Training module

This document is ASML Confidential

Configuration: Document ID: Issue date:

TwinScan TT-L2-CS, version3v0 1/1/2005
3.4
Module ID: Status:
TT-L2-CS Released

LEVEL 2 PERIODIC MAINTENANCE

TRAINING - COMPUTER SYSTEMS
FOR TRAINING PURPOSES ONLY

ASML Confidential - This document is provided for employees of ASML and for selected employees of ASML's customers
and agents, in order to assist them in efficient use of ASML products. The document must not be disclosed to third parties.
 i About this module TT-L2-CS

COPYRIGHT © 2004, ASML Holding N.V. (or affiliate companies). All rights reserved.
This documentation is subject to change without notice and contains confidential and
proprietary information of ASML Holding N.V. or affiliate companies ("ASML").
This documentation is for the intended purpose only and for the use of the intended
recipient only. Please retain control of this documentation. It is not to be forwarded or
distributed. Any unauthorized review, copying, use, disclosure or distribution is strictly
prohibited. The material herein is provided "as-is" and ASML makes no warranty of
any kind with regard to this material. ASML shall not be liable for errors and
omissions contained herein.

Trademarks ASML, ASM Lithography, TWINSC AN, MASKRIGGER, MASKWEAVER,

LITHOCRUISER, ATHENA, QUASAR, IRIS, MICRALIGN, PAS 5500, PAS 5000,
3DAlign, 2DStitching, 3DMetrology, and the ASML logo are trademarks of ASML
Holding N.V. or affiliate companies. The trademarks may be used either alone or in
combination with a further product designation.

Starlith and Aerial are trademarks of Carl Zeiss.

Nothing in this documentation is intended to make representations with regard to

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whether any trademark is registered or to suggest that any sign other than those
mentioned should not be considered to be a trademark of ASML or of any third party.
ABOUT THIS MODULE TT-L2-CS

MODULE INTRODUCTION

This section contains the module appetizer. The student is motivated to study this
module. Often, the main motivation is knowing the impact on system performance of
the task(s) discussed in this module.

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GENERAL MODULE INFORMATION

Objectives Upon successful completion of the module, you are able to:
• Start and Stop a TWINSCAN and associated software
• Initialize a TWINSCAN system
• Backup sepcified files
• Backup the system disk
• Determine available disk space by file system
• Clean the DAT drive

Test Demonstrate the above listed tasks on a SAWS or TWINSCAN system

Prerequisites None

Additional Materials None

 iii About this module TT-L2-CS

SAFETY

Safety related items are indicated in this manual by:

• A pictogram
• A description that tells how serious the danger is and any actions necessary to
prevent it
The three levels in safety are:
• Danger, shows a very dangerous situation that, if not prevented, could result in
death or a very serious injury
• Warning, shows a dangerous situation where there is a risk of serious injury
• Caution, shows that equipment or property could be damaged or there is a risk of
minor injury
Before you install, operate or maintain the system, read the applicable safety manual.
There is a safety manual for each system.

Definition of The following pictograms are used in ASML equipment:

pictograms :
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General hazard Electrostatic damage Laser radiation UV radiation Electrical hazard

Flammable substance Toxic hazard Chemical hazard Hot surface(s) Sharp object(s)

Strong magnetic field(s) Lifting heavy object(s) Moving parts Moving heavy object(s) Radio frequency radiation

General warnings
Warning All forms of operation, installation work, maintenance, repair, modification and all
other activities involving the different systems must only be carried out by authorized,
fully qualified personnel.
Warning Only personnel who have received ASML maintenance training are allowed to open
system covers.
Warning All safety and other requirements described in ASML manuals, the applicable
contracts and the law must be observed at all times.
Warning Use of controls or adjustments or performance of procedures other than those
specified in ASML manuals may result in hazardous radiation exposure.
Warning The mains power switch can be locked off during maintenance. Lockout/tagout
procedures should be according to local fab standards. In the U.S.A. these
procedures must conform to OSHA standard 1910.147.
Warning During maintenance, all machine operating control points must be tagged to prevent
accidental operation.
 Table of Contents iv

Chapter 1 Computer Systems

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
TwinScan Software General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Brief Review of the Navigation Manager 2
Stopping and Starting TWINSCAN Software 3

UNIX System Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

Backups 11
File System Maintenance 16
System Generated Reports 17

Chapter 2 Procedures
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Shutdown and Startup of the TwinScan Software. . . . . . . . . . . . . . . . 20
Make a Backup of Machine Configuration Files . . . . . . . . . . . . . . . . . 22
Make a File Backup of Machine Configuration Files . . . . . . . . . . . . . . 23
Make a Tape Backup of the System Files. . . . . . . . . . . . . . . . . . . . . . . 24

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Make BackupS of the Hard Disk, Incremental / Full . . . . . . . . . . . . . . 25
Make More Disk Space . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Clean the Tape Drive . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
ASML Confidential v Table of Contents
 1
COMPUTER SYSTEMS

INTRODUCTION A TWINSCAN system is a marvel of sophisticated electromechanical devices

and highly precision optics. However, it would be of little use without the very
sophisticated computers and the software that runs the system.
This module contains an explanation of some of the basic user interactions with
the computer system such as stopping and starting the system, loggin in,
backing up files, and checking the health of the system’s disk drive(s).

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In following modules, subsystem specific diagnostic utilities and programs will
be covered.
 2 For training purposes only

TWINSCAN SOFTWARE GENERAL

TWINSCAN software is an extremely complex multi-layered set of programs which

interact with each other and the hardware to provide the logic required to run the
system.
The host computer in an /1100 series TWINSCAN is a Sun Microsystems Ultra-60.
The TWINSCAN applications program was developed and written by ASML Software
Engineering. It is the applications program that provides the user interface to a
TWINSCAN and all the functionality associated with the system. The operating
system, which provides the platform on which the applicaiton is written, is UNIX / Sun
Microsystems Solaris, and Open Windows based, and, incorporates a number of
purchased program tools such as VxWorks, which is used in the subsystem
controllers, and Fast Tools, which is part of system software management.
The application features an easy to use Graphical User Interface (GUI), and supports
touch screen functionality to make user interaction with the system less cumbersome
in a clean room environment. The /1100 series systems has a custom keyboard with
a built in track ball and custom built display unit.
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The software is constantly evolving as new and better methods for managing and / or
controlling the system are discovered, and as new features are added.

Brief Review of the Navigation Manager

The terminal screen capture below is the software release 3.3.c Start Up / Shutdown
view of the Navigation Manager. It will be used as a point of review for the
components of the Navigation Manager window.

The window is surrounded by a typical Open Windows frame, which contains the title
of the window. In this case TWINSCAN Navigation Manager.

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Below the window frame across the top is the Title Bar. The Title Bar contains
information such as the status of SECS communication, Date and Time, the name of
the selected function, (in this case Start Up / Shutdown), machine type, software
release, in this case 3.3.c, the name of the user logged into the TWINSCAN
application, and the level of that user. In later releases additional information will be
added into the Title Bar.
The bulk of the window is called the Information area. In the pictured window the
information area shows the status of all the subsystems. To the right of the
Information area is a Function bar. The Function bar in the Start Up / Shutdown
window includes the system start, stop, and display refresh buttons. Note that not all
Information windows have a Function bar.

In some windows, particularly test windows in which information must be provided in

order to run the test, information is displayed between the bottom of the Information
area and above the navigation buttons. An example of the information is the upper
and lower range of the information that can be entered in a specific field in the test
configuration.
Finally, across the bottom of the window are the Navigation buttons, which are used
to select the various “views” supported by the application.

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Stopping and Starting TWINSCAN Software
UNIX / Solaris and the TWINSCAN application software can be thought of as two
separate entities in as much as UNIX and the application are stopped and started
separately, although the application is dependent upon UNIX.

Stopping TWINSCAN software

The operating system must be running in order for the application to run. Therefore,
the sequence for shutting down a TWINSCAN is to first stop the application, then
stop UNIX. Note that for some diagnostic procedures and / or system recovery, it may
not be necessary to stop UNIX, only the application. Both situations are covered in
the following paragraphs.

Shutting down to power off state using the TWINSCAN software

When a system is to be shutdown to power off state, first the application will be
stopped, then the operating system. To facilitate this process, there is a function
within the application’s graphical user interface (Start Up / Shutdown view) which will
automatically shut down the system, or, the process can be performed manually
using UNIX.

When shutting down a system using the TWINSCAN application program, there is
one precondition which must be taken into consideration. That is the production Lot
Queue must be stopped before the software will allow the application to stop.
The picture below is of the Lot Operations view of the Navigation Manager, with the
Stop Queue pop up window displayed. To reach this view, the Lot Operations button
was selected, and within the Lot Operations view, the Stop (Queue) button was
selected. To stop the queue, the “Stop Queue” radio button was selected. To
complete the procedure, the “OK” button would be selected.

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To continue shutting the system down using the software, the next step would be to
select the Start Up / Shutdown navigation button, which brings up the Start Up /
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Shutdown view.

Then, from the Function bar, select Shutdown System and UNIX. This action would
bring up a popup window with a statement describing briefly the action which is about
to take place, and a warning that once started, it can not be stopped.

To shut the system down to power off state, select the OK option in the popup
window.

When the TWINSCAN application program has stopped, the Navigation Manager
window will disappear. In many, but not all, cases there will be two windows behind
the Navigation Manager, a Terminal, and a Console.

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The console in a pure UNIX environment is used by the system administrator to
manage the system, and the system displays operating system relevant messages to
the console. A Terminal is a user window into UNIX.

When UNIX has shutdown to single user mode, all the windows will disappear from
the terminal, and a series of messages from the UNIX kernel will be displayed. When
UNIX has stopped, a few residual kernel messages may be left on the display, and
on the bottom line the ok prompt will be displayed.

um oun t: /usr/asm bu sy
T he system is do w n.
IN IT : failed w rite o f utm px entry:”s0”
IN IT : failed w rite o f utm px entry:”s0”
syn cing file syste m s . . . D one
P ro gram term in ated
ok

The ok prompt is generated by the computer system firmware. The computer

firmware can support a limited number of commands, including some very low level
diagnostics, low level configuration scans, etc. The firmware also contains the code
necessary to start to operating system.

Shutting down to power off state using UNIX

Using UNIX to bring a system down would typically only be done in the event that the
TWINSCAN application had already been stopped. However, it is not necessary to
stop the application first. The command sysshutdown will safely stop the application,
then UNIX very much as the Shutdown System and UNIX button does.The

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sysshutdown command is linked to the UNIX root user command shutdown. In the
unlikely event sysshutdown failed to execute, it is possible to change user ID to root
and issue the shutdown command.
Interacting directly with UNIX requires use of a Terminal or Console window (usually
a Terminal). To open a Terminal window using the TWINSCAN application, select the
Other Functions navigation button, and from the popup menu, select Desk Top, and
from the Desk Top menu, select Terminal.
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This action will open a Terminal window over the top of the Navigation Window.

To bring the application and UNIX down, enter the sysshutdown command at the
UNIX prompt.

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Note that if the TWINSCAN application is not running, it is possible to open a

Terminal window by placing the mouse cursor in a blank area on the OIU screen, and
click the right mouse button. This will bring up a list of utilities. Select the Tools
option, and from Tools, select Terminal. To bring the system all the way down to
power off use the syshsutdown command.

Shutting down the TWINSCAN application

During normal maintenance of a TWINSCAN it is not typically necessary to bring the
system all the way down to power off state. However, there are occasions that it is
necessary to stop and restart the application. For example, if after performing
maintenance, several subsystems do not re-initialize. In some instances, stopping
and restarting the application will correct that situation.

To stop the application from within the software, select the Start Up / Shutdown view
from the Navigation manager, and select the under the Shutdown section of the
Function bar, select System. This will bring down the application only.

If the application software has become confused, or has locked up, and will not
execute Shutdown System from the menu, either open a Terminal from the Other

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Functions, Desktop, or if that is not available, minimize the Navigation Manager
window, and start a Terminal with the UNIX utilities (right mouse button, select Tools,
Terminal).
To stop the application using UNIX, enter the command system_stop . This
command will post a warning that the application is about to be stopped, and will
prompt continue, yes or no. Enter y to select yes.

As the system_stop program shuts down the application, there will be a few screen
messages, the last of which will be “stopping fast tools . . . . .”
When the UNIX prompt comes back, the application has stopped.

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Starting / restarting the TWINSCAN application - UNIX running

To start, or restart the application, open a Terminal window and enter the command
system_start. The start program will display the message “starting fast tools”,
followed by a few other lines. In a short time the Navigation Manager window will
open, and shortly there after the TWINSCAN application login prompt will popup in
the center of the Navigation Manager window.
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Starting / restarting the TWINSCAN system from power down state

From the “ok” prompt, to restart the TWINSCAN system, enter the command boot.

Note that UNIX can be booted using the commands reset, and sync as well. These
commands (boot, reset and sync) will cause the operating system to be loaded into
system memory, and begin executing. When the UNIX boot process is complete, the
OIU will display the Common Desktop Environment welcome window.

Note also that if TWINSCAN system power is cycled (system power off and on), the
UNIX computer will auto boot to the UNIX login - the CDE welcome window.

Welcome to m1234

Please enter your user name Sun

atl.1234 Microsystems

OK Start Over Options Help

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To start the TWINSCAN software, log into UNIX using the user identification (UID)
atl.####, where #### is the TWINSCAN system number. For example if the system
number were 1234, the login would be atl.1234. Note that the system number will be
displayed in the title of the Common Desktop Environment (CDE) welcome window.

Note that typically, there is no password required for the TWINSCAN UNIX user
(atl.####). However, it is possible to add password protection.

The TWINSCAN UNIX user has a fairly complex profile, which includes starting the
TWINSCAN application. Because of this, and the complexity of the TWINSCAN
software, it will take some time for the application to start. The first indication the
application is starting is the appearance of the Navigation Manager window. A short
time after the Navigation Manager is displayed, the Login Prompt will popup in the
middle of the Navigation Manager display.

ASML TWINSCAN software supports ten levels of TWINSCAN application user. The
logic behind the several levels of user is that not all users require the same level of
access to the many functions the application offers. For example an operator would
typically not need access to diagnostic tests. Defining TWINSCAN application users
and their level of access is normally done by the customer. There is however, a

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default Service Engineer user defined when the software is installed. The user name
is ASML, and the ASML user password is litho.

It is important to know the difference in the two logins. The atl.#### is the UNIX user,
ASML is the default TWINSCAN application software user. The way ASML software
is written, there is only one UNIX user, there may be many application users, and, the
application users will have different levels of access to the TWINSCAN software
programs.

Note that the Service Engineer (CSE) has unrestricted access to the application.

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TWINSCAN system initilization

Initilization is the process through which the UNIX computer and the subsystem
computers establish communication, down load the driver code to the subsystem
CPUs, and prepare the TWINSCAN for operation.

Historically there have been two modes of initilization, Full and Fast. Full initilization
restarted all the subsystems regardless of their current status, and Fast only started
those which were not ready for operation. However, in the latest revision of the
software (3.4) the Full initilization function has been removed. This is because the
software is now sufficiently intelligent to determine what initilization actions are
required. Along with a number of other performance enhancements in release 3.4 the
time required to initilize a TWINSCAN has been reduced. The screen capture below
is the release 3.4 System Start Up Shutdown window.
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After logging into the application, to initialize, select the Start Up / Shutdown button
from the navigation bar. From the Start Up and Shutdown view Function bar, (in
release 3.4 software), under the heading Start Up, select the Drivers button.
As the subsystems “come on line” the driver name in the display area will turn green,
indicating a successful start.

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UNIX SYSTEM MAINTENANCE

Backups
Backups are the first line of defence against a software disaster.

In administering a UNIX based computer system there are a number of possible

backup scenarios. In this program ASLM application supported system backup
procedures are covered briefly.

ASML defines several backup options and utilities which can be found in the COACH
procedures under Computer System.

Make a Tape Backup of the System Files / Machine Configuration Files

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These two back up types can be run from the Navigation Manager, Maintenance view
System Files option.

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There are several fields in the System Files - Backup dialogue. The first section
under the heading Backup ID are:

> Date / time, which is supplied by the operating system

> Machine number and software version, which is supplied by the operating system
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> Comment, which is supplied by the person making the backup. The comment
should contain a brief description of what is on the backup. This information is
recorded on the tape as header information and can be used to identify the tape prior
to restoring, or for archive management purposes.
Under the heading Backup Information are:
> Device, or backup media. The default device is Digital Audio Tape (DAT)
> Backup Type, The type may be Full or Specific. A Full backup DOES NOT
INCLUDE the OPERATING SYSTEM or the FAST TOOLS DATA. Full in this case
includes only the ASML system files. A Specific backup opens up a list of files or file
groups to be backed up.

It is from the list of files or file groups in the specific backup Machine Configuration
Files can be selected.

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 For training purposes only Chapter 1 13

COACH describes in detail the procedures for creating these backups, and the
procedures for restoring from tape.

Other options under the Maintenance, System Files pull down menu are:
> Restore, the procedures for which are described in COACH.
> Show Backup ID, which is a utility that will read the header on a DAT tape. This is
the information put on a tape when a backup is made.
> Show Backup / Restore History, which is an ascii text record of every backup and
restore performed on a system.
The screen capture below is an example of what a Backup / Restore History looks
like.

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Check backup tape header information

Before restoring files from a backup, or as a function of maintaining a tape backup
archive, the Check Backup ID function can be very useful. Check Backup ID in the
Backup / Restore Dialogue and the Maintenance view, System Files, Show Backup
ID reads the header on a tape, and displays the information placed there when the
backup was made.
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This is an example of the information on the tape header.

Backup ID information inclueds the date the tape was made, the machine number on
which the tape was made, and software release in use at the time the tape was
made. This information is important in that some files, particularly configuration files

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are not compatable between systems. Also, in some cases the procedure for
restoring data may be different when the current system release does not match the
release in use when the tape was made.
The comment field can be very valuable. In this case it indicates the file sets that
were backed up, and the machine number.
Backup Information indicates the device on which the backup was made. Currently
the default device is always tape (DAT). Also, the backup type, in this case S for
specific. And, the Kind of backup, or the file set that was selected from the specific
backup list.
To restore files, select the restore function from the Maintenance view, System Files,
menu. Check the tape header to be sure it is the correct backup, then select the
restore function. The screen capture below is an example of performing a restoration
of a Full backup.

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Once it is confirmed the correct tape is loaded on the drive, to restore, select the
Accept button.
Note that it is always important to comfirm the procedure in COACH before
performing a backup or restore to be sure the latest procedures are being used.

Make a FAST / TOOLS DATABASE backup

The Fast Tools database is not included in the Maintenance, System Files options.
Fast Tools backup is performed in a Terminal window, and is described in detail in
COACH.

A Fast Tools backup should be a scheduled event, or performed durring Pereventitive

Maintenance. This is because the application is stopped as a part of the process. The
Fast Tools data base is backed up to tape (the default backup device). To perform
the backup, shutdown the application, open a terminal window, place a tape in the
DAT device, and run the command FT/FT_backup.

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Make a FILE BACKUP of the MACHINE CONFIGURATION FILES

The File Backup of the Machine Configuration Files is similar to the Tape Backups
described above. However, this utility is run from a Terminal window, and offers some
flexibility not available from the application menu. The asml_backup_settings
command will write the Machine, Factory and Test constants to a file. With the -d
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option the path to the file can be set. The default path (with out -d) is ~/ML/backups.

Make a FULL / INCREMENTAL BACK of the HARD DISK

Although these backups each have a separate procedure in COACH, they are very
similar. A FULL backup transfers all the data on one disk to another disk. An
INCREMENTAL backup captures those things that have changed since the last
INCREMENTAL backup, and updates the previous INCREMENTAL backup, which
resides on a second disk drive. Both procedures are time consuming and should be
scheduled events.

The procedures for both backup types are described in COACH.

File System Maintenance

Checking available disk space

The amount of data in a file system will increase through the normal operation of the
UNIX operating system, as well as information added by users. Because any file
system has a limit to the amount of data it can store, it will, periodically, be necessary
to check the capacity of the file systems verses the amount of data stored in them.
And, periodically, it will be necessary to move old data to an alternate storage media.
COACH describes the procedure for checking the amount of information in each of a
disk’s file systems, how much room is available in bytes and in percentage of total
capacity.
Note that the procedure in COACH is called Make More Disk Space. Checking
available space is a part of the total procedure.

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CAUTION - before removing any files, be sure their absence will not have a negative
impact on the customer or the computer system.

System Generated Reports

TWINSCAN software generates reports on a variety of system activity. Of particular
interest to coustomers and applications engineers are the Lot Reports which contain
information on all of the activities performed by the system as a function of running a
lot (batch).
Also, the system diagnostics tests and system calabration procedures generate
reports that can be useful when checking system performance, or reviewing a history
of system maintenance.

Locate System Generated Reports

The TWINSCAN application makes it easy to locate system generated reports. From
the Navagation buttons, select Reports. From the Reports view, select Report.

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This will result in a drop down menu which includes:
> Diagnostics
> LAR... (Alignment reports)
> LOT
> Maintenance
> Reliability
> Test
LOT reports are listed by the name of the lot, in the order they were run by date and
time. The latest reports are at the top of the list.
Test reports are listed by subsystem. Under the subsystem are the Test types
Calibration Adjustment and Diagnostic. Under the test type is the component within
the subsystem on which the test was run. Under the component is the name of the
test, and finally the report(s) in order by the date and time they were run, the latest at
the top of the list. For example:
Test
> Subsystem (Wafer Handler for example)
>> Calibration
>> Adjustment
>> Diagnostic
>>> Component (Carrier Handler for example)
>>>> Test
>>>>> Test date time

Note that reviewing report data can be done concurrent with other system activity.
For example it is possible to look up a test report while the same test is running. It is
possible to look up a lot report while a lot is running

For additional information refer to COACH or the User Guide which

resides on the TWINSCAN system or Stand Alone Work Station.

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 2
PROCEDURES

INTRODUCTION This chapter will discuss the procedures to be performed as part of the level 2
qualification process for the Computer System. The discussion of the procedures
will NOT be a reiteration of the coach procedure, but rather amplifying information
concerning the coach procedure.
Always refer to the coach procedure for specific prerequisites, actions, and
specifications.

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The Coach
Procedures:
1. SHUTDOWN & START UP THE TWINSCAN SOFTWARE
2. MAKE A TAPE BACKUP OF MACHINE CONFIGURATION FILES
3. MAKE A FILE BACKUP OF MACHINE CONFIGURATION FILES
4. MAKE A TAPE BACKUP OF SYSTEM FILES
5. MAKE INCREMENTAL BACKUP OF THE HARD DISK
6. MAKE FULL BACKUP OF THE HARD DISK
7. MAKE MORE DISK SPACE
8. CLEAN THE TAPE DRIVE

Additional Practice Note: Additional practice procedures are for training purposes only and are not
Procedures: listed in coach. Student material is provided to support these activities.
9. SHUTDOWN SYSTEM & UNIX WITH THE sysshutdown COMMAND
10. SHUTDOWN & START UP SYSTEM SOFTWARE WITH system_stop
system_start COMMANDS
11. LOCATE: LOT REPORTS, ER LOGS, TEST MANAGER REPORTS
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SHUTDOWN AND STARTUP OF THE TWINSCAN SOFTWARE

Procedure Name SHUTDOWN AND START UP THE TWINSCAN SOFTWARE

Coach Number cscs027.adj

Function Shut down and start up the TWINSCAN software.

Preconditions Make sure that all of the production processes are stopped.

Points of attention The Lot Queue must be stopped before shutting down the TWINSCAN application

Sequence of Events 1. STOP THE TWINSCAN SOFTWARE.

a. Typically the TWINSCAN software (application) will be stopped using the
Navigation Manager, Start Up / Shutdown view.
b. Although less commonly used, it is possible to shutdown and application
using the UNIX script system_stop.
2. START THE TWINSCAN SOFTWARE.
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a. Restarting the application with UNIX running requires running the UNIX
script system_start or system_restart.
b. Restarting the application after rebooting UNIX is an automated function of
the UNIX user login.
c. The indication the software has started is the appearance of the TWINSCAN
login window. To login supply a user name and associated password.
3. RESTART THE TWINSCAN SYSTEM
a. When the software is shutdown and restarted, before the system is able to
perform any action, the subsystems will have to be restarted.
b. The subsystems are typically restarted from the Start Up / Shutdown view of
the Navigation Manager.

Procedure Results 1 The TWINSCAN software (application program) shuts down.

On Screen Result 1

When TWINSCAN software (application program) shuts down, the Navigation

Manager window will be closed.

Failure Response 1 Failure Mode/Actions required

1. If the procedure is followed, it is unlikely the system will fail to shutdown.

Procedure Results 2 The TWINSCAN software starts.

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On Screen Result 2

When the TWINSCAN application starts, first the Navigation Manager window frame
will be displayed. Next the Navigation Manager will appear. A few seconds after the
Navigation Manager is displayed, the Login dialogue box will open.

On Screen Result 2

To log into the application software, enter a valid User Name. Note that the default
user name is ASML. Then enter a valid password. Note that the default password for
the ASML user is litho.
When the User Name and password is validated by the software, the Login dialogue
box will disappear, giving the user access to the functions of the Navigation Manager.

Recovery Sequence 2 Failure Mode

1. Re-enter the User Name and Password.

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2. Verify User Name and Password are correct. Note that it is possible to change the
User Name and / or Password for security reasons.

Procedure Result 3 The TWINSCAN system will be initialized.

On Screen Result 3

The Start Up / Shutdown view of the Navigation manager will display the progress of
system initilization. The process is complete when all the named subsystems are
green.

Failure Response 3 Failure Mode / Actions required

Selecting the Drivers from the Start Up option, and initiating the action by selecting
OK from the popup dialogue window will cause the TWINSCAN software to initialize
all the sub-system drivers.
Results NOK:
1. If the system fails to initialize, retry at least once more.
2. If specific subsystems fail to initilize, try to start it using the Command Handler.
3. If the system continues to fail to respond refer to the OCAP, or local expert

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MAKE A BACKUP OF MACHINE CONFIGURATION FILES

Procedure Name MAKE A TAPE BACKUP OF THE MACHINE CONFIGURATION FILES

Coach Number cscs014.adj

Function 1. To make a backup on tape of the machine configuration files. The backup
contains the CM configuration files, Machine-, Factory- and Test constants.

Preconditions 1. Obtain a DDS-3 tape.

2. Verify there are no lots running.

Points of attention 1. If a rotating, date, or event related backup system is in use, verify the correct tape
is available before beginning the backup procedure.
2. Verify the tape cartridge is write enabled.
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Sequence of Events 1. Insert the tape cartridge into the drive.

2. From the Navigation Manager tool bar, select Maintenance.
3. From the Maintenance view, select the System Files option.
4. From the System Files pull down menu, select Backup.
5. Fill out the Backup dialogue:
6. Upon completion, remove the tape from the drive, and set write protect.

Procedure Results The system will back up CM, MC, FC, and TC files to the cartridge tape.

On Screen Results
1. Maintenance view of the Navigation Manager.
2. System Files pull down menu.
3. Backup dialogue.

Failure Response Failure Mode / Action Required

Follow procedure cscs014.adj.

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MAKE A FILE BACKUP OF MACHINE CONFIGURATION FILES

Procedure Name MAKE A FILE BACKUP OF THE MACHINE CONFIGURATION FILES

Coach Number cscs044.adj

Function To make a disk to disk backup of the CM, MC, FC, and TC files.

Preconditions Make sure that all production processes are stopped and there is no test software
running.

Points of attention N.A.

Sequence of Events. 1. Open a terminal window.

2. Press Enter to change directories to or verify the user is in the ASML user home
directory.
3. Type the command asml_backup_settings to save the data in the default
directory ML/backups, or add the -d operand, and specify the path to a directory

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of the user’s choice. (E.g. asml_backup_settings -d /user_data/backup)

Procedure Results The system will backup the configuration files to the default, or specified directory.

On Screen Result
asml_backup_settings
asml_backup_settings run on Fri. Oct. 29 01:25:58 MEST 2004
asml_backup_settings: successfully backed up data files
Backup file = ML/backups/settings_manual_1898_340c_c0t1d0s0_2004_1029_0125
The file name is interpreted as:
1. settings_manual = data type / files
2. 1898 = system number on which the command was run
3. 340c = software release
4. c0t1d0s0 = hard disk 0
5. 2004_1029_0125 = year, date, time the command was run

Failure Response Failure Mode / Action Required

Check the target directory to assure the backup was successful.
Results NOK
Re-run the command. Remember, UNIX is case sensitive, and sensitive to character
spacing in the command line.

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 24 For training purposes only

MAKE A TAPE BACKUP OF THE SYSTEM FILES

Procedure Name MAKE TAPE BACKUP OF THE SYSTEM FILES

Coach Number cscs007.adj

Function Make a backup of the TWINSCAN system files (full backup).

Preconditions 1. Obtain a DDS-3 tape.

2. Verify there are no lots running.

Points of attention 1. This backup does not include the operating system, or the FastTools database.
2. If a rotating, date, or event related backup system is in use, verify the correct tape
is available before beginning the backup procedure.
3. Verify the tape cartridge is write enabled.

Sequence of Events 1. Insert the tape cartridge into the drive.

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2. From the Navigation Manager tool bar, select Maintenance.

3. From the Maintenance view, select the System Files option.
4. From the System Files pull down menu, select Backup.
5. Fill out the Backup dialogue:
6. Upon completion, remove the tape from the drive, and set write protect.

Procedure Results The system will back up the TWINSCAN system files.

On Screen Result

1. Maintenance view of the Navigation Manager.

2. System Files pull down menu.
3. Backup dialogue.

Failure Response Failure Mode / Action Required

Follow procedure cscs007.adj

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MAKE BACKUPS OF THE HARD DISK, INCREMENTAL / FULL

Procedure Name MAKE AN INCREMENTAL BACKUP OF THE HARD DISK

MAKE A FULL BACKUP OF THE HARD DISK

Coach Number cscs032.adj

cscs031.adj

Function Make an incremental backup of the currently booted disk to an existing backup on the
second disk.
Note: The incremental backup does not work if new patches are installed. Then only
a full backup can be done, refer to procedure cscs031.adj.
Note: The procedures for a full backup and incremental backup are the same with the
exception of the operand. For a full backup the command operand is -f . For an
incremental backup the command operand is -i.

Preconditions Verify all production activity is stopped, and the Lot Queue is stopped.

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Points of Attention N.A.

Sequence of events 1. Shut down the TWINSCAN software (application).

2. Determine the target disk (the disk on which the backup will be written).
3. Make the backup (Note the command must be run by the root user).
4. Restart the TWINSCAN software (application).
5. Re-initialize the system drivers.

Procedure Results The previous disk backup will be updated with the latest information on the system’s
active disk.

On Screen Results
1. Display the Lot operations view of the Navigation Manager
2. Display the Stop Lot Queue dialogue popup window
3. Display the Start Up / Shutdown view of the Navigation Manager
4. Display the System Shutdown dialogue popup window
5. Display a terminal window
6. In the terminal window, display the commands
Note: the backup command will remain busy until the backup is complete
7. Display the Navigation Manager window with login dialogue
8. Display the Start Up / Shutdown view of the Navigation Manager
9. Display the initilization process on the Start Up / Shutdown view.

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Failure Response Failure Mode / Actions Required

Results NOK:
Failure of a disk to disk backup has numerous ramifications
1. Check the command line for typing errors
2. When doing a partial backup, be sure no patches have been added to the source
drive since the last partial backup.
3. Try running a full system disk to disk backup
4. Refer to OACP, and / or contact a local expert.
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MAKE MORE DISK SPACE

Procedure Name MAKE MORE DISK SPACE

Coach Number cscs001.adj

Function Evaluate disk usage, determine whether or not any of the file systems are getting too
full, and if so, remove excess data.

Preconditions Be sure there is a current backup of the TWINSCAN software before beginning this
procedure.
Be aware of local policy. It may be preferable to backup old reports and data to tape
before deleting the files.

Points of Attention N.A.

Sequence of Events 1. Be sure there is no production running on the system.

2. Open a terminal window.

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3. Run the UNIX command df -kl
4. Evaluate the report. Determine that no file system is above 90% capacity.
5. If a file system is above 90%, locate and remove old reports or data.
Note: before removing files be certain they do not effect operation of the software.

Procedure Results Reduce disk usage to less than 90% for all mounted file systems.
Note: When a UNIX File System (UFS) approaches 80% capacity it becomes less
efficient, which will have a negative effect writing and retrieving data from the system
disk. The aggregate effect is the computer system will run slower.

On Screen Results
After removing files, re-run the df -kl command and observe the disk usage until the
values are less than 90%

Required Actions

Failure Response Failure Mode / Action Required

Upon completion of the procedure, close the terminal window.
Results NOK
Verify the command has been entered correctly.
Verify the UNIX user has permission to delete the specific file.

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CLEAN THE TAPE DRIVE

Procedure Name CLEAN THE TAPE DRIVE

Coach Number cscs001.cle

Function Clean the tape drive of the Operator Interface Unit

Preconditions The system must be functional and there must be no tape in the tape drive.

Sequence of Events 1. Obtain the cleaning tool which looks like a DAT tape cassette.
2. Insert the cleaning tool into the tape drive.
3. The drive will identify the tape as a cleaning tool, use a length of the cleaning tape
in the tool, and discard the tape in a few seconds.

Procedure Results The surfaces in the tape drive that touch a tape are wiped with a fabric tape in the
cleaning tool.
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On Screen Results
N.A.

Failure Response Failure Mode / Action Required

Remove the ejected tape. If the tape is completely wound to the take-up side of the
cleaning tool, discard the used tool and replace it with a new one.
Results NOK
If the cleaning procedure doesn’t work, check if the tool is used up.
Try using a known good file tape if the system has problems reading a data tape or
will not read files on a back-up tape.

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