MEASUREMENT

APPLICATION
GUIDE
For HEIGHT/
STEP/FLATNESS
Measurement

INDEX
y Selection Guide·· ················································· P.2
y Measurement Principles········································ P.3 to 4
y Height and Flatness Measurement·························· P.5
y Height Measurement using a Thrubeam Type
Measuring Instrument·· ········································· P.5
y Step Measurement Using Multiple Sensors·· ·············· P.6
y Step Measurement with a 2D Sensor······················· P.7
y Step Measurement by Moving a Workpiece or Sensor·· P.7
 HEIGHT/STEP/FL ATNESS MEASUREMENT

HEIGHT/STEP/FL ATNESS
MEASUREMENT METHOD Selection Guide

 Measuring the height and variation at the specific point

Height and Flatness Measurement

Varia tio n
 P. 5
Recommended Products
 LK-G Series
 LT-9000 Series
Measuring film deflection
* Refer to P. 3 for the measurement principles.

Diameter: 21000 µm
Lens
Height Measurement using a Thrubeam
H eight height: Type Measuring Instrument
2000 µm
 P. 5

Distance: 12000 µm Recommended Products

 LS Series
Measuring lens height
* Refer to P. 4 for the measurement principles.

 Measuring the step height

Step Measurement Using Multiple Sensors

St e p h eight
m e asure m e nt usin g  P. 6
multip l e d evic e s Recommended Products
 LK-G Series
 LT-9000 Series
Measuring the step of a
* Refer to P. 3 for the measurement principles.
mechanical chassis

Step Measurement with a 2D Sensor

St e p h eight
m e asure m e nt wit h  P. 7
a sin gl e d evic e Recommended Products
 LJ Series
 LT-9000 Series
Measuring the edge curl in
* Refer to P. 3 for the measurement principles.
wound film

Step Measurement by Moving a

Workpiece or Sensor
 P. 7
Recommended Products
 LK-G Series
Measuring the thickness of  LT-9000 Series
glass plates
* Refer to P. 3 for the measurement principles.

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 HEIGHT/STEP/FL ATNESS MEASUREMENT

MEASUREMENT PRINCIPLES

LK-G Series Measurement Principle (Triangulation type) HIGH-SPEED WIDE RANGE 12 SENSOR HEADS CONNECTION

At the reference distance At a short distance At a long distance

Semiconductor Light-receiving Semiconductor Light-receiving Semiconductor Light-receiving

laser element laser element laser element

Transmitter Transmitter Transmitter

lens lens lens

Ernostar Ernostar Ernostar

lens lens lens

Light-receiving Light-receiving Light-receiving

element element element

The semiconductor laser emits the laser beam to the target as shown above. The light reflected off the target is focused by the
ernostar lens and forms an image on the light-receiving element. The position of the beam spot on the receiving element varies
with the distance to the target. This variation is evaluated and converted into a measurement of target position.

LJ Series Measurement Principle (2D triangulation type) 2D 3D MULTI POINT HIGH-SPEED

Cylindrical lens Semiconductor laser
GP64-Processors

2D triangulation type
The laser light is projected in a horizontal line by
the cylindrical lens and diffusely reflects on the target
object.
This reflected light is formed on the HSE3-CMOS and by
detecting changes in position and shape, displacement
and shapes are measured.

2D Ernostar lens HSE3-CMOS

LT-9000 Series Measurement Principle (Confocal type) CLEAR TARGET THICKNESS HIGH-ACCURACY

High-accuracy measurement method uses the confocal principle

The laser beam is focused on the target surface through an objective lens that vibrates up and down at high speed by means of
a tuning fork. The beam reflected off the target surface is converged on a pinhole and then enters the light-receiving element. By
measuring the exact position of the objective lens at the moment of receiving the light, the sensor measures the distance to the
target surface accurately without being affected by the material, colour, or angle of the target.

When the focal point is not When the focal point is

on the target surface on the target surface

Semiconductor Semiconductor
laser laser

Light-receiving Light-receiving
element element
Pinhole The received Pinhole The received
light intensity light intensity is
Tuning fork Tuning fork
is low. high.

Sensor Sensor

A small amount of received light All of the received light passes

passes through the pinhole. through the pinhole.

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 HEIGHT/STEP/FL ATNESS MEASUREMENT

MEASUREMENT PRINCIPLES

LS-9000 Series Measurement Principle (Thrubeam type) NEW METHOD LONG LIFE HIGH-ACCURACY HIGH-SPEED

[Principle] Green-LED light is emitted as a uniform collimated

beam. The CMOS detects the position of the edge between
light and dark edges of the received light and calculates
measured values.
13.3 times
than convenfaster
Fastest in its class tion
systems al

16000 Hz
sampling rate

High performance High-intensity Fitted with a high-speed exposure CMOS and

condenser Green-LED
high-intensity Green-LED to produce a 16000 Hz
Monitor CMOS Target Position CMOS High-speed exposure CMOS Lens unit efficiently High-intensity Green LED lasts
The Monitor CMOS tracks The CMOS measures Proprietary designed measurement focuses LED light longer than traditional LED
sampling rate, far outstripping previous systems.
workpiece inclination to the position between the CMOS features an integrated light sources while providing Improves production line cycle times and ensures
automatically correct for transmitter and receiver amplifier to maximise performance high intensity and evenly-
tilt errors. and speed. distributed lighting.
more stable measurement.

POINT L S-90 0 0 Series ensures long life due t o its no moving par t design.
The LS-9000 Series has solved
the problem of motor durability
that has been a disadvantage of
the laser scanning method.

Semiconductor laser

No moving parts used!

A moving part (motor) is used!
High-intensity GaN Green LED

TM Series Measurement Principle (2D thrubeam type) 2D HIGH-ACCURACY MULTI POINT

Dual telecentric optical system

Dual telecentric lenses ensure only collimated
Uniform collimated lighting with a green LED. Two-dimensional
light is used for imaging. Even though the distance CMOS array detects the light-dark edges in the received light,
from the object to the lenses change, the size of
the image on the CMOS does not change. and measures the dimensions.
High precision measurement is possible.

Even with slight deviations of the

object within the measurement
area, the size of the image does
not change.

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 HEIGHT/STEP/FL ATNESS MEASUREMENT

HEIGHT AND FL ATNESS Height and Flatness Measurement

The height and variation at the specific point are measured. It is

Measurement method also possible to measure the amount of displacement deviation
from a masterwork piece.

POINT M e a s u r e m e n t a c c u r a c y r e l i e s o n l i n e a r i t y. Linearity

Actual measurement value

Linearity Actual measurement
value
The laser displacement sensor measures the amount of displacement, but the actual measurement value slightly
deviates from an ideal line. Linearity is the amount of the deviation from the ideal line.
[Example] If the condition is linearity ± 0.1% of F.S. (F.S. = measurement range) and measurement range ± 5 mm,
the linearity of laser displacement sensor is ±10 μm.
Ideal line
Linearity: ±0.1% x 10 mm = ±10 μm
That means the measuring instrument with better linearity can ensure higher-accuracy measurement. Distance

SELECTION
POINT Applications

Resolution Sampling rate Measurement range

HIGH FAST BROAD

LT-9000 Series LK-G Series LK-G Series

LK-G Series
LT-9000 Series LT-9000 Series Measuring the deflection
of a rubber sheet

LOW SLOW NARROW

Measuring the height of a

bottle cap

HEIGHT AND LEVEL

MEASUREMENT Height Measurement using a Thrubeam Type Measuring Instrument

Measurement method Applications

With a thrubeam type, a desired section can be measured based on the shadow of a target. Diameter 21.000

The TM Series 2D Measurement Sensor allows measurement of not only height but also various sections
such as pitch, width, angles and radius.
Convex height 2.000
Distance 12.000

Position correction function [edge correction/pattern correction]

POINT Measures diameter/height of lenses
Automatically corrects misalignments and tilt of the target which is directly linked to
measurement errors. Can measure accurately even when positioning is difficult or objects
are conveyed in random orientations. Outer thread height
14.000

Neck ring
height 26.000
Master image Measured image Outer thread
diameter
26.500

Position
Outer diameter correction area Outer
Position Measures outer diameter and
measurement area diameter
correction area
measurement threads on a PET bottle
Correction area after
correction

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 HEIGHT/STEP/FL ATNESS MEASUREMENT

STEP Step Measurement Using Multiple Sensors

Height of the step is referred to as "L". One of the two

Measurement method measuring instruments measures the distance X and
the other the distance Y. The step "L" is obtained by
calculating X-Y.

Height L = X-Y

POINT Fr e e f r o m i n f l u e n c e o f u p - a n d - d o w n m o v e m e n t
The value obtained from X-Y does not fluctuate even the workpiece and surface move up and down.

Stable measurement via synchronous sampling

Without synchronous sampling, the value obtained from X-Y fluctuates when the workpiece moves up and down. Synchronous
measurement by the controller ensures the stable measurement.

SELECTION
POINT

Synchronous
Resolution Sampling rate sampling
HIGH FAST AVAILABLE

LK-G Series LK-G Series

LT-9000 Series

LK-G Series LT-9000 Series

LT-9000 Series
LOW SLOW UNAVAILABLE

Applications

Measuring the step on a Measuring silicon wafer Measuring glass flatness

mechanical chassis parallelism

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 HEIGHT/STEP/FL ATNESS MEASUREMENT

STEP Step Measurement with a 2D Sensor

The distance between the two levels (step) at the specific point is measured based on
Measurement method the obtained target profile.

POINT Stable measurement using slant correction

If the workpiece is slanted, the actual heights to be measured vary, resulting in
measurement errors. The slant correction function detects and automatically corrects
the slant of workpiece, which enables stable measurement of the target step.

SELECTION
POINT The advantages of each series are shown below for your selection reference.

Repeatability Applicable range Fine measurement

HIGH BROAD LARGE

LT-9000 Series LT-9000 Series

LJ Series

LJ Series LJ Series
LT-9000 Series

LOW NARROW SMALL

Applications

Measuring the height of ICs on a Measuring BGA height

circuit board

STEP Step Measurement by Moving a Workpiece or Sensor

The measurement value without the workpiece at the

Measurement method reference point is referred to as "X". The measurement
value at movement of workpiece or sensor is referred to
as "Y". The step of workpiece is obtained by calculating
X-Y.

Height L = X-Y

POINT M e a s u r e m e n t a c c u r a c y r e l i e s o n l i n e a r i t y.
Linearity
Linearity
Actual measurement value

The laser displacement sensor measures the amount of displacement, but the actual measurement value slightly Actual measurement
value
deviates from the ideal line. Linearity is the amount of the deviation from the ideal line.
[Example] If the condition is linearity ± 0.1% of F.S. (F.S. = measurement range) and measurement range ± 5 mm,
the linearity of laser displacement sensor is ±10 μm.
Linearity: ±0.1% x 10 mm = ±10 μm
Ideal line
That means the measuring instrument with better linearity can ensure higher-accuracy measurement.
Distance
* The mechanical accuracy in the structure to move the workpiece or sensor head affects the measurement errors.

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DISPLACEMENT METER/DIMENSION MEASUREMENT SYSTEM LINEUP
Reflective-Type Measurement Instrument
High-Speed, High-Accuracy High-speed 2D/3D Laser Scanner
CMOS Laser Displacement Sensor LJ-V7000 Series
LK-G5000 Series

HIGH-SPEED 2D/3D

WIDE RANGE MULTI POINT

12 SENSOR HEADS CONNECTION HIGH-SPEED

PROFILES

Surface Scanning Laser Confocal

Displacement Meter
LT-9000 Series

HIGH-ACCURACY

DOUBLE-SCANNING

CLEAR TARGET THICKNESS

Thrubeam-Type Measurement Instrument

High-speed Optical Micrometer High-speed 2D Measurement Sensor
LS-9000 Series TM Series

2D
GREEN LED
MULTI POINT
LONG LIFE

HIGH-ACCURACY

HIGH-SPEED

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