivelan and Arunachalam [159]).
 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1323

Microfeatures Generation
Micro-ECM can generate stress-free microfeatures
such as holes, grooves, and slots for numerous bio-
medical and medical applications. Kozak et al. [162] per-
formed a study on different features produced by
micro-ECM, including slots, grooves, and mini holes,
and also observed the process limitations. The techni-
ques of ultrashort pulse current and ultrasmall gap size
were introduced to increase the capability of micro-
ECM and the performance was evaluated.
Kim et al. [163] fabricated a 3D microstructure using
an ultrashort pulse and nano duration process conditions
with sulfuric acid as an electrolyte. Disc-type electrode
was used to avoid taper and hole; groove and hemisphere
features were produced successfully as shown in
Figs. 87(a)–87(c). Jo et al. [164] made an attempt to dis-
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cover the possibilities of micro-ECM in making complex

FIGURE 86.—Comparison of radial gap for 500 kHz pulse frequency internal features by controlling the pulse condition.
(Nguyen et al. [161]).

FIGURE 87.—(a) Hemisphere with 60 mm size, (b) / 15 mm microholes by ECM (a) image at the entrance, (c) exit, and (d) microgrooves on SS 304 (Kim et al. [163]).
 1324 S. P. LEO KUMAR ET AL.

MRR and improved accuracy were achieved. The SEM

image of the microchannel is shown in Fig. 90. Zeng
et al. [168] performed Micro-ED milling and Micro-
ECM milling in a sequential manner to improve the
surface characteristics. Similar setup arrangement with
different dielectric medium was used in the analysis. It
was observed that Ra of 0.707 mm was attained by
Micro-EDM is being reduced to 0.143 mm by
Micro-ECM. The proposed system was verified with
the fabrication of 3D microstructures; its SEM image
is shown in Fig. 91.
FIGURE 88.—Disc-shaped electrode to form a groove in microhole (Jo et Ghoshal and Bhattacharya [169] performed an experi-
al. [164]).
mental investigation to minimize the overcut and taper
angle of microfeatures. Nominal current density was cal-
Disc-shaped electrode was used to form internal culated along the length of microfeatures and it was
groove as shown in Fig. 88. Zhu et al. [165] carried observed that the conical microtool is best suitable for
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out micro-ECM on dimple array in which the patterned taperless features. Finally, 3D features were produced
insulation plate was coated with a metal film, attached successfully. Hung et al. [170] performed finite element
to the workpiece as shown in the figure. Owing to elec- simulation to investigate the electrical distribution and
trochemical reaction, a dimple array of microholes was anodic dissolution for the fabrication of helical grooves
generated on the workpiece as shown in Figs. 89(a) in a thrust bearing. Microgroove of length 190 mm with a
and 89(b). Moreover, the effect of process parameters depth of 4.9 mm fabricated with the help of simulation
on microstructure was demonstrated. result is shown in Fig. 92. Ningsong et al. [171] used a
Chang et al. [166] performed a numerical analysis to dry-film photoresist mask to generate 94 mm-diameter
optimize the tool design, process conditions, and fabri- and 22.7 mm-deep dimple arrays on a cylindrical surface
cated herring bone microgroove in hydrodynamic bear- with sodium nitrate electrolyte as shown in Fig. 93. It
ing. Finally, microgroove of size 11 mm was obtained in was found that the size of dimple can be adjusted for a
0.85 s. Malapati and Bhattacharyya [167] investigated given depth by combining lower current density and
the effect of Micro-ECM parameters and their influence longer machining time.
on MRR and machining accuracy during microchannel
fabrication. Mathematical model was developed through Material Aspects
RSM and the validated model was tested with ANOVA.
Optimum values of machining conditions for maximum A wide range of electrically conductive difficult-to-cut
materials was effectively machined by micro-ECM.
Lu and Leng [172] performed jet machining on Ti6Al4V
material generally used in biomedical application.
Microholes were fashioned with an AR of over 1.3 by

FIGURE 89.—(a) Schematic of electrode arrangement and (b) hole array FIGURE 90.—SEM image of microchannel (Malapati and Bhattacharyya
(Zhu et al. [165]). [167]).
 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1325
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FIGURE 91.—SEM image of two-layered square column (Zeng et al. [168]).

compared with the EDM process. Microgrooves were

produced on the WC workpiece as shown in Fig. 95;
moreover, microelectrochemical turning was introduced
to fabricate the microshaft.
Shibuya et al. [174] fabricated a WC micropin with
NaNO3 aqueous electrolyte and analyzed the machining
conditions. Ultrasonic washing was used to get rid of the
by-products and its effects were investigated. Finally, a
micropin of diameter 20 mm and length 2 mm with an
AR of 100 was fabricated successfully. Huang and Liu
[175] experimentally investigated the influence of process
variables on nickel-based super alloys and arrived at the
optimum process conditions. Finally, complex micro-
shapes were produced with the optimum conditions to
demonstrate the capability of the micro-ECM process.

FIGURE 92.—Schematic diagram of microgroove (Hung et al. [170]). Microtools Fabrication

Microtools can be produced with the desired precision
using micro-ECM. Numerous works have addressed the
combining jet impingement and electrolytic reaction and
the results were compared with the mask-type micro-
ECM; images are shown in Fig. 94. Choi et al. [173]
investigated the electrochemical behavior of WC alloy
with ultrashort pulse. The potentials of workpiece and
tool electrode were determined in terms of surface integ-
rity, machining rate, and stability of the finished pro-
ducts. Surface quality in the range of 0.069–0.075 mm
was obtained and the performance of ECM was

FIGURE 93.—Micro-dimple array in a cylindrical surface (Ningsong et al. FIGURE 94.—SEM image of microholes on Ti6Al4V material using
[171]). Jet-EMM (Lu and Leng [172]).
 1326 S. P. LEO KUMAR ET AL.

FIGURE 95.—Microgroove on WC plate (Choi et al. [173]).

development of microtools. Kurita et al. [176] performed the hole inlet and outlet diameter to 335 and 299 mm,
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compound micro-ECM for the fabrication of a 3D elec- respectively.

trode. Initially, a prismatic electrode of size 200 mm was It is well known that a precision tiny electrode is the
machined and the optimum parameters were deter- prime requirement for the invention of microstructures.
mined. Then a 3D machining in sub-millimeter size Fan et al. [180] fabricated WC of various lengths for EC
was performed with the optimum parameters by scan- microdrilling for MEMS application as shown in Fig. 98.
ning the prismatic electrode as shown in Fig. 96. The influence of process parameters was analyzed and
Park et al. [177] performed enamel coating on the side- microhole of size 100 mm was produced successfully.
wall of the tool electrode for insulation as shown in Tsui et al. [181] fabricated a microhelical tool for
Fig. 97. It was observed that the reduction of tool area EC-microdrilling using the electrophoretic deposition
due to insulation minimizes the electrolyte resistance technique and explored the effects of process parameters
and ensures high AR microstructures. Junz Wang et al. on tool diameter. Experiments were carried out with the
[178] fabricated wedge-shaped SS tool with an edge fabricated microtool and the quality of microholes were
radius of 0.6 mm using pulsed micro-ECM. Then hydro- studied in terms of size and surface finish; the fabricated
carbon coating was applied by the sputtering technique tool is shown in Fig. 99. Abishek et al. [182] presented a
to enhance the SR and wear resistance properties. mathematical model to predict the tool size for micro-
The microstructure and mechanical properties were ECM process and compared it with the experimental
analyzed compared with the single-crystal diamond results. It was observed that the differences in tool size
cutter. It was observed that the specific cutting energy were within 9% as shown in Fig. 100.
of the fabricated tool is superior to a diamond cutter.
Tsui et al. [179] used a helical tool to improve the Performance Characteristics
accuracy of EC microdrilling. Rotational speed and Performance of micro-ECM depends on the process
pulse off time were chosen as the controlling parameters variables, machine tool capability, material property,
for hole quality. It was observed that the rotational and so on. Bhattacharyya et al. [183] developed a micro-
speed of 20,000 rpm and 90 ms pulse off time turn down tool vibration system and performed microdrilling on a
copper sheet with SS tool. The parameters including

FIGURE 96.—Image of machined electrode (Kurita et al. [176]). FIGURE 97.—Uninsulated and insulated tool (Park et al. [177]).
 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1327

FIGURE 100.—Comparison of experimental and model prediction

(Abishek et al. [182]).
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FIGURE 98.—Fabricated tungsten microelectrodes with different lengths

(Fan et al. [180]).

effect of parameters on machining accuracy was exper-

vibration frequency, amplitude, and electrolyte concen- imentally investigated and a microgroove of width
tration were analyzed for the desired accuracy and 15 mm with an AR of 10 shapes is shown in Fig. 103.
MRR. It was observed that the tool vibration system Ghoshal and Bhattacharya [187] analyzed the effect of
improves the performance characteristics. The SEM vibration during microtool fabrication on the tungsten
image of the hole is shown in Fig. 101. workpiece. Tools were fabricated with different operat-
Huaiqian et al. [184] performed micro-ECM with pure ing conditions to determine the significant impact of
water (PW) on SS material for aerospace application. A process variables. It was observed that quality micro-
combined machining method of PW and ultrasonic tools can be produced by controlling diffusion layer
vibration of the tool was proposed. Finally, different thickness through tool vibration. Qian et al. [188] used
microshapes and cavities were produced successfully. the auxiliary anode approach to minimize the lateral
Nguyen et al. [185] performed combined MEDEC to undercut and to improve the localization of the surface
enhance surface integrity and the accuracy of micro- texture. Simulation was performed to verify the current
parts. The combined reaction and discharge was distribution through the IEG and the effect of auxiliary
obtained by exploiting low-resistivity deionized water. anode was investigated experimentally. It was found
The performance of the system was compared with that the localization improved successfully. Rathod
micro-ED milling as shown in Fig. 102. Surface finish et al. [189] performed sidewall insulation by dip coating
of 22 nm was successfully obtained by the proposed on the microtool. The liquid solution was obtained by
technique. dissolving polymer and resin-based solution with isopro-
Wang [186] proposed vibratile tungsten wire approach pyl alcohol. Microfeatures such as hole and groove were
for the fabrication of high-AR microstructures. The formed on SS using the microtool with and without
insulation as shown in Fig. 104. The performance was
studied in terms of radial overcut and taper angle. It

FIGURE 99.—Image of fabricated microhelical tool (Tsui et al. [181]). FIGURE 101.—SEM image of microhole (Bhattacharyya et al. [183]).
 1328 S. P. LEO KUMAR ET AL.

FIGURE 102.—3D microcavities fabricated by (a) Micro-ED milling and (b) MEDEC milling (Nguyen et al. [185]).
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was observed that around 33.78% reduction of radial STATISTICAL ANALYSIS

overcut, 40.57
to 18
and 58.39
to 25.20
reduction Tool-based micromachining processes such as micro-
of taper angle for microhole and groove were attained turning, microdrilling, micro-end-milling, micro-EDM,
by the proposed method [189]. micro-ECM, and their related processes are considered
in this work for review. The research works carried
out in the past 10 years are identified in various aspects,
which include performance characteristics, experimental
analysis, process control, and product development. The
publications referred to in this article are mainly from
Taylor & Francis, Elsevier, and Springer publications.
Conference proceedings are not included in the analysis,
unless it has any significant nature. Articles with an
obvious spotlight on tool-based micromachining pro-
cesses alone were taken into account.
There are 11 review articles related to micromachining
since 2010 as shown in Table 2. Masuzawa [2] published
in CIRP annals in 2000. Pham et al. [81] performed a
review on micro-EDM recent development and research
issues in 2004, Mahendran et al. [96] in 2010, and Jahan
et al. [116] with respect to WC material in 2011. Cardoso
and Davim [50, 51] performed a review in terms of mate-
FIGURE 103.—High AR microgroove (Wang [186]). rials perspective for micro-end-milling in 2012. Robinson
and Jackson [6] in 2005 and Chae et al. [49] in 2006
performed a review in terms of materials. Petar et al. [4]
performed a review on micromachining since 1980–2010
and covered various aspects in terms of materials, tool
failures, number of publications, and so on, in 2014.
Sen and Shan [148] performed a review on electro-
chemical macro to microdrilling in 2005, Spieser and
Ivanov [147] addressed recent developments of micro-
ECM in 2013. The recent publication in 2013 focused
on micro-ECM process. It was observed that the pub-
lished review articles focused on a specific micromachin-
ing process in one aspect as on 2013. There has been no
comprehensive review on different tool-based microma-
chining processes in a range of aspects since 2013. The
total number of papers published under different micro-
machining areas is shown in Fig. 105. It was observed
that more research papers have been published in the
field of micro-EDM process and a limited number in
the field of microturning for the past 10 years. The num-
ber of papers published between 2003 and 2014 is shown
FIGURE 104.—Microtool (a) without insulation, (b) with sidewall insu- in Fig. 106. It was found that more number of papers
lation (Rathod et al. [189]). was published in 2009.
 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1329
TABLE 2.—Micromachining in previous review articles.

Author Title Journal Year

Masuzawa [2] State-of-the-art micromachining CIRP Annals 2000

Pham et al. [81] Micro-EDM—Recent Developments and Research Issues Journal of Material Processing Technology 2004
Robinson and Jackson [6] A Review of Micro and Nano Machining From a Materials Journal of Materials Processing Technology 2005
Perspective
Sen and Shan [148] A review of electrochemical macro- to micro-hole drilling International Journal of Machine Tools & 2005
processes Manufacture
Chae et al. [49] Investigation of Micro-Cutting Operations International Journal of Machine Tools & 2006
Manufacture
Mahendran et al. [96] A Review of Micro-EDM International Multi Conference of Engineers and 2010
Computer Scientists
Jahan et al. [116] A Review on The Conventional and Micro-Electro Discharge International Journal of Machine Tools & 2011
Machining of Tungsten Carbide Manufacture
Cardoso and Davim [50] A Brief Review on Micromachining of Materials Recent Advances in Material Sciences 2012
Cardoso and Davim [51] Micro Milling of Metallic Materials—A Brief overview Transactions of Famena 2012
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Spieser and Ivanov [147] Recent developments and research challenges in electrochemical International Journal of Advanced Manufacturing 2013
micromachining (mECM) Technology
Petar et al. [4] Micromachining—Review of literature from 1980 to 2010 Interdisciplinary Description of Complex Systems 2014

FUTURE TRENDS
The previous section may help predict the current
research status of tool-based micromachining processes
and it is a challenging task to do in any capacity. The
possible research direction for different micromachining
processes is discussed in this section. A considerable
amount of research work has been carried out in micro-
turning process. The published research works are
related to product development, machinability studies,
FEA, simulation, performance analysis, material
aspects, parameters optimization, size effects, and so
on Limited amount of research works has been con-
ducted in the field of product development, parameters
optimization, and process development. Energy con-
sumption is a challenging task in micromachining. Chip
morphology analysis is an important activity that affects
the finish surface quality. CF measurement during
FIGURE 105.—Percentage of papers published in different micromachining machining is also another important area that needs
processes. more research focus. Deflection of workpiece is the
major problem when developing high AR axis symmetry
parts. Surface finish is an important aspect; only few
works have addressed surface characteristics. Future
research direction can focus on the study of energy con-
sumption during machining and their optimization, chip
morphology analysis with respect to cutting condition,
CF prediction, and their effects on surface texture, sur-
face characteristics study, tool and work material inter-
action study, deflection study, tool life prediction and
their improvement, automation of part program gener-
ation during microturning process, and so on.
Microdrilling process resembles conventional drilling
with tight control of process parameters apart from
reduction in tool size <500 mm. A number of works have
been performed in the past due to its potential appli-
cation in the field of semiconductor, textile, and biome-
dical and medical implants. The published research
work focused on profile generation, burr formation
analysis, surface finish measurement, chip morphology
FIGURE 106.—Number of papers published between 2003 and 2014. analysis, effect of coating, tool wear analysis, parameter
 1330 S. P. LEO KUMAR ET AL.

optimization, product development, force analysis, Research work can be focused on the processing of com-
impact of lubrication, size effects, FEA, and so on. Tool posite materials and their performance analysis. Very
failure in the major problem associated with microdril- few works have been performed on hybrid processes to
ling due to excessive CF. Force prediction analysis can leverage their advantages; it can be focused in detail.
be focused to minimize tool failure. Few research works Power supply has a direct influence on dimensional
have addressed the effect of process conditions on com- accuracy and surface quality. More investigation on
posite materials, and further work needs to be carried pulsed power supply and their performance analysis
out. The effect of coolant on tool life improvement needs can be carried out. Comparison on processing of materi-
more research focus. Process conditions and their effects als with two or more micromachining processes can be
on hole characteristics need to be studied. Future focused to gain the manufacturing objectives. Die-
research direction may focus on CF prediction, study sinking is a typical micro-EDM process. Research work
lubrication effect, tool failure analysis and their on the development of microtools for die-sinking and
improvement, effect of coating on tool life improvement, their performance analysis can be carried out. Limited
hole characteristics, product development, HAZ and work has focused on material behavior analysis with
process analysis, parameters optimization, energy con- two different micromachining processes. Future research
sumption, and so on. direction can be focused on the mentioned vicinity for
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Micromilling has major applications in the field of their development.

microfluidic channels, microreactor, micropump, sur- Micro-ECM has the potential to fabricate microcom-
gery equipment, and so on. Several research works have ponents that are stress-free with the desired surface qual-
been carried out in the past few decades. The literature ity. The limitations of LIGA and micro-EDM process
addressed areas including tool life measurement, chip are resolved by the overture of micro-ECM. A quantum
formation analysis, CF prediction, size effects, perfor- of research works have been conducted on profile gener-
mance characteristics, temperature measurement, ation, performance characteristics study, process vari-
machinability studies, chatter prediction, condition ables, tools fabrication, microfeatures such as slot,
monitoring, SR analysis, and so on. Very limited works hole, groove generation, material aspects, and so on.
have been done related to product development, con- Considerable research works have addressed pulsed
dition monitoring, effect of coating on tool life improve- power supply and their influence on responses. How-
ment and their performance analysis lubrication, ever, the works need to be strengthened to deal with
machine tool development, and profile generation. Most the diversity of materials and their analysis. Hybrid pro-
of the work focused on invention of microchannels, but cess is discussed with minimum capability. Development
real-time application is widespread. Research can be of various hybrid processes, consideration of size effects,
focused on complex profile generation and its perfor- energy study, and electrolyte concentration can be
mance analysis. Very limited works have addressed CF focused. Most of the work was carried out with the
analysis; further investigation can be carried out. Burr SS304 material; various other materials including their
formation analysis has been performed by many composites can be studied in detail to discover the mate-
researchers and their focus has been on exit and entrance rials’ behavior. Micro-ECM includes different allied
burr formation. Various other burrs including top burr, processes. Research work can focus on capillary, jet, sin-
side burr, and their analysis can be focused in detail. gle-, and double-sided mask-type processes and their
Very few literatures have discussed the influence of behavioral analysis. Effect of dielectric fluid has been
lubrication on micromilling. Future research direction analyzed by a few research works and thus can be
can focus on the above areas by taking objectives and focused in detail.
process limitation into account. Process development, online micro=nano metrology,
Micro-EDM is one of the typical advanced micro- and machine tool development are the three areas that
machining processes that overcomes the limitations of need improvement [3]. The CAD=CAM system is a part
conventional tool-based micromachining processes. It of product development practice and it is independent of
can generate profiles and features that are impossible machining processes. Since numerous systems support
by conventional micromachining processes. Enormous the design process, the need of CAPP as a part of
amount of research works have been carried out related decision support activity is always important. In fact,
to micro-EDM and their allied processes. The published the integrated CAPP is not a desired option but a must.
works were related to profile generation, micromold, Ultraprecision micromachine tools can produce
performance characteristics, burr formation analysis, microparts with extreme accuracy but lacks in self-
process optimization, monitoring and control, cryogenic decision-making capability. Hence, expertise is always
treatment of tool, simulation, mathematical modeling, needed. Future research direction can focus on CAPP=
microfeatures, microtools, material aspects, and so on. CAM system development for micromachining
Future research direction can focus on size effect, energy processes.
consumption, analysis, dielectric fluid performance
analysis, process development, effect of electrode shape,
and so on. Micro-EDM can process any electrically con- CONCLUSION
ductive material regardless of its mechanical properties. In this work, effort has been made to perform a
Application of composite materials is widespread. review on tool-based micromachining processes such as
 CURRENT RESEARCH ASPECTS IN TOOL-BASED MICROMACHINING PROCESSES 1331

microdrilling, microturning, micromilling, and micro- 4. Petar, P.; Zdenka, K.; Miljenko, M. Micromachining—
EDM, micro-ECM, and their related processes. The review of literature from 1980 to 2010. Interdisciplinary
research works carried out in the past 10 years are ana- Description of Complex Systems 2014, 12 (1), 1–27.
lyzed in terms of materials perspective, performance 5. Jain, V.K. Introduction to micromachining, 1st ed.; Narosa
characteristics, size effects, modeling and analysis, pro- Publishing House Pvt. Ltd: New Delhi, India, 2011.
cess monitoring and control, profile generation, tools 6. Robinson, G.M.; Jackson, M.J. A review of micro and nano
fabrication, feature generation, and product develop- machining from a materials perspective. Journal of Materials
ment. Although some research works might have been Processing Technology 2005, 167, 316–337.
missed in this survey, maximum care has been taken to 7. Palani, S.; Natarajan, U.; Chellamalai, M. On-line predic-
include the majority of the published works. It is tion of micro-turning multi-response variables by machine
observed that an enormous amount of research works vision system using adaptive neuro-fuzzy inference system.
has been carried out focusing on micro-EDM and Machine Vision and Applications 2011, 24, 19–32.
micro-ECM-related processes. Apart from the general 8. Rahman, A.; Rahman, M.; Senthil Kumar, A.; Lim, H.S.
consideration, it was inferred that the future research CNC micro turning: an application to miniaturization.
direction includes chip morphological study, CF analy- International Journal of Machine Tools and Manufacture
sis, deflection study, surface characteristics study, and 2005, 45, 631–639.
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so on, for microturning process. Microdrilling research 9. Gaitonde, V.N.; Karnik, S.R.; Silva, L.R.; Abrão, A.M.;
can focus on tool failure analysis and their improve- Davim, J.P. Machinability study in micro turning of PA66
ment, burr formation, surface analysis, coating perfor- GF30 polyamide with a PCD tool. Materials and Manufac-
mance study, composite materials processing, and so turing Processes 2009, 24, 1290–1296.
on. Micromilling can be strengthened by burr formation 10. Rahman, A.; Rahman, M.; Senthil Kumar, A.; Lim, H.S.;
analysis, condition monitoring, force prediction, 3D Asad, A.B.M.A. Development of micro pin fabrication pro-
complex profile generation, and so on. Micro-EDM cess using tool based micromachining. International Journal
research can concentrate on hybrid process develop- of Advanced Manufacturing Technology 2006, 27, 939–944.
ment, die-sinking, wire-EDM process analysis, energy 11. Aly, M.F.; Ng, E.; Veldhuis, S.C.; Elbestawi, M.A.
consumption, HAZ analysis, and so on. Finally, Prediction of cutting forces in the micro-machining of silicon
micro-ECM research work can proceed further in power using a hybrid molecular dynamic-finite element analysis
supply, size effect, hybrid process development, product force model. International Journal of Machine Tools and
development, process improvement, hybrid processes Manufacture 2006, 46, 1727–1739.
optimization, and their related areas. Special focus can 12. Liu, K.; Melkote, S.N. Effect of plastic side flow on SR in
be given to microturning process, since overall the mini- micro-turning process. International Journal of Machine
mum number of research works has been done in this Tools and Manufacture 2006, 46, 1778–1785.
area in the past few years. Very few research works have 13. Nga, C.; Shreyes, N.M.; Rahman, M.; Senthil Kumar, A.
addressed the development of CAM system to speed up Experimental study of micro- and nano-scale cutting of
the development process. Future research direction can aluminum 7075-T6. International Journal of Machine Tools
focus on CAD=CAM system development for microma- and Manufacture 2006, 46, 929–936.
chining processes. 14. Egashira, K.; Iwata, M.; Nomura, Y. Boring and face
In the present study, conventional tool-based (micro- grooving using micro turning tools. CIRP Annals –
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Various other nonconventional micromachining and Processes 2011, 26 (12), 1481–1493.
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