DP Series Diaphragm Valve Technical Report

Scope This technical report provides data on Moisture and hydrocarbon analysis data
Swagelok® DP series diaphragm valves show test results from valves cleaned
with PCTFE seats. The report covers: with deionized (DI) water in accordance
■ surface finish specifications with Swagelok Ultrahigh Purity Process
■ inboard helium leak testing Specification (SC-01), MS‑06‑61.
■ particle counting Particle counting data contrast
■ moisture analysis test results from valves cleaned in
■ hydrocarbon analysis accordance with SC-01 and with
Swagelok Photovoltaic Process
■ ionic cleanliness.
Specification (SC‑06), MS‑06‑64.
Ionic cleanliness data for SC‑01
and SC‑06 processed valves are
comparable.

Surface Finish Statistical process control (SPC) allows specification we have established for
Swagelok to provide consistent surface the wetted surfaces of DP series valves
finishes, as described in Specification manufactured with a Swagelok P or P1
SC-01. The roughness average (Ra) finish is 5 µin. (0.13 µm) Ra on average.

Inboard Helium 1  10–7

Leak Testing
Helium Leak Rate, std cm3/s

SC-01 processed valves maintained a

helium leak rate of less than 1 × 10 –9 15 s Test Limit
1  10–8
std cm3/s at the seat for an average 1 × 10–9 std cm 3/s Limit
of 200 s, which exceeds the required
test time of 15 s, in accordance with
SEMI F1-96. This result indicates that 1  10–9

the PCTFE seat design has a high

resistance to permeation.
The DP series valves were assembled
1  10–10
in a class 100 environment and tested 0 15 60 120 180 240 300 360
to ASTM E498, Method A, at the rated
Time, s
pressure of the valve.

Particle Counting 5
Average Particle Counts Per Minute

Static particle counts from SC-01 and

SC‑06 processed DP series valves are 4

very low.
Typical SC-06 Process
The DP series valves were tested in 3
accordance with ASTM F1394: Typical SC-01 Process
■ Class 100 cleanroom 2
■ Class 100 laminar-flow bench
■ 2.4 std ft3/min flow rate
1
■ Particles greater than 0.014 µm in
size detected.
0
0 5 10
Time, min

www. swagelok.com
Moisture Analysis 250

SC-01 processed valves recover

to background levels from a 2 ppm Install Install Background Level
200 Spool Test
moisture spike within 30 min, much
Piece Piece
faster than the 4 h recommended by
SEMI E49.8.
Three DP series valves were tested

Moisture, ppb
150
in accordance with SEMASPEC
90120397B­-STD guidelines:
■ The test gas was pure nitrogen.
100
■ The flow rate was 1.28 std L/min at
30 psig (2 bar).
The lower graph shows the pattern
of elevated temperatures that were 50
applied to the valves during testing to
enhance the moisture sensitivity of the
system.
0
0 100 200 300 400 500 600 700
Time, min

80
Temperature, °C

60

40

20
0 100 200 300 400 500 600 700

Time, min

Hydrocarbon Analysis
50

Hydrocarbon residues in SC-01

processed valves fall within the 40 Install Install Background Level
background level produced by the test Spool Test
Typical SC-01
instrument. Piece Piece
Process
Hydrocarbon analyses of SC-01 30
Methane, ppb

processed products are conducted

in accordance with SEMASPEC
90120396B-STD guidelines. 20
The lower graph shows the pattern
of elevated temperatures that were
applied to the valves during testing to 10
drive off any hydrocarbon residues in
the system.
0

–5
0 100 200 300 400 500 600 700
Time, min

80
Temperature, °C

60

40

20
0 100 200 300 400 500 600 700
Time, min

2
Ionic Cleanliness 2

Residual ionic contamination is very

Ionic Concentration, µg/mL

low (less than 1 µg/mL for SC-01 and
SC‑06 processed valves).
The DP series valves were tested in
accordance with ASTM F1374:
1
■ Each valve was filled with
deionized (DI) water.
■ After 24 h, the sample was
extracted and analyzed.
Anions Cations
(–) (+)
Anions (–) Cations (+)
0
Fluoride Lithium
Chloride Sodium
Nitrate Ammonium
Phosphate Potassium
Sulfate Magnesium
Calcium

Lab Cycle Testing Test Data

The DP series diaphragm valve was Model High-Pressure Low-Pressure Low-Pressure
tested to determine an estimated cycle Mode of Actuation Normally closed pneumatically actuated
life of the diaphragms under severe Quantity 10 10 20
laboratory conditions (table at right).
Gas Dry, filtered nitrogen
Both high- and low-pressure DP series Temperature
pneumatically actuated valves with 70 (20) ambient
°F (°C)
cobalt-based superalloy (UNS R30003) Inlet Pressure
diaphragms were tested. Valve cycle psig (bar)
life was evaluated for leakage at 3045 (210) 145 (9.9) 250 (17.2)
Outlet Pressure
regular intervals. Failure was defined psig (bar)
as a helium leak rate greater than Actuator Pressure
100 (6.8) 70 (4.8) 70 (4.8)
1 ×+++ 10 –9 std cm3/s for envelope psig (bar)
(inboard) or seat leakage. Cycle Rate, cpm 30
The tests predict the mean time to Mean Time to Failure
130 000 cycles 2 600 000 cycles 1 000 000 cycles
failure (MTTF) and the expected cycle (MTTF)
life for 95 % of the valves. Expected Cycle Life
> 50 000 cycles > 520 000 cyclesS > 290 000 cycles
for 95% of Valves
These tests are not a guarantee of a
minimum number of cycles in service.
They indicate that in tests under these
laboratory conditions the probability
of early failure is low. Laboratory tests
cannot duplicate the endless variety of
actual operating conditions and cannot
promise that the same results will be
realized in service.

3
Referenced Documents ASTM Standards 1 SEMI Standard s3
E498 Standard Test Method for Leaks E49.8 Guide for High-Purity and
Using the Mass Spectrometer Ultrahigh-Purity Gas Distribution
Leak Detector or Residual Gas Systems in Semiconductor
Analyzer in the Tracer Probe Mode Manufacturing Equipment
F1374 Standard Test Method for F1 Specification for Leak Integrity of
Determination of Ionic/Organic High-Purity Gas Piping Systems
Extractables of Internal Surfaces— and Components
IC/GC/FTIR for Gas Distribution
Systems Components Swagelok Specifications
F1394 Standard Test Method for Photovoltaic Process Specification
Determination of Particle (SC‑06), MS‑06‑64
Contribution from Gas Distribution Ultrahigh-Purity Process Specification
System Valves (SC-01), MS-06-61
SEMATECH SEMASPECS 2 1. American Society for Testing and Materials,
100 Barr Harbor Dr., West Conshohocken, PA
90120396B-STD Standard Test 19428.
Method for Determination of Total 2. SEMATECH, Inc., 2706 Montopolis Dr., Austin,
Hydrocarbon Contribution by Gas TX 78741.
3. Semiconductor Equipment and Materials
Distribution Systems Components International, 3801 Zanker Rd., San Jose, CA
90120397B-STD Standard Test Method 95134.
for Determination of Moisture
Contribution by Gas Distribution
Systems Components

Safe Product Selection

When selecting products, the total system design
must be considered to ensure safe, trouble-free
performance. Function, material compatibility, adequate
ratings, proper installation, operation, and maintenance
are the responsibilities of the system designer and user.

Swagelok—TM Swagelok Company

© 2000–2017 Swagelok Company
May 2017
MS-06-15-E, RevG