EP 1913003

M.chandra has .

White
Light Interferometer .

Aim : To measure the

step height of a. thin
film
Using Michelson
Interferometer and calculate
calibration constant
the
of linear
stage using
He -
Ne laser .

Apparatus Monochromatic thin film

light
: source , ,

white substrate
light source , .
Beam

splitter >
Analysis software ,
Michelson
objective .

Theory
:

is measurement
Coherence : It the
of
-

definite phase relationship source which

radiation
emits a
particular frequency of .

There are 2
types :

spatial coherence : It describes the

ability for two
points
in
space in extent
of a wave to Interfere
when overtime
averaged .

Temporal coherence : Measurement of the

average
co - relation

between the value of a wave and itself

time 't?
at a
delayed
white
light interferometry
is the
superposition of the
*

fringes generated by all the wavelengths comprising of

white
light ( Bator ) interfering with each other
v1

( red with Red , voi let with ✗ oilet etc

) .
 white
light beam
sp
liter
mirror
¥ ¥ ¥ ¥ ¥ ¥
%
'

thinfilm

hit -tÉIhz
Him ←
sample
Experimental setup to schematic of Michelson
determine the thickness
of objective
film .

→ d- bz -
b, = on X -
①

This thickness be described

can
by constructive

interference vying eg
① .

Calculation and observation

*
Image set 1 .

light fringe
→ white 1 .

M=£÷
'
cc 702 A 13=50
14 ; dw= 593mm
71¥
=
, = ~

D=
M÷ =
4.154M

→ white
light fringe 2 .

¥-1B 47¥
'
Cc =
479 AB = 37 M= 13
'

-
=
 of =

M =
3¥93 = 3.854m

Greenlight tinge 1
→

cc '= 702
'
M : cc

IB
~
14 ; dg = 553mm

AB = 50

D=
14×25-53 3 874M
.

→
Green light tinge 2

'
cc = 479 m=
47¥ v15

AB = 31

of =
15×-2553 =
4.154m

*
Average film height for
thin white
light fringe =
Tqm
daxg 1- Um =

Average thin film height for green light fringe =3

"
* sym
dax.ge =
-1.019m

*
Image set 2 .

→ white
light fringe I Xw= 593mm ; D= m¥

c% ,
'
cc = 91-0 A- 13=68 M= ~ 14
,

of =
14×-2593 = 4 .
154m
→ white
light tinge 2

'
cc = 582 M=
c%☐~ 14

AB = 45

D=
14×2-593 = 4 -154m

→ white
light tinge 3

cc
' = 144 M = cc = 12

AB = 12

of =

12×-2-93 = 3.56
Efron

→
green light tinge 1
Xg= 553mm ; D=
228
'
C C = 940 M = 16

AB = 58

D= 16×553 4-
= 424m
2-

→
green light tinge 2

'
cc =
584 M = 15

AB = 40
15×553
D= =
4 -

154M
2-
 green light tinge 3
→

'
cc I
=
144 M =
= 16

AB = 9

D=
16¥53 = 4.42 Mom

Average d form white

light fsin.ge 3.954M
* =

Average of foam light fringe -1-33 Um

*
green
=

Image set 3 .

white
light fringe
→ 1

cc '= 29 D=
0.43€
M=
= o .
43
68
AB = 6 8

white
light fringe
→ 1

Cd = 12 m = 0 .
4 D=
0.4¥
AB = 68

light fringe
→
green 1

of
0.4-25/1
'
CC = 29 M = 0 .
45 =

AB = 65
→
green light tinge 2

cc'= 12 m= o .
01 D=
0.0¥
A- 13=126

# for all
fringes m is less than 0.5 or me
Iz which

is the smallest thickness can be measured

using
experiment .

>
= 268.05 ✗ 10 ✗ 632-8×10-9 = 0.0848mm
-1

Error
Analysis :

d) of film
step height thin .

"
2d = and =
CCYAB

( ^¥¥-)
Acc '
A- of =D
¥)
+
I. ad -
- d +

* set 1
Image .

A- dw
,
= 4.15
( ¥2 + =
0.094m

Adwz = 3.85
⇐ + =
0.119M

Adg ,
= 3.87
( ¥2 + =
0.089m
 Adgz = 4.15
(¥ ,
+
¥) =
0.149m -

A- dw=
Average in lo ee
o m
* error -

in
*
Average error
Adg = 0 .

Ilysm

*
Image set II.

dw , =
0
-074m
Ad wz =
o -

ly m

A- of wz = 0
-324mn

A
dg , =
0.084m
A-
dgz 0.11 Urn
=

A-
dgz eysm
= 0.02

A- dw=
-*
Average error in 0-16 4m

in
*
Average error
Adg = 0
-249M

Error in calibration constant .

a- =

If =
d÷ =d÷> +
d +
d¥

( )
-1
d (d) = .
(o .
00 8) soil = o -
0002mm
Result !

thickness
Average
*

set 1 dw= 410.14M

Image dog =
-1.01 -10.119m
set dw 5-93+0-16
dog
-6-51 -10.249m
Image
2 =
qm

* For
image 3 de
% thus not calculated

* calibration constant o 0848-1-0-0002

- l
= -
Mm
*

Data for calibration constant .

 plotting given points and
finding linear model

fit
using regression
to
get slope of the
graph .

268.05
Slope :

*
plotted in python