TWINSCAN-T Directory Structure & UNIX

Commands
For Training Purposes Only

ASML Confidential
/ Slide 1 For training purposes only AP-L1-SL-1v0

1
COPYRIGHT
© 2003, ASML Holding N.V. (or affiliate companies). All rights reserved.
This documentation is subject to change without notice and contains confidential and proprietary
information of ASML Holding N.V. or affiliate companies ("ASML").
This documentation is for the intended purpose only and for the use of the intended recipient only.
Please retain control of this documentation. It is not to be forwarded or distributed. Any
unauthorized review, copying, use, disclosure or distribution is strictly prohibited. The material
herein is provided ”as-is" and ASML makes no warranty of any kind with regard to this material.
ASML shall not be liable for errors and omissions contained herein.

Trademarks
ASML, ASM Lithography, TWINSCAN, MASKRIGGER, MASKWEAVER, LITHOCRUISER,
ATHENA, QUASAR, IRIS, MICRALIGN, PAS 5500, PAS 5000, 3DAlign, 2DStitching, 3DMetrology,
and the ASML logo are trademarks of ASML Holding N.V. or affiliate companies. The trademarks
may be used either alone or in combination with a further product designation.

Starlith and Aerial are trademarks of Carl Zeiss.

Nothing in this documentation is intended to make representations with regard to whether any
trademark is registered or to suggest that any sign other than those mentioned should not be
considered to be a trademark of ASML or of any third party.

ASML Confidential
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Contents
l General UNIX knowledge
l Terminal window
l Command line interface
l User security
l Boot & Shutdown
l File system commands
l Displaying text files
l Shell features
l TWINSCAN directory structure
l File security
l Sending files
l Zipping and unzipping files
l Working remotely on a system
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Goals

l After completion of this module the trainee;

l will be able to explain the global concepts of the
TWINSCAN directory structure, and identify specific
components.
l will be able to explain the purpose, functionality, and use
of the built in software tools.
l will be able to run basic UNIX commands

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 UNIX architecture

Shell: C-shell, Bourne, Korn.

Hardware

Kernel: sun4c,sun4m,
sun4u,...

Applications: TWINSCAN

ASML Confidential
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An operating system is the program that controls all the other parts of a computer system - both the
hardware and the software. Most importantly, it allows you to make use of the facilities provided by
the system. Every computer has an operating system.
The UNIX operating system is build in layers:
Kernel
The kernel is at the core of each UNIX system and is loaded in whenever the system is started up -
referred to as a ‘boot’ of the system.
It manages the entire resources of the system. You do not need to know anything about the kernel in
order to use a UNIX system. This information is provided for your information only.
There are different kernels for different systems: sun4u is for the Ultra-10, sun4m is for the Sparc5
and sun4c for the IPX.
Shell
Once you've logged in, you're working with a program called a shell. The shell interprets the
commands you enter, runs the program you've asked for, and generally coordinates what happens
between you and the UNIX operating system. Common shells include Bourne, Korn, and C shell.
Applications
This is your TWINSCAN operator user interface where you actually enter your commands where the
shell is passing those commands to the kernel operating system.

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Using the terminal Window (1)

l The full power of UNIX is only available from a

command line. You can access a command line from
inside the graphical environment by opening a terminal
window.
l To open a terminal window:
l Click on the terminal symbol on the navigation bar
l A new window will open with a title bar that reads:
Terminal

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Using the terminal Window (2)

l Note: The pointer must be in the window for the cursor

to be active.
l When you want to close the window, you have two
options:
l quit the window completely or
l close it and minimise it to an icon on the desktop from
which it can be retrieved for continued use.

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 What is a command line interface?

l Unix commands are strings of text the user types on a

line, called the command line, on a screen from a
keyboard.
l After the desired text or command has been entered,
the ENTER key is pressed.
l Only now, the operating system interprets the command
and if it is a valid command, the task is performed.
l There are literally thousands of possible commands.
Fortunately, the ones you actually need to use are
limited in number.

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Discuss how the line can be edited using the arrow keys and the backspace and
delete keys before the Enter key is pressed.
Use the ‘clear’ command to clear the screen.

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 UNIX commands (1)

l All commands entered on a command line use this

form:
l <name of the command> <flags> <additional parameters>
rm -i <filename>
(remove) (confirmation) (filename)
l The name of the command is one word that ends with at
least one space.
l The flags are read by the command and tell it how to do
different tasks.
l Additional parameters may include file names or strings
of text the command uses.
l UNIX is case sensitive!

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• Discuss which symbols are allowed in the name.

• Describe some simple flags such as -a and -l for the ls command.

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 UNIX commands (2)

• Examples of valid command names would include:

boot eject
filemgr snapshot
textedit sysshutdown

• Invalid names would include:

you and me {no spaces allowed}

you&me {no special symbols allowed}

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Point out the differences between the valid and invalid names.

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 UNIX users

l There is no such thing as an unknown user. It is

impossible to interact with a UNIX system without
logging in as a user.

l A user will have permissions (or rights/abilities) and a

home directory on the hard drive.

l A user usually has a password.

l The most powerful user is root

(also called Super User (SU)).

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Before you can start using UNIX, your system administrator has to set up a UNIX
account for you. Think of this account as your office - it's your place in the UNIX
environment. So in addition to knowing your account name, you may also need to
know the hostname (name) of the TWINSCAN system that has your account.
Each user communicates with the TWINSCAN system from a terminal. To get into
the UNIX environment, you first connect to the system. (You may have a terminal
that's already connected to your TWINSCAN system.) Next, you start a session by
logging in to your UNIX account. Logging in does two things: it identifies which user
is in a session, and it tells the system that you are ready to start working. When
you've finished working, you log out - and, if necessary, disconnect from the UNIX
computer.
The concept of a user is crucial to protecting the system from non-authorized
persons.
The stability of the system is based in the concept that no user can damage the
critical files or the file structure.

The ‘root’ is all powerful and with certain commands is capable of damaging the
system and even erasing the whole harddrive. The password for the root is usually
kept secret and not made available to everyone. is used to perform administration
actions that are not allowed by the normal users. Such as installing patches,
defining network connection, etc… 11
 User security

There are two predefined users on ASML tools. They

are:

l UNIX login as atl.xxxx, no password required

(Note, xxxx is the tool number.)

l The TWINSCAN login is: asml, litho

Security should not be a problem in a fab but in order

to prevent problems, it is common to create special
logins for different categories of people who interact
with the tools.

ASML Confidential
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Discuss the difference between a UNIX user and the PAS user.
Discuss the use of the password and what makes a good password. Note, that
ASML makes the ‘atl.####’ user able to logon without a password. This is justified
because the system is in a ‘protected environment’ (the fab) and this user does not
have access or control of critical files. These rights are reserved to the ‘root’ user.

A good password is kept secret, not written down, and consists of random letters
(upper and lower case) and digits.

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 Software Structure on a TWINSCAN tool

The TWINSCAN login is: asmL, litho

(’atl.xxxx' login loads the TWINSCAN

software)

UNIX login as atl.xxxx, no password required

(Note, xxxx is the tool number.)

('Boot' command loads UNIX)

Start here: The hardware gives the 'Ok' prompt and

provides limited functionality.

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atl.#### (####=machine number) is the normal user for running the TWINSCAN
application.

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 System startup and shutdown

l Boot - starts the system from the ok prompt

l system_start - starts the application TWINSCAN software Fast/Tools

l system_stop -
see picture

l sysshutdown: Properly stops the TWINSCAN software and brings the system
down to the OK prompt. Use this command after system_stop.
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System_stop is not the formal way to stop a machine.

It just kills all ASML processes !!! So use the applications shutdown menu items.
The NORMAL way is to shutdown the system using the TWINSCAN application
menu: "System Shut-Down".

Sysshutdown is written by ASML and allows the user atl . xxxx to shutdown the
system without harming the FAST/TOOLS database.

System_restart is sometimes used as replacement for both the commands

system_stop and system_start. The system_restart command stops and starts the
system automatically. It is not preferred because it can cause some errors on
system start-up due to improper driver termination.

The command ‘boot -s’ starts in single user mode and is sometimes needed to
do system administration actions on a malfunctioning system. In single user mode
the file systems mounting and logins are disabled. A common task to do in single
user mode is the command fsck to check and repair any corrupted file systems.

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 UNIX file system

l Tree structure of directories and files, similar to MS-

DOS or Windows.

l Long filenames are allowed, but avoid slashes, spaces

and tabs.
l It is always safe to use: letters, digits, and _ (underscore)

l UNIX is case sensitive!

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The file structure is like MS-DOS. You can use cd to walk trough the tree structure.
Also cd .. is the same as in DOS.
The filenames are long and don't need the filename extension. Remember,
filenames are case sensitive !

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 Filesystem commands (1)

l Shell metacharacter (they represent something other than the

character or symbol that they are).
~ your home directory
./ your current directory (use pwd for full path)
/ the root directory
. when the first character of a file or directory
name means the file or directory not usually
visible.
@ a symbolic link when used in file names or
directories.
* wildcard character in executable files.
& placed after a command name, to keep the
terminal window open for other commands.
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Use the command ‘ls -a’ to see hidden files that begin with a dot.
Use the command ‘man ls’ for all the other options. The ‘man’ command is a
help function which displays the manual pages of the requested command.

The @ is a symbolic link to another directory (file). This metacharacter is shown if

you use the ls command. When the long list command ll is used, the symbolic link
will be shown as an arrow (-->).
Symbolic links can be made with the command ln -s
Example: ln -s /usr/asm/data.0000/images image
This example will create a symbolic link named image to the directory
/usr/asm/data.0000/images

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 Filesystem commands (2)

l cd : change your current working directory

cd .. move up one level of the directory tree
cd ../data.xxxx move to another directory using a relative pathname

cd go directly to your home directory

cd / go directly to your root

l ls : use the ‘ls’ command to list the files in a directory

ls -l long listing (try using ‘ll’ and compare results)
ls ~/ER list files in another directory

l pwd : print working directory (display the pathname of the current working
directory)

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The above slide gives a brief summary of each command. Use the manual pages
(command ‘man’) for a more complete explanation.

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 File handling (1)

l mkdir: create a directory

mkdir mynewdir this command creates the directory mynewdir.

l rmdir: remove an empty directory

rmdir mynewdir this command removes the empty directory mynewdir.
See previous slide if directory is not empty

l touch: update the date and time a file was last modified to the
current date and time
touch -c newfile The -c option prevents the filename from being
created if it does not already exist.

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The access permissions for a directory that you create are set to a predetermined
value which ensures that other users cannot get access to your directories and
their contents. This value is defined by the file-creation mode mask.
To display the value of this mask enter the command ‘umask’.
Without the mask the system would set permissions of 666 for files and 777 for
directories when first created. The values in the mask are subtracted from these
values to give a default value for access permissions for the files and directories
created by you. To change your default access permissions use the command
‘umask nnn’
Example:
‘umask 002’ this command give all access permissions to the group and allow
other users read and execute permission
This subtracts 002 from the system defaults to give a default access permission for
your files of 664 (rw-rw-r--) and for your directories of 775 (rwxrwxr-x).

The touch command can also be used to create a new file.

E.g. ‘touch newfile’ will create the file newfile.

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 File handling (2)

l cp : copy files
cp -p *.const ~/mydir The -p command duplicates not only the
contents of source_file, but also preserves the owner and group id and permissions
modes.

l mv : move (rename) files and directories from one place to another

mv file_old file_new this command renames file_old to file_new.
mv file_old ~/newdir this command moves the file file_old to the
directory /newdir. The ~ is referring to the home directory atl.<nnnn>.

l rm : remove files or directories

rm *.bak this command removes all the files with the extension .bak.
rm -r old_dir this command removes the directory old_dir and his
content.

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Take care what name you give to the file copy. If you choose the name of a file that
already exists it will be overwritten by the new copy! To avoid this use the cp
command together with its -i option. This will prompt you for confirmation whenever
the copy would overwrite an existing file.
If you want to copy a subdirectory and all of his content, use the ‘cp -r’
command. E.g. cp -r olddir/ newdir/

When you move a directory to an existing directory, then the source directory will
become a subdirectory of the existing directory.

rm is an alias in our system. Use \rm to use the original one.

Example:
\rm -rf mydir will remove mydir and all its files and subdirectories.
The command rm -f mydir will only remove all its files in the mydir directory.

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 Displaying Text Files (1)

l The cat command is usually used to join two files one after the
other (concatenate)
l cat: concatenate and display files
cat myfile the file will be displayed on the screen. If the file content is
bigger than the screensize, the beginning of the file will not be visible anymore.

l more or page : browse through a text file page by page

cat myfile | more the file “myfile” will not be displayed on the screen,
but will be redirected (using the pipe | command) to the command ‘more’.
The ‘more’ command will display the file per page on the screen.
Ditto for the ‘page’ command.
The ‘page’ command will also clear the screen and displays the file at the top of the
screen.

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Use the manual pages for further exploration and for a the complete explanation.
The manual pages can be opened with the command ‘man <command>’, e.g.
‘man cat’.

The cat command can also be used to redirect the content of the file to a mail
address.
E.g. cat <filename> | mail [email protected]

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 Displaying Text Files (2)

l tail: display the last part of a file

tail -20 ER/ER_event_log this command will display the last
20 lines of the ER_event_log file.

l head: display the first part of a file

head -20 ER/ER_event_log this command will display the first 20
lines of the ER_event_log file.

l say : allow the user to put a message on the screen.

(use between “ “ if you want to use it’s or don’t)

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Use the manual pages for further exploration and for a the complete explanation.

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 Displaying Text Files (3)
Text editor
l textedit: open a new text edit window. Also used to create a new
file.

l textedit <filename>: opens the file <filename> in a new

textedit window
e.g. the command textedit CM_release.dat will show the
following information:

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Use the manual pages for further exploration and for a the complete explanation.

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 Displaying Text Files (4)
VI screen editor
l The vi editor is available on all UNIX systems: other editors are not.
Being able to use vi ensures that you will always have an editor
available to you.
Vi only works fine if you know the commands (use only as a last
resort). Use textedit if possible!
l See below for the most used Vi commands:
l Moving cursor h j k l
l Moving screens ^f ^b ^u ^d
l Delete current line dd
l Delete current character x
l Search: /string/ and // to repeat last search.
l Goto the end with G and to a line number 10 with 10G
<Ctrl>-G displays current line number.
l Entering editing mode use a or i.
End edit mode with <esc>
l Exit vi with : x
l Exit vi with save :wq without save :q!

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Vi opens in command mode that allow you to move around and enter line
command mode with : or editing mode with a or i.
Leave line command mode and editing mode with <esc>
Search with string between / and /. Backward search with string between ? and ?.

q! = quit discarding any changes.

x or wq save file and quit

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 Miscellaneous software commands:
C-shell features
l !! - Repeats last command
l !mo - uses last command that starts with mo
l ^ab^df - execute last command and replaces ab with df
l history - shows a list of recent commands
l <esc> - will try to finish the filename that you are typing
l cd use*/jobs - does a cd user_data/jobs
l textedit & - start textedit as a separate process
l alias - asigning your own name for a command
l env - shows environment variables
l I/O redirection - sends command output elsewhere:
ls > list.txt

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Use the manual pages to view all the C-shell features. The manual pages can be
viewed with the following command ‘man csh’.
Remembering the name of a command and how it is used can be difficult.
Assigning your own name for a command - an alias - is very easy. To view all
assigned alias command use the command ‘alias’.
Assigning an alias is done with the command: alias name definition.
Example: alias del 'rm -i’ this creates the alias del for the command rm -
i which prompts you for confirmation before removing a file.
del memo.txt
rm: remove memo.txt? y

The command ls > list.txt will not list the content of the directory on the
screen, but will send the output to the file list.txt.

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 Miscellaneous software commands:
snapshot
l snapshot:
used to capture some or all of a screen image and save it to a
raster file. Can be saved as a jpeg (.jpg) image if desired.

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Snapshot can come handy if you want to save graphics produced by the test
software.
E.g. mirror map graphics will be generated after completion of the wafer stage
mirror map calibration test. If you save the test log file (tlg file) the graphics are lost.
Hence the snapshot tool can be used to save the graphical output of the test.

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 UNIX (Solaris) version on your system

l Recognize what is on your system with the command

uname -a
l The following will appear on your screen:
release 3.2 (solaris 8):

SunOS m2295 5.8 Generic_108528-13 sun4u sparc SUNW,Ultra-60

l Hardware details will be displayed with prtconf

l prtconf -v

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ASML delivers a UNIX version and the TWINSCAN application together on one
CDROM. This means that when a new release of the TWINSCAN software is
introduced, it can come with changes in UNIX.
At this moment most systems will run Solaris 5.8

Beside different UNIX releases we have also different architectures of sun

computers. Sparc 1, IPX and Sparc 5.
An easy way to recognize the Solaris version is the use of the command uname.
‘uname’ = print name of current system

The command ‘uname -a’ will give the following information:

operating system name, node name for the network, operating system release,
operating system version, machine hardware name, processor type.

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Recognize ASML software version (1)

l The most easy way to recognize ASML software version

is to look on the TWINSCAN navigation manager:

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 Recognize ASML software version (2)

l Other options to check your software version

(e.g. remote access)
l Go to the directory and file:
CM/CM_release.dat
3.2.0.c Twinscan Customer Version, 07/27/2002

l In errorlog:
09/18/2002 11:40:09.6507 Machine:0000 (Rel:3.2.0.c, SXEH
[816], SX_EH_rq.c, 1.58, 954)
SYSTEM EVENT: SX-000C DEFAULT
SECS manager event.
Component SX succesfully initialized.

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The file /usr/asm/atl.0000/CM/CM_release.dat hold the ASML software

version. View the file with the ‘more’ command.
‘more CM_release.dat’

The software version is also shown in the errorlog file.

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Recognize ASML machine number

l In the TWINSCAN navigation manager click

configuration ==> software ==> software
configuration overview

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 THE TOP-LEVEL DIRECTORY STRUCTURE

l The top-level directory structure is as follows:

/

tls@ usr/asm/

atl.<nnnn> (TWINSCAN) data.<nnnn>

l where <nnnn> stands for a unique machine

identification number.
l The atl.<nnnn> directory is the ”home" directory from
which the software accesses all its files.
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All directories on a UNIX system are organized into a hierarchical structure that you
can imagine as a family tree. The parent directory of the tree is known as the root
directory and is written as a forward slash (/).
The two main branches of the UNIX directory structure are atl.<nnnn> and the
data.<nnnn> (where <nnnn> is the system number). The atl.<nnnn> directory is
defined as the home directory. The atl.<nnnn> directory contains the TWINSCAN
application software.
Note, all non necessary directories from the root (/) and from usr/asm/ are left
out!
Some softlinks from within the atl.<nnnn> directory to the data.<nnnn> directories
are defined for transparent usage of the software. The link /tls@ points to the
/usr/asm/data.<nnnn>/.FT/tls/ directory, required by FAST/Tools.

Note:
FAST/Tools is a real-time database used for storage and retrieval of component
data.
FAST/Tools is not meant as a communication interface between all components,
i.e., the flow of control data should not be done via FAST/Tools.

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 THE ATL.<NNNN> DIRECTORY STRUCTURE

Atl.<nnnn>

Bin/ El.<n> Lib/ ER@ FT@ TM@ <cc> share/ user_data@ service_data@
directories

VW/ SUN/ SUN/ VW/ reserved@ icon/ help/

hsms/

secs1/

install/

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Each subsystem has a directory. These are subdirectories of the atl.<nnnn>

directory. They are not shown in the slide. Machine constants for the subsystems
are written to files (.const files) in the associated directories. These directories are
located in /usr/asm/atl.<nnnn>/* where * stands for the subdirectory name
e.g. FO = focal
The bin directory contains executables.
Users should not place or create subdirectories in the atl.xxxx directory. Rather
they should be included in the data.<nnnn>/user_data directory.
Files and format of files under the atl.<nnnn> directory can be freely changed by
software, unless a softlink exists to the data.<nnnn> directory. However, files
residing under the data.<nnnn> directory can only be changed after agreement with
marketing and customer service.
The directories shown that end with an @ symbol are symbolic links to other
directories. Symbolic links can be thought of as short cuts to other directories or
files. For example, the ER@ directory is a symbolic link to the data.xxxx directory

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 THE ATL.<NNNN> DIRECTORY STRUCTURE

l Explanation of abbreviations
bin/vw/ Executables (binaries) for the VxWorks processors (*.o files)
bin/sun/ Executables (binaries) for the Sun processor
bin/sun/hsms/ Executables for one SECS control mode
bin/sun/secs1/ Executables for another SECS control mode
bin/sun/install/ Support scripts for (re)installation
el.<n>/ Boot code for VxWorks processor <n>
lib/sun/ Shared object libraries for the SUN processor
lib/vw/ Shared object libraries for the VxWorks processors
ER@ Symbolic link to the hidden directory data.<nnnn>/.ER
FT@ Symbolic link to the directory data.<nnnn>/.FT
TM@ Symbolic link to the directory data.<nnnn>/.TM
<cc>/ Component <cc> owned directories, containing machine constants files (for
subsystem drivers), or the option file and machine definition file (used for the
configuration manager).
reserved@ Symbolic link to /reserved/<cc>/
share/icon/ Common storage for icon pixmaps.
share/help/ Common storage for ASML help text.
user_data@ Symbolic link to the directory data.<nnnn>/user_data
service_data@ Symbolic link to the directory data.<nnnn>/service_data

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 THE DATA.<NNNN> DIRECTORY STRUCTURE

data.<nnnn>

service_data/ .ER/ user_data/ .TM/ .FT

test_data@ testqueus/ <cc> Several subdirectories see next slide tls/

containing test com@ dat/
log files (.tlg files)
exe@ log/

lib@ lst/

src@ sav/

sup/

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The slide above shows some of the data.xxxx part of the file system.
The test_data@ directory located under the service_data directory is a symbolic
link to the hidden Test Manager directory (.TM/) which contains a list of all tests,
test queues and test reports.
There are numerous other subdirectories under the service_data directory where
the software puts .tlg files (test log files generated by tests defined in the test
manager).

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 THE DATA.<NNNN> DIRECTORY STRUCTURE

data.<nnnn>

user_data/

help/ alignment_recipes/ error_logs/ lot_reports/ jobs/ reticle_layout/ reticle_database/ reticle_data/ RDM/

asm/ error_log.cur@ asm/ export/

error_log.old@ extern/
system/ test/
export/

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The slide shows that reticle data, jobs batch reports etc. are located in
subdirectories of the user_data directory.

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 THE DATA.<NNNN> DIRECTORY STRUCTURE

l Explanation of abbreviations
service_data/ Contains non-user files that have to be exported. Specific diagnostic information,
intended for service engineers, can be accessed through this directory. In contrast to
the “user_data” directory, the format of files that are gathered in this directory may
easily be different between subsequent releases.
service_data/<cc>/ Specific data for component <cc>.
service_data/<cc>/<ccbb> Specific data for the test <ccbb>.
service_data/test_data@ Symbolic link to the .TM directory.
service_data/testqueues/ Testqueues.
.ER/ A hidden directory that contains the current active error log file, and the previous error
log file. When a new log file is created, the previous log file is gzipped. Maximum 10
gzipped will be saved.
user_data/ Directory for storing user data.
user_data/help/ Common storage for customer help text.
user_data/alignment_recipes/ User-defined recipes. The user is free to organise these recipe files by defining
directories and filenames in this directory.
user_data/alignment_recipes/asm/ Contains ASML-defined OA recipes for different marks and different process layers
(application). It also contains a default recipe named "default_job_recipe".
user_data/alignment_recipes/asm/system/ Contains ASML-defined OA recipe for fiducial marker under the name
"ME_default_fiducial_recipe".
user_data/alignment_recipes/asm/test/ Contains ASML-defined OA recipes used for metro and alignment tests. It also
contains default recipes for EM and LA tests under the names
"ME_default_test_recipe" and "AL_default_test_recipe", respectively.
user_data/error_logs/ Directory for error logfiles.
user_data/error_logs/error_log.cur@ Symbolic link to the current active error log files in .ER.
user_data/error_logs/error_log.old@ Symbolic link to the previous error log files in .ER.
user_data/lot_reports/ Lot reports for finished lot files.
user_data/iris_reports/ Reticle inspection reports

ASML Confidential
/ Slide 35 For training purposes only

35
 THE DATA.<NNNN> DIRECTORY STRUCTURE

l Explanation of abbreviations
user_data/batch_reports/ Batch reports for finished batch files.
user_data/iris_reports/ Reticle inspection reports
user_data/jobs/ User-defined jobs. The user is free to organise this job files by defining directories and
filenames in this directory.
user_data/jobs/ This directory is controlled by the component JD (Job Definition). It contains job definition files.
One directory (asm) is already available at installation time.
user_data/jobs/asm/ Contains ASML-defined jobs used for the ATP (Acceptance Test Protocol) and the FAT
(Factory Acceptance Test).
user_data/jobs/extern/ Reserved directory. When present, it is a mounted directory on a path that lies outside
/usr/asm/data.xxxx. This may even be a mount on a remote filesystem. The mounting itself is
done by the root user once. On VxWorks processors, there is no need to mount this directory,
as it is used by SUN-based processes only.
user_data/monitoring/ Productivity / reliability monitoring data
user_data/reticle_database/ Contains reticle data and reticle layouts stored in the file “reticle_database”.
user_data/reticle_database/export/ Import/export data that belongs to one specific reticle, to or from the database.
user_data/reticle_data/, Used to store old reticle specific data and old reticle layout files, respectively. With the upgrade
user_data/reticle_layout/ component (UP), these files are converted to the new format in the directory
“reticle_database”.
RDM/ Used to store Self-contained Recipes
.TM/ A hidden directory that contains a list of all tests, the predefined test queues, and the test
reports.
.FT/ FAST/Tools directory.
.FT/tls/ FAST/Tools standard directory.
.FT/tls/com@, exe@, lib@, src@ Symbolic link to FAST/Tools release data and executable directories.
.FT/tls/dat/, log/, lst/, sav/, sup/ Directories for user data storage, i.e. Recipe Manager Database.

ASML Confidential
/ Slide 36 For training purposes only

36
 Symbolic links
/

tls@ user/asm/

atl.<nnnn>/ data.<nnnn>/

FT/ user_data@ user_data/ .ER/ service_data/ .TM/

service_data@
tls/ error_logs/ <current log> test_data@
ER@
<old log>
com@ TM@

exe@

lib@ error_log.cur@ error_log.old@

scr@

ASML Confidential
/ Slide 37 For training purposes only

The directories shown that end with an @ symbol are symbolic links to other
directories. Symbolic links can be thought of as short cuts to other directories or
files. For example, the ER@ directory is a symbolic link to the data.<nnnn>
directory.
There are many (symbolic) links between the atl.<nnnn> directory and
data.<nnnn> directory. The slide shows how these two directories are linked (all
non-essential information is left out).

The directories/files shown that start with a ‘dot’ are hidden directories/files.
They are not visible while navigating true the directory structure.Make hidden
directories/files visible with the command ‘ls -a’.

37
 UNIX file system

The file system is root

file system + mounts
of other file systems
such as tape drives
and floppy disks or
even other computers.

ASML Confidential
/ Slide 38 For training purposes only

38
 File Manager

l The file manager can be opened with the command

‘filemgr’

ASML Confidential
/ Slide 39 For training purposes only

A file manager program provides the user with a graphic representation of the
directory structure and can be used to navigate through the directories. Files can be
dragged and dropped between locations. Alternatively the user can navigate through
the directory structure and handle files using UNIX commands.
As with other work station programs, the file manager is opened through a command
tool. The command to open the file manager is ‘filemgr&’
If the ‘&’ symbol were not included in the command, the terminal window would be
unusable while the file manager is open.

39
 File security

l After an ‘ll’ command you might get…

l lrwxrwxrwx 1 root root 22 Sep 24 17:23 TM ->

/usr/asm/data.0000/.TM/
l drwxr-xr-x 2 atl.0000 ATLAS 1024 Nov 11 13:14 TS/
l -rw-rw-r-- 1 atl.0000 ATLAS 20 Nov 17 17:37 jan.txt

Group
Owner File name
d|rwx|rwx|rwx
R = read
- File
W = write
d Directory
E = execute
b Block special device entry Owner World
c Character special device entry Group
p Named pipe
l Symbolic link

ASML Confidential
/ Slide 40 For training purposes only

Example on how to read access permissions:

To display the permissions on a single file use the command ‘ls -l file’
The result of this command would be
-rw-r--r-- 2 unixjohn doc 3287 Apr 8 12:10 file

This displays the following information about the file “file”.

-rw-r--r-- access permissions

2 number of links to this file
unixjohn owner
doc group ownership
3287 size in bytes
Apr 8 12:10 date and time last modified

40
 Understanding file permissions
• By turning on or off the three binary bits (of the bit-mask
syntaxes) we can change the permissions for a file.
• The first 3 bits change the read permission, the second 3
bits the write permission and the last 3 bits the execute
permission
100 - Read permission - The decimal equivalent of this binary value is 4
010 - Write permission - The decimal value for write is 2
001 - Execute permission - he decimal value for execute is 1

r = 4 w = 2 x = 1

For example: rwx = 4+2+1 = 7

rw- = 4+2+0 = 6
--x = 0+0+1 = 1
r-x = 4+0+1 = 5

ASML Confidential
/ Slide 41 For training purposes only

Every file and directory in your account can be protected from or made accessible to other users by
changing its access permissions.
You can only change the permissions for files and directories that you own.
Read permission is given the value 4, write permission the value 2 and execute permission 1.
r w x
4 2 1

These values are added together for any one user category:
1 = execute only
2 = write only
3 = write and execute (1+2)
4 = read only
5 = read and execute (4+1)
6 = read and write (4+2)
7 = read and write and execute (4+2+1)

So access permissions can be expressed as three digits. For example:

user group others

chmod 640 <file> rw- r-- ---
chmod 754 <file> rwx r-x r--
41
chmod 664 <file> rw- rw- r--
 Change attributes

l chmod : change the access mode of one or more files.

l example; chmod 777 myfile

l chown : change the ownership of one or more files

l example; chown atl.0000 myfile

l chgrp : change the ownership of one or more files to a

new group
l example; chgrp ATLAS myfile
l Important: You must be the owner of the file or root to
change the permissions of a file.

ASML Confidential
/ Slide 42 For training purposes only

These commands are NOT part of the objectives but because the concept of
permissions is discussed on the previous pages they are included in this slide.
They certainly don't need to be emphasized in this course.

42
 File conversion
l Text file difference between DOS & UNIX:
l Coding of the End_of_line statement.
l If a UNIX text file is opened under DOS (without conversion),
DOS does not recognise the End_of_line code,
The DOS text editor displays a ‘unknown_character’ code instead
of a line feed.
l Convert text files with unix2dos or dos2unix
Example: unix2dos myfile myfile.txt

UNIX file DOS file

l To open a file in UNIX use the textedit command.

Example: textedit& myfile This command will open the file myfile.
The metacharacter & is used to preserve terminal availability. Without this character the
terminal will be locked for further commands until the texteditor is closed.

ASML Confidential
/ Slide 43 For training purposes only

unix2dos and dos2unix convert text between UNIX and DOS.

A program as FTP can convert automatically if you put it in ASCII transfer mode
instead of binary mode.
FTP will be explained later on in this module. See section on remote login.

43
 File gathering

l tar: create tape archives, and add or extract files

tar cvf erlog.tar ~/ER/ER_event* this command
creates a tape archive file called erlog.tar with all the files ER_event* in the ER
directory.

Backup MCs: tar cvf MC_back.tar ~/*/*.const this

command copy all the files with the extension .const from all the directories in he root to the
MC_back.tar file

Restore MCs: tar xvf MC_back.tar

l gzip: compresses and decompresses files

gzip erlog.tar this command compresses the erlog.tar file.
gzip -d erlog.tar.gz this command decompresses the
erlog.tar.gz file.

ASML Confidential
/ Slide 44 For training purposes only

The “tar” command can be used create a specially formatted copy or archive of
files or directories. The command is an acronym for tape archive, although it is
commonly used with floppy disks. There are several arguments associated with tar.
These are described below
c copy from the hard disk to the floppy. Note the use of c will cause the existing
files on the floppy to be overwritten.
u will, in contrast to c, add files to an existing archive or update files that have
changed since they were last archived.
t will list the contents of the archive on a floppy.
x can be used to extract the contents of an archive from a floppy to the hard disk.
Either individual files or the entire archive can be extracted. Files are written to the
directory where the tar command was issued .
v means verbose and provides information about what the command is doing.
f indicates the device on which the archive is to be created/read/extracted the
default at ASML being the floppy.

GZIP tip: Use MS-Windows file types (.tar, .gz, .tgz, .uue). GZIP will automatically
ad the extension .gz to the zipped file. Use the copy ‘cp’ command to change the
file extension. E.g. ‘cp mcconst.tar.gz mcconst.tar.tgz’.
For the .uue extension use the uuencode command. See next slides for 44
explanation.
 Gathering and Sending Files

l Follow these steps to send files to 2nd or 3rd line for analysis:

l Identify the files to send and make a tar file.

l Example: tar cvf erlog.tar ~/ER/ER_event*

l Compress the tar file into a zip file.

l Example: gzip erlog.tar (creates file: erlog.tar.gz )

l Attach the resulting file to an email and send.

ASML Confidential
/ Slide 45 For training purposes only

Walk through the steps and describe what happens and then practice in on a Stand
Alone Work Station (SAWS).

45
 Sending more data… !
erlog.tar
3 Mb
~/ER/ER_event* erlog.tar.gz erlog.tar.gz.uu
3 * 1 Mb 0.4 Mb
gzip 0.3 Mb
tar cvf uuencode

Mail As text
Attachment in mail

To: [email protected]
via patchmail or laptop

tar xvf gzip -d uudecode

ASML Confidential
/ Slide 46 For training purposes only

With tar you can archive files into one file. This file is not compressed.
With gzip you can pack this large file. Use ‘gzip -h’ for help on this command.
The tar and gzip can be combined with gtar. Gtar allows the z option for zipping. So
gtar czvf ... or gtar xzvf ... or gtar tzvf ...
Use recognizable filetypes :
*.tar = tar
*.gz = gzip
*.uu = uuencode
*.tgz = gzip-ed tar file
Uuencode is used to convert files into ASCII format, allowing it to be used by
programs that do not handle binary files, such as electronic mail.
Used as:
‘uuencode file.gz file.gz > file.gz.uu’ this command converts the
binary file file.gz into an ASCII (text) file file.gz.uu
‘uudecode file.gz.uu’ reverses the latter command.

ASCII (American Standard Code for Information Interchange)

A standard code used for representing information on computer systems and 46
networks
 Software command: snapshot

l snapshot:
used to capture some or all of a screen image and save it to a
raster file. Can be saved as a jpeg (.jpg) image if desired.

ASML Confidential
/ Slide 47 For training purposes only

Snapshot can come handy if you want to save graphics produced by the test
software.
E.g. mirror map graphics will be generated after completion of the wafer stage
mirror map calibration test. If you save the test log file (tlg file) the graphics are lost.
Hence the snapshot tool can be used to save the graphical output of the test.

47
 Mounting the diskette on SAWS, TWINSCAN

l On a stand alone work station (SAWS)

l insert floppy
l type: volcheck -v
l to access floppy, type cd /floppy/floppy0
l to eject floppy, type eject

l On a TWINSCAN (external drive)

l insert floppy (will automatically mount)
l to access floppy, type cd /rmdisk/rmdisk0
l to eject floppy, type eject -f /vol/dev/aliases/rmdisk0

ASML Confidential
/ Slide 48 For training purposes only

Files from the TWINSCAN application software can be copied to DOS formatted
floppies. Before using a DOS floppy disk on a UNIX system it is necessary to
mount the floppy disk. The floppy is a file system which when mounted becomes an
extension of the UNIX file system. Mounting the disk makes the connection
between the main file system and the extension (the floppy).

Remember to use the eject command before removing the floppy disk from the
drives. On older systems, which have no eject button, this is the only way to
remove a floppy from a drive.
With the eject command the floppy will be unmounted automatically. The
command unmountall can be used as alternative.

48
Copying files on floppy disk

l To copy files on DOS/UNIX formatted floppy’s use the following

command:
On a SAWS cp errorlog.cur /floppy/floppy0
On a machine cp errorlog.cur /rmdisk/rmdisk0

l Unformatted
On a SAWS tar cvf /vol/dev/aliases/floppy0 <filename>
On a machine tar cvf /vol/dev/aliases/rmdisk0 <filename>

l Diskette can be formatted with the following command

l fdformat -d (dos format)
l fdformat -u (unix format)

Make sure to unmount the floppy first with the eject command before
formatting.

ASML Confidential
/ Slide 49 For training purposes only

49
 Working Remotely on the TWINSCAN:
Using telnet
l Telnet allows a person to log on and work on the tool as
if they were standing at the operator control unit.
l You do NOT have the graphical interface of the
TWINSCAN software.
l Instead, you will be running a shell (terminal) with a
command line.
l By connecting from a SAWS, you can use VI to edit files.
This is not possible from a PC telnet connection.

ASML Confidential
/ Slide 50 For training purposes only

The computer you log in to may not be the computer you need to use. For instance,
you might have a workstation (or PC) on your desk but need to do some work on
the TWINSCAN machine in another building..

Your UNIX system can probably connect to another computer to let you work as if
you were sitting at the other computer. To do this, you first log in to your local
computer.
Then you start a program on your local computer that connects to the remote
computer. Some typical programs are telnet and rlogin (for connecting over a
computer network). You use the remote system until you're done; when you log off
the remote computer, the remote-login program quits, and then returns you to your
local computer.

50
 Working Remotely on the TWINSCAN:
Using telnet
l From a Stand Alone Work Station (SAWS):
l open terminal window and type telnet
(type help for a list of command options)
l to connect to a machine type: open mXXXX
(XXXX stands for the machine number)
l to login type: atl.XXXX
l …
l perform the desired tasks on the remote system
l …
l type exit or logout to break the connection and exit
telnet

ASML Confidential
/ Slide 51 For training purposes only

The difference between exit and logout command to close a login session:
• If you type exit the telnet session will be closed as well the terminal window.
• If you type logout the telnet session will be closed without closing the terminal
window.

51
 Working Remotely on the TWINSCAN:
Using UNIX command rlogin
l From a Stand Alone Work Station (SAWS):
l open terminal window and type:
rlogin -l atl.<nnnn> m<nnnn>
(a password is not needed)
l perform the desired tasks on the remote system
l type logout to break the connection and exit your login
session.

ASML Confidential
/ Slide 52 For training purposes only

rlogin establishes a remote login session from your terminal to a remote

machine.
The command -l username specifies a different username for the remote login.
If you do not use this option, the remote username used is the same as your local
username.

Example:
rlogin -l atl.0000 m0000
This logs the user in to the remote system named m0000 (hostname) on which
they have an account for the username atl.0000.

52
Working Remotely on the TWINSCAN:
Using telnet
l From a PC on the network:
l Open a MSDOS Command Prompt window and type
telnet
l open the Connect | Remote system menu and enter a
valid machine name. (see also next page)
l When the tool responds, log in with atl.mXXXX
(XXXX stands for the machine number)
l …
l perform the desired tasks on the remote system
l …
l type exit or logout to break the connection.

ASML Confidential
/ Slide 53 For training purposes only

53
Working Remotely on the TWINSCAN:
Using telnet
l Graphical overview of a telnet session on a PC

ASML Confidential
/ Slide 54 For training purposes only

54
 Working Remotely on the TWINSCAN:
Using ftp
l ftp stands for file transfer protocol.

l ftp doesn’t give you the range of options you have

from a command line as telnet provides.

l However, ftp allows you to copy files between the

computer you are on and the machine to which you are
connected.

ASML Confidential
/ Slide 55 For training purposes only

Ftp is not a replacement for Telnet. They complement each other.

55
Working Remotely on the TWINSCAN:
Using ftp
l From a SAWS:
l open terminal window and type ftp
(type help for a list of command options)
l to connect to a machine type: open mXXXX
(XXXX stands for the machine number)
l fill in username: ftp.<nnnn> (where <nnnn> is machine
number)
l fill in password: ftp … now you have your ftp prompt
l copy files using get (from machine to SAWS) and send
(from SAWS to machine)
l type close or disconnect to close the connection or
l type bye to break the connection and exit the ftp session.

ASML Confidential
/ Slide 56 For training purposes only

56
Working Remotely on the TWINSCAN:
Using ftp
l Graphical overview of a ftp session on a SAWS:
l open terminal window and type ftp
l to connect to a machine type: open mXXXX
l fill in username: ftp.<nnnn>
l fill in password: ftp

ASML Confidential
/ Slide 57 For training purposes only

57
Working Remotely on the TWINSCAN:
Using ftp
l From a PC on the network:
l Open a DOS Command Prompt window and type ftp
l to connect to a machine type: open mXXXX
(XXXX stands for the machine number)
l When the tool responds, log in as ftp.<nnnn> (where
<nnnn> is machine number)
l use ftp as password
l copy files using get and send
l use close or disconnect to close the connection or
l use bye to break the connection and exit ftp.

ASML Confidential
/ Slide 58 For training purposes only

58
Connecting a laptop on a TWINSCAN machine :
Using ftp
l The following slides describe the steps to connect a
laptop on a TWINSCAN machine.
l These slides are only intended to give an global
overview.
l The procedure (cscs006a_ins.fm) is available in coach.
Make sure that you always use the latest version.

ASML Confidential
/ Slide 59 For training purposes only

59
Connecting a laptop on a TWINSCAN machine
• Before connecting a laptop on a
TWINSCAN pay attention to the
following points:
• Make sure that no lots are
running on the system.
• The laptop is turned off and not
connected to the power supply.

NOTE:
• Use an UTP Ethernet cable to
connect the laptop to HUB at the
back side of the system
• The lower HUB is for the QFE1
connection.

QFE (Quad Ethernet Interface)

ASML Confidential
/ Slide 60 For training purposes only

60
Connecting a laptop on a TWINSCAN machine

l From the menu bar (of your laptop) select:

l start --> programs --> command prompt
l In the DOS window type:
l ipconfig /all
l a list of IP addresses will be visible. Note the IP address from
the DHCP server and the machine number <nnnn>.

ASML Confidential
/ Slide 61 For training purposes only

61
Connecting a laptop on a TWINSCAN machine

l Start the ftp program in the DOS window with the

following commands:
l ftp <IP address from the DHCP server>
e.g. ftp 10.x.x.95
l username: ftp.<nnnn> (where <nnnn> is machine
number)
l password: ftp
l If username and password are correct the system will
give the ftp> prompt.
l The system is ready to transfer files

ASML Confidential
/ Slide 62 For training purposes only

62
Connecting a laptop on a TWINSCAN machine

l Before you transfer files, specify the destination

directory on your laptop:
l do this with the lcd (local change directory) command
e.g. lcd d:\temp.
l The command to transfer files is mget
l mget <filename>
multiple files will be copied from the TINSCAN machine
into your specified directory on your laptop.
l The session can be quit with the command:
l bye

ASML Confidential
/ Slide 63 For training purposes only

63
Some useful ftp commands

l ascii set ftp to transfer a text file

l binary set ftp to transfer a binary file
l cd dir change remote directory to dir
l dir print a list of file in the remote directory
l get fn get file fn from the remote system
l lcd dir change directory on local system to dir
l ls list files in remote directory
l mget get multiple files (use wildcard matching)
l mput send multiple files (use wildcard matching)
l pwd show working directory on remote system

ASML Confidential
/ Slide 64 For training purposes only

64
Practice

l Check which user you are now with ‘who am i’ or

‘logname’ or ‘id’.

l Use ‘who’ or ‘finger’ to see who else is on the system.

l When using the command ‘id’ the abbreviations uid and gid
will be visible on the screen.

e.g. uid=15115(atl.9151) gid=9999(ATLAS)

uid = user id
gid = group id

ASML Confidential
/ Slide 65 For training purposes only

65
Practice

l Use ‘cd’ to go to the asm jobs directory

/usr/asm/atl.####/user_data/jobs/asm

l List the hidden files in your home directory

l List all files with one entry per line.

ASML Confidential
/ Slide 66 For training purposes only

66
Practice

l Create a text file with ls > dir.txt and use vi to show this file and
move around with your cursor. Insert your own text and delete
some lines. Save and quit your new file.

l Repeat the above action by using the texteditor.

l Spot the differences.

ASML Confidential
/ Slide 67 For training purposes only

67
Practice

l Look in the errorlog file. The errorlog file can be found in the
directory /usr/asm/ER/
The errorlog is big, so better use the ‘tail’or ‘head’
command.

l Spot the differences between both commands.

ASML Confidential
/ Slide 68 For training purposes only

68
Practice

l As root, create a file (ls > dir.txt) and play with chmod:
l Use chmod for changing the permission mode of this file so that
the user has read, write and executable rights, but the group an
others have no rights at all.
l ‘chmod xxx dir.txt’ fill in the xxx

l Use ‘ll’ or ‘ls -l’ to see the permissions.

ASML Confidential
/ Slide 69 For training purposes only

69
Practice

l Check the active mountings with ‘mount’.

l Remove mountings with ‘umountall’ and restore them with
‘mountall’

l Use a formatted floppy to copy files.

l Use also tar. (the DOS format of the floppy disk is lost after tar is
used to copy files).

ASML Confidential
/ Slide 70 For training purposes only

70
Practice

l Create a file with the texteditor.

l Save the file on disk and make a copy.
l Save the original file on floppy without UNIX2DOS conversion.
l Save the copied file on floppy with UNIX2DOS conversion.
l Load the floppy on a DOS system and look at the differences.

ASML Confidential
/ Slide 71 For training purposes only

71
Practice

l Create a directory and create one file in this directory that holds
a zipped version of both the errorlog file and the old errorlog file.
l Send the zipped file to your own email address.
l Remove the file and directory you just created.

ASML Confidential
/ Slide 72 For training purposes only

72
Appendix

Machine Constants and Factory Constants

ASML Confidential
/ Slide 73 For training purposes only AP-L1-SL-1v0

73
Machine Constants and Factory Constants

l Machine constants and factory constants describe

l characteristics of a machine that are specific for a single
machine (machine constant) or
l for a specific production line in a factory (factory constant).

ASML Confidential
/ Slide 74 For training purposes only

74
 Machine Constants

l Machine constants are a combination of calibration

constants and design constants.
l Calibration constants are:
l Physical parameters that determine the exact behaviour and
adjustments of the software components of a machine, The
values for the machine constants are specific (different) for
each machine.

l Design constants are

l Machine parameters that are identical for all machines.
They are not modified by calibration software, and any change
to their value must be performed for all machines.
(e.g., with a patch).

ASML Confidential
/ Slide 75 For training purposes only

There is a set of machine constants for each (hardware) subsystem component,

and also for several software components.

Each component is responsible for its own set of machine constants. They are
gathered into a constants-file (<file>.const), which is stored in the directory
belonging to that component.
This component is called the owning component, meaning that it (or its test
software) is allowed to write in the constants file directly. Other components that
are interested in importing the value of a machine constant of another component
are called using components.

75
 Machine Constants

l The following categories of machine constants can be

distinguished:
l Boot critical constants
l These constants require a fresh startup (i.e., a system_stop
followed by a system_start) of the complete software before
they can become effective.
l System-wide initialisation critical constants
l These constants are used by more than one component, When
a constant of this category changes, the change is effectuated
by a full initialisation (shutdown + full startup) of all drivers.
l Regular machine constants
l These constants may be changed by the test software without
re-initialisation of the entire system.

ASML Confidential
/ Slide 76 For training purposes only

Test software is typical ASML terminology for a set of programs (tests) that are
used for calibrating (part of) a subsystem, to test its behaviour, to track
malfunctioning electronics or mechanics, etc. In general, it is software that is not
related to the production of wafers.
A test is only responsible for a single specific hardware function, which is the
reason why more than 300 tests have been developed within ASML.

76
Modification of Machine Constants

l Machine constants may only be changed by:

l the Machine Constants editor
l the test software of the owner-component
l the driver software of the owner-component.
l Direct access to the machine constants file of a
component is not allowed.
This leads to unwanted dependencies and to
inconsistencies if the component's processes are
running.
l It is not allowed to change machine constants during lot
production.

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77
Factory Constants

l Factory constants are machine parameters that the

customer typically sets for an entire production plant.
l Factory constants are managed by the customer, and
machine constants are managed by the machine itself
and by ASML service personnel.
l Factory constants are similar to machine constants with
respect to backup, upgrade, storage, and editing
facilities.

ASML Confidential
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 ASML Confidential
/ Slide 79 For training purposes only

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