ZERODUR® glass-ceramic
Dr. Ralf Jedamzik, Dr. Janina Krieg
© SCHOTT AG, 03/02/2022
Structure of glass-ceramics
Crystal Glass-Ceramics Glass
© SCHOTT AG, 03/02/2022
Structure of glass-ceramics
Macroscopically almost zero thermal expansion
Quantified by Coefficient of Thermal Expansion (CTE)
© SCHOTT AG, 03/02/2022
ZERODUR® glass-ceramics
Lithium-Aluminum-Silicate
Polycrystalline phase ~80 vol.-%
Mean length of crystallites 70-80 nm
100 nm
© SCHOTT AG, 03/02/2022
52 years of highest precision in six different industries
Astronomy Aviation IC Lithography
1968 1978 1996
Projects Industrialized
1972 1984 1998
https://microsites.schott.com/the-power-of-zerodur Metrology Space FPD Lithography
© SCHOTT AG, 03/02/2022
ZERODUR® development challenged by ambitious projects
Calar Alto METEOSAT VLT Chandra Aries LISA Pathfinder ELT
1968 1984 1996 1999 2009 2015 2017
4 m blank light weighting 8 m blank tube shape CTE < 5 ppb/K optical bench largest convex
© SCHOTT AG, 03/02/2022
ZERODUR® material production
Raw Material Melting Casting Hot Transport Annealing Raw Glass Ceramization CTE Metrology
Machining
© SCHOTT AG, 03/02/2022
ZERODUR® mirror substrate production
CNC Machining Metrology Technical Final Product Handling Packaging Shipping Application
Acceptance
© SCHOTT AG, 03/02/2022
Thermal expansion measurements
Design of SCHOTT’s dilatometer
Titanium-Silicate-
System
Furnace
Sample Pt-100
Measuring
head
Laser
interferometer
© SCHOTT AG, 03/02/2022
Sequence of thermal expansion measurements
1. Thermal expansion at two different temperatures 2. Calculation of Coefficient of Thermal Expansion (CTE)
dl/l value recorded
Thermal expansion (dl/l) [ppm]
50
T [°C]
CTE(0°C, 50°C) = 0.015 ppm/K
0
time
20 min 20 min 20 min
T [°C]
© SCHOTT AG, 03/02/2022
The CTE of ZERODUR® is measured with a push rod dilatometer:
High accuracy, small downtime
optimized for CTE (0°C,50°C): measurement at 0°C and
50°C (holding time 20 minutes and cooling rate of 36K/h)
sample size 100 x 6 x 6 mm
Standard: inductive coil measurement head
Improved: Interferometric measurement head
Advanced: Linear Heidenhain encoder, monolithic setup
Accuracy Reproducibility (95%)
CTE(0°C, 50°C)
[ppb/K] [ppb/K]
Standard Design of improved dilatometer
± 10 ±5
Dilatometer
Improved
± 6.2 ± 1.2
Dilatometer
Advanced
±3 ±1
Dilatometer
© SCHOTT AG, 03/02/2022
Reproducibility of CTE(0°C,50°C) measurements
Results reference sample measurements
CTE deviation from mean [ppb/K]
Weekly measurements
Reproducibility of < 1 ppb/K in 280 days
95% confidence interval
Time [days]
© SCHOTT AG, 03/02/2022 R. Jedamzik, R. Müller, P. Hartmann, “Homogeneity of the linear thermal expansion coefficient
of ZERODUR® measured with improved accuracy”, Proc. SPIE Vol. 6273 (2006)
Definition of CTE grades
100
ZERODUR® CTE Grades CTE(0°C, 50°C)
Expansion Class 2 ± 100 ppb/K
CTE Tolerance [ppb/K]
50 100
Expansion Class 1 ± 50 ppb/K
50
Expansion Class 0 ± 20 ppb/K 20 10 7
0
-20 -10 -7
Expansion Class 0 SPECIAL ± 10 ppb/K -50
Expansion Class 0 EXTREME ± 7 ppb/K -50 -100
Expansion Class ???
-100
EC 2 EC 1 EC 0 SPECIAL EXTREME
© SCHOTT AG, 03/02/2022
ZERODUR® is characterized by the Coefficient of Thermal Expansion
Thermal expansion for various samples Coefficient of thermal expansion CTE
6
CTE(0,50) = +0.021 ppm/K
5 CTE(0,50) = +0.010 ppm/K
CTE(0,50) = -0.003 ppm/K
CTE [ppm/K]
CTE(0,50) = -0.019 ppm/K
4
[ppm]
dl/ldl/l[ppm]
-1
-50 -40 -30 -20 -10 0 10 20 30 40 50
TT [°C]
[°C] T [°C]
© SCHOTT AG, 03/02/2022
What if a specific application temperature range is needed?
Temperature profile
Extremely Large Telescope on Cerro Armazones, Chile
Temperature [°C]
Time [h]
Image: ESO
© SCHOTT AG, 03/02/2022
What if a specific application temperature range is needed?
Temperature profile
Extremely Large Telescope on Cerro Armazones, Chile
Length change (∆l/l) [ppm]
Temperature [°C]
SPECIAL
Time [h]
Image: ESO
© SCHOTT AG, 03/02/2022
Modelling of the thermal expansion
CTE at a specific temperature CTE is measured as a function of temperature
CTE(0°C, 50°C) ≠ CTE (T)
Thermal expansion (dl/l) [ppm]
CTE [ppm/K]
CTE(T)
CTE(0°C, 50°C
T [°C] T [°C]
© SCHOTT AG, 03/02/2022
Modelling of the thermal expansion
1. Batch material parameters 3. Modelling thermal expansion dl/l(t)
Modell
2. Application temperature profile
T
12
11
10
T [°C]
0 2000 4000 6000 8000
t [min]
© SCHOTT AG, 03/02/2022
Modelling of the thermal expansion
1. Batch material parameters 3. Modelling thermal expansion dl/l(t)
0,05
dl/l
0,04 slope: +0.0025 ppm/K
0,03
0,02
0,01
dl/l [ppm]
0,00
Modell
-0,01
2. Application temperature profile -0,02
T -0,03
12
-0,04
11
-0,05
10 6 7 8 9 10 11 12
T [°C]
9 T [°C]
8
0 2000 4000 6000 8000
t [min]
© SCHOTT AG, 03/02/2022
ZERODUR® TAILORED
Temperature profile
Extremely Large Telescope on Cerro Armazones, Chile
Length change (∆l/l) [ppm]
Temperature [°C]
SPECIAL
Time [h]
Image: ESO
© SCHOTT AG, 03/02/2022
ZERODUR® TAILORED
Temperature profile
Extremely Large Telescope on Cerro Armazones, Chile
Length change (∆l/l) [ppm]
Temperature [°C]
TAILORED
SPECIAL
Time [h]
Image: ESO
© SCHOTT AG, 03/02/2022
Expansion classes
ZERODUR® CTE Grades CTE(0°C, 50°C)
Expansion Class 2 ± 100 ppb/K
Expansion Class 1 ± 50 ppb/K CTE (T, dT/dt)
Expansion Class 0 ± 20 ppb/K
Expansion Class 0 SPECIAL ± 10 ppb/K
Expansion Class 0 EXTREME ± 7 ppb/K
Optimized* for
Expansion Class TAILORED
application T-profile CTE(0°C, 50°C)
*ZERODUR® TAILORED accuracy of +/- 5 ppb/K achievable
Is there even more?
© SCHOTT AG, 03/02/2022
ZERODUR® TAILORED CRYO: optimized for low T
Thermal expansion with temperature Coefficient of thermal expansion CTE
0,3
80
0,2
70
ZERODUR Sample 1 0,1
60 ZERODUR Sample 2
ZERODUR TAILORED CRYO 0,0
50
-0,1
dl/l [ppm]
40
CTE [ppm/K]
-0,2
30 -0,3
20 -0,4
ZERODUR sample 1
10 -0,5 ZERODUR sample 2
ZERODUR TAILORED CRYO
0 -0,6
-10 -0,7
-20 -0,8
0 50 100 150 200 250 300 0 50 100 150 200 250 300
T [K] T [K]
© SCHOTT AG, 03/02/2022 * ZERODUR® sample 1, sample 2 and TAILORED CRYO measured by the PTB
(Physikalisch Technische Bundesanstalt, national standardization laboratory 2013/2014)
Expansion classes
ZERODUR® CTE Grades CTE(0°C, 50°C)
Expansion Class 2 ± 100 ppb/K
Expansion Class 1 ± 50 ppb/K
Expansion Class 0 ± 20 ppb/K
Expansion Class 0 SPECIAL ± 10 ppb/K
Expansion Class 0 EXTREME ± 7 ppb/K
Optimized for
Expansion Class TAILORED
application T-profile
Optimized for low T
Expansion Class TAILORED CRYO
applications
© SCHOTT AG, 03/02/2022
The CTE of ZERODUR® is measured with a push rod dilatometer:
High accuracy, small downtime
optimized for CTE (0°C,50°C): measurement at 0°C and
50°C (holding time 20 minutes and cooling rate of 36K/h)
sample size 100 x 6 x 6 mm
Standard: inductive coil measurement head
Improved: Interferometric measurement head
Advanced: Linear Heidenhain encoder, monolithic setup
Accuracy Reproducibility (95%)
CTE(0°C, 50°C)
[ppb/K] [ppb/K]
Standard Design of improved dilatometer
± 10 ±5
Dilatometer
Improved
± 6.2 ± 1.2
Dilatometer
Advanced
±3 ±1
Dilatometer
© SCHOTT AG, 03/02/2022
ZERODUR® TAILORED
The CTE homogeneity is estimated from CTE measurement
of samples cut at the outer circumferential area of the blank
All CTE homogeneity evaluations
are based on CTE (0°C, 50°C)
measurements.
The CTE homogeneity is the
peak to valley (pv) CTE variation
of the samples measured.
Typically between 4 to 24
samples are taken for orders
evenly distributed around a blank
or near a center hole.
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021
ZERODUR® TAILORED
25 years of excellent ZERODUR® CTE homogeneity:
Refinement of production process and improvement of CTE metrology
Dimensions of Mirror Number of samples CTE homogeneity CTE homogeneity
Project Dilatometer Completed
Blank [mm] per blank [ppb/K] specification [ppb/K]
4 blanks
VLT 122 50 < 28 Standard 1996
dia. 8200 x 177
43 segments
Keck I 1990
dia. 1900 x 76,5
18 20 21 (22% < 10) Standard
42 segments
Keck II 1993
dia. 1900 x 75,8
96 hexagons
HET 4 samples per casting 10 < 13 (85% < 10) Standard 1995
width 1019 x 56
GTC 42 hexagons
12 20 < 20 (60% < 10) Standard 2002
width 1622 x 83,5
VISTA dia. 4100 x 171 18 20 18 Standard 2003
SST dia. 3610 x 370 12 30 25 Standard 2005
ARIES dia. 3700 x 163 36 40 9 Improved 2009
Finnland dia. 3400 x 180 12 30 5 Improved 2010
DKIST dia. 4250 x 350 16 40 3 Improved 2014
IOE dia. 4060 x 103 16 20 7 Improved 2016
DAG dia. 4000 x 100 12 20 4 Advanced 2016
ELT M2 dia. 4250 x 100 16 20 5 Advanced 2019
ELT M3 dia. 4000 x 100 16 20 4 Advanced 2019
798 segments
ELT M1 6 10 <7 Advanced 2024
dia. 1520 x 50
10 ppb/K = 0.010*10-6 K-1 Ralf Jedamzik, Thomas Westerhoff, “Homogeneity of the coefficient of linear thermal expansion of ZERODUR: a review of a
decade of evaluations“, Proc. SPIE Vol. 10401 (2017)
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021
The CTE homogeneity on blanks 1.5 m in diameter was determined by
cutting about 90 samples per blank.
Ralf Jedamzik, Peter Hartmann, Thomas Westerhoff,
„CTE homogeneity of ZERODUR® in the ELT century”,
Proc. SPIE. 11451 (2020)
© SCHOTT AG, 03/02/2022
ZERODUR® CTE Homogeneity on 1.5 m blanks has repeatedly been
determined in the single digit ppb / K level.
Blank 1 2006 Blank 2 2008 Blank 3 2019
blank 3, measurement from 2019
DCTE [ppb/K]
1,5
3,0
0,75
600 2,6
2,3
400 1,9
1,5 1,5
1,5 0,75
0,0
1,1
200
0,75
0,38
y [mm]
0,75 -2,3
-0,75 -1,5
0 0,0
-0,75 -0,38
0,75
1,5 -0,75
-200
-0,75 -1,1
2,3 1,5 -0,75
-1,5
-0,75
-400 0,750,0 -1,9
0,0 -2,3
-2,6
-600
-1,5 -0,75 -3,0
-600 -400 -200 0 200 400 600
x [mm]
CTE Homogeneity: 6.4 ppb/K CTE Homogeneity: 3.8 ppb/K CTE Homogeneity: 5.3 ppb/K
Ralf Jedamzik, Peter Hartmann, Thomas Westerhoff,
10 ppb/K = 0.010*10-6 K-1 „CTE homogeneity of ZERODUR® in the ELT century”, Proc. SPIE. 11451 (2020)
© SCHOTT AG, 03/02/2022
Very high CTE homogeneity for large rectangular castings: 5 ppb/K pv
Two dimensional contour plot of CTE data
measured with the Improved Dilatometer
64 samples, 1.2 m x 1.2 m casting
R. Jedamzik, C. Kunisch, J. Nieder, T. Westerhoff, “Glass ceramic ZERODUR enabling nanometer precision“,
Proc. SPIE Vol. 9052 (2014)
© SCHOTT AG, 03/02/2022
Small scale CTE Homogeneity of a ZERODUR® cube: 1.3 ppb/K pv !
100mm x 100mm x 100 mm 100 samples cut in a 10 x 10 matrix
Ralf Jedamzik, Thomas Westerhoff, “Homogeneity of the coefficient of linear thermal expansion of ZERODUR: a review of a decade of evaluations“,
Proc. SPIE Vol. 10401 (2017)
© SCHOTT AG, 03/02/2022
ESO’s ELT mirrors M1 to M4 ZERODUR®
are made from ZERODUR® –
CTE Homogeneity
in serial production
ZERODUR®
ZERODUR®
ZERODUR®
© SCHOTT AG, 03/02/2022
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021
A homogeneity statistic on 90 ELT M1 blanks
shows single ppb/K CTE homogeneity
goal
Ralf Jedamzik, Peter Hartmann, Thomas Westerhoff,
„CTE homogeneity of ZERODUR® in the ELT century”, Proc. SPIE. 11451 (2020)
© SCHOTT AG, 03/02/2022
Single digit pv CTE homogeneity for 4m class blanks
© SCHOTT AG, 03/02/2022 34
Single digit pv CTE homogeneity for 4m class blanks
CTE CTE CTE
operational homogeneity axial gradient
[ppb/K] [ppb/K] [ppb/K]
ELT M2 -8 5 0.9
ELT M3 + 27 4 - 0.1
ESO ELT M2 and M3 with single ppb/K CTE homogeneity
© SCHOTT AG, 03/02/2022 35
ZERODUR® is machinable into various shapes and structures
Dimensions: 10 mm – 4500 mm
Mirror substrates
Optical benches
Laser cavities
© SCHOTT AG, 03/02/2022
ZERODUR® large curved surface processing
Radii & aspheres
Free-form surfaces
Up to 4.5 m
© SCHOTT AG, 03/02/2022
ZERODUR® complex light-weighting
Substrates up to 4.5m
Various light-weighting designs
Up to ~90% mass reduction
© SCHOTT AG, 03/02/2022
Significant investments in capacity & capabilities
Manufacturing Center since 2019 Large 3D CMM ZEISS MMZ-G since 2020
Area ~ 5.000 m² Room T stabilized to: max. 0.3 K/day
T stabilization ± 1K Maximum measurement range: 5 m x 6 m x 2 m
Controlled environment: vibration, temperature Archived accuracy: < 2.0 µm + L/2000 mm
Up to 14 CNC machines (< 4.5 m diameter)
© SCHOTT AG, 03/02/2022
Metrology for large workpieces
Accredited by national standards Large 3D CMM ZEISS MMZ-G since 2020
12 E0,MPE = 4,0 +L/350
(given specification)
8
Deviation P-V in µm
0
800 1600 2400
-4
-8
E0,MPE = 2,0 +L/2000
(actual accuarcy incl. uncertainty)
-12
Length in mm
Room T stabilized to: max. 0.3 K/day
Maximum measurement range: 5 m x 6 m x 2 m
Archived accuracy: < 2.0 µm + L/2000 mm
© SCHOTT AG, 03/02/2022
Tight front figure tolerances
Front Figure PV [µm]
80
4250 mm LASER TRACKER Measurement
70 Length measurement error:
15 µm + 6 * L/1000 (L in mm)
60
50
40
2560 mm 2700 mm 4250 mm 3D CMM Measurement expectation
30 Length measurement error:
2200 mm
3050 mm 4 µm + L/350 (L in mm)
20 935 mm
1500 mm
10
670 mm
376 mm
0
500 1.000 1.500 2.000 2.500 3.000 3.500 4.000 4.500
Diameter [mm]
© SCHOTT AG, 03/02/2022
Dimensions for light-weight structures
240 mm
200 mm
Pocket depth
125 mm
60 mm
300 m 700 mm 1200 mm 2500 mm
Diameter
© SCHOTT AG, 03/02/2022
Space-ready mirror substrates
Diameter: 1200 mm
Edge Thickness: 125 mm
Rib thickness: 2 mm
Light weighting factor: 88 %
Face sheet thickness: 8 mm
Weight: 45 kg
First Eigenfrequency: > 200 Hz
Front figure tolerance: < 15 µm
Passed thermal test confirming
NASA Technical Readiness Level (TRL) 6
© SCHOTT AG, 03/02/2022
Grinding generates micro cracks, called Sub-Surface Damage (SSD)
Diamond grains
Wheel
movement
FEPA (Federation of European Producers of Abrasives)
Diamond Standard Mesh width µm
coarse
D151 150 – 125
Lateral crack (Material removal)
D64 63 – 53
Vertical crack (SSD)
D46 45 – 38
D35 40 – 32
D25 30 – 20 fine
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021 44
Q: When does glass break?
A: When tensile stress can grow micro cracks strongly in short time.
Tensile Stress
Roughness
Range: Rz ~20 µm
50 µm
Micro cracks in ZERODUR® from
grinding with bonded diamond grains
D151 with maximum size of 150 µm
Bending strength of a component depends on the local maximum depth of the micro cracks.
For homogeneously ground surfaces there is a global maximum crack depth.
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021 45
The sub-surface damage depth dependence on the grain size and
tool/grinding geometry: Maximum SSD ~ Tool grain size
4
D151 wheel
Frequency [%]
Maximum SSD
wheel grinding
0
0 20 40 60 80 100 120 140 160 180 200
SSD [µm]
SSD depth strongly depends on the grinding parameters.
The results presented based on SCHOTT’s processes !
© SCHOTT AG, 03/02/2022
Precision grinding of mirror front figures down to < 15 µm minimizing
sub-surface damage is significantly reducing polishing time.
Aspherical mirror surface figure deviation of < 15 µm
achieved by CNC grinding on a 600 mm diameter
ZERODUR® blank and D25 grain (< 10-15 µm SSD).
Thomas Westerhoff, Thomas Werner, “Advances in ZERODUR manufacturing for space and ground based telescopes”
Proc. SPIE Vol. 10706- 25 (2018)
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021
Statistical Approach: Breakage test on 100 x 100 x 6 mm samples
Stress increases with constant rate Area tested: 2.54 cm2
until breakage occurs Stress increase: 2 MPa/s
σ = σr t
Specimen Load ring
Load Ring
Ø 18
Ø 90 Support
Ring on Ring Setup
Support ring Ring
acc. EN 1288-5 R 45
Sample sets between 50 to 150 samples
Homogeneous and isotropic tensile stress field within the load ring area
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021 48
With ground surfaces a bending strength of larger 40 MPa can be
achieved for short term loads
SiC320
SiC600
D151
D64
D46
D35
D25
Threshold breakage stress values for coarse D151 high SSD
ground surfaces extend from
Increasing strength
47 MPa to 69 MPa D64
for maximum grain sizes
between 20 µm and 150 µm D46
SiC320
D35
D25
fine SiC600 low SSD
How to further increase the strength?
But this is short time strength
for < 1 minute
20 30 40 50 60 70 80 90 Peter Hartmann, “Minimum lifetime of ZERODUR® structures based on the breakage
stress threshold model: a review
(OPEN ACCESS)”, Optical Engineering Vol. 58, Issue 2 (2019)
© SCHOTT AG, Academy of Optics, Dr. Janina Krieg, Dr. Ralf Jedamzik 10/03/2021 49
Acid etching increases the strength to values above 100 MPa
E181 = 181µm acid etching
Peter Hartmann, “Minimum lifetime of ZERODUR® structures based on the breakage
stress threshold model: a review
(OPEN ACCESS)”, Optical Engineering Vol. 58, Issue 2 (2019)
© SCHOTT AG, 03/02/2022
ZERODUR® components lifetime prediction based on 3-parameter
Weibull Statistic and stress corrosion coefficient
Peter Hartmann, "Minimum lifetime of
ZERODUR® structures based on the
breakage stress threshold model: a
review," Opt. Eng. 58(2) 020902 (9
February 2019)
© SCHOTT AG, 03/02/2022
ZERODUR® based components enable wafer-stepper for the production
of high performance computer chips for the digital age.
Length: 460 mm
Width: 420 mm
Thickness: 60 mm
Smartphone Data Center
Reticle Stage
Length: 450 mm
Width: 450 mm
Thickness: 80 mm
Wafer Stage IC Lithography Wafer Stepper Gaming 5G Network
Wafer diameter: 300 mm
Length: 850 mm
Scans / hour:
Width: 830 mm 26400
Thickness: 65 mm
Position accuracy: < 1.6 nm*
Alignment system Line distance: 10 – 20 nm Autonomous Driving Artificial Intelligence
* Nanometer = 10-9 m, equivalent to 1/50.000 diameter of a human hair
© SCHOTT AG, Dr. Janina Krieg, April 9th 2019
52
Today, 95% of Flat Panel Displays are produced with ZERODUR®
involved as crucial part of FPD Lithography process.
Television Smartphone
Diameter: 1500 mm
Thickness: 348 mm
Weight: 1200 kg
Mirror
Public Display Virtual Reality
Flat Panel Display Mask aligner
Length: 1100 mm
Width: 950 mm Glass sheet size: 2700 x 2300 mm2
Thickness: 480 mm
Scans / hour: 60 – 70
Weight: 700 kg
Position accuracy: ~ 500 nm*
Prism Line distance: 1500 nm
Automotive Smart Watch
* Nanometer = 10-9 m, equivalent to 1/50.000 diameter of a human hair
© SCHOTT AG, Dr. Janina Krieg, April 9th 2019
53
ZERODUR® allows for nanometer precision in mechanical engineering
and optics production metrology.
Length: 1800 – 3200 mm
Width: 75 – 150 mm
Thickness: 4 – 75 mm Mechanical Engineering 3D Metrology
Long bars
Length Scale
Flat Panel Display Prod. Computer Chip Prod.
Diameter: 150 – 800 mm
Thickness: 30 – 80 mm
Round blanks Interferometer Optical Metrology Material Metrology
© SCHOTT AG, Dr. Janina Krieg, April 9th 2019
54
ZERODUR® is designed into high-end and tactical Ring Laser Gyroscopes (RLG)
in Inertial Navigation Systems for various applications.
Ring Laser Gyroscope Inertial Navigation System
Commercial Defense
Space Drones
Mirror Prism
Emerging markets
Body
Autonomous Driving Robotic Ships
90-25 mm
© SCHOTT AG, Dr. Janina Krieg, April 9th 2019
ZERODUR® material properties enable highest optical performance for
space borne telescopes and earth observation.
Primary
Mirror
Secondary
Tertiary Mirror
Mirror
Diameter: 1200 mm Band pass filter and CCD Weather Astronomy
Thickness: 125 mm camera
Optical System for Satellite
Light weighted mirror
Surveillance Disaster Monitoring
Diameter: 700 mm
Thickness: 78 mm
Light weighted mirror Earth Observation Satellite Environmental Monitoring Optical Data Link
© SCHOTT AG, Dr. Janina Krieg, April 9th 2019
56
ZERODUR® is considered as the material of choice for monolithic and
segmented solar and astronomical telescope mirrors.
Diameter: 4260 mm DKIST 4.25 m, Hawaii KECK 2 x 10 m, Hawaii
Thickness: 80 mm
Daniel K. Inue Telescope
(DKIST) mirror substrate Monolithic Telescopes
ARIES 3.6 m, India GTC, 10.4 m, Canary Esp
Diameter: 1450 mm
Thickness: 50 mm
Segmented Telescopes VLT* 8.2 m, Chile ELT*, 39 m, Chile
*VLT: Very Large Telescope, ELT: Extremely Large Telescope; Monolithic Telescopes Segmented Telescopes
© SCHOTT AG, Dr. Janina Krieg, April 9th 2019
57