TWINSCAN -T Machine Based Diagnostic

System (MBDS)
For Training Purposes Only

ASML Confidential
/ Slide 1 For training purposes only AP-L1-SL-1v0

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COPYRIGHT
© 2003, ASML Holding N.V. (or affiliate companies). All rights reserved.
This documentation is subject to change without notice and contains confidential and proprietary
information of ASML Holding N.V. or affiliate companies ("ASML").
This documentation is for the intended purpose only and for the use of the intended recipient only.
Please retain control of this documentation. It is not to be forwarded or distributed. Any
unauthorized review, copying, use, disclosure or distribution is strictly prohibited. The material
herein is provided ”as-is" and ASML makes no warranty of any kind with regard to this material.
ASML shall not be liable for errors and omissions contained herein.

Trademarks
ASML, ASM Lithography, TWINSCAN, MASKRIGGER, MASKWEAVER, LITHOCRUISER,
ATHENA, QUASAR, IRIS, MICRALIGN, PAS 5500, PAS 5000, 3DAlign, 2DStitching, 3DMetrology,
and the ASML logo are trademarks of ASML Holding N.V. or affiliate companies. The trademarks
may be used either alone or in combination with a further product designation.

Starlith and Aerial are trademarks of Carl Zeiss.

Nothing in this documentation is intended to make representations with regard to whether any
trademark is registered or to suggest that any sign other than those mentioned should not be
considered to be a trademark of ASML or of any third party.

ASML Confidential
/ Slide 2 For training purposes only

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 Machine Base Diagnostic System (MBDS)

l The MBDS system is used to monitor the status of the

Twinscan.
l Main functions of the MBDS:
l Monitor all safety-related interlocks, EMO’s and other
emergency related detectors.
l Monitor machine based functions that could not be
allocated to a standard function or subsystem of the
machine.
l Being an aid for system installation, for the above
mentioned monitoring functions.
l Display the status to the user on 2 identical control panels.
l Logging of alarms.

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/ Slide 3 For training purposes only

The MBDS is realised as an independent system. If the TWINSCAN system is

partial powered down, but the 24 Volt DC power supply is still active, the MBDS
remains fully operational.
When the MBDS is powered down and/or disconnected from the 24 Volt DC power
supply, it shall not influence the operation or functioning of the TWINSCAN system.

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Who is the user of the diagnostic tool?

l Service engineer is the primary user.

l In case of partial shutdown of the machine, MBDS
(Machine Base Diagnostic System) provides the following
information:
l priority of the alarm
l location of the alarm
l filtering of the alarms on priority
l Designers, Customer Support, etc are secondary users.
l Tool for:
l Testing
l System installation, up to status “shutter open” in cabins

ASML Confidential
/ Slide 4 For training purposes only

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 Hardware configuration

l The Diagnostic Human Machine Interface (DHMI) has

two control panels, one located in the Mains Distribution
Cabinet (MDC) and the other in the Machine Cabinet
(MCAB), at the rear side of exposure unit. S9 = Shutdown

l Control Panels
l TFT touch screen Soft PLC keys
S1 to S10

l 10 softPLC keys
l 10 function keys
l ENTER & ESC keys

Function keys
ESC and ENTER

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/ Slide 5 For training purposes only

The function key area contains buttons, which are accessible at all times. The
Escape and Enter buttons on the control panel are windows buttons. The Escape
button is used in the application to get some additional information / screens and
the Enter button is used to close popup windows.
Both the function keys on the display as the buttons on the bottom of the screen,
can be used for navigation to the main screens. The MBDS Hardware button will
change colour and blink if an alarm on one of the nodes should occur. The function
keys for Location Search and Function Search will not change colour.
The SoftPLC buttons are hardware buttons and are used as shortcuts within the
MBDS application to go to the Production and Service screens.

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 MBDS graphical user interface
l The graphical user interface consists of a number of screens which all have the
same layout. The general layout of the screens is divided into four areas.

S1 S2 S3 S4 S5 S6 S7 S8 S9 S10 Soft PLC Buttons

Title area

User The figure gives an

defined
area
overview of the
different areas.

Status area

Function
key area

Esc F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 Enter Function Key

Buttons

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/ Slide 6 For training purposes only

Interaction with the operator can be done via the touch screen, the function buttons
(F1 - F10, Esc, Enter) located on the bottom of the control panels, or the SoftPLC
buttons (S1 - S10) located on the top of the control panels.

The user can navigate through the various screens, by pressing the highlighted and
blinking elements. The machine modules are represented as rectangles. These
rectangles do not give insight on the exact location of the source of the alarm, but
will start to blink in the colour corresponding to the priority of the underlying
alarm(s). They will help the user to quickly get to the right screen; where a more
detailed graphic of the sub module is presented and the source of the alarm is
coloured according to the highest priority level.

For more and detailed information regarding explanation and functionality of the
MBDS refer to the word document operatinginstruction_DHMI2.doc.

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MBDS used Symbols

l The figure below shows the symbols used in the MBDS

application. These symbols change colour according to
the alarm state.

S
Fan unit Circuit breaker Smoke Sensor
H2 O
Relay state Earth leakage Water Sensor
P
EMO Button Interlock Pressure Sensor
T
EMO Dummy Vsource DC Temp Sensor

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/ Slide 7 For training purposes only

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 Diagnostic Human Machine Interface:
Navigation

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Visual Elements:
Overview of the screen hierarchy
User Action:
From this screen the user can navigate to all the screens

The first row of accentuated blocks are the main navigation indicators,
corresponding with the main overviews and can be accessed at any time from the
buttons located at the bottom of the screen or the equivalent function keys

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 Diagnostic Human Machine Interface:
Location search

ASML Confidential
/ Slide 9 For training purposes only

Visual Elements:
Schematic overview exposure unit and cabinets, including the laser and beam
delivery

User Action :
No user action needed, other then navigating to and solving possible errors.
Alarms:
Alarm in underlying object; the main element will blink and change colour according
to the highest active priority level.

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 Diagnostic Human Machine Interface:
Wafer handler

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/ Slide 10 For training purposes only

Visual Elements:
Top view of the Wafer Handler with detailed view of all the I/O concerning the
safety handling box wafer handler (SHB-WH (II)).

Alarms:
Smoke detector, relays, interlocks, pressure sensors, fan unit and 24Vdc.

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 Diagnostic Human Machine Interface:
Reticle handler

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Visual Elements:
Top view of the Reticle Handler
Detailed view of all the I/O concerning the safety handling box reticle handler (SHB-
RH (II)).

Alarm:
Smoke detector, relays, interlocks, pressure sensors and 24Vdc.

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 Diagnostic Human Machine Interface:
Illuminator

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/ Slide 12 For training purposes only

Visual Elements:
• Schematic overview of the Illuminator.
• Inner cover interlocks for the illuminator.
• Information about the start-up sequence of light source.
• Digital and analog presentation of analog values for the nitrogen and/or air
pressure sensors and temperature energy sensors, including warning levels
Alarm:
• Interlocks, changing color of analog sensors according to set limits, ‘Sensor’
button changes color if a sensor is in a warning zone according to the pressure
temperature interlock (PTI) board.

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 Diagnostic Human Machine Interface:
Laser

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Visual Elements:
• View of front side of the Laser including Beam Delivery System.
• Information about the start-up sequence of light source.

Alarm:
• EMO button, smoke / water leakage detector, interlocks, 24Vdc.

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 Diagnostic Human Machine Interface
MBDS hardware overview

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/ Slide 14 For training purposes only

Visual Elements:
• Schematic overview of DeviceNet nodes, iPC and control panels

User Action:
• The user must solve the error if this screen appears, because the faulted nodes
will not give accurate information to the user.
• Pressing ESC, brings up a TwinCAT system manager screen, with detailed error
codes on the DeviceNet
• Possible to suppress this screen by setting the Test mode ON via the screen

Alarm:
• Changing colour if an error occurs
• In case of an MBDS hardware error, this screen pops up with an interval of 15
seconds.

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 Diagnostic Human Machine Interface:
Production and service
l Test Mode

l NOTE: DIAGNOSTICS WITH INCOMPLETE

HARDWARE IS NOT RELIABLE !!!

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/ Slide 15 For training purposes only

Test Mode On / Off

Function to suppress the MBDS Hardware and the popup screens from blocking
over the current screen. The function Test Mode On/Off is very useful when parts
of the diagnostic system are not present or not connected. However, the logic's in
the software will not work properly. So use only the I/O Monitor screens.
When this button is pressed, the message “Test Mode Active” will be shown and
blinking at the top of each screen.

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 Diagnostic Human Machine Interface:
EMO overview

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/ Slide 16 For training purposes only

Visual Elements:
• Overview of state and location of EMO buttons and EMO.

User Action :
• Pressing the “Test Screen” button will show the test screen.
• Possible to reset the test by pressing “ESC”.

Alarm:
• EMO buttons and dummies.

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 Diagnostic Human Machine Interface:
General settings

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/ Slide 17 For training purposes only

Visual Elements:
Option menu for machine layout configurations and software.
User Action:
Selecting and setting machine layout configurations for:
• Machine type (if changed, sensor limits must be selected)
• Left / right side OIU
• Presence / absence smoke and water leak detectors
• Suppressing of subsystems
• Reading the sensor values from registry, according to machine type. By selecting these buttons a
popup window will appear which show the current settings. After 3 seconds the user can load the
limits.
Software configuration:
• Disabling / Enabling the alarm logger.
• Reading the last saved settings from the registry
• Reading the default ASML factory settings from the ini-file
• Saving the adjusted settings to the registry. If the industrial PC (iPC) is shut down and restarted,
the saved settings will be used.

Info:.
• The settings made in this screen will have affect on the proper working of the MBDS application,
so make sure these settings are correct.
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Diagnostic Human Machine Interface

l MBDS and DHMI info on intranet site:

http://www5nl.asml.nl/~elayout/mgils/mbds.html
l Help document embedded in DHMI:
Help (pdf file)

ASML Confidential
/ Slide 18 For training purposes only

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