01.l40lp rvt1p1 v141 MC
01.l40lp rvt1p1 v141 MC
ge 1.1V MOSFET
Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
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UMC Confidential - Do Not Copy 40nm Logic and Mixed-Mode Low Power with Regular Threshold Voltage 1.1V MOSFET
Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
Table of Contents
1 INTRODUCTION ................................................................... 5
1.1 Revision History ................................................................................................. 5
1.2 General Information ............................................................................................ 7
1.3 Model Usage ....................................................................................................... 8
1.3.1 Simulators ................................................................................................... 8
1.3.2 The combination of statistical model & corner model................................ 8
1.3.3 Mismatching parameters in corner model .................................................. 8
1.3.4 Sigma number for Monte-Carlo model ....................................................... 9
1.3.5 Model usage ................................................................................................ 9
2 MONTE CARLO DC SIMULATION RESULTS FOR
PROCESS VARIATION............................................................. 17
2.1 Threshold voltage in linear region VTLIN ....................................................... 17
2.2 Threshold voltage in saturation region VTSAT................................................ 19
2.3 Linear Current IDLIN ....................................................................................... 20
2.4 Saturation Current IDSAT ................................................................................ 21
2.5 Transfer Conductance GM ................................................................................ 22
2.6 Output Conductance GDS................................................................................. 23
3 MONTE CARLO DYNAMIC SIMULATION RESULTS
FOR PROCESS VARIATION ................................................... 24
3.1 Ring Oscillator Circuit ...................................................................................... 24
4 MONTE CARLO SIMULATION RESULTS FOR
MISMATCH ................................................................................. 26
4.1 Threshold voltage in linear region VTLIN ....................................................... 26
4.2 Saturation Current IDSAT ................................................................................ 27
5 APPENDIX ............................................................................. 29
5.1 HSPICE Warning Message ............................................................................... 29
5.2 ELDO Warning Message .................................................................................. 29
5.3 SPECTRE Warning Message ........................................................................... 29
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
List of Figures
Figure 1-1 Layout Example of parallel devices. ............................................................... 10
Figure 1-2 Layout Example for LOD effect ..................................................................... 11
Figure 2-1 Monte Carlo plots of threshold voltage at low drain bias ............................... 18
Figure 2-2 Monte Carlo plots of threshold voltage at high drain bias .............................. 19
Figure 2-3 Monte Carlo plots of linear current ................................................................. 20
Figure 2-4 Monte Carlo plots of saturation current .......................................................... 21
Figure 2-5 Monte Carlo plots of transfer conductance ..................................................... 22
Figure 2-6 Monte Carlo plots of output conductance ....................................................... 23
Figure 3-1 Ring oscillator netlist diagram ........................................................................ 24
Figure 3-2 Corner plot of ring oscillator ........................................................................... 25
Figure 4-1 VTLIN mis-matching simulation of 1.1V n-ch MOSFET .............................. 26
Figure 4-2 VTLIN mis-matching simulation of 1.1V p-ch MOSFET .............................. 27
Figure 4-3 IDSAT mis-matching simulation of 1.1V n-ch MOSFET .............................. 28
Figure 4-4 IDSAT mis-matching simulation of 1.1V p-ch MOSFET .............................. 28
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
List of Tables
Table 1-1 Revision history .................................................................................................. 5
Table 3-1 Ring oscillator (inverter) structure description for SA=0.099um .................... 25
Table 5-1 HSPICE warning message ................................................................................ 29
Table 5-2 ELDO warning message ................................................................................... 29
Table 5-3 SPECTRE warning message ............................................................................ 29
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
1 Introduction
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
l40lp_rvt1p1_v111.lib
1. This Monte Carlo model includes both
process and mis-matching characteristics
1.1_P1 2011/05/26 Chun Wei Chen extracted from model cards as below:
l40lp_rvt1p1_v121.mdl
l40lp_rvt1p1_v121.lib
1. Modify noise parameters.
2. Add noise corner parameters.
3. Modified NMOS LOD parameters.
4. Revised leff trend of Cgc for N/P
MOS
1.2_P1 2011/11/30 Yeong-Jia Chen 5. Revised N/P MOS corner range
6. This Monte Carlo model includes both
process and mis-matching characteristics
extracted from model cards as below:
l40lp_rvt1p1_v141.mdl
l40lp_rvt1p1_v141.lib
1. Modify global corner range.
2. This Monte Carlo model includes both
Annie Kuo
process and mis-matching characteristics
1.3_P1 2012/03/01 Louis Yuen
extracted from model cards as below:
Yeong-Jia Chen
l40lp_rvt1p1_v141.mdl
l40lp_rvt1p1_v141.lib
1. This Monte Carlo model includes both
process and mis-matching characteristics
1.4_P1 2013/06/24 Ryan LK Chen extracted from model cards as below:
l40lp_rvt1p1_v151.mdl
l40lp_rvt1p1_v151.lib
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
This document serves as a reference to the design of products that will be manufactured
by UMC using the following process.
For more information about this process and technology, please see the electrical design
rule listed below.
G-02-LOGIC/MIXED_MODE40N-LP-EDR
The creation, verification, and usage of the compact model of the following devices are
presented in this document.
The following compact model is chosen for the modeling of these devices.
BSIM4V4.6.0
For detailed descriptions of the compact model equations and parameters, please refer to
this material.
In BSIM4V4.6.0, there are two types of models that can be used. One is a binning model,
which means the whole device dimension range is chopped into several "bins" and
different model parameter sets are provided for each bin. The other one is a global model,
which means one scalable parameter set is provided and it can cover the whole device
geometry range. Each of these two approaches has advantages over the other.
UMC provides global models for their many benefits and the model accuracy is
guaranteed by a quantitative report of model fitting error against the silicon data, which
can be found in the following sections.
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
1.3.1 Simulators
The compact model is provided in various formats. It is guaranteed that the simulation
results of this model from different simulators show differences less than 0.5% and 1%
for DC and AC simulations respectively. It should be noted that the model has been
verified on different simulators of the specific versions listed below, and the simulation
results from other versions of the simulators might be different
The Monte-Carlo model and corner model (5 corners) are combined into a single
model library. The user can choose either the Monte-Carlo model or a corner case
by selecting different model sections for simulation. The following sections are
included:
MC: Monte-Carlo model
TT: Typical n-ch MOSFET and Typical p-ch MOSFET
SS: Total corner of Slow n-ch MOSFET and Slow p-ch MOSFET
SNFP: Total corner of Slow n-ch MOSFET and Fast p-ch MOSFET
FNSP: Total corner of Fast n-ch MOSFET and Slow p-ch MOSFET
FF: Total corner of Fast n-ch MOSFET and Fast p-ch MOSFET
TT_G: Typical n-ch MOSFET and Typical p-ch MOSFET (the same as TT)
SS_G: Global corner of Slow n-ch MOSFET and Slow p-ch MOSFET
SNFP_G: Global corner of Slow n-ch MOSFET and Fast p-ch MOSFET
FNSP_G: Global corner of Fast n-ch MOSFET and Slow p-ch MOSFET
FF_G: Global corner of Fast n-ch MOSFET and Fast p-ch MOSFET
The mismatching parameters are included in the corner models. Therefore, the user can
run Monte-Carlo mismatching simulation over a corner model. For example, the user can
evaluate the mismatching performance at the SS_G case.
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
The user can define standard deviation at sigma level for Monte-Carlo simulation. If a
larger sigma number is used, it means the model parameters will have greater variation.
Sigma=3 is recommended to be used.
After invoking Monte-Carlo model parameters, the compact transistor models evolve to
sub-circuit models. The input parameters for the sub-circuit model are the same as the
compact model, except two more input parameters (mis_flag, & mf) are added for the
sub-circuit model.
The following example shows 3 transistors connected in parallel; each transistor has 5
fingers and each finger has width 5u and length 1u. The mismatching parameters are
turned on. And the parameter "mf" is a must for mismatching simulation of parallel
devices. Please note mf and m have to be equal.
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
Follow the description for the net-list of the LOD effect and these steps to invoke the
model file during simulation.
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
- Add the following statement in the input file to the simulator for 90% dimension
shrinkage.
.Option scale=0.9
.lib "./ModelFileName.lib" CaseName
, where CaseName could be MC,TT, FF, SS, FNSP, SNFP, FF_G, SS_G,
FNSP_G or SNFP_G.
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
+ A_SA_EDGE='SA*W/NF' P_SA_EDGE='2*(SA+W/NF)'
+ A_SB_EDGE='SB*W/NF' P_SB_EDGE='2*(SB+W/NF)'
+ AD='NF_ODD*(A_UNIT*((NF+1)/2-1)+A_SB_EDGE) +
NF_EVEN*(A_UNIT*NF/2)'
+ AS='NF_ODD*(A_UNIT*((NF+1)/2-1)+A_SA_EDGE) +
NF_EVEN*(A_UNIT*(NF/2-1)+A_SA_EDGE+A_SB_EDGE)'
+ PD='NF_ODD*(P_UNIT*((NF+1)/2-1)+P_SB_EDGE) +
NF_EVEN*(P_UNIT*NF/2)'
+ PS='NF_ODD*(P_UNIT*((NF+1)/2-1)+P_SA_EDGE) +
NF_EVEN*(P_UNIT*(NF/2-1)+P_SA_EDGE+P_SB_EDGE)'
+ SGA=SGA1 SGB=SGB1 SG2A=SG2A1 SG2B=SG2B1
Example 2:
run global MC simulation only.
.lib "./ModelFileName.lib" MC
.PARAM PROCESS=1 MISMATCH=0
Example 3:
run local MC simulation only.
.lib "./ModelFileName.lib" MC
.PARAM PROCESS=0 MISMATCH=1
Example 4:
run local MC simulation on global corners.
.lib "./ModelFileName.lib" FF_G (or SS_G, FNSP_G,SNFP_G)
.PARAM PROCESS=0 MISMATCH=1
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
- Add the following statement in the input file to the simulator for 90% dimension
shrinkage.
SetOption1 options scale=0.9
include "./ModelFileName.lib.scs" section=CaseName
, where CaseName could be mc,tt, ff, ss, fnsp, snfp, ff_g, ss_g, fnsp_g or snfp_g.
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
- Add the following statement in the input file to the simulator for 90% dimension
shrinkage.
.Option scale=0.9
.lib "./ModelFileName.lib.eldo" CaseName
, where CaseName could be MC,TT, FF, SS, FNSP, or SNFP.
Example 2:
run global MC simulation only.
.lib "./ModelFileName.lib.eldo " MC
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
Example 3:
run local MC simulation only.
.lib "./ModelFileName.lib.eldo " MC
.PARAM PROCESS=0 MISMATCH=1
Example 4:
run local MC simulation on global corners.
.lib "./ModelFileName.lib.eldo " FF_G (or SS_G, FNSP_G,SNFP_G)
.PARAM PROCESS=0 MISMATCH=1
The noiflag is used for 1/f noise corner simulation (1 for worst case; 0 for typical case;
-1 for best case), which will be turned off when 1/f noise Monte Carlo simulation is
turned on.
noiflag_mc is used for 1/f noise Monte Carlo simulation (1:turn on 0: turn off).
noisigma is the standard deviation at the sigma level (noisigma= 3 is recommended) for 1/f
noise corner or Monte Carlo simulation.
As stated above that one global model is provided and this model is valid within the
following geometry, voltage, and temperature ranges. Device behavior beyond these
ranges may not be well described by the model and is not guaranteed.
Voltage range:
For 1.1V n-ch MOSFET:
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
Temperature range:
-40 ℃ ~ +125 ℃
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
Two hundred Monte Carlo iterations are performed in the following simulation
conditions, and the following corner points show TT, SS, FF, SNFP and FNSP values
individually.
A reasonable number of Monte Carlo iterations is 30. The statistical significance of 30
iterations is quite high. If the circuit operates correctly for all 30 iterations, there is 99%
probability that over 80% of all possible component values operate correctly. The relative
error of a quantity determined through Monte Carlo analysis is proportional to (iteration
times)^(-1/2).
The following figures show the Monte Carlo simulation results (process=1, mismatch=1)
of linear threshold voltage extracted at ID =10nA*WDES*0.9/(LDES*0.9+0.006um) for
NMOS and ID =-10nA*WDES*0.9/(LDES*0.9+0.006um) for PMOS at 25 ℃.
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
Vtlin(W=0.9um,L=0.9um) Vtlin(W=0.270um,L=0.036um)
3.20E-01 4.60E-01
_Corners _Corners
3.10E-01 4.40E-01
_MC_points _MC_points
4.20E-01
3.00E-01
4.00E-01
2.90E-01
Vtp(V)
Vtp(V)
3.80E-01
2.80E-01
3.60E-01
2.70E-01
3.40E-01
2.60E-01
3.20E-01
2.50E-01 3.00E-01
2.40E-01 2.80E-01
2.10E-01
2.20E-01
2.30E-01
2.40E-01
2.50E-01
2.60E-01
2.70E-01
2.60E-01
2.80E-01
3.00E-01
3.20E-01
3.40E-01
3.60E-01
3.80E-01
4.00E-01
4.20E-01
Vtn(V) Vtn(V)
Vtlin(W=0.9um,L=0.036um) Vtlin(W=0.108um,L=0.9um)
4.60E-01 3.20E-01
_Corners _Corners
4.40E-01 _MC_points 3.00E-01 _MC_points
4.20E-01
2.80E-01
4.00E-01
2.60E-01
Vtp(V)
Vtp(V)
3.80E-01
2.40E-01
3.60E-01
2.20E-01
3.40E-01
3.20E-01 2.00E-01
3.00E-01 1.80E-01
3.20E-01
3.40E-01
3.60E-01
3.80E-01
4.00E-01
4.20E-01
1.40E-01
1.60E-01
1.80E-01
2.00E-01
2.20E-01
2.40E-01
Vtn(V) Vtn(V)
Vtlin(W=0.54um,L=0.036um) Vtlin(W=0.108um,L=0.036um)
4.60E-01 4.60E-01
_Corners 4.40E-01 _Corners
4.40E-01
_MC_points _MC_points
4.20E-01
4.20E-01
4.00E-01
4.00E-01
3.80E-01
Vtp(V)
Vtp(V)
3.80E-01 3.60E-01
3.60E-01 3.40E-01
3.20E-01
3.40E-01
3.00E-01
3.20E-01
2.80E-01
3.00E-01 2.60E-01
2.80E-01 2.40E-01
2.80E-01
3.00E-01
3.20E-01
3.40E-01
3.60E-01
3.80E-01
4.00E-01
4.20E-01
2.50E-01
3.00E-01
3.50E-01
4.00E-01
4.50E-01
Vtn(V) Vtn(V)
Figure 2-1 Monte Carlo plots of threshold voltage at low drain bias
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
Vtp(V)
2.70E-01 2.40E-01
2.60E-01 2.20E-01
2.00E-01
2.50E-01
1.80E-01
2.40E-01
1.60E-01
2.30E-01 1.40E-01
2.20E-01 1.20E-01
1.90E-01
2.00E-01
2.10E-01
2.20E-01
2.30E-01
2.40E-01
2.50E-01
1.60E-01
1.80E-01
2.00E-01
2.20E-01
2.40E-01
2.60E-01
2.80E-01
3.00E-01
3.20E-01
3.40E-01
Vtn(V) Vtn(V)
Vtsat(W=0.9um,L=0.036um) Vtsat(W=0.108um,L=0.9um)
3.20E-01 3.00E-01
_Corners _Corners
3.00E-01 _MC_points 2.80E-01 _MC_points
2.80E-01
2.60E-01
2.60E-01
2.40E-01
Vtp(V)
Vtp(V)
2.40E-01
2.20E-01
2.20E-01
2.00E-01
2.00E-01
1.80E-01 1.80E-01
1.60E-01 1.60E-01
2.20E-01
2.40E-01
2.60E-01
2.80E-01
3.00E-01
3.20E-01
1.20E-01
1.40E-01
1.60E-01
1.80E-01
2.00E-01
Vtn(V) Vtn(V)
Vtsat(W=0.54um,L=0.036um) Vtsat(W=0.108um,L=0.036um)
3.40E-01 4.00E-01
3.20E-01 _Corners _Corners
_MC_points 3.50E-01 _MC_points
3.00E-01
2.80E-01
3.00E-01
2.60E-01
Vtp(V)
Vtp(V)
2.40E-01
2.50E-01
2.20E-01
2.00E-01
2.00E-01
1.80E-01
1.60E-01 1.50E-01
1.40E-01
1.20E-01 1.00E-01
2.00E-01
2.20E-01
2.40E-01
2.60E-01
2.80E-01
3.00E-01
3.20E-01
1.50E-01
2.00E-01
2.50E-01
3.00E-01
3.50E-01
Vtn(V) Vtn(V)
Figure 2-2 Monte Carlo plots of threshold voltage at high drain bias
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Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
The following figures show the Monte Carlo simulation results (process=1, mismatch=1)
of linear current at 25℃.
Idlin(W=0.9um,L=0.9um) Idlin(W=0.270um,L=0.036um)
3.90E+00 5.00E+01
_Corners _Corners
3.80E+00 4.80E+01
_MC_points _MC_points
3.70E+00
4.60E+01
3.60E+00
4.40E+01
Idp(uA/um)
Idp(uA/um)
3.50E+00
4.20E+01
3.40E+00
4.00E+01
3.30E+00
3.80E+01
3.20E+00
3.10E+00 3.60E+01
3.00E+00 3.40E+01
1.15E+01
1.20E+01
1.25E+01
1.30E+01
9.00E+01
9.50E+01
1.00E+02
1.05E+02
1.10E+02
1.15E+02
Idn(uA/um) Idn(uA/um)
Idlin(W=0.9um,L=0.036um) Idlin(W=0.108um,L=0.9um)
4.30E+01 5.60E+00
4.20E+01 _Corners _Corners
_MC_points 5.40E+00 _MC_points
4.10E+01
4.00E+01 5.20E+00
3.90E+01 5.00E+00
Idp(uA/um)
Idp(uA/um)
3.80E+01
4.80E+00
3.70E+01
3.60E+01 4.60E+00
3.50E+01 4.40E+00
3.40E+01
4.20E+00
3.30E+01
3.20E+01 4.00E+00
9.00E+01
9.50E+01
1.00E+02
1.05E+02
1.10E+02
1.50E+01
1.55E+01
1.60E+01
1.65E+01
1.70E+01
1.75E+01
1.80E+01
1.85E+01
1.90E+01
Idn(uA/um) Idn(uA/um)
Idlin(W=0.54um,L=0.036um) Idlin(W=0.108um,L=0.036um)
4.80E+01 6.00E+01
_Corners _Corners
4.60E+01 _MC_points _MC_points
5.50E+01
4.40E+01
4.20E+01
Idp(uA/um)
Idp(uA/um)
5.00E+01
4.00E+01
3.80E+01 4.50E+01
3.60E+01
4.00E+01
3.40E+01
3.20E+01 3.50E+01
9.00E+01
9.50E+01
1.00E+02
1.05E+02
1.10E+02
9.50E+01
1.00E+02
1.05E+02
1.10E+02
1.15E+02
1.20E+02
1.25E+02
1.30E+02
1.35E+02
Idn(uA/um) Idn(uA/um)
The following figures show the Monte Carlo simulation result (process=1, mismatch=1)
of saturation current at 25℃
Idsat(W=0.9um,L=0.9um) Idsat(W=0.270um,L=0.036um)
2.80E+01 4.00E+02
_Corners _Corners
2.70E+01 _MC_points 3.80E+02 _MC_points
2.60E+01 3.60E+02
Idp(uA/um)
Idp(uA/um)
2.50E+01 3.40E+02
2.40E+01 3.20E+02
2.30E+01 3.00E+02
2.20E+01 2.80E+02
2.10E+01 2.60E+02
7.40E+01
7.60E+01
7.80E+01
8.00E+01
8.20E+01
8.40E+01
8.60E+01
5.00E+02
5.50E+02
6.00E+02
6.50E+02
7.00E+02
Idn(uA/um) Idn(uA/um)
Idsat(W=0.9um,L=0.036um) Idsat(W=0.108um,L=0.9um)
3.40E+02 4.40E+01
3.30E+02 _Corners _Corners
_MC_points 4.20E+01 _MC_points
3.20E+02
3.10E+02 4.00E+01
3.00E+02 3.80E+01
Idp(uA/um)
Idp(uA/um)
2.90E+02
3.60E+01
2.80E+02
2.70E+02 3.40E+01
2.60E+02 3.20E+01
2.50E+02
3.00E+01
2.40E+02
2.30E+02 2.80E+01
4.80E+02
5.00E+02
5.20E+02
5.40E+02
5.60E+02
5.80E+02
6.00E+02
6.20E+02
1.10E+02
1.15E+02
1.20E+02
1.25E+02
1.30E+02
1.35E+02
1.40E+02
Idn(uA/um) Idn(uA/um)
Idsat(W=0.54um,L=0.036um) Idsat(W=0.108um,L=0.036um)
3.80E+02 4.80E+02
_Corners 4.60E+02 _Corners
3.60E+02 _MC_points _MC_points
4.40E+02
3.40E+02 4.20E+02
3.20E+02 4.00E+02
Idp(uA/um)
Idp(uA/um)
3.80E+02
3.00E+02
3.60E+02
2.80E+02 3.40E+02
2.60E+02 3.20E+02
3.00E+02
2.40E+02
2.80E+02
2.20E+02 2.60E+02
4.80E+02
5.00E+02
5.20E+02
5.40E+02
5.60E+02
5.80E+02
6.00E+02
6.20E+02
6.40E+02
6.60E+02
5.00E+02
5.50E+02
6.00E+02
6.50E+02
7.00E+02
7.50E+02
8.00E+02
Idn(uA/um) Idn(uA/um)
The following figures show the Monte Carlo simulation results (process=1, mismatch=1)
of transfer conductance at 25℃.
Gm(W=0.9um,L=0.9um) Gm(W=0.270um,L=0.036um)
1.20E-05 9.00E-05
_Corners _Corners
1.10E-05 _MC_points 8.00E-05 _MC_points
1.00E-05 7.00E-05
9.00E-06 6.00E-05
Gmp(S)
Gmp(S)
8.00E-06 5.00E-05
7.00E-06 4.00E-05
6.00E-06 3.00E-05
5.00E-06 2.00E-05
4.00E-06 1.00E-05
1.00E-05
1.20E-05
1.40E-05
1.60E-05
1.80E-05
2.00E-05
2.20E-05
2.00E-05
4.00E-05
6.00E-05
8.00E-05
1.00E-04
1.20E-04
1.40E-04
Gmn(S) Gmn(S)
Gm(W=0.9um,L=0.036um) Gm(W=0.108um,L=0.9um)
2.00E-04 2.40E-06
_Corners 2.20E-06 _Corners
1.80E-04 _MC_points _MC_points
2.00E-06
1.60E-04
1.80E-06
1.40E-04 1.60E-06
Gmp(S)
Gmp(S)
1.20E-04 1.40E-06
1.00E-04 1.20E-06
1.00E-06
8.00E-05
8.00E-07
6.00E-05 6.00E-07
4.00E-05 4.00E-07
1.00E-04
1.50E-04
2.00E-04
2.50E-04
3.00E-04
3.50E-04
1.00E-06
1.50E-06
2.00E-06
2.50E-06
3.00E-06
3.50E-06
4.00E-06
4.50E-06
Gmn(S) Gmn(S)
Gm(W=0.54um,L=0.036um) Gm(W=0.108um,L=0.036um)
1.60E-04 4.50E-05
_Corners _Corners
4.00E-05
1.40E-04 _MC_points _MC_points
3.50E-05
1.20E-04
3.00E-05
Gmp(S)
Gmp(S)
1.00E-04 2.50E-05
8.00E-05 2.00E-05
1.50E-05
6.00E-05
1.00E-05
4.00E-05
5.00E-06
2.00E-05 0.00E+00
5.00E-05
1.00E-04
1.50E-04
2.00E-04
1.00E-05
2.00E-05
3.00E-05
4.00E-05
5.00E-05
6.00E-05
7.00E-05
Gmn(S) Gmn(S)
The following figures show the Monte Carlo simulation results (process=1, mismatch=1)
of output conductance at 25℃.
Gds(W=0.9um,L=0.9um) Gds(W=0.270um,L=0.036um)
2.00E-07 9.00E-06
_Corners _Corners
8.00E-06
1.80E-07 _MC_points _MC_points
7.00E-06
1.60E-07
6.00E-06
Gdsp(S)
Gdsp(S)
1.40E-07 5.00E-06
1.20E-07 4.00E-06
3.00E-06
1.00E-07
2.00E-06
8.00E-08
1.00E-06
6.00E-08 0.00E+00
1.50E-07
2.00E-07
2.50E-07
3.00E-07
3.50E-07
1.00E-06
2.00E-06
3.00E-06
4.00E-06
5.00E-06
6.00E-06
7.00E-06
8.00E-06
Gdsn(S) Gdsn(S)
Gds(W=0.9um,L=0.036um) Gds(W=0.108um,L=0.9um)
2.00E-05 5.00E-08
_Corners _Corners
1.80E-05 4.50E-08
_MC_points _MC_points
1.60E-05 4.00E-08
1.40E-05 3.50E-08
Gdsp(S)
Gdsp(S)
1.20E-05 3.00E-08
1.00E-05 2.50E-08
8.00E-06 2.00E-08
6.00E-06 1.50E-08
4.00E-06 1.00E-08
2.00E-06 5.00E-09
4.00E-06
6.00E-06
8.00E-06
1.00E-05
1.20E-05
1.40E-05
1.60E-05
1.80E-05
1.00E-08
2.00E-08
3.00E-08
4.00E-08
5.00E-08
6.00E-08
Gdsn(S) Gdsn(S)
Gds(W=0.54um,L=0.036um) Gds(W=0.108um,L=0.036um)
1.80E-05 5.00E-06
_Corners 4.50E-06 _Corners
1.60E-05
_MC_points _MC_points
1.40E-05 4.00E-06
3.50E-06
1.20E-05
3.00E-06
Gdsp(S)
Gdsp(S)
1.00E-05
2.50E-06
8.00E-06
2.00E-06
6.00E-06
1.50E-06
4.00E-06 1.00E-06
2.00E-06 5.00E-07
0.00E+00 0.00E+00
2.00E-06
4.00E-06
6.00E-06
8.00E-06
1.00E-05
1.20E-05
5.00E-07
1.00E-06
1.50E-06
2.00E-06
2.50E-06
3.00E-06
3.50E-06
4.00E-06
4.50E-06
Gdsn(S) Gdsn(S)
To assess the dynamic performance of these devices, a ring oscillator circuit with the
following configuration is adopted
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UMC Confidential - Do Not Copy 40nm Logic and Mixed-Mode Low Power with Regular Threshold Voltage 1.1V MOSFET
Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
Inverter
Inverter Tpd
9.00E-12
_Corners
8.50E-12 _MC_points
8.00E-12
Tpd(second)
7.50E-12
7.00E-12
6.50E-12
6.00E-12
5.50E-12
6.50E+03
7.00E+03
7.50E+03
8.00E+03
8.50E+03
1/Idn+1/Idp(1/A)
-25-
UMC Confidential - Do Not Copy 40nm Logic and Mixed-Mode Low Power with Regular Threshold Voltage 1.1V MOSFET
Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
The following figures show the Monte Carlo mis-matching simulation results of linear
threshold voltage extracted at ID =10nA*WDES*0.9/(LDES*0.9+0.006um) for NMOS and ID
=-10nA*WDES*0.9/(LDES*0.9+0.006um) for PMOS at 25℃.
Vt-Mismatch
1.20E-01
L=0.9um,y=(6.47e-3)x
L=0.18um,y=(4.50e-3)x
L=0.045um,y=(3.34e-3)x
1.00E-01 L=0.036um,y=(3.25e-3)x
8.00E-02
d(delta Vt)
6.00E-02
4.00E-02
2.00E-02
0.00E+00
0.00E+00
2.00E+00
4.00E+00
6.00E+00
8.00E+00
1.00E+01
1.20E+01
1.40E+01
1.60E+01
1/sqrt(W*L*MF)
Figure 4-1 VTLIN mis-matching simulation of 1.1V n-ch MOSFET
-26-
UMC Confidential - Do Not Copy 40nm Logic and Mixed-Mode Low Power with Regular Threshold Voltage 1.1V MOSFET
Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
Vt-Mismatch
6.00E-02
L=0.9um,y=(3.44e-3)x
L=0.18um,y=(2.74e-3)x
L=0.045um,y=(2.35e-3)x
5.00E-02 L=0.036um,y=(2.50e-3)x
4.00E-02
d(delta Vt)
3.00E-02
2.00E-02
1.00E-02
0.00E+00
0.00E+00
2.00E+00
4.00E+00
6.00E+00
8.00E+00
1.00E+01
1.20E+01
1.40E+01
1.60E+01
1/sqrt(W*L*MF)
Figure 4-2 VTLIN mis-matching simulation of 1.1V p-ch MOSFET
The following figures show the Monte Carlo mis-matching simulation results of
saturation current at 25℃.
-27-
UMC Confidential - Do Not Copy 40nm Logic and Mixed-Mode Low Power with Regular Threshold Voltage 1.1V MOSFET
Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
Id-Mismatch
2.00E-01
L=0.9um,y=(1.19e-2)x
1.80E-01 L=0.18um,y=(0.76e-2)x
L=0.045um,y=(0.68e-2)x
L=0.036um,y=(0.6e-2)x
1.60E-01
1.40E-01
1.20E-01
d(delta Id/Id)
1.00E-01
8.00E-02
6.00E-02
4.00E-02
2.00E-02
0.00E+00
0.00E+00
2.00E+00
4.00E+00
6.00E+00
8.00E+00
1.00E+01
1.20E+01
1.40E+01
1.60E+01
1/sqrt(W*L*MF)
Figure 4-3 IDSAT mis-matching simulation of 1.1V n-ch MOSFET
Id-Mismatch
1.20E-01
L=0.9um,y=(0.7e-2)x
L=0.18um,y=(0.7e-2)x
L=0.045um,y=(0.7e-2)x
1.00E-01 L=0.036um,y=(0.7e-2)x
8.00E-02
d(delta Id/Id)
6.00E-02
4.00E-02
2.00E-02
0.00E+00
0.00E+00
2.00E+00
4.00E+00
6.00E+00
8.00E+00
1.00E+01
1.20E+01
1.40E+01
1.60E+01
1/sqrt(W*L*MF)
-28-
UMC Confidential - Do Not Copy 40nm Logic and Mixed-Mode Low Power with Regular Threshold Voltage 1.1V MOSFET
Monte Carlo SPICE Model Document. This document is the property of UMC. Its use is authorized only for
design of products manufactured by UMC.
5 Appendix
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