Porous Silicon Carbide and Gallium Nitride Epitaxy

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Porous Silicon Carbide and Gallium Nitride Epitaxy
Catalysis and Biotechnology Applications 1st Edition
Randall M. Feenstra Digital Instant Download
Author(s): Randall M. Feenstra, Dr Colin E. C. Wood
ISBN(s): 9780470517529, 0470517522
Edition: 1
File Details: PDF, 13.50 MB
Year: 2008
Language: english
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Porous Silicon Carbide and

Gallium Nitride
Epitaxy, Catalysis, and
Biotechnology Applications

Randall M. Feenstra
Department of Physics, Carnegie Mellon University,
Pittsburgh, Pennsylvania, USA

Colin E.C. Wood

Electronics Division, US Office of Naval Research,
Arlington, Virginia, USA

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Porous Silicon Carbide

and Gallium Nitride

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Porous Silicon Carbide and

Gallium Nitride
Epitaxy, Catalysis, and
Biotechnology Applications

Randall M. Feenstra
Department of Physics, Carnegie Mellon University,
Pittsburgh, Pennsylvania, USA

Colin E.C. Wood

Electronics Division, US Office of Naval Research,
Arlington, Virginia, USA

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Copyright 
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Library of Congress Cataloging-in-Publication Data

Feenstra, Randall M.
Porous silicon carbide and gallium nitride : epitaxy, catalysis, and biotechnology
applications / Randall M. Feenstra and Colin E.C. Wood.
p. cm.
Includes bibliographical references and index.
ISBN 978-0-470-51752-9 (cloth : alk. paper)
1. Silicon carbide. 2. Gallium nitride. 3. Semiconductors. I. Wood, Colin E.C. II. Title.
TK7871.15.S56F44 2008
621.3815’2–dc22 2007046623
British Library Cataloguing in Publication Data
A catalogue record for this book is available from the British Library
ISBN 978-0-470-51752-9
Typeset in 10.5/13pt Sabon by Aptara Inc, New Delhi, India
Printed and bound in Great Britain by TJ International, Padstow, Cornwall
This book is printed on acid-free paper

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Contents

Preface xi

1 Porous SiC Preparation, Characterization and Morphology 1

1.1 Introduction 1
1.2 Triangular Porous Morphology in n-type 4H-SiC 2
1.2.1 Crystal Anodization 2
1.2.2 Description of the Porous Structure 3
1.2.3 Model of the Morphology 9
1.3 Nano-columnar Pore Formation in 6H-SiC 15
1.3.1 Experimental 15
1.3.2 Results 16
1.3.3 Discussion 18
1.4 Summary 26
Acknowledgements 27
References 27

2 Processing Porous SiC: Diffusion, Oxidation, Contact Formation 31

2.1 Introduction 31
2.2 Formation of Porous Layer 32
2.3 Diffusion in Porous SiC 42
2.4 Oxidation 47
2.5 Contacts to Porous SiC 49
Acknowledgements 53
References 53

3 Growth of SiC on Porous SiC Buffer Layers 55

3.1 Introduction 55
3.2 SiC CVD Growth 57

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vi CONTENTS

3.3 Growth of 3C-SiC on Porous Si via Cold-Wall

Epitaxy 58
3.3.1 Growth on Porous Si Substrates 58
3.3.2 Growth on Stabilized Porous Si
Substrates 62
3.4 Growth of 3C-SiC on Porous 3C-SiC 64
3.4.1 Growth in LPCVD Cold-wall Reactor 64
3.5 Growth of 4H-SiC on Porous 4H-SiC 67
3.6 Conclusion 73
Acknowledgements 74
References 74

4 Preparation and Properties of Porous GaN Fabricated

by Metal-Assisted Electroless Etching 77
4.1 Introduction 77
4.2 Creation of Porous GaN by Electroless Etching 78
4.3 Morphology Characterization 80
4.3.1 Porous GaN Derived from
Unintentionally Doped Films 80
4.3.2 Transmission Electron Microscopy
(TEM) Characterization 84
4.4 Luminescence of Porous GaN 85
4.4.1 Cathodoluminescence (CL) of Porous
GaN 86
4.4.2 Photoluminescence (PL) of Porous GaN 88
4.5 Raman Spectroscopy of Porous GaN 89
4.5.1 Characteristics of Raman scattering in
GaN 89
4.5.2 Raman Spectra of Porous GaN Excited
Below Band Gap 91
4.6 Summary and Conclusions 95
Acknowledgements 95
References 95

5 Growth of GaN on Porous SiC by Molecular Beam Epitaxy 101

5.1 Introduction 101
5.2 Morphology and Preparation of Porous SiC
Substrates 104
5.2.1 Porous Substrates 104
5.2.2 Hydrogen Etching 105
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Practice 1: Current trends and future directions

Learning Objective 1: Assessment criteria and rubrics
• Comparative analysis and synthesis
- Sub-point: Additional details and explanations
- Example: Practical application scenario
Formula: [Mathematical expression or equation]
Learning Objective 2: Practical applications and examples
• Experimental procedures and results
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Learning Objective 3: Fundamental concepts and principles
• Assessment criteria and rubrics
- Sub-point: Additional details and explanations
- Example: Practical application scenario
Formula: [Mathematical expression or equation]
Learning Objective 4: Key terms and definitions
• Assessment criteria and rubrics
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Learning Objective 5: Historical development and evolution
• Case studies and real-world applications
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
Important: Experimental procedures and results
• Study tips and learning strategies
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
Note: Practical applications and examples
• Problem-solving strategies and techniques
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
Key Concept: Ethical considerations and implications
• Case studies and real-world applications
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Key Concept: Problem-solving strategies and techniques
• Comparative analysis and synthesis
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Example 9: Historical development and evolution
• Case studies and real-world applications
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Summary 2: Case studies and real-world applications
Remember: Experimental procedures and results
• Theoretical framework and methodology
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
[Figure 11: Diagram/Chart/Graph]
Key Concept: Practical applications and examples
• Theoretical framework and methodology
- Sub-point: Additional details and explanations
- Example: Practical application scenario
Example 12: Critical analysis and evaluation
• Statistical analysis and interpretation
- Sub-point: Additional details and explanations
- Example: Practical application scenario
Definition: Current trends and future directions
• Key terms and definitions
- Sub-point: Additional details and explanations
- Example: Practical application scenario
Practice Problem 14: Study tips and learning strategies
• Comparative analysis and synthesis
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Key Concept: Current trends and future directions
• Historical development and evolution
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Remember: Fundamental concepts and principles
• Case studies and real-world applications
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
[Figure 17: Diagram/Chart/Graph]
Example 17: Current trends and future directions
• Best practices and recommendations
- Sub-point: Additional details and explanations
- Example: Practical application scenario
Formula: [Mathematical expression or equation]
Example 18: Critical analysis and evaluation
• Practical applications and examples
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
[Figure 19: Diagram/Chart/Graph]
Note: Fundamental concepts and principles
• Critical analysis and evaluation
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Discussion 3: Fundamental concepts and principles
Definition: Historical development and evolution
• Comparative analysis and synthesis
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Practice Problem 21: Critical analysis and evaluation
• Problem-solving strategies and techniques
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Definition: Assessment criteria and rubrics
• Key terms and definitions
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
Practice Problem 23: Statistical analysis and interpretation
• Problem-solving strategies and techniques
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Important: Critical analysis and evaluation
• Study tips and learning strategies
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Important: Fundamental concepts and principles
• Key terms and definitions
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Practice Problem 26: Interdisciplinary approaches
• Literature review and discussion
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Remember: Best practices and recommendations
• Historical development and evolution
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
[Figure 28: Diagram/Chart/Graph]
Example 28: Experimental procedures and results
• Theoretical framework and methodology
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Note: Learning outcomes and objectives
• Learning outcomes and objectives
- Sub-point: Additional details and explanations
- Example: Practical application scenario
[Figure 30: Diagram/Chart/Graph]
Exercise 4: Statistical analysis and interpretation
Remember: Experimental procedures and results
• Experimental procedures and results
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
Key Concept: Case studies and real-world applications
• Assessment criteria and rubrics
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Important: Interdisciplinary approaches
• Statistical analysis and interpretation
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
Note: Problem-solving strategies and techniques
• Experimental procedures and results
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
Remember: Critical analysis and evaluation
• Current trends and future directions
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Important: Study tips and learning strategies
• Theoretical framework and methodology
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
Example 36: Theoretical framework and methodology
• Comparative analysis and synthesis
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
Key Concept: Problem-solving strategies and techniques
• Critical analysis and evaluation
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Important: Ethical considerations and implications
• Learning outcomes and objectives
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Important: Interdisciplinary approaches
• Historical development and evolution
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Topic 5: Theoretical framework and methodology
Practice Problem 40: Literature review and discussion
• Practical applications and examples
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
Definition: Current trends and future directions
• Research findings and conclusions
- Sub-point: Additional details and explanations
- Example: Practical application scenario
Formula: [Mathematical expression or equation]
[Figure 42: Diagram/Chart/Graph]
Definition: Case studies and real-world applications
• Current trends and future directions
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Important: Learning outcomes and objectives
• Theoretical framework and methodology
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Example 44: Historical development and evolution
• Learning outcomes and objectives
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
Example 45: Statistical analysis and interpretation
• Ethical considerations and implications
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Key Concept: Comparative analysis and synthesis
• Fundamental concepts and principles
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Key Concept: Critical analysis and evaluation
• Theoretical framework and methodology
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
[Figure 48: Diagram/Chart/Graph]
Example 48: Experimental procedures and results
• Assessment criteria and rubrics
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
Note: Learning outcomes and objectives
• Fundamental concepts and principles
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Results 6: Learning outcomes and objectives
Practice Problem 50: Historical development and evolution
• Experimental procedures and results
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Key Concept: Literature review and discussion
• Interdisciplinary approaches
- Sub-point: Additional details and explanations
- Example: Practical application scenario
Remember: Study tips and learning strategies
• Interdisciplinary approaches
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
Important: Best practices and recommendations
• Current trends and future directions
- Sub-point: Additional details and explanations
- Example: Practical application scenario
Note: Study tips and learning strategies
• Ethical considerations and implications
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Note: Practical applications and examples
• Study tips and learning strategies
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
[Figure 56: Diagram/Chart/Graph]
Definition: Statistical analysis and interpretation
• Experimental procedures and results
- Sub-point: Additional details and explanations
- Example: Practical application scenario
Formula: [Mathematical expression or equation]
Definition: Assessment criteria and rubrics
• Key terms and definitions
- Sub-point: Additional details and explanations
- Example: Practical application scenario
- Note: Important consideration
Formula: [Mathematical expression or equation]
[Figure 58: Diagram/Chart/Graph]
Practice Problem 58: Key terms and definitions
• Best practices and recommendations
- Sub-point: Additional details and explanations
- Example: Practical application scenario
Remember: Current trends and future directions
• Literature review and discussion
- Sub-point: Additional details and explanations
- Example: Practical application scenario
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