Technical Data for Alicat MC and MCR Mass Flow Controllers
0 – 0.5 sccm Full Scale through 0 – 3000 slpm Full Scale Tel: 888-290-6060
www.alicat.com/mc
Standard Specifications (Contact Alicat for available options.)
Performance MC & MCR Mass Flow Controller
Accuracy at calibration conditions after tare ± (0.8% of Reading + 0.2% of Full Scale)
± (0.4% of Reading + 0.2% of Full Scale)
High Accuracy at calibration conditions after tare
High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.
Repeatability ± 0.2% Full Scale
Zero Shift and Span Shift 0.02% Full Scale / ºCelsius / Atm
Operating Range / Turndown Ratio 0.5% to 100% Full Scale / 200:1 Turndown
Maximum Controllable Flow Rate 102.4% Full Scale
Typical Response Time 100 ms (Adjustable)
Warm-up Time < 1 Second
Operating Conditions MC & MCR Mass Flow Controller
Mass Reference Conditions (STP) 25ºC & 14.696 psia (standard — others available on request)
Operating Temperature −10 to +50 ºCelsius
Humidity Range (Non–Condensing) 0 to 100%
Maximum Pressure 145 psig
Mounting Attitude Sensitivity MC: None MCR: Mount with valve cylinder vertical & upright
Valve Type Normally Closed
Ingress Protection IP40
MC: 303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced Nylon, Aluminum,
Brass, 430FR Stainless Steel, Silicon, Glass.
Wetted Materials MCR: 303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced Nylon, Aluminum,
416 Stainless Steel, Nickel, Silicon, Glass.
If your application demands a different material, please contact Alicat.
Communications / Power MC & MCR Mass Flow Controller
Monochrome LCD or Color TFT Display with
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
integrated touchpad
1
Digital Output Signal Options RS-232 Serial / RS-485 Serial / PROFIBUS3
Analog Output Signal2 Options 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Optional Secondary Analog Output Signal2 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Electrical Connection Options 8 Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6 pin locking
Supply Voltage MC: 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) MCR: 24 to 30 Vdc
Supply Current MC: 0.250 Amp MCR: 0.750 Amp
1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass Flow, Volumetric Flow,
Pressure or Temperature
3. If selecting PROFIBUS, no analog signal is available. PROFIBUS units do not have the display. See PROFIBUS specifications for PROFIBUS
supply voltages and currents. (www.alicat.com/profibus)
Features MC & MCR Mass Flow Controller
Programmed Gases: Acetylene, Air, Argon, Butane, Carbon Dioxide, Carbon Monoxide, Ethane,
Ethylene (Ethene), Helium, Hydrogen, Iso-Butane, Krypton, Methane, Neon, Nitrogen, Nitrous
Oxide, Oxygen, Propane, Sulfur Hexafluoride, Xenon, A-25, A-75, A1025, C-2, C-8, C-10, C-25,
C-75, P-5, Star29
30 Gas Select™
If your application calls for a gas not on this list, please let us know. We can also calibrate to a wide
30 On-Board User Selectable Gas Calibrations
variety of complex gas mixtures involving up to eight gas constituents.
Alicat’s MCS and MCRS controllers are also compatible with these aggressive gases: Ammonia,
Hydrogen Sulfide, Nitric Oxide, Nitrogen Triflouride, Propylene, Nitrogen Dioxide to 0.5% in an inert
carrier, Refrigerant gases (www.alicat.com/ms)
Range Specific Specifications
Pressure Drop1 at FS Flow (psid)
Full Scale Flow Mass Controller Mechanical Dimensions Process Connections2
venting to atmosphere
MC 0.5 sccm to 50 sccm 1.0 3.9”H x 3.4”W x 1.1”D M-5 (10-32) Female Thread3
MC 100 sccm to 500 sccm 1.0
MC 1 slpm 1.5
MC 2 slpm 3.0
4.1”H x 3.6”W x 1.1”D 1/8” NPT Female
MC 5 slpm 2.0
MC 10 slpm 5.5
MC 20 slpm 20.0
MCR 50 slpm 2.0
5.5”H x 7.7”W x 2.3”D 1/4” NPT Female
MCR 100 slpm 3.2
MCR 250 slpm 2.4 5.5”H x 7.7”W x 2.3”D 1/2” NPT Female
MCR 500 slpm 6.5
3/4” NPT Female
MCR 1000 slpm 14.0 5.5”H x 7.4”W x 2.3”D
MCR 1500 slpm 17.0 (A 1-1/4” NPT Female process connection
is available for 2000 slpm controllers.)
MCR 2000 slpm 28.6 5.5”H x 8.1” W x 2.9” D
MCR 3000 slpm 16.8 5.5”H x 8.9” W x 2.9” D 1-1/4” NPT Female
1. Lower Pressure Drops Available, please see our WHISPER-Series mass flow controllers at www.alicat.com/whisper.
2. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter fittings. VCR and SAE connections upon request.
3. Shipped with M-5 (10-32) Male Buna-N O-ring face seal to 1/8” Female NPT fittings.
DOC-SPECS-CONTROLLERS Rev.24 1 November 14, 2013
MC-Series
0 - 0.5 sccm
Tel: 888-290-6060
0 - 1 sccm
www.alicat.com/mc
0 - 2 sccm
0 - 5 sccm
0 - 10 sccm
0 - 20 sccm
0 - 50 sccm
0.5 sccm to 50 sccm approximate shipping weight: 1.1 lb.
MC-Series
0 - 100 sccm
0 - 200 sccm
0 - 500 sccm
0 - 1 slpm
0 - 2 slpm
0 - 3 slpm
0 - 5 slpm
0 - 10 slpm
0 - 20 slpm
100 sccm to 20 slpm approximate weight: 1.2lb
DOC-SPECS-CONTROLLERS Rev.24 2 November 14, 2013
MCR-Series
0 - 50 slpm Tel: 888-290-6060
0 - 100 slpm www.alicat.com/mc
MCR 50 slpm to 100 slpm approximate weight: 9.0 lb.
MCR-Series
0 - 250 slpm
MCR 250 slpm approximate weight: 9.0 lb.
MCR-Series:
0 - 500 slpm
0 - 1000 slpm
0 - 1500 slpm
MCR 1500 slpm approximate weight: 9.0 lb.
DOC-SPECS-CONTROLLERS Rev.24 3 November 14, 2013
Tel: 888-290-6060
www.alicat.com/mc
MCR-Series
0 - 2000 slpm
MCR 2000 slpm approximate weight: 12.0 lb.
MCR-Series
0 - 3000 slpm
MCR 3000 slpm approximate weight: 12.0 lb.
DOC-SPECS-CONTROLLERS Rev.24 4 November 14, 2013
