Training module

This document is ASML Confidential

Configuration: Document ID: Issue date:

TWINSCAN #####, version 00 3-Jan-2005

Module ID: Status:

TT-L3-AM Draft

TWINSCAN MAINTENANCE AND

ADJUSTMENTS - AIRMOUNTS
FOR TRAINING PURPOSES ONLY

ASML Confidential - This document is provided for employees of ASML and for selected employees of ASML's customers
and agents, in order to assist them in efficient use of ASML products. The document must not be disclosed to third parties.
 i About this module TT-L3-AM

COPYRIGHT © 2005, ASML Holding N.V. (including affiliates). All rights reserved.
This publication is subject to change without notice and contains confidential and
proprietary information of ASML Holding N.V. or its affiliates ("ASML").
This documentation is for the intended purpose only and for the use of the intended
recipient only. Please retain control of this documentation. It is not to be forwarded or
distributed. Any unauthorized review, copying, use, disclosure or distribution is strictly
prohibited. The material herein is provided "AS-IS" AND ASML makes no warranty of
any kind with regard to this material. ASML shall not be liable for errors and
omissions contained herein.

Trademarks AS ML, ASM Lithography, TW INSCAN, MAS KRIGGER, MAS KWEA VER,
LITHOCRUISER, ATHENA, QUASAR, IRIS, MICRALIGN, PAS 5500, PAS 5000,
3DAlign, 2DStitching, 3DMetrology, and the ASML logo are trademarks of ASML
Holding N.V. or affiliate companies. The trademarks may be used either alone or in
combination with a further product designation.

Starlith and Aerial are trademarks of Carl Zeiss.

Nothing in this publication is intended to make representations with regard to whether

any trademark is registered or to suggest that any sign other than those mentioned
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should not be considered to be a trademark of ASML or of any third party.

ASML Confidential
 iii About this module TT-L3-AM

ABOUT THIS MODULE TT-L3-AM

MODULE INTRODUCTION

This module is ment to support the practical part of the Maintenance and Adjustments
training.
The first part of this module describes the Twinscan Airmounts subsystem. This will
include the function, components, control system and driver of the Airmount system.
The second part of the module comprizes the explanation of the procedures as listed
in the objectives.
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GENERAL MODULE INFORMATION

Objectives Upon successful completion of this course, given a fully operational TWINSCAN
system, the trainee will be able to :
• state the main functions of the airmounts
• state how the main functions of the airmounts are carried out
• locate the parts within the airmounts relevant to understand the functionality
• Perform procedures:
– Verify power supply to SURC.
– Remove and replace 24v supply.
– Remove and replace Gas valve.
– Test AM air supply.
– Adjust the Airmounts Z-stroke..
– Calibrate the metro frame range.
– Check Airmounts for contamination.
– Test AM proximity sensor. AM Geophone sensors, AM motors and sensors.
– Test Airmount motor performance.
– Low frequency performance check.
– Servo loop performance check.
– Prepare for escalation of an airmount problem.

Test -

Prerequisites • Basic communication skills in the English language.

• Training module: TT-L2-AM

Additional Materials -
 About this module TT-L3-AM iv

SAFETY

Safety related items are indicated in this manual by:

• A pictogram
• A description that tells how serious the danger is and any actions necessary to
prevent it
The three levels in safety are:
• Danger, shows a very dangerous situation that, if not prevented, could result in
death or a very serious injury
• Warning, shows a dangerous situation where there is a risk of serious injury
• Caution, shows that equipment or property could be damaged or there is a risk of
minor injury
Before you install, operate or maintain the system, read the applicable safety manual.
There is a safety manual for each system.

Definition of The following pictograms are used in ASML equipemt:

pictograms :

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General hazard Electrostatic damage Laser radiation UV radiation Electrical hazard

Flammable substance Toxic hazard Chemical hazard Hot surface(s) Sharp object(s)

Strong magnetic field(s) Lifting heavy object(s) Moving parts Moving heavy object(s) Radio frequency radiation

General warnings
Warning All forms of operation, installation work, maintenance, repair, modification and all
other activities involving the different systems must only be carried out by authorized,
fully qualified personnel.
Warning Only personnel who have received ASML maintenance training are allowed to open
system covers.
Warning All safety and other requirements described in ASML manuals, the applicable
contracts and the law must be observed at all times.
Warning Use of controls or adjustments or performance of procedures other than those
specified in ASML manuals may result in hazardous radiation exposure.
Warning The mains power switch can be locked off during maintenance. Lockout/tagout
procedures should be according to local fab standards. In the U.S.A. these
procedures must conform to OSHA standard 1910.147.
Warning During maintenance, all machine operating control points must be tagged to prevent
accidental operation.
 v About this module TT-L3-AM
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 Table of Contents vi

Chapter 1 Functional overview

Function and location of the Airmounts. . . . . . . . . . . . . . . . . . . . . . . . . 2
Function of the airmounts system 2
Location of the airmounts system 3

Airmounts components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Airmount overview 4
Airmount components 5

Airmounts Servo control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

Control loops 19
Control System 22

Chapter 2 Procedures
Procedures explained. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Verify Mains Power to SUCR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Replace the 24 V supply. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Replace servo Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

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Test the Airmount air supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
The Metro Frame Range Test. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
Adjust the z-stroke . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
Test AM airbearing for contamination . . . . . . . . . . . . . . . . . . . . . . . . . 46
Test the Airmount Proximity sensors . . . . . . . . . . . . . . . . . . . . . . . . . . 47
Test the Airmount Motors & Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . 48
Test the Airmount Geophone Sensors . . . . . . . . . . . . . . . . . . . . . . . . . 49
Test the Airmount motor performance . . . . . . . . . . . . . . . . . . . . . . . . . 50
The low frequency test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
The servo performance test. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
AM Problem escalation procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59

Appendix 1 Glossary of terms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61

 vii Table of Contents
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 1
FUNCTIONAL OVERVIEW

INTRODUCTION

This chapter describes the Twinscan Airmounts system. The major topics discussed
are:
• The functions of the airmount system and the location of the airmount system
• An overview of the major airmount components

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• An explanation of the servo control and feedback systems
 2 For training purposes only

FUNCTION AND LOCATION OF THE AIRMOUNTS

In this section the main function and the physical location of the Airmounts systems
will be discussed.

Function of the airmounts system

In the TWINSCAN system the Airmounts support the Metroframe and isolate it from
the Baseframe and so from the outside world.
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Figure 1.1 Airmounts between Metroframe and Baseframe

The Airmounts are positioned in between the Baseframe and Metroframe as

illustrated in figure 1.1.
The Airmounts do not only provide vibration isolation. Their complete purposes are
listed below.
1. To isolate the Metroframe ("silent world") from external vibrations
2. To maintain the Metroframe vertical position at 200µm above the Baseframe
3. To maintain the Metroframe X, Y, Rz position, centrally above the Baseframe
4. To actively damp oscillations of the Metroframe.
5. To provide the TWINSCAN system with a Dynamics diagnostics facility

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Location of the airmounts system

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Figure 1.2 Physical locations of the Airmounts.

The Airmounts are positioned on the Baseframe as illustrated in figure 1.2.

There are three airmounts which are identical.
Airmount 1 is mounted across the front. Horizontal drive is in X direction
Airmount 2 & 3 are mounted front to back. Horizontal drive is in Y direction.
All three airmounts work together to accomplish positioning in six degrees of
freedom.
• AM 1 -- at the front of the machine behind the wafer handler and below the reticle
handler robot.
• AM 2 -- on the right side of the machine, toward the rear (forward of the electronic
cabinet)
• AM 3 --on the left side of the machine, toward the rear (forward of the electronic
cabinet)

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AIRMOUNTS COMPONENTS

Introduction
In this section, the different Airmount components and their function will be
discussed.

Airmount overview
An illustration of the complete Airmount with all the parts is shown in figure 1.3.
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Figure 1.3 Complete Airmount

The parts visible are:

• Locking bolts - Secure top plate during shipping
• Geophones - Sense vibrations and velocity
• Lorentz motors - No contact drive motor, horizontal and vertical
• Servo valve - controls flow of air into air volume
• .5 liter tank - works with restrictor, attenuates air supply noise
• 3 nm filter - remove ultra small particles from air supply
• Restrictor - works with .5l tank to attenuate supply noise
• Water connectors - connects motor cooling lines
• Main plate - supports and positions airmount on baseframe
• Proximity sensors - senses relative position - metro to base frame
• Support surface - toughened, curved point of contact
• Air bearing - Piston and cylinder assembly that lift metro frame
• Top Plate - mechanically interfaces airmount to metro frame
• Safety Limiter- locking bolt without washer limits vertical movement

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.An Airmount without covers mounted on it is shown in figure 1.4.

Figure 1.4 Airmount without cover

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Airmount components

Air volumes
On the TWINSCAN system there are some extra air tanks, one per airmount. Each
air tank has a volume of 30 liters..figure 1.5 shows the air tank connected to the

Figure 1.5 The Air volumes (highlighted)

airmount.

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For all Airmounts, the compressed air inside the Air volumes pushes upwards
through holes in the Baseframe where the Airmounts are fitted (O-ring connection).
The air then enters through a matching hole in each Airmount base plate and pushes
The function of the 30 liter air volume is:
• To create a low stiffness resulting in a low resonance frequency of AM of about
0.5 Hz
• “Absorbs” Base frame motion
– 30-liter air volume and air bearing (no friction)
• Air Volumes provide a supply of stable air
• Buffer supply of flow through airmount

The air tanks for Airmounts 2 and 3 are the ‘Torpedo Tubes’.These are located along
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Figure 1.6 The long tube type Air volumes used by AM 2 & 3

the each side of the system for Airmounts 2 & 3, bolted to the Baseframe. There are
three on each side of the system. In figure 1.6 a photo is shown of the assembly of
the air volume.

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For Airmount 1, there are two round volumes of 15 litres each which are connected

Figure 1.7 The round type Air volumes used by AM 1

together through channels in the Baseframe.

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These round Air volumes are mounted just inside of the Baseframe and below the
Metroframe height; There is no difference in the actions of the different types of
Airmount volumes and the shape is solely due to fitting into the design layout.

Dither principle and dither filtering

The servo valve regulates the pressure inside the Airmount. This valve is part of the
Pneumatic control loop which will set the valve opening (will be discussed later in this
module). To prevent the valve from sticking a 28 Hz “dither signal” is added to the
valve control signal. To avoid transfer of the 28 Hz dither to the Metroframe a
pneumatic filtering is implemented.

Figure 1.8 Pneumatic Filter Functional Layout

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Earlier the restrictor was mentioned. The restrictor not only reduces the pressure by
1 Bar but also forms a low pass filter in conjunction with the Air volume (air capacity).
.In figure 1.9 an illustration is shown of the pneumatic filter.

Figure 1.9 Pneumatic Low Pass Filter

Machine Constants determine the setting of the dither signal amplitude (AC), while
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vertical position (proximity sensor) determines the servo valve position (DC) to keep
the Metroframe at the wanted height (setpoint).
Clean compressed air (8 bar) from the customer facilities is applied via the Pneumatic
Facility Unit (7 bar) through a servo valve into a 0.5 litre air tank which stabilises the
pressure at 5.5 Bar. The servo valve has a 28Hz signal applied to it, causing a
continuous opening and closing action so that the valve cannot stick. This is to
prevent pressure variations inside the air tank. A 3nm filter is installed in the output of
this small air tank. The 3nm filter is a particle filter that filters out all particles bigger
than 3nm. The output of the small airtank is leading to an in line restrictor which drops
the pressure by another 1 Bar down to 4.5 Bar.

Caution:
Never adjust The Airmount Restrictor as it is factory presetted!

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Top Plate & Support Plate

There is a small Support plate bolted to the underside of the Airmount Top Plate. The
toughened steel support pin pushes up against this support plate when the Airmount
is ON AIR.

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Figure 1.10 Top plate and support plate

The Top Plate is bolted to the underside of (and supports) the Metroframe WHEN air
is on. However, note that unlike previous systems, the Airmounts do not support the
Metroframe when the compressed air is switched off. The Metroframe rests on the
Baseframe whenever the Airmounts are off air, making exchanging an Airmount
easier. In figure 1.11 the top view of an airmount top plate is visible.

Figure 1.11 Airmount Top Plate (top-front view)

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Airbearing
The flow of air through the system is 20 ~ 40 litres per minute per Airmount.
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Figure 1.12 Airbearing (dashed circle)

On power down, including an emergency power down, the Metroframe gradually

lowers down as the stored compressed air discharges slowly and can take
approximately 5 to 10 minutes to empty.

Figure 1.13 Airbearing (highlighted) OFF AIR

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Note the differences between the highlighted areas in figure 1.13 and figure 1.14. It
can be seen that the Airbearing provides no support for the Metroframe when air is
off. In fact the Metroframe "sits" onto the Baseframe when air is off (right hand side of
figure 1.13 shows this).

Figure 1.14 Airbearing (highlighted) ON AIR

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Figure 1.15 Airbearing CYLINDER (top view)

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The Airbearing is actually comprises two parts, the outer is the Cylinder (figure 1.15)
and inner is the Piston (figure 1.16).

Figure 1.16 Airbearing PISTON (top view)

The Airmounts have individual covers which must be in place for normal operation.
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Air is designed to escape from the Airbearing, as can be seen in figure 1.12 and on
the Cylinder (bottom centre of figure 1.15), through small holes situated around its
circumference.The two parts are separated by a small air gap. This curved surface in
turn supports a small plate attached to the underneath of the Airmount Top Plate (not
illustrated). The surface of the support pin is slightly curved so that as small a contact
area as is possible occurs between the toughened steel and the small support plate.

Actuators
The Airmount contains two different types of actuators. One is a pneumatic type and
one is an electric type.
The airbearing as discussed in previous sections of this module acts as a pneumatic
actuator in the vertical direction by varying the airpressure of the airbearing. This
airpressure is set by means of a setpoint for the servo valve. This setpoint is
generated by the pneumatic loop and will be discussed later in this module.The
airbearing lifting force is very high (it carries the Metroframe) but it reacts slow.

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The electrical actuators are so called Lorentz motors. These Lorentz motors perform
minor corrections to Metroframe position and velocity. These motors are isolated from
the external world by using coils fitted to the outside world (bottom of the Airmount)
influencing magnets which are attached to the silent world (Top Plate).

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Figure 1.17 End view of Lorentz motors (coils and magnets)

Figure 1.18 The Horizontal motor

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The Horizontal motor (figure 1.18) adjusts position and velocity changes with the
capability of applying 100N in the horizontal plane (X/Y-plane).

Figure 1.19 The Vertical motor

Also the Vertical motor (figure 1.19) adjusts for position and velocity changes. The
motor is capable of generating 20 N maximum in Z-direction. We need less force for
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the vertical motors since most weight of the Metroframe is lifted by air pressure.

Proximity Sensors
Measurement of the positioning of the Top Plate, and hence the Metroframe, is
achieved by Vertical and Horizontal proximity sensors. These sensors measure the
distance between the Airmount base plate and the Airmount top plate. A proximity
sensors is mounted to a bracket which is part of the base plate while the sensor vane
is part of the top plate, so no physical contact between outside world and silent world.

Figure 1.20 Location of Horizontal & Vertical Proximity sensors

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Figure 1.21 Horizontal & Vertical Proximity sensors

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Adjustment of the physical position of the proximity sensors is not necessary, instead
a test software program is used to calculate the optimum position of the Metroframe.
This is discussed later in this document.

Geophones
The TWINSCAN system Airmounts have been designed with a maximum permissible
vibration level of 0.5mm/s 2 on the Metroframe which required a eigenfrequency
specification of 0.5 Hz in all three axis.
Obviously any vibration or noise at 0.5 Hz would be amplified and we therefore need
to suppress this resonant spike in the gain response. To achieve this Geophones are
used to measure the Metro Frame velocity thus the vibration in conjunction with
Lorentz motors that are used to suppress the vibration. The horizontal and vertical
Geophones are mounted together in a combined unit on the upper surface of the
Airmount Top Plate.

Figure 1.22 Geophones on the Top Plate

Mechanical Limiters
When the Airmounts are up the Metroframe floats on air (via the Airmount
airbearings) while the position of the Metroframe is controlled by the Lorentz motors.
At the moment the Lorentz motors do not work (f.i. due to an overheated motor) the

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Metroframe can freely move to any position. Because of that the Metroframe
movement needs to be limited in both horizontal and vertical plane. To achieve a
limited range in the neigbourhood of each Airmount a mechanical limiter is located.
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Figure 1.23 Mechanical limiter locations

There is a mechanical limit imposed by the pin shown in figure 1.24 and figure 1.26.
The down vertical limit is the Baseframe.

Figure 1.24 Mechanical limiter close up (AM1)

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The up vertical limit is the nut which is factory set in Veldhoven and should not be
adjusted in the field unless really necessary (after contact with next line support). The
total range of vertical movement is 400 ~ 600 micro metres. Horizontal limits in X and
Y are also achieved by these pins. Although it is difficult to see, there is a separation
around the pins giving a total range of horizontal movement of 800 ~ 1200 micro
metres. No contact is made with these limit pins during normal use.
In figure 1.25 per airmount the shape of the limiter (part of the Metroframe) is shown.
The limiter shape defines in what direction the limiter will define the mechanical
range. X & Z for Airmount 1 , X, Y & Z for Airmount 2 , Y & Z for Airmount 3.

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Figure 1.25 Mechanical Limiters

However there is another use of these limit pins as reference points.

Figure 1.26 Interface pin

Should it be necessary to exchange an Airmount a reference point for fitting will

simplify the setting up required afterwards. The Airmount base is dowel pin
referenced to the Baseframe, however as the air is allowed to exhaust, the
Metroframe can settle in an unknown position. The design of these pins is tapered so
that when on air, the pin can be raised mechanically from the Baseframe so that it fills
the holes or slots shown at AM 2 & 3. We then have a guide pin at each of these two
points which the Metroframe will follow or slide down as it descends. The reference
point at AM 1 is only used for Z (remember that theMetroframe rests on the

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Baseframe when off air). The reason that only two points are required is that we do
not want to over define the position or the pins are likely to be strained and broken.
Only two points are required to achieve horizontal referencing.
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AIRMOUNTS SERVO CONTROL

This sewction describes the airmounts system control loops and control system. This
includes also the software interfacing.

Control loops
The Airmounts are controlled by the following 3 types of loops :
• Proximity control loop (Position control loop)
• Pneumatic control loop
• Inertial feedback control loop (Velocity control loo
In general a control loop contains a controller, an actuator, a measurement system
and as an input a setpoint.

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Position control loop
The proximity or position control loop is for vertical and horizontal positioning of the
Metroframe. The characteristics are:
• Fast response
• Input = Proximity sensors
• Output = Lorentz motors
.A Proximity Control Loop is shown in figure 1.27.

Figure 1.27 Proximity Loop Diagram

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The proximity Control loop consists of:

• Setpoint - The desired position (from software/download)
• Position error - The difference between setpoint and feedback
• Controller - Airmount controller in Suspension Control Rack
• Drive signal - Amplified and calibrated output based on position error
• Lorentz Motor - Horizontal or Vertical Drive Motor
• Proximity Sensor - Sensor with linear output relative to distance from reference
surface
• Feedback - Signal from proximity sensor
• Integration - Electronic circuit provides “difference” signal indicating error
direction and amplitude

Pneumatic control loop

The pneumatic control loop controls the vertical position of the Metroframe using the
pressure inside the Airmounts. The characteristics are:
• Slow response - Supports most of weight
• Input = Proximity sensors
• Output = Servo Valve Position
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The pressure inside the Airmounts is controlled using an electropneumatic control

valve. The pneumatic loop is the slowest, and most sensitive control loop of the
Airmount system. The vertical position sensor of an Airmount provides the input
signal. This signal is compared to a vertical setpoint. Any deviation between setpoint
and measurement is called error-signal. This error signal is used to modify the output
signal going to the valve. A controller, is used to calculate the output signal. The
controller is located in the Suspension Control Rack at the back of the machine as
part of the Electronic Cabinet 1, also called ECOL1 (Electronic Colom 1). This
location is on the right side second rack from the back at the bottom.
In figure 1.28 the overall layout of the pneumatic loop is shown.

Figure 1.28 Pneumatic Loop Diagram

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A Pneumatic Control Loop consist of:

• Setpoint - The desired position (from software/download)
• Position error - The difference between setpoint and feedback
• Controller - Airmount controller in Suspension Control Rack
• Drive signal - Amplified and calibrated output based on position error
• Servo Valve - Air Flow Control Valve (DC part)
• Proximity Sensor - Sensor with linear output relative to distance from reference
surface
• Feedback - Signal from proximity sensor
• Integration - Electronic circuit provides “difference” signal indicating error
direction and amplitude

Inertial feedback control loop

The Inertial feedback control loop (or velocity control loop) of the Airmounts serves a
special purpose. The velocity loop is also called inertial feedback loop or sky hook
damper. The purpose of the velocity loops is to reduce horizontal and vertical
vibration levels on top of the Metroframe, without compromising the vibration isolation
performance. In order to do this a Geophone is used. The absolute velocity measured

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by Geophones can be used to dampen the Metroframe vibration levels by means of
the Lorentz motors.
The characteristics are:
• High Frequency Sensitive
• Input = Geophones
• Output = Signals for Acceleration, Motion and Velocity
• To retrieve performance data.
In figure 1.29 the overall layout of the inertial feedbackloop is shown.

Figure 1.29 Inertial Feedback Loop Diagram

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A Inertial Control Loop consist of two loops, a horizontal and a vertical loop. each
loop consists of:
• Setpoint - The desired position (from software/download)
• Position error - The difference between setpoint and feedback
• Controller - Airmount controller in Suspension Control Rack
• Drive signal - Amplified and calibrated output based on the position error
• Lorentz Motor - Horizontal or Vertical Drive Motor
• Geophones - Sensor with linear output relative to velocity of metro frame
• Feedback - Signal from geophones
• Integration - Electronic circuit provides “difference” signal indicating error
direction and amplitude

Control System

Introduction
The Airmount control system is the system for operating the Airmounts. In figure 1.30
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a schematic overview is given of the logical position of the Airmount control system
with respect to the total system. In the top part of this drawing the Sun software
environment is mentioned. The SUN represents the operator user interface. This
operator user interface (OUI) provides general system control, while linking the
custom made jobs to the rest of the machine and with its related components:
• MC (machine constants)
• ADT (advanced diagnostic test)
• CH (command handler)
• ER (exception handling)
• TSW (test software)

Figure 1.30 Schematic overview of Airmount control systems logical position

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The SUN block is connected to the Airmounts driver, the next logical block in the
sequence. The main function of Airmounts driver is to establish a communication link
between SUN and controller, enabling information exchange between the SUN and
the controller. Any commands from the SUN to the controller go via the driver. The
driver is not automatically initialized on power-on of the controller. This must be done
separately, as is the case with all other sub-systems. Also terminating the driver only
breaks the link to the controller, not the controller functioning itself! The driver itself is
directly linked to the Airmount control system and acts like a gatekeeper for anything
trying to reach the Airmounts controller. The Airmount control system is the next
block in sequence and is the actual part responsible for stabilizing the Metroframe.

The location of the controller

The controller or controll logic is located in the SUCR rack. The controller comprises
the Masterboard with the control software on it. SUCR, is an abbreviation for
Suspension Control Rack. The SUCR rack is located in Electronic Cabinet 1. In figure
1.31 a photo of the rack is shown.

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Figure 1.31 Photo showing the SUCR

The six boards on the right are for the proximity sensors, the geo sensors and the
lorentz motors interfaces. The boards on the left of these boards are power supplies
and the Masterboard. Normally we do not call the CPU board the Masterboard but
this is inherited from the scanner and left this way. Note that in this specific rack the
slave board is not present any more. This is again a heritage of the scanner.
It is important to mention here that we use two names for the same thing: SUCR-rack
and AM-controller are considered to be the same thing. The only difference is the
way we use it when we talk about it. This means that when we specifically refer to
hardware components, then generally the term “SUCR-rack” is used. When we talk
about the controlling system in terms of servo loops, software, firmware, drivers….
we talk about AM-controller.

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 24 For training purposes only

Airmount controller firmware

The Airmount subsystem is a stand alone system. Therefore the controller has its
own operating system. This operating system is located on the Masterboard. The
Airmount control system is memory based: when the system is started or rebooted
the operating system is loaded from memory.
The operating system can also be identified as the firmware of the system. The
firmware is the low-level software mostly in machine-coded language, that controls
directly the hardware. As such it can function as a command-interface to higher level
software. The firmware version can be retrieved via the “Get Controller State” option
in the command handler.
In figure 1.32 a schematic drawing is showing the logical position of the firmware
within the controller. It acts as an independent operating system, and is in direct
contact with the sensors and actuators.
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Figure 1.32 Schematic showing the logical position of memory in the controller

The Airmount controller

The control system, and in fact the Airmounts as a whole, is a stand alone system.
Stand alone here means that once the controller is powered up it takes care of
bringing the Airmounts completely under servo control without any intervention of the
surrounding subsystems or SUN software.
The AM Controller has its own firmware. This is necessary to be able to control the
AM when the AM driver is not active or terminated. The controller always uses V-
RAM settings. V-RAM is the volatile part of the memory. To make the machine
settings available in V-RAM the necessary constants have to be copied from NV-
RAM. NV-RAM stands for non-volatile memory.
Copying data into V-RAM takes place in three cases, and is performed by the
controller itself:
• when the controller is powered up (copy NV-RAM into V-RAM)
• when the AM driver is initialized (copy SUN Airmount driver data and MC’s into
V-RAM)
• when the machine constants are changed (copy SUN Airmount MC’s into V-RAM)
When the controller is powered up the internal V-RAM settings are used. These
settings can be changed via the SUN software as explained under section "Airmount
Machine Constants".
When the AM driver is initialized the settings from the SUN machine constant files are
used. Also after editing these machine constants via the machine constant editor
these values will automatically be mirrored into the V-RAM and used as new settings.

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 For training purposes only Chapter 1 25

In figure 1.33 the schematic is shown for the logical position within the controller of
the memory types.

Figure 1.33 Schematic showing the logical position of memory in the controller

The Airmount driver

The Airmount driver is mainly responsible for setting up and maintaining a
communication link between SUN and controller.
The electronics for the Airmount driver are not located on the Masterboard nor
anywhere in the SUCR-rack. Instead the driver is located on the C&T rack.

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Figure 1.34 Schematic showing the logical position of memory in the controller

The allocation of the driver logic was decided based on the processor constraints on
the Masterboard. In fact the driver is multitasking on the C&T processor, meaning it
uses processor time of the C&T. The state of the C&T though has no impact on the
functioning of the driver, as long as the processor is powered on. So whenever the
C&T is terminated the driver just keeps running. Only when the processor itself does
not run for any reason, this automatically implies the driver can not do its job.
The driver in combination with the controller can be seen as one system. In initialized
state the status of the system can be read, and machine constants can be updated.
This system can be identified as having three states:
• Terminated
• Busy
• Idle
When the system is initialized via the SUN, the driver establishes the communication
link. As a result of the established, link the machine constants are downloaded and
sensors can be read. It is important here to recognize that although the controller
itself was already initialized during powering on, the system is called not initialized or
terminated based on the state of the driver. When the system is terminated via the
SUN software, only the driver is terminated and not the controller itself. Now why is
this done so complicated as it seems. Basically this has to do with safety. Every
subsystem in the machine has a mandatory fail safe system state requirement in its
software. In a “normal” situation terminating means “out of servo control”. Bringing the
Airmounts servo loops down though might end up in a costly “break-dance”. So never
ever are the Airmounts terminated when terminating the “controller” via the SUN
software but only its associated driver. The Airmounts keep running under servo
control!

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 26 For training purposes only

The other two states “busy and idle” are related to the status of the controller
regarding the servo loops and associated conditions. The state “busy” means the
controller is not yet stable and tries to get the system stabilized. Once stabilized the
system can go into the “idle” state.
The three states and their transitions are schematically represented in figure 1.35.
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Figure 1.35 Schematic showing the driver controller states and their transitions

In this schematic the transition from “busy” to “terminated” might be a little bit
puzzling. However once the system is busy trying to get stable, many conditions are
checked. If within a certain time frame these conditions are not met, the system will
terminate automatically. Again this does not mean the Airmounts are “shut down”; On
the contrary. Still attempts are made to get the controller operating within
specification, but from the terminated state. If for any reason conditions are
exceeding safety limits components responsible for these conditions are temporary
disabled, until conditions are within specification again and a renewed attempt can
take place. An example here is the overheating of a Lorentz motor as a result of not
being able to reach the required position due to an obstruction. While continuously
trying to reach the position the motor temperature sensor reading will show an
overheated condition, resulting in disabling the motor. Once the temperature reading
is within specification, another attempt is made. This process will continue until the
system is able to reach the position, meaning the obstruction is removed.

Initializing the controller

When talking about initializing the controller what is meant is initializing the controller
and its associated driver. Once the SUCR rack is powered on, the controller itself
initializes using the “on board” settings. Once the user initializes the driver via the
SUN software, the driver is initialized as well and consequently the latest machine
constants are downloaded into the controller. Once the machine constants are
available, the controller will switch to this new set of constants. Normally the latest
required constants have been downloaded into NV-RAM (see section "Airmount
Machine Constants"). This means in general that the system will not see any change
while getting this set. The driver is able to obtain the initialized state within seconds.
Before getting into the initialized state, whether this takes seconds or minutes,
various conditions have to be met and several actions will take place. The following
eight steps occur during initialization:
1. Initialize RS232 communication with the airmount controller.

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2. Check whether the controller runs with the correct firmware version, in case the
firmware version is not correct: upload the correct firmware version and save it in
NV-RAM.
3. Update settings: get the machine constants from file and send them to the V-Ram
of the controller.
4. Turn off any noise injection (just to be sure that there is no noise switched on)
5. Close the control loops (this is to be compared with turning off the noise injection).
Normally all loops will be closed, but we close them during initialize to be sure that
nobody opens a loop manually for testing the system, and forgot to close the loop.
6. Clear all trace buffers (used by test software). Normally all buffers will be cleared,
but we clear them anyway to be sure.
7. Clear all emergency states.
8. Wait for stabilization of the Metroframe (max. 10 min.).
Using Command Handler / Diagnostic Commands / Stepwise Initialize it is possible to
perform the individual initialization steps, see figure 1.36.

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Figure 1.36 CH AM initialization steps

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 28 For training purposes only

This latest item “Wait for stabilization of the Metroframe (max. 10 min.)” is elaborated
on by using figure 1.37.

Figure 1.37 Driver state during initialize

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In this figure much information is combined. Horizontal the time axis is considered.
Vertical the Metroframe position around the setpoint (0 µm) is presented. Horizontal
centred around the time axis two type of bars are used. Both represent the logical
“AND” specification state of the individual temperature, overpowering and kinetic
energy states.
The first one starting from zero represents an overall “ok” condition meaning
temperature AND overpowering AND kinetic energy are all within the specified state:
no error conditions occur. The bar next to this one simulates an error condition has
occurred, so one or more of the fields temperature, overpowering and kinetic energy
are out of specification. In the top of the graph bars identify the driver state read out.
The alternating curve drawn throughout the graph is representing the actual position
of the Metroframe. Considering all these meanings of the graph elements the graph
can be interpreted as follows:
When initialization starts via the SUN software at moment zero, the following items
are checked on performance within specified limits:
1. Metroframe height change. This should be stabilized within a range limit of ±30
µm within the time limit of 10 minutes.
2. Within the same 10 minutes time frame all aspects covered by the bars (so
temperature AND overpowering AND kinetic energy) must be within specification.
If these conditions are met within the time limit of 10 minutes the controller
(driver+controller) become initialized and idle. The states are visualized in the top
bars. When initialized the system is automatically idle. Directly after the sytem
succeeded initialization the position error bounderies move from ±30 µm to ±120 µm,
these are the so called production limits.
When the temperature or overpowering or kinetic energy go out of range specified as
“safe” the system gets automatically busy again. After a while the system stabilizes
again and becomes idle. In the graph after the transition when the system goes from
busy to the idle state, it can be noted that at the moment the Metroframe is regularly
out of the ±120µm range the system state becomes busy till metroframe position is
stable within the ±120µm range.

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Referring to figure 1.38, if for any reason the system does not pass the initialization
within 10 minutes the system becomes automatically terminated. It should be noted
here that in this case it is possible to read out sensor readings, which was not
possible before initialization at all. So despite the outcome of the initialization
process, it always results in being able to read sensor readings.

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Figure 1.38 Schematic representing the event of terminating after an initialization request

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 30 For training purposes only

If a succesfully initialized system runs into a busy state for more then 10 minutesthe
Airmount driver will move to the terminate state. See figure 1.39.

Figure 1.39 Driver terminates after 10 minutes busy

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Summary of criteria on which the AM driver checks:

During initialization check on limits regarding
• overheating (> 61ºC),
• overpowering (Vert >20N, Hor >100N)
• energy >6e-7 (=kinetic energy threshold)
• 30 um set points error window
After initialization (every 10 sec) ….
• Production set points Stability limit is used : 120 um window.
• If one of the 3 limits (OH, OP, KE) is exceeded, the driver state becomes ‘busy’
• If the busy state last longer then aprox 10 minutes the driver will be terminated

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 2
PROCEDURES

INTRODUCTION
In the next sections, the procedures as listed under the objectives will be described.
For each procedure the following info will be given (if applicable):
• Purpose
• Principle
• GUI

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• Report
• Graphic Data
• File Location
• OOS case (Out Of Spec.)
 32 For training purposes only

PROCEDURES EXPLAINED

The procedures discussed in this section are:

• (csam003.rep)Verify Power to SUCR
• (csam017.rep)Remove and install the 24 V supply
• (csam015.rep)Remove and install servo valve
• (csam015.per)Test AM airbearing for contamination
• (csam020.per)Test the Airmount air supply
• (csam003.adj)Metro Frame Range Test
• (csam004.adj)Adjust the z-stroke
• (csam038.per)Test the Airmount Proximity sensors
• (csam022.per)Test the Airmount Motors & Sensors
• (csam039.per)Test the Airmount Geophone Sensors
• (csam006.per)Test the Airmount motor performance
• (csam031.per)AM Low Frequency Test
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• (csam030.per)AM Servo Performance Test

• (csam002.dia)AM Problem escalation procedure

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 For training purposes only Chapter 2 33

VERIFY MAINS POWER TO SUCR

Purpose
The purpose of this procedure is to check if the Suspension Control Rack (SUCR)
gets 230V power supplied.

Principle
See figure 2.1 on page 33
• Visually check if SUCR on/off switch is switched on
• Visually check SUCR masted board green led is on
See figure 2.2 on page 33
• Visually check Exposure unit Mains Connection Box (EMCB) for 3 phase power
availability
• Check cable connections between SUCR and EMCB

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Figure 2.1 Photo showing the SUCR

Figure 2.2 EMCB 3 phase power

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 34 For training purposes only

REPLACE THE 24 V SUPPLY

Purpose
Replace the 24 V supply in case it is broken or not functioning well.

Principle
• Terminate AM, RS and WS drivers
• Switch off SUCR
• Replace the 24 V Power Supply (see figure 2.3)
• Switch on SUCR
• Initialise AM, RS and WS
• Test AM gas valve
• Check performance with AM Servo performance test
As this replacement can be performed quickly it is important to wait sufficiently long
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before the SUCR is switched on again. This to allow the Airmounts to deflate
completely. If they are not deflated completely when the SUCR is switched on the
Airmounts will end up in an undefined state.

Figure 2.3 Photo showing the SUCR

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 For training purposes only Chapter 2 35

REPLACE SERVO VALVE

Purpose
Replace the Gas Valve (servo valve) in case it is broken or not functioning well.

Principle
• Terminate AM, RS and WS drivers
• Close AM gas supply on Pneumatic Manifold (see figure 2.4)
• Switch off SUCR
• Replace the gas valve on applicable Airmount (see figure 2.6)
• Switch on SUCR
• Open AM gas supply on Pneumatic Manifold
• Initialise AM, RS and WS
• Test AM gas valve

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Figure 2.4 Manifold location

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 36 For training purposes only
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Figure 2.5 Pneumatic manifold AM supply

Figure 2.6 The Valve Block (gas valve)

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 For training purposes only Chapter 2 37

TEST THE AIRMOUNT AIR SUPPLY

Purpose
• To test proper supply capacity of air to the airmount valve.
• With not sufficient air supply the Airmount performance will decrease.Principle
• Increase the Airmounts Dither gain MC (see figure 2.7)
• Check if Airmount valve outlet produces a louder sound (see figure 2.6)
• Put back original Airmounts Dither gain MC
• If not correct then diagnose air supply (see Layout procedures)

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Figure 2.7 Servo valve exhaust

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 38 For training purposes only

THE METRO FRAME RANGE TEST

The Metro Frame Range Test is currently known as procedure name: “CALIBRATE
METRO FRAME RANGE”. Check for the latest version in the coach documentation
system.

The purpose of the Metro Frame Range Test

During final assembly the Metro Frame Range Test is used to calibrate the horizontal
and vertical setpoints of the Metrop frame. This can be considered the “factory
setting”. During maintenance checks this procedure is used to check if these set
points are still within specification, assuring enough travel range for the Metroframe.

Introduction
The positioning of the Metro Frame is controlled by the Airmounts. The limits of
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movement of the Metro Frame are set by the assembly of the mechanical interface
pin and limiter spaces of the Metroframe. To allow maximum range control over the
Metro Frame, optimized setpoints need to be determined. If necessary the vertical
physical travel range can be readjusted. There are three mechanical interface pins.

Figure 2.8 Interface pins location1

Each one of them is mounted closely to an Airmount.

Basically the mechanism is very simple. The mechanical interface pin is mounted to
the Base Frame giving it a fixed position in relation to the Airmount. The mechanical
interface pin itself is positioned inside part of the Metroframe leaving very little room
to the frame to move in horizontal direction. On top of the mechanical interface pin a
nut is mounted ensuring a limited range in Z with respect to the Base Frame. Having
a mechanical interface pin assy mounted strategically near each Airmount the total
travel range of the Metro Frame is limited in all directions.

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 For training purposes only Chapter 2 39

.In figure 2.9 the mechanical travel ranges can be recognized.

Figure 2.9 Schematic overview mechanical interface pin travel ranges and locations

For clarity only the encapsulating parts, the limiters of the Metro Frame, are shown
here. It can be seen that the limiters are not of the same shape. This has been done
to prevent over defining the limits. The round limiter near Airmount 2 sets the basic

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limits in both X and Y direction for this position. The limiters of Airmount 1 and 3 are
oval shaped. They both limit in one direction only: in Y (position 3) and X (position 1).

Warning:
Once the system is setup, don’t change any of these setpoints since it
will have major impact on metrology.

The principle of the Metroframe Range test

The principle of the test can be described as follows:
To determine the limits for each direction inject a signal into the corresponding
Lorentz motors to generate movement in that specific direction. By increasing
gradually the amplitude of the signal the Metro Frame will automatically run into it’s
physical limits. During this movement the proximity sensor values are recorded.
These values can be plotted into a graph which will visualize the limits. During the
whole test all three motors are used simultaneously.

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 40 For training purposes only

When all data is available, the travel ranges and the setpoints can be determined.
The setpoints to be calculated are schematically represented in figure 2.10. In the X/
Y direction the middle of the travel range of the Metro Frame is calculated and
transformed to a physical setpoint per Airmount. In the Z-range the setpoint B is
calculated ensuring a minimum required height according to specification in respect
to the Base Frame.
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Figure 2.10 Schematic showing the calculated setpoints

When you are going to run this test special attention is asked for the following:
1. Normally the MART test will ask RS driver to lift R-chuck. If RS is in simulation
mode this is not possible, then be sure to first lift the Reticle Stage manually. The
lens top ski’s will most likely hit the gold strips on the Reticle Stage while moving
in Z.
2. Be sure the Base Frame is correctly levelled. This is done during installation only.
If installation is done properly, levelling is also correctly done.
3. Be sure no overpowered and overheated conditions occur when starting the test
(or during the test later on).

Graphs

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 For training purposes only Chapter 2 41

The graphical representation of the measurement result of the test is shown in the
graphics displayer. In figure 2.11 an example is shown in case the Z-direction limits
are being determined.

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Figure 2.11 Graph representing the Metro Frame Range test result

The graphics displayer shows a combined graph by default for each Airmount.
It is now possible to identify the new setpoints. The new calculated setpoint is:

Setpoint = Bottom_limit (lowest sensor reading) + 200µm [2.1]

These values are calculated by the system and can be found in the report.
Always check the procedure for the latest specs and when to update new values.
Remember that not all limiter shapes are circular. Check out the minimum and
maximum values required in each measurement shown. Also check for the latest
specifications the coach documentation.

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 42 For training purposes only

In figure 2.12 a snapshot of graphical representation of X and Y direction is given.

The circular shape is derived from Airmount limiter 2. The other two shapes are not
circular since their movement is blocked by the combination of limits of the other
limiters.
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Figure 2.12 Graph showing Metro Frame Range test result example contour shape

Report
Horizontal and vertical setpoints are calculated for each airmount.
The change (delta) between the old setpoints (MC) and the new (currently measured
in this test) are calculated (see figure 2.13).
If the delta is less than 20 µm the MCs should not be updated.
If no AM components have been replaced and the values have changed more than
20 µm, the system should be checked to determine the cause. An obstruction or
shortcut may be limiting movement of the metro frame.
If the delta is more than 100 µm Horizontal, or 50 µm vertical, the values must be
updated and major additional set-up and metrology calibrations must be performed.

+--------------------------------------------------------------------+
| Old and new set points delta check | The horizontal absolute
+----------------------+------------+------------+------------+------+ values in the Delta column
| Airmount | Old | New | Delta |OK/NOK| should be 100 µm
+======================+============+============+============+======+
| 1 horizontal Uum] | 231.011 | 249.012 | 18.001 | OK |
| 2 horizontal Uum] | 67.012 | 74.012 | 7.000 | OK |
| 3 horizontal Uum] | 5.012 | 5.012 | -0.000 | OK |
The vertical absolute
| 1 vertical Uum] | 125.011 | 134.012 | 9.001 | OK |
| 2 vertical Uum] | -185.012 | -189.012 | -4.000 | OK | values in the Delta column
| 3 vertical Uum] | 55.012 | 63.012 | 8.000 | OK | should be 50 µm
+----------------------+------------+------------+------------+------+

Figure 2.13 MART - Report: Delta Specification

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 For training purposes only Chapter 2 43

Setpoints can also be expressed relative to the contour of the perimeter traced using
the proximity sensors (see figure 2.14).
For example, AM2:
The calculation of the limiter coordinates per limiter is based on the input of the
contour trace made on all six proximity sensors (Xin1, Zin1, Xin2, Zin2, Xin3, Zin3 are
the sensor data of AM1,2,3).
For AM2 the limiter position is calculated according:
Xout2 = a4 . Xin1 + b4 . Zin1 + c4 . Xin2 + d4 . Zin2 + e4 . Xin3 + f4 . Zin3
Yout2 = a5 . Xin1 + b5 . Zin1 + c5 . Xin2 + d5 . Zin2 + e5 . Xin3 + f5 . Zin3
Similar formulas for AM 1 and AM3 are used but with different coefficients ;a,b,c etc
(like a1, b1, etc).
Although there is no x-proximity sensor for AM2 the AM2 limiter x-position can be
calculated.
The z-values are also involved so the tilt effect of the Metroframe on the horizontal
limiter position is also taken into account.

New setpoints range check in limiter co-ordinates

+--------------------------------------------------------------------+

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| Z range |
+----------------------+------------+------------+------------+------+
| Airmount | Positive | Negative | Range |OK/NOK| Z range should be
+======================+============+============+============+======+ 400 µm < range < 600 µm
| Airmount 1 Uum] | 266.622 | -199.378 | 466.000 | OK |
| Airmount 2 Uum] | 251.948 | -199.052 | 451.000 | OK |
| Airmount 3 Uum] | 261.968 | -199.032 | 461.000 | OK |
+----------------------+------------+------------+------------+------+

+--------------------------------------------------------------------+
| X range |
+----------------------+------------+------------+------------+------+
| Airmount | Positive | Negative | Range |OK/NOK|
+======================+============+============+============+======+
X and Y ranges should be
| Airmount 1 Uum] | 597.201 | -552.563 | 1149.764 | OK |
800 µm < range < 1400 µm
| Airmount 2 Uum] | 590.599 | -627.414 | 1218.013 | NOK |
+----------------------+------------+------------+------------+------+

+--------------------------------------------------------------------+
| Y range | For the time being,
+----------------------+------------+------------+------------+------+ ignore the OK/NOK
| Airmount | Positive | Negative | Range |OK/NOK| in this test
+======================+============+============+============+======+
| Airmount 2 Uum] | 568.451 | -601.783 | 1170.234 | OK |
| Airmount 3 Uum] | 624.299 | -586.804 | 1211.102 | NOK |
+----------------------+------------+------------+------------+------+

Figure 2.14 MART - Report: Range Specifications

What if the specifications are not met?

In case of the vertical range, when the specs are not met the setpoints should be
reset. In case this is not enough the nut also needs to be readjusted.
• In case the X/Y total range is not in specification:
check for anything blocking the Metro Frame from moving freely in horizontal
direction
• In case the horizontal setpoint is not OK:
adjust the setpoint. This is not covered in this training and may only be
performed by qualified personnel...see next warning.

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 44 For training purposes only

Warning:
Changing the setpoint after installing can cause major problems for
other subsystems. So don’t do this!
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 For training purposes only Chapter 2 45

ADJUST THE Z-STROKE

Purpose
To check and adjust the MetroFrame z-stroke to assure sufficient mechanical z-
range.

Principle
• Terminate AM, RS and WS drivers
• Switch off SUCR
• Get access to all 3 Airmounts
• Adjust z-stroke by turning the nut on the interface pin (see figure 2.15)
• Repeat for all 3 airmounts
• Switch on SUCR
• Initialise AM, RS and WS

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• Calibrate MetroFrame range

Figure 2.15 Z-stroke adjustment

If the range test is too great or to little in the Z direction, the limiting nut on the limiter
pin can be adjusted.
Because this limit is not encountered during normal operation of the machine, there is
no effect on metrology as a result of this adjustment.
If the range test indicates that vertical range is restricted and a feeler gauge does not
indicate that the metro frame is encountering the limiting nut, a short cut may be
present.

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 46 For training purposes only

TEST AM AIRBEARING FOR CONTAMINATION

Purpose
To check if the AM airbearing is not contaminated by particles, particles could
decrease Airmount performance.

Principle
• Get access to all 3 Airmounts
• Rotate the airbearing outer ring (the cilinder) manually (see figure 2.16)
• Check for free rotation
• Repeat for all 3 airmounts
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Figure 2.16 Rotate airbearing to check free rotation

If there is too much friction contact next line support.

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 For training purposes only Chapter 2 47

TEST THE AIRMOUNT PROXIMITY SENSORS

Purpose
To check if the AM proximity sensor is functioning correctly.

Principle
• Get access to one Airmount
• Via Command Handler monitor all sensors (see figure 2.17)
• Push the Metro Frame manually in x, y & z direction
• Check if Metro Frame movement is visible in proximity sensors value for all
Airmounts

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Figure 2.17 Monitor all sensors

If one of the proximity sensor values is not changing

• Terminate Airmounts in CH
• Exchange the connections of proximity vertical and horizontal of the suspicious
airmount
• Initialize step by step up and untill “Turning Noise off”
• Repeat the procedure

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 48 For training purposes only

TEST THE AIRMOUNT MOTORS & SENSORS

Purpose
To check if the AM motors and sensors function correctly.

Principle
This procedure uses both Command Handler and Advanced Diagnostics Tests.
• In command handler, Inject low frequency sine wave shaped noise into an
airmount motor control loop.
• Using WS ADT make trace of actuator and sensors in the loop
• Check trace in time based plot shown on screen
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Figure 2.18 Flow of check motor and sensor

Verify the following preconditions (CH) according the Coach procedure:

• AM General
– Controller state
– Inert. Feedback mode
– Pneumatic loop mode
– Proximity Cont. loop mode
• Motor Status
In diagnostic tests/WS ADT Trace the selected output signal
• Check the curve signals for:
– Motor input signal sine
– Proximity sensor sine
– geophone sensor cosine

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 For training purposes only Chapter 2 49

TEST THE AIRMOUNT GEOPHONE SENSORS

Purpose
To check if the AM geophone sensors function correctly.

Principle
• Using WS ADT make traces of all 6 Geophone sensor output signals
• Start trace
• Manually push the MetroFrame
• Plot the trace on time base

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 50 For training purposes only

TEST THE AIRMOUNT MOTOR PERFORMANCE

Purpose
To check if the AM motor performance is correct

Principle
• Via Command Handler monitor all sensors
• Verify DAC outputs are within specification.
• Remark: the same information is available in Servo Performance test report
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 For training purposes only Chapter 2 51

THE LOW FREQUENCY TEST

The Low Frequency test is currently known as procedure name: “TEST LOW-
FREQUENCY SYSTEM PERFORMANCE”.

The purpose of the Low Frequency Test

The purpose of the Low Frequency test is to make sure no short cuts are in the
system.

The principle of the Low Frequency Test

To be able to determine the presents of possible shortcuts, a sine wave of 0.2Hz
frequency is injected in subsequently each individual logical axis of the Metro Frame.
The output per axis will be a measure for possible shortcuts.
If there is a shortcut energy will travel through it, and will show up accordingly into the

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other possible axis. In total 6 logical axis can be identified: X, Y, Z, Rx, Ry and Rz. In
figure 2.19 a flow diagram of the principle is shown.

Figure 2.19 Schematic flow diagram Low Frequency Test principle

As can be seen from the diagram a PSD graph is created from which the conclusions
are to be drawn. PSD stands for Power Spectrum Density. A PSD graph is an energy
representation per frequency of the movement of the Metroframe. To understand this
you must remember that the Metroframe makes a physical movement that can be
displayed in a time graph. This graph can be converted via Fast Fourier
Transformation technology into a frequency spectrum. Each frequency thus
represents part of the original movement of the Metro Frame in time. Since
movement represents energy a conversion towards each single frequency can be
done. Since the results are to be found in the lower frequencies this test is called
accordingly.
This test is started up as a command line test, see figure 2.20.

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 52 For training purposes only

Figure 2.20 MALF is a command line test

Test report.
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The left column (see figure 2.21) indicates the axis that has the sine wave applied to

+----------------------------------------------------------------------+
| Previous Low Frequency Table |
+--------+------+----------+----------+----------+----------+----------+
| In/Out | Xt | Yt | Zt | Xr | Yr | Zr |
+========+======+==========+==========+==========+==========+==========+
| Xt | 1.27e-10 | 2.43e-13 | 5.86e-12 | 7.53e-13 | 3.76e-11 | 5.96e-12 |
| Yt | 4.76e-12 | 1.80e-10 | 5.63e-13 | 4.18e-12 | 8.15e-13 | 8.97e-12 |
| Zt | 1.35e-10 | 2.33e-11 | 7.21e-10 | 7.81e-12 | 9.50e-12 | 2.53e-10 |
| Xr | 1.62e-13 | 1.36e-11 | 1.31e-13 | 4.20e-10 | 5.79e-12 | 4.48e-12 |
| Yr | 1.26e-10 | 3.73e-11 | 4.92e-11 | 1.94e-11 | 1.46e-09 | 4.24e-11 |
| Zr | 2.12e-10 | 2.57e-11 | 8.43e-13 | 2.67e-12 | 3.36e-11 | 8.58e-10 |
+====+==========+==========+==========+==========+==========+==========+

+----------------------------------------------------------------------+
| New Low Frequency Table |
+--------+------+----------+----------+----------+----------+----------+
| In/Out | Xt | Yt | Zt | Xr | Yr | Zr |
+========+======+==========+==========+==========+==========+==========+
| Xt | 5.36e-11 | 1.75e-12 | 7.09e-12 | 1.33e-11 | 4.94e-11 | 3.49e-11 |
| Yt | 4.73e-12 | 1.84e-10 | 1.15e-12 | 2.69e-12 | 2.63e-13 | 9.73e-12 |
| Zt | 2.71e-11 | 1.29e-11 | 4.57e-10 | 1.60e-11 | 6.12e-13 | 2.79e-11 |
| Xr | 4.22e-13 | 2.81e-11 | 7.82e-12 | 4.64e-10 | 2.83e-12 | 6.62e-13 |
| Yr | 1.00e-10 | 6.39e-12 | 9.27e-12 | 2.14e-12 | 1.19e-09 | 4.82e-11 |
| Zr | 1.64e-10 | 1.35e-11 | 2.45e-13 | 1.83e-11 | 3.64e-11 | 7.06e-10 |
+====+==========+==========+==========+==========+==========+==========+

Figure 2.21 MALF report section

the control loop. (i.e. Xt)

In the same row are the measurements of all six axis by the respective proximity
sensors.
Only the reading in the column labeled the same as the “in” axis should show a
significant value (relative to the other values in that row.

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 For training purposes only Chapter 2 53

In the “normalized” tables (see figure 2.22), the value of the reference axis is a

+----------------------------------------------------------------------+
| Previous Normalized Low Frequency Table |
+--------+------+----------+----------+----------+----------+----------+
| In/Out | Xt | Yt | Zt | Xr | Yr | Zr |
+========+======+==========+==========+==========+==========+==========+
| Xt | 1.00e+00 | 1.91e-03 | 4.61e-02 | 5.92e-03 | 2.96e-01 | 4.69e-02 |
| Yt | 2.65e-02 | 1.00e+00 | 3.13e-03 | 2.33e-02 | 4.53e-03 | 4.99e-02 |
| Zt | 1.87e-01 | 3.24e-02 | 1.00e+00 | 1.08e-02 | 1.32e-02 | 3.51e-01 |
| Xr | 3.86e-04 | 3.23e-02 | 3.12e-04 | 1.00e+00 | 1.38e-02 | 1.07e-02 |
| Yr | 8.57e-02 | 2.55e-02 | 3.36e-02 | 1.33e-02 | 1.00e+00 | 2.90e-02 |
| Zr | 2.47e-01 | 2.99e-02 | 9.83e-04 | 3.12e-03 | 3.92e-02 | 1.00e+00 |
+====+==========+==========+==========+==========+==========+==========+

+----------------------------------------------------------------------+
| New Normalized Low Frequency Table |
+--------+------+----------+----------+----------+----------+----------+
| In/Out | Xt | Yt | Zt | Xr | Yr | Zr |
+========+======+==========+==========+==========+==========+==========+
| Xt | 1.00e+00 | 3.27e-02 | 1.32e-01 | 2.48e-01 | 9.22e-01 | 6.52e-01 |
| Yt | 2.57e-02 | 1.00e+00 | 6.24e-03 | 1.46e-02 | 1.43e-03 | 5.28e-02 |
| Zt | 5.92e-02 | 2.81e-02 | 1.00e+00 | 3.51e-02 | 1.34e-03 | 6.10e-02 |
| Xr | 9.10e-04 | 6.05e-02 | 1.68e-02 | 1.00e+00 | 6.11e-03 | 1.43e-03 |
| Yr | 8.46e-02 | 5.39e-03 | 7.82e-03 | 1.80e-03 | 1.00e+00 | 4.06e-02 |

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| Zr | 2.32e-01 | 1.92e-02 | 3.47e-04 | 2.60e-02 | 5.16e-02 | 1.00e+00 |
+====+==========+==========+==========+==========+==========+==========+

Figure 2.22 MALF report section

relative zero (1.00e+00).

The other axes in the same row are all smaller values as indicated by the “-XX”
notations.
If any of these values approach zero, that axis would be suspect.
This table is most useable when compared to a previous test (when the system was
known to be performing correctly) and inspected for a large change in values.

In addition a check can be made based on a fingerprint. The fingerprint of a particular

machine is made right after it is completely in spec for example after installation.
Values that show up in the fingerprint can be considered as reliable references for
comparison.

What if the specifications are not ok

The following items should be checked:
• In the normalized table the non diagonal values must be significantly lower then 1.
• Compare the fingerprint values not differing to much.
If from the above can be concluded that a shortcut is likely an investigation must be
started to solve the shortcut.

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 54 For training purposes only

THE SERVO PERFORMANCE TEST

The servo performance test is currently known as procedure name: “TEST

PERFORMANCE OF AIRMOUNT SERVO CONTROL-LOOPS”.

The purpose of the Servo Performance Test

The purpose of the servo performance test is to make sure the static position and
velocity errors of the Airmount system are in specification.

The principle of the SP Test

The principle can be described as follows:
• Monitor the position and velocity errors of the movement of the Metro Frame
• Generate data to perform diagnostics on the Airmount servo systems.
The test is done while the system is not scanning.
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Test Report
IA status report is provided. The information provided in the status report can also be

Figure 2.23 MASP status report section

obtained using command handler (see figure 2.24).

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 For training purposes only Chapter 2 55

Figure 2.24 Diagram of Status info via Command Handler

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The Position check report.

Horizontal Minimum and Maximum Position values must be 0 ± 30`m

Position error horizontal
+-----------------+----------+------+----------+------+----------+------+
| |Airmount 1| |Airmount 2| |Airmount 3| |
| +----------+------+----------+------+----------+------+
| | Value | Run | Value | Run | Value | Run |
| | Uum] | | Uum] | | Uum] | |
+=================+==========+======+==========+======+==========+======+
| maximum | 3.95 | 1 | 3.27 | 1 | 2.21 | 1 |
| minimum | -3.96 | 1 | -3.83 | 1 | -2.16 | 1 |
| mean + 3*sigma | 4.94 | 1 | 3.57 | 1 | 2.50 | 1 |
| mean - 3*sigma | -4.52 | 1 | -3.14 | 1 | -2.30 | 1 |
| mean | 0.21 | 1 | 0.22 | 1 | 0.10 | 1 |
+-----------------+----------+------+----------+------+----------+------+

Vertical Minimum and Maximum Position values must be 0 ± 30`m

Position error vertical
+-----------------+----------+------+----------+------+----------+------+
| |Airmount 1| |Airmount 2| |Airmount 3| |
| +----------+------+----------+------+----------+------+
| | Value | Run | Value | Run | Value | Run |
| | Uum] | | Uum] | | Uum] | |
+=================+==========+======+==========+======+==========+======+
| maximum | 3.41 | 1 | 6.17 | 1 | 4.48 | 1 |
| minimum | -3.81 | 1 | -5.79 | 1 | -5.40 | 1 |
| mean + 3*sigma | 4.15 | 1 | 7.76 | 1 | 6.80 | 1 |
| mean - 3*sigma | -4.32 | 1 | -7.94 | 1 | -7.74 | 1 |
| mean | -0.09 | 1 | -0.09 | 1 | -0.47 | 1 |
+-----------------+----------+------+----------+------+----------+------+

Figure 2.25 MASP report section

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 56 For training purposes only

IVelocity check report.

Horizontal Minimum and Maximum Velocity values must be 0 ± 175`m/s

Velocity horizontal
+-----------------+----------+------+----------+------+----------+------+
| |Airmount 1| |Airmount 2| |Airmount 3| |
| +----------+------+----------+------+----------+------+
| | Value | Run | Value | Run | Value | Run |
| | Uum/s] | | Uum/s] | | Uum/s] | |
+=================+==========+======+==========+======+==========+======+
| maximum | 5.21 | 1 | 5.69 | 1 | 5.52 | 1 |
| minimum | -8.86 | 1 | -6.78 | 1 | -7.92 | 1 |
| mean + 3*sigma | 7.24 | 1 | 6.66 | 1 | 6.76 | 1 |
| mean - 3*sigma | -8.77 | 1 | -7.08 | 1 | -7.45 | 1 |
| mean | -0.77 | 1 | -0.21 | 1 | -0.35 | 1 |
+-----------------+----------+------+----------+------+----------+------+
Vertical Minimum and Maximum Velocity values must be 0 ± 175`m/s
Velocity vertical
+-----------------+----------+------+----------+------+----------+------+
| |Airmount 1| |Airmount 2| |Airmount 3| |
| +----------+------+----------+------+----------+------+
| | Value | Run | Value | Run | Value | Run |
| | Uum/s] | | Uum/s] | | Uum/s] | |
+=================+==========+======+==========+======+==========+======+
| maximum | 4.36 | 1 | 7.12 | 1 | 6.06 | 1 |
| minimum | -3.64 | 1 | -8.65 | 1 | -6.78 | 1 |
| mean + 3*sigma | 3.61 | 1 | 7.30 | 1 | 6.94 | 1 |
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| mean - 3*sigma | -4.52 | 1 | -8.06 | 1 | -7.39 | 1 |

| mean | -0.46 | 1 | -0.38 | 1 | -0.22 | 1 |
+-----------------+----------+------+----------+------+----------+------+

Figure 2.26 MASP report section

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 For training purposes only Chapter 2 57

Graphs
In figure 2.27 and figure 2.28 show examples of representations of data that is
gathered during the Servo Performance measurement. The first graph shows the
results of a positional trace. The position is presented in micrometers. The second
graph shows the velocity trace. The velocity is presented in micrometers per second.

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Figure 2.27 Graph representing of the position data

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 58 For training purposes only
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Figure 2.28 Graph representing the velocity data

What if the specs are not met

If the specifications are not met the following should be done:
1. Make a status report to check the pre-conditions for a stable airmount system.
2. If you suspect a shortcut perform the low frequency test. See “The low frequency
test” on page 51.

File locations
The following file locations contain the related files:
• Test report: ~/TM/Airmounts/MASP.log/
MASP.01
• Matlab files: ~/service_data/MA/MASPmath/
POS_YYMMDD_HHMM_###.m
GEO_YYMMDD_HHMM_###.m
• Graphics: ~/service_data/MA/MASPlots/
GEO_YYMMDD_HHMM_#.gd2
POS_YYMMDD_HHMM_#.gd2

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 For training purposes only Chapter 2 59

AM PROBLEM ESCALATION PROCEDURE

General Problem
Patch installed list
error log file
AM MC file
AM Performance Problem
MASP related files
AM logging files
AM (MF) Range Problem
MART related files
AM logging files
Short cut Problem
MALF related files

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Initialization Problem (only for SW ver 2.1 / 3.2)
Identify where the initialization stopped by using stp by step initialize.

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 1
APPENDIX: GLOSSARY OF TERMS

Table 1.1 Glossary of terms

Term Explenation
Airbearing A bearing that provides support of the load of the Metroframe by means of a
thin air layer.

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Cylinder The outer section of the Airbearing.
DOF Degrees Of Freedom.
Eigenfrequency Resonance frequency
External World Any part of the TWINSCAN system THAT IS NOT isolated from external
vibrations.
Lorentz motor A motor constructed so that there is no physical connection to the part of the
motor which is required to move.
Metroframe A solid metal frame constructed to support the Silent World.
Piston The inner section of the Airbearing.
Silent World Any part of the TWINSCAN system THAT IS isolated from external
vibrations.
SWS Scanning Wafer Stage.
WH The Wafer Handler is used to transport wafers to and out from the Scanning
Wafer Stage.
Airbearing A bearing that provides support of the load of the Metroframe by means of a
thin air layer.
Cylinder The outer section of the Airbearing.
DOF Degrees Of Freedom.
Eigenfrequency Resonance frequency
External World Any part of the TWINSCAN system THAT IS NOT isolated from external
vibrations.
Lorentz motor A motor constructed so that there is no physical connection to the part of the
motor which is required to move.
Metroframe A solid metal frame constructed to support the Silent World.
Piston The inner section of the Airbearing.
Silent World Any part of the TWINSCAN system THAT IS isolated from external
vibrations.
SWS Scanning Wafer Stage.
WH The Wafer Handler is used to transport wafers to and out from the Scanning
Wafer Stage.
 62 For training purposes only
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